CN217877516U

CN217877516U - Flatness testing device with adjustable measuring diameter

Info

Publication number: CN217877516U
Application number: CN202221966263.4U
Authority: CN
Inventors: 刘凯; 包翔; 胡露; 汪兆铭; 胡宇浩
Original assignee: Changfei Wuhan Photosystem Co ltd
Current assignee: Changfei Wuhan Photosystem Co ltd
Priority date: 2022-07-28
Filing date: 2022-07-28
Publication date: 2022-11-22
Anticipated expiration: 2032-07-28

Abstract

The utility model relates to a flatness measurement technical field, in particular to a flatness testing device with adjustable measurement diameter, which comprises a bracket and a dial indicator arranged at the center of the bracket, wherein at least three support legs capable of horizontally sliding along the center to the periphery are arranged below the bracket, a probe of the dial indicator is contacted with the center of the surface of an optical sample to be measured, and the dial indicator measures the flatness of the optical sample by detecting the height difference between the probe and the support legs; the flatness testing apparatus further includes a base having a polished surface, the base being adapted to zero the flatness testing apparatus prior to measurement. The utility model discloses a measuring device solves the plane degree measurement problem of unidimensional optical material between the diameter 60-300mm to be furnished with the ceramic zero clearing base that a fine manipulation was thrown, let the measurement after adjusting the measurement diameter more accurate at every turn.

Description

Flatness testing device with adjustable measuring diameter

Technical Field

The utility model relates to a flatness measurement technical field specifically is a measure diameter adjustable flatness testing arrangement.

Background

With the increasing development of optical material applications, optical materials have been widely used in the fields of communication, sensing, image transmission, laser, etc., and the requirements for these optical materials are higher and higher, and not only extremely high flatness and extremely low surface roughness are required, but also no deterioration layer and no scratch are required on the surface. The grinding and polishing processes and equipment for optical materials play a critical role in the development of these industries.

The current technical situation is that for a large-size (the diameter is more than or equal to 300 mm) optical material processing sample, the planeness measured after grinding is measured by a tool with a dial indicator; for small-size (diameter less than 300 mm) optical material processing samples, the traditional method mainly comprises the steps of placing a flat ruler on a processing surface, judging the grinding surface type condition by judging whether gaps exist or not and the size of the gaps, wherein the detection is not accurate enough, and the measurement range is limited. Therefore, a flatness testing device with adjustable measuring diameter is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a measure flatness testing arrangement of diameter adjustable measures the optical material plane degree of unidimensional between diameter 60-300mm through a measuring device to be furnished with the ceramic zero clearing base that a piece was thrown, let the measurement after adjusting the measurement diameter at every turn more accurate, solve traditional method accurate enough and artificial judgement too big to the influence of result, and the too big problem that can't measure specific sample of frock that has the amesdial.

In order to achieve the above purpose, the utility model provides a following technical scheme: a flatness testing device with an adjustable measuring diameter comprises a support and a dial indicator arranged at the center of the support, wherein at least three support legs capable of horizontally sliding along the center to the periphery are arranged below the support, a probe of the dial indicator is in contact with the center of the surface of an optical sample to be measured, and the dial indicator measures the flatness of the optical sample by detecting the height difference between the probe and the support legs;

the flatness testing device further comprises a base with a polished surface, and the base is used for zeroing the flatness testing device before measurement.

Preferably, at least three groups of sliding blocks and sliding rails are arranged below the support, the supporting feet are arranged on the sliding blocks, and the sliding blocks slide relative to the sliding rails and are used for adjusting the distance between the supporting feet and the probe, so that the measuring diameter of the flatness testing device is adjusted.

Preferably, the plurality of legs are equidistant horizontally from the probe.

Preferably, the bottom of the probe is a ball-type probe.

Preferably, the horizontal adjustable distance of the support foot relative to the probe is 30-150mm.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the flatness measurement problem of optical materials with different sizes between the diameters of 60mm and 300mm is solved through a measuring device, on one hand, the flatness measurement device is suitable for flatness of optical materials with different sizes, on the other hand, the range covered by the supporting legs is adjusted by adjusting the distance between the supporting legs and the probe, and finally, the flatness measurement precision is adjusted. The ceramic zero clearing base which is finely thrown is matched, so that the measurement after the diameter is adjusted and measured each time is more accurate, and the measurement error is reduced.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a top view of the present invention.

In the figure: 1. a dial indicator; 2. a support; 3. a slide rail; 4. a slider; 5. a support leg; 6. a probe; 7. a base.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, a flatness testing device with an adjustable measuring diameter comprises an upper measuring device including a dial indicator 1 and a support 2, wherein the support 2 is a stainless steel support, three high-precision slide rails 3 and precision slide blocks are arranged below the stainless steel support, a ceramic support leg is arranged on each slide block 4 and is placed on the surface of a ground optical sample to determine a surface, a tungsten steel probe is in contact with the center of the surface, and the other end of the tungsten steel probe is connected with the dial indicator 1 to read the height difference between the center and the periphery of the surface so as to achieve the purpose of measuring the flatness; the lower part of the device is a ceramic base with a highly polished surface for zeroing the device before measurement when the reference surface is used.

The side of each stainless steel bracket is 50-160 mm; the width is 10-50 mm. Each high-precision slide rail is 40-150 mm long; the width is 8-40 mm. The precise sliding block is tightly connected with the high-precision sliding rail, and the side length of the sliding block 4 is 30-40 mm. The diameter of each ceramic support leg is 2-4 mm, and the exposure amount is 3-5 mm. The spherical probe is arranged in front of the tungsten steel probe so as to avoid scratching the grinding surface of the optical material. The diameter of the ceramic base is 200-300 mm, and the surface processing surface flatness is 0.5-2 um. The optical material may be one of glass, crystal, and organic compound.

