CN217839118U - Rotating device and vacuum coating equipment - Google Patents

Abstract

The utility model discloses a rotary device and vacuum coating equipment belongs to vacuum coating technical field. The rotating device is arranged in the cavity, the hanger assembly is arranged in the cavity and used for bearing the substrate, the rotating device comprises a rotating assembly, the output end of the rotating assembly is used for being in butt joint with the hanger assembly and driving the hanger assembly to rotate, the hanger assembly is made to rotate so as to be in a first state or a second state, the substrate is mounted on the hanger assembly and is in the second state, and the substrate surface can be coated with a film. The utility model discloses a rotary device and vacuum coating equipment improve the flexibility of base plate in the cavity to satisfy the production demand.

Description

Rotating device and vacuum coating equipment

Technical Field

The utility model relates to a vacuum coating technical field especially relates to a rotary device and vacuum coating equipment.

Background

In the prior art, the substrate is hung behind the hanging rack of the revolution frame, the position of the substrate is fixed, the flexibility is poor, and the production requirement is difficult to meet. For example, when the substrate is conveyed and hung on a hanging rack of a public rotating rack, one surface of the substrate is adopted to face the public rotating rack to pass through the conveying port, and after the substrate is hung on the hanging rack, the other surface of the substrate faces the inner side wall of the cavity, so that the direction of the hung substrate is consistent with the direction of a film forming state, the film can be directly coated, and the film coating is simple and efficient. When the substrate faces the revolution frame and passes through the conveying port, the opening area of the conveying port is larger than the cross-sectional area of the substrate, however, the larger the opening area of the conveying port is, the more easily the equipment in the cavity is polluted, in addition, the larger the door valve mechanism of the conveying port occupies a large space, the convection consumption of the internal temperature of the cavity is increased, and the film forming quality and the film forming efficiency are finally influenced.

Therefore, a rotating device and a vacuum coating apparatus are needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a rotary device and vacuum coating equipment improve the flexibility of base plate in the cavity to satisfy the production demand.

To achieve the purpose, the utility model adopts the following technical proposal:

in a first aspect, a rotating device is arranged in a cavity, a hanger assembly is arranged in the cavity and used for bearing a substrate, the rotating device comprises a rotating assembly, an output end of the rotating assembly is used for being in butt joint with the hanger assembly and driving the hanger assembly to rotate, so that the hanger assembly rotates to be in a first state or a second state, and when the substrate is hung on the hanger assembly and is in the second state, the substrate surface can be coated.

In some possible embodiments, a male rotating frame is arranged in the cavity, the hanger assembly is rotatably connected to the male rotating frame, the male rotating frame can drive the hanger assembly to rotate around a first central line to be in butt joint with the rotating assembly, and the rotating assembly can drive the hanger assembly to rotate around a second central line.

In some possible embodiments, the chamber is provided with a handling opening,

the two groups of rotating assemblies are positioned at two sides of the carrying port along the rotating direction of the revolution frame; and/or

The carrying port comprises a carrying inlet and a carrying outlet.

In some possible embodiments, the swivel assembly includes a swivel drive fixed to the cavity and a swivel head connected to an output end of the swivel drive, and the hanger assembly is attachable to or detachable from the swivel head.

In some possible embodiments, a limiting assembly and a lifting assembly are arranged between the hanger assembly and the male rotating frame, the limiting assembly can limit the rotation of the hanger assembly, when the lifting assembly drives the hanger assembly to move forward, the limiting assembly is in a non-limiting state and the hanger assembly is in butt joint with the rotating assembly, and when the lifting assembly drives the hanger assembly to move backward, the hanger assembly is separated from the rotating assembly and the limiting assembly is in a limiting state.

In some possible embodiments, the stop assembly comprises:

the first limiting assemblies comprise a bolt and a jack, one of the bolt and the jack is arranged on the hanger assembly, the other one of the bolt and the jack is arranged on the male rotating frame, when the hanger assembly moves, the bolt is inserted into or separated from the jack, when the hanger assembly is in a first state, the first limiting assembly is in a limiting state, and the second limiting assembly is in a non-limiting state; when the hanger assembly is in the second state, the first group of first limiting assemblies are in the non-limiting state, and the second group of first limiting assemblies are in the limiting state; and/or

The second limiting assembly comprises a cross table and a cross groove, the cross table and the cross groove are arranged on the hanger assembly, the other cross table and the cross groove are arranged on the revolution frame, and when the hanger assembly moves, the cross table is inserted into or separated from the cross groove.

