CN215887218U - Film coating system - Google Patents

Abstract

The utility model provides a coating system, which comprises a chamber structure, wherein the chamber structure comprises a transfer chamber and a coating chamber; the valve device is arranged between the transfer chamber and the coating chamber; a sample transfer device disposed within the chamber structure, the sample transfer device adapted to transfer the sample from the transfer chamber to the plating chamber and retrieve the sample from the plating chamber; the multifunctional base is arranged in the cavity structure and comprises a lifting device, a rotating device and a grabbing device, wherein the rotating device is arranged on the lifting device, and the grabbing device is connected with the rotating device. Compared with the prior art, the sample transfer device is matched with the multifunctional base, so that the coating efficiency and the coating quality are improved.

Description

Film coating system

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a coating system.

Background

Vacuum coating is mainly carried out in a vacuum coating chamber