The first embodiment is as follows:

as shown in fig. 1 and 2, a measuring device for measuring flatness with an adjustable diameter, the measuring device on the upper part of which comprises a dial indicator 1 and a stainless steel bracket, three high-precision slide rails and a precision slide block are arranged below the bracket 2, a ceramic support leg on the slide block 4 is placed on the surface of a ground optical sample to determine a surface, a tungsten steel probe is contacted with the center of the surface, and the other end of the tungsten steel probe is connected with the dial indicator 1 to read the height difference between the center and the periphery of the surface so as to achieve the purpose of measuring flatness; the lower part of the device is a ceramic base with a highly polished surface for zeroing the device before measurement when the reference surface is used.

The diameter of an optical material to be detected is 60mm, three sides of a stainless steel support are 160mm in length and 30mm in width, a lower high-precision slide rail is 150mm in length and 20mm in width, precision slide blocks on the slide rail 3 are square, the sides are 40mm in length, each precision slide block is provided with a ceramic support leg, the diameter of each ceramic support leg is 2.5mm, and the exposure amount is 3mm; the spherical probe is arranged in front of the tungsten steel probe so as to avoid scratching the grinding surface of the optical material; the diameter of the ceramic base is 300mm, and the surface processing surface flatness is 1um.

The using method of the device comprises the following steps: adjusting the three precise slide blocks to proper positions to enable the three ceramic support legs to form a circle with the diameter of 60mm; then stably placing the ceramic substrate on a ceramic base, and pressing a return-to-zero key of a dial indicator 1 to perform zero clearing operation; the grinding surface of the optical material is wiped clean by pure water and alcohol without leaving dirt; and (3) stably placing the reset measuring device on the grinding surface of the optical material to be measured, and reading and recording the flatness value of the dial indicator 1.

Example two:

as shown in fig. 1 and 2, a measuring device for measuring flatness with an adjustable diameter, the measuring device on the upper part of which comprises a dial indicator 1 and a stainless steel bracket, three high-precision slide rails and a precision slide block are arranged below the bracket 2, a ceramic support leg on the slide block 4 is placed on the surface of a ground optical sample to determine a surface, a tungsten steel probe is contacted with the center of the surface, and the other end of the tungsten steel probe is connected with the dial indicator 1 to read the height difference between the center and the periphery of the surface so as to achieve the purpose of measuring flatness; the lower part of the device is a ceramic base with a highly polished surface for zeroing the device when the reference surface is before measurement.

The diameter of an optical material to be detected is 100mm, three sides of a stainless steel support are 160mm in length and 30mm in width, a lower high-precision slide rail is 150mm in length and 20mm in width, precision slide blocks on the slide rail 3 are square, the sides are 40mm in length, each precision slide block is provided with a ceramic support leg, the diameter of each ceramic support leg is 2.5mm, and the exposure amount is 3mm; the spherical probe is arranged in front of the tungsten steel probe so as to prevent scratching the grinding surface of the optical material; the diameter of the ceramic base is 300mm, and the surface processing surface flatness is 1um.

The using method of the device comprises the following steps: adjusting the three precise slide blocks to proper positions to enable the three ceramic support legs to form a circle with the diameter of 100 mm; then stably placing the ceramic substrate on a ceramic base, and pressing a return-to-zero key of a dial indicator 1 to perform zero clearing operation; the grinding surface of the optical material is cleaned by pure water and alcohol without dirt; and (3) stably placing the reset measuring device on the grinding surface of the optical material to be measured, and reading and recording the flatness value of the dial indicator 1.

The utility model discloses a measuring device solves the plane degree measurement problem of unidimensional optical material between the diameter 60-300mm, can be suitable for the optical material plane degree that the size is different on the one hand, and on the other hand is through the distance of adjustment stabilizer blade 5 and probe 6, and then the scope that 5 covers of adjustment stabilizer blade, adjusts the measured precision of plane degree at last. The ceramic zero clearing base 7 which is finely thrown is matched, so that the measurement after the diameter is adjusted every time is more accurate, and the measurement error is reduced.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a measure flatness testing arrangement of diameter adjustable which characterized in that: the device comprises a support (2) and a dial indicator (1) arranged at the center of the support (2), wherein at least three support legs (5) capable of horizontally sliding along the center to the periphery are arranged below the support (2), a probe (6) of the dial indicator (1) is in contact with the center of the surface of an optical sample to be measured, and the dial indicator (1) measures the flatness of the optical sample by detecting the height difference between the probe (6) and the support legs (5);

the flatness testing device further comprises a base (7) with a polished surface, and the base (7) is used for zeroing the flatness testing device before measurement.

2. A flatness testing apparatus for measuring flatness with adjustable diameter as defined in claim 1, wherein: support (2) below is provided with three group's slider (4) and slide rail (3) at least, stabilizer blade (5) are installed on slider (4), and slider (4) slide relative to slide rail (3) and are used for adjusting stabilizer blade (5) for the distance of probe (6), and then adjust flatness testing arrangement's measurement diameter.

3. A flatness testing apparatus for measuring flatness with adjustable diameter as defined in claim 2, wherein: the plurality of support legs (5) are at equal horizontal distances from the probe (6).

4. A flatness testing apparatus for measuring flatness with adjustable diameter as defined in claim 1, wherein: the bottom of the probe (6) is a spherical probe.

5. A flatness testing apparatus for measuring adjustable diameter according to claim 1, wherein: the horizontal adjustable distance of the supporting foot (5) relative to the probe (6) is 30-150mm.