In some possible embodiments, the lifting assembly corresponds to the rotating assembly, the lifting assembly includes a lifting driving member and a lifting head, the lifting driving member is fixed to the cavity, the lifting head is connected to an output end of the lifting driving member, and the lifting driving member drives the hanger assembly to move through the lifting head.

In some possible embodiments, the hanger assembly includes a connecting shaft and a frame connected to the connecting shaft, the substrate is detachably connected to the frame, the revolving frame is provided with a bearing set, the connecting shaft penetrates through the bearing set, and the rotating assembly is drivingly connected to the connecting shaft.

In some possible embodiments, the bearing set includes a linear bearing or an oilless bushing.

In some possible embodiments, the hanger assembly is angled at 90 ° when in the first and second states.

In a second aspect, a vacuum coating apparatus is provided, which includes a chamber, a hanger assembly and the above-mentioned rotating device, wherein the rotating device can drive the hanger assembly to rotate.

The utility model has the advantages that:

the utility model provides a pair of rotary device and vacuum coating equipment, rotating assembly can drive the hanger subassembly and rotate in order to be in first state or second state to make the hanger subassembly be in different angular position for the cavity, the base plate articulates when the hanger subassembly, along with the hanger subassembly is in different states and changes the angular position, has improved the flexibility of base plate in the cavity, in order to satisfy the production demand.

Drawings

FIG. 1 is a schematic structural diagram of a vacuum deposition apparatus according to an embodiment of the present invention;

FIG. 2 is a top view of a vacuum deposition apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic view of a hanger assembly provided by an embodiment of the present invention;

FIG. 4 is a schematic view of a hanger assembly and a rotating assembly according to an embodiment of the present invention;

FIG. 5 is an enlarged view taken at I of FIG. 4;

FIG. 6 is an enlarged view at II of FIG. 4;

FIG. 7 is an enlarged view taken at III of FIG. 4;

fig. 8 is a schematic view illustrating a docking state of the hanger assembly and the rotating assembly according to an embodiment of the present invention.

In the figure:

100. a substrate;

2. a hanger assembly; 21. a connecting shaft; 22. a frame; 23. hooking; 24. a pin shaft;

3. a rotating assembly; 31. a rotary drive member; 32. rotating the head; 321. a through groove;

4. a male revolving rack; 41. a frame body; 42. a turntable; 43. a bearing set;

5. a lifting assembly; 51. a lifting drive member; 52. a lifting head;

6. a limiting component; 61. a first limit component; 611. a bolt; 612. a jack; 62. a second limiting component; 621. a cross table; 622. a cross groove;

A. a first rotational position; B. a second rotational position; C. carrying out; D. carrying into position.

Detailed Description

In order to make the technical problem solved by the present invention, the technical solutions adopted by the present invention, and the technical effects achieved by the present invention clearer, the following detailed description will be made with reference to the accompanying drawings for further describing the technical solutions of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by the skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.

The embodiment provides a rotating device, locate the cavity, be equipped with hanger subassembly 2 in the cavity, hanger subassembly 2 is used for bearing substrate 100, rotating device includes rotating assembly 3, rotating assembly 3's output is used for with the butt joint of hanger subassembly 2 to drive hanger subassembly 2 rotatory, make hanger subassembly 2 rotate in order to be in first state or second state, when substrate 100 is hung and is carried on hanger subassembly 2 and is in the second state, the coating film can be carried out to the substrate 100 face. The rotating assembly 3 can drive the rack assembly 2 to rotate so as to be in a first state or a second state, so that the rack assembly 2 is in different angle positions relative to the cavity, when the substrate 100 is hung on the rack assembly 2, the angle positions are changed along with the fact that the rack assembly 2 is in different states, and the flexibility of the substrate 100 in the cavity is improved so as to meet production requirements.

In an embodiment, a cavity is provided with a male rotating frame 4, the hanger assembly 2 is rotatably connected to the male rotating frame 4, the male rotating frame 4 can drive the hanger assembly 2 to rotate around a first central line to be in butt joint with the rotating assembly 3, the rotating assembly 3 can drive the hanger assembly 2 to rotate around a second central line, and particularly, when a plurality of hanger assemblies 2 are arranged in the cavity, the number of the rotating assemblies 3 can be reduced by butting the hanger assemblies 2 with the rotating assembly 3.

The embodiment also provides a vacuum coating apparatus, as shown in fig. 1 and 2, which includes a chamber, a hanger assembly 2 and the above-mentioned rotating device, and the rotating device drives the hanger assembly 2 to rotate, so as to change the angular position of the substrate 100 located in the chamber, and improve the flexibility of the substrate 100 in the chamber. In one embodiment, the rack assembly 2 is disposed in the cavity, a carrying opening is disposed on a sidewall of the cavity, the rack assembly 2 is used for carrying the substrate 100, the rotating assembly 3 can drive the rack assembly 2 to rotate to be in the first state or the second state, and the rack assembly 2 is disposed at an included angle when being in the first state and the second state. When the substrate 100 is mounted on the hanger assembly 2 and is in the second state, the surface of the substrate 100 faces the film coating source action area on the inner side wall of the cavity for film coating; when the substrate 100 is mounted on the rack assembly 2 and the rack assembly 2 is in the second state, coating the substrate 100; when the rack assembly 2 faces the transfer port and the rack assembly 2 is in the first state, the side of the substrate 100 faces the transfer port, for example, the side of the substrate 100 faces the transfer port, or the substrate 100 is inclined toward the transfer port, and the substrate 100 can be taken off from the rack assembly 2 and passed through the transfer port to carry out the substrate 100, or the substrate 100 can be passed through the transfer port from the outside and mounted on the rack assembly 2. The substrate 100 is prevented from facing and passing through the carrying port, the opening area of the carrying port is effectively reduced, the equipment in the cavity is prevented from being polluted, and the internal temperature consumption of the cavity is reduced, so that the film forming quality and the film forming efficiency are improved. In other embodiments, the substrate 100 is driven by the rotating device to rotate, so that a flip-chip coating or the like can be performed, and a specific application scenario is not limited.

In one embodiment, as shown in fig. 2, the angle between the first state and the second state of the rack assembly 2 is 90 °, and the rotating assembly 3 can drive the rack assembly 2 to rotate 90 ° in the forward direction or 90 ° in the reverse direction, so that the side of the substrate 100 faces the through-transfer opening, and the opening area of the through-transfer opening is minimized.

In other embodiments, the included angle between the first state and the second state of the rack assembly 2 may be other angles, and is not limited, so that the substrate 100 may be inclined to pass through the transfer opening, and the opening area of the transfer opening may be reduced to some extent.

In one embodiment, as shown in fig. 2, a male turret 4 is provided in the chamber, the hanger assembly 2 is rotatably connected to the male turret 4, the male turret 4 can drive the hanger assembly 2 to rotate around a first central line, and the male turret 4 drives the hanger assembly 2 to rotate with the substrate 100 during film formation. Specifically, a rotation position and a carrying position are arranged, and the hanger assembly 2 faces the carrying port in a first state when the carrying position is set; coating the film on the substrate 100 when the substrate is positioned at the film coating position along with the hanger assembly 2; when the public rotating frame 4 drives the hanger assembly 2 to be positioned at the rotating position, the hanger assembly 2 is in butt joint with the rotating assembly 3, the rotating assembly 3 drives the hanger assembly 2 to rotate around a second central line, and the first central line and the second central line are parallel or approximately parallel so that the hanger assembly 2 rotates from the second state to the first state; when the public rotating frame 4 drives the hanging frame assembly 2 to rotate to the carrying position, namely when the public rotating frame is positioned at the carrying position in the first state, the substrate 100 is hung or taken; then, the revolving frame 4 drives the hanger assembly 2 to rotate to the rotating position, and the rotating assembly 3 drives the hanger assembly 2 to rotate reversely around the second central line, so that the hanger assembly 2 is rotated from the first state to the second state. The rotating position and the carrying position can be separately arranged, and the plurality of hanger assemblies 2 can independently work at the rotating position and the carrying position at the same time, so that the working efficiency is improved. In addition, the rotating position and the carrying position can be the same position, and the specific rotating position and the carrying position are set according to the carrying path outside the cavity and are set according to the requirement.

Further, when the substrates 100 are hung on all the hanger assemblies 2 of the revolving frame 4 and the hanger assemblies 2 are in the second state, the carrying port is closed and the coating is performed. Further, a coating position may be provided to be independent of the rotation position and the carrying position, and when the substrate 100 rotates to the coating position, the coating is performed, that is, the coating source structure is provided at the coating position to prevent the coating source structure from interfering with the rotation device or the door flange.

In one embodiment, as shown in fig. 2, two sets of rotating assemblies 3 are provided, two sets of rotating assemblies 3 are positioned at two sides of the carrying port along the rotating direction of the revolving frame 4, the revolving frame 4 drives the hanger assembly 2 to be in butt joint with the rotating assemblies 3, so that the hanger assembly 2 is in a second state to a first state, and when the hanger assembly is in the first state to the second state, the revolving frame 4 only rotates towards one direction, and the working efficiency is improved. Specifically, a first rotation position a and a second rotation position B are provided, which are respectively provided with the rotating assembly 3.

In one embodiment, as shown in fig. 2, the carrying port includes a carrying-in port and a carrying-out port that are independent of each other, the carrying position includes a carrying-out position C and a carrying-in position D, and the carrying-out position C and the carrying-in position D correspond to the carrying-in port and the carrying-out port, respectively; the carrying inlet and the carrying outlet are positioned between the two groups of rotating assemblies 3, the substrate 100 is carried in through the carrying inlet and carried out through the carrying outlet, the substrate 100 can synchronously enter and exit, and the operation efficiency is improved.

In one embodiment, as shown in fig. 3, the hanger assembly 2 includes a connecting shaft 21 and a frame 22 connected to the connecting shaft 21, the substrate 100 is detachably connected to the frame 22, a bearing set 43 is disposed on the revolving frame 4, the connecting shaft 21 penetrates the bearing set 43, and the rotating assembly 3 is drivingly connected to the connecting shaft 21, so that the connecting shaft 21 rotates on the bearing set 43, and the frame 22 and the substrate 100 connected to the frame 22 are rotated. Furthermore, a hook 23 is arranged on the frame 22, and the substrate 100 is hung on the hook 23, so that the substrate is convenient to take and place; further, the number of the hooks 23 is not limited, and if the hooks 23 are provided at both ends, the hooks 23 can be hung at both ends of the substrate 100, or the hooks 23 are provided at both ends and the middle position, and the hooks 23 can be hung at both ends and the middle position of the substrate 100.

In one embodiment, as shown in fig. 4, 5 and 8, the rotating assembly 3 includes a rotating driving element 31 and a rotating head 32, the rotating driving element 31 is fixed to the cavity, the rotating head 32 is connected to an output end of the rotating driving element 31, the hanger assembly 2 can be connected to or disconnected from the rotating head 32, and the hanger assembly 2 can be ensured to rotate by a corresponding angle along with the rotating assembly 3 by clamping or plugging the hanger assembly 2 to the rotating head 32, so as to improve the rotating precision and reliability. Specifically, when the revolving frame 4 drives the hanger assembly 2 to enter the rotating position, the hanger assembly 2 is clamped with the rotating head 32, so that the rotary driving element 31 drives the hanger assembly 2 to rotate simultaneously through the rotating head 32, and when the revolving frame 4 drives the hanger assembly 2 to rotate out of the rotating position, the hanger assembly 2 is separated from the rotating head 32. Specifically, be equipped with logical groove 321 on the rotating head 32, the one end of the connecting axle 21 of hanger subassembly 2 is equipped with round pin axle 24, and round pin axle 24 can be through leading to groove 321 or joint in leading to groove 321, can make things convenient for the two to dock or part.

In one embodiment, as shown in fig. 4 and 6-7, a limiting assembly 6 and a lifting assembly 5 are disposed between the hanger assembly 2 and the revolving frame 4, the limiting assembly 6 can limit the rotation of the hanger assembly 2, when the lifting assembly 5 drives the hanger assembly 2 to move forward to a specific position, the limiting assembly 6 is in a non-limiting state and the hanger assembly 2 is in butt joint with the rotating assembly 3, and when the lifting assembly 5 drives the hanger assembly 2 to move backward to the specific position, the hanger assembly 2 is separated from the rotating assembly 3 and the limiting assembly 6 is in a limiting state. Through setting up spacing subassembly 6, when spacing subassembly 6 is in spacing state, make hanger subassembly 2 and revolution frame 4 carry on spacingly, guarantee that the base plate 100 on hanger subassembly 2 and the hanger subassembly 2 rotates along with revolution frame 4 simultaneously, improved the coating film effect, can accurately rotate to coating film position, rotatory position, move out position C and move into position D. The lifting assembly 5 can realize the transition of the limiting assembly 6 between a limiting state and a non-limiting state and the transition of the butt joint and the separation between the driving hanger assembly 2 and the rotating assembly 3.

In one embodiment, as shown in fig. 3 and 7, the position limiting assembly 6 includes two sets of first position limiting assemblies 61, each set of first position limiting assemblies 61 includes a pin 611 and a socket 612, one of the pin 611 and the socket 612 is disposed on the hanger assembly 2, and the other is disposed on the male rotating frame 4, when the hanger assembly 2 moves, the pin 611 is inserted into or separated from the socket 612, when the hanger assembly 2 is in the first state, the first position limiting assemblies 61 are in the position limiting state, and the second position limiting assemblies 61 are in the non-position limiting state; when the hanger assembly 2 is in the second state, the first group of first limiting assemblies 61 are in the non-limiting state, and the second group of first limiting assemblies 61 are in the limiting state; the precise positioning between the revolution frame 4 and the hanger assembly 2 is realized through the matching of the bolt 611 and the jack 612, and the precise positioning between the hanger assembly 2 and the revolution frame 4 in the second state and the precise positioning between the hanger assembly 2 and the revolution frame 4 in the first state and the revolution frame 4 are respectively realized through arranging two groups of limiting assemblies 6, namely the precise positioning of the hanger assembly 2 before and after the rotation of the rotating assembly 3 is realized.

In one embodiment, as shown in fig. 7, the limiting component 6 includes a second limiting component 62, the second limiting component 62 includes a cross-shaped table 621 and a cross-shaped groove 622, one of the cross-shaped table 621 and the cross-shaped groove 622 is disposed on the hanger component 2, and the other is disposed on the common rotating rack 4, when the hanger component 2 moves, the cross-shaped table 621 is inserted into or separated from the cross-shaped groove 622, and the cross-shaped table 621 and the cross-shaped groove 622 are matched at different angles, so that the coarse positioning between the hanger component 2 and the tooling frame in the second state or the first state respectively is realized.

In one embodiment, as shown in fig. 4 and 6, the lifting assembly 5 is disposed corresponding to the rotating assembly 3, and further, a lifting assembly 5 and a rotating assembly 3 are disposed at each rotating position, and the lifting assembly 5 and the rotating assembly 3 are respectively disposed at both ends of the hanger assembly 2. Specifically, the lifting assembly 5 includes a lifting driving member 51 and a lifting head 52, the lifting driving member 51 is fixed to the cavity, the lifting head 52 is connected to an output end of the lifting driving member 51, and the lifting driving member 51 drives the hanger assembly 2 to move through the lifting head 52 so as to engage with or disengage from the rotating assembly 3.

In one embodiment, as shown in fig. 2, the revolving frame 4 includes a frame body 41, two upper and lower rotating discs 42 disposed around the frame body 41, and a bearing set 43 connected to the upper shaft 21 of the rotating discs 42, wherein the shaft 21 penetrates through the bearing set 43, and one end of the shaft can be abutted to the rotating head 32, and the other end of the shaft can be abutted to the lifting head 52.

In one embodiment, as shown in fig. 3 and 4, the bearing set 43 includes a linear bearing fixed to the turntable 42, the lifting assembly 5 drives the connecting shaft 21 to move along the linear bearing, and the rotating assembly 3 drives the connecting shaft 21 to rotate in the linear bearing; likewise, in one embodiment, the bearing set 43 includes an oilless bushing within which the connecting shaft 21 can move or rotate.

The technological process when the vacuum coating equipment is adopted comprises the following steps:

the method comprises the following steps: the hanger assembly 2 in the second state is in butt joint with the rotating assembly 3, and the rotating assembly 3 drives the hanger assembly 2 to be in the first state;

step two: the hanger assembly 2 is separated from the rotating assembly 3, and the hanger assembly 2 keeps a first state;

step three: the hanger assembly 2 in the first state is in butt joint with the rotating assembly 3, and the rotating assembly 3 drives the hanger assembly 2 to be in the second state;

step four: the hanger assembly 2 is separated from the rotating assembly 3 and the hanger assembly 2 maintains the second state.

After the substrate 100 is coated in the cavity, the first step and the second step are performed to realize turning so as to take down the substrate 100. And then, mounting a new substrate 100, and performing the third step and the fourth step to adjust the position of the substrate 100 so as to perform film coating in the next step.

Specifically, the method further comprises the following steps:

the method comprises the following steps: after the substrate 100 is coated in the film forming chamber of the cavity, the revolution frame 4 drives the hanger assembly 2 and the coated substrate 100 to rotate to a first rotation position A, and the rotation assembly 3 drives the hanger assembly 2 to rotate to a first state;

specifically, the process of docking the hanger assembly 2 with the rotating assembly 3 comprises:

step A: the lifting driving member 51 drives the lifting head 52 to ascend, and after the lifting head 52 ascends for a certain distance, the lifting head 52 starts to contact the connecting shaft 21; then the lifting head 52 lifts the connecting shaft 21, the frame 22 and the substrate 100 simultaneously, and the hanger assembly 2 and the substrate 100 can only rise due to the action of the limiting assembly 6 and the linear bearing; continuing to ascend, and sequentially releasing the limit of the second limit component 62 and the first limit component 61 until the pin shaft 24 on the connecting shaft 21 is clamped with the through groove 321 of the rotating head 32;

and B: the rotary driving member 31 rotates the spin head 32 and the connecting shaft 21, so as to rotate the frame 22 and the substrate 100 until the rack assembly 2 is in the first state.

Specifically, the process of separating the hanger assembly 2 from the rotating assembly 3 comprises the following steps:

and C: the lifting driving member 51 drives the lifting head 52 to descend, the second limiting assembly 62 and the first limiting assembly 61 sequentially limit, the hanger assembly 2 descends to an initial position, and the lifting driving member 51 drives the lifting head 52 to continuously descend until the lifting head 52 is separated from the connecting shaft 21.

Step two: the common rotating frame 4 rotates to the carrying-out position C with the rack assembly 2 and the plated substrate 100, and the plated substrate 100 is taken off the rack assembly 2 and carried out by a carrying robot or the like;

step three: the revolution shelf 4 rotates to the carrying-in position D with the rack assembly 2, and the substrate 100 is carried on the rack assembly 2 through the carrying port by a carrying manipulator or the like;

step four: the male rotating frame 4 drives the hanger assembly 2 and the substrate 100 on the hanger assembly 2 to rotate to a second rotating position B, and the rotating assembly 3 drives the hanger assembly 2 and the substrate 100 on the hanger assembly 2 to rotate to a second state;

step five: the public rotating frame 4 drives the hanging frame assembly 2 and the substrate 100 to rotate to a coating position to realize coating;

the steps are repeated and circulated in sequence, and the loading, coating and unloading of the substrate 100 are realized.

It is to be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (11)

1. The utility model provides a rotating device, locates the cavity, be equipped with in the cavity and hang a subassembly (2), it is used for bearing substrate (100) to hang a subassembly (2), its characterized in that, rotating device includes rotating assembly (3), the output of rotating assembly (3) be used for with hang a subassembly (2) butt joint, and the drive hang a subassembly (2) and rotate, make hang a subassembly (2) and rotate in order to be in first state or second state, substrate (100) are hung and are carried on hang a subassembly (2) and when being in the second state, the coating film can be carried out to substrate (100) face.

2. The rotating device according to claim 1, characterized in that a common rotating frame (4) is arranged in the cavity, the hanger assembly (2) is rotatably connected to the common rotating frame (4), the common rotating frame (4) can drive the hanger assembly (2) to rotate around a first central line to be in butt joint with the rotating assembly (3), and the rotating assembly (3) can drive the hanger assembly (2) to rotate around a second central line.

3. The rotating device according to claim 2, wherein the chamber is provided with a carrying port,

two groups of rotating assemblies (3) are arranged, and the two groups of rotating assemblies (3) are positioned at two sides of the carrying port along the rotating direction of the revolution frame (4); and/or

The carrying port comprises a carrying-in port and a carrying-out port.

4. A swivel arrangement according to claim 2, characterized in that the swivel assembly (3) comprises a swivel drive (31) and a swivel head (32), the swivel drive (31) being fixed to the cavity, the swivel head (32) being connected to an output end of the swivel drive (31), the hanger assembly (2) being connectable or disconnectable from the swivel head (32).

5. The rotating device according to claim 2, characterized in that a limiting component (6) and a lifting component (5) are arranged between the hanger component (2) and the male rotating frame (4), the limiting component (6) can limit the hanger component (2) to rotate, when the lifting component (5) drives the hanger component (2) to move forward, the limiting component (6) is in a non-limiting state and the hanger component (2) is in butt joint with the rotating component (3), and when the lifting component (5) drives the hanger component (2) to move reversely, the hanger component (2) is separated from the rotating component (3) and the limiting component (6) is in a limiting state.

6. The rotating device according to claim 5, characterized in that said stop assembly (6) comprises:

two sets of first limiting assemblies (61), wherein each first limiting assembly (61) comprises a bolt (611) and a jack (612), one of the bolt (611) and the jack (612) is arranged on the rack assembly (2), the other one of the bolt (611) and the jack (612) is arranged on the male rotating frame (4), when the rack assembly (2) moves, the bolt (611) is inserted into or separated from the jack (612), when the rack assembly (2) is in a carrying state and a first state, the first limiting assembly (61) is in a limiting state, and the first limiting assembly (61) is in a non-limiting state; when the hanger component (2) is in a second state of a film forming state, the first group of first limiting components (61) are in a non-limiting state, and the second group of first limiting components (61) are in a limiting state; and/or

The second limit component (62), the second limit component (62) includes cross platform (621) and cross recess (622), cross platform (621) with one of cross recess (622) is located hang on the frame subassembly (2), another is located on public revolving rack (4), when hanging frame subassembly (2) removes, cross platform (621) peg graft or separate in cross recess (622).

7. The rotating device according to claim 5, wherein the lifting assembly (5) is disposed corresponding to the rotating assembly (3), the lifting assembly (5) comprises a lifting driving member (51) and a lifting head (52), the lifting driving member (51) is fixed to the cavity, the lifting head (52) is connected to an output end of the lifting driving member (51), and the lifting driving member (51) drives the hanger assembly (2) to move through the lifting head (52).

8. The rotating device according to claim 2, wherein the hanger assembly (2) comprises a connecting shaft (21) and a frame (22) connected to the connecting shaft (21), the base plate (100) is detachably connected to the frame (22), a bearing set (43) is arranged on the male rotating frame (4), the connecting shaft (21) penetrates through the bearing set (43), and the rotating assembly (3) is drivingly connected to the connecting shaft (21).

9. A rotating device according to claim 8, characterized in that the bearing pack (43) comprises a linear bearing or an oilless bushing.

10. Swivel arrangement according to any of claims 1-9, characterized in that the angle between the hanger assembly (2) in the first and second state is 90 °.

11. Vacuum coating installation, characterized in that it comprises a chamber, a hanger assembly (2) and a rotating device according to any one of claims 1 to 10, said rotating device being able to drive said hanger assembly (2) in rotation.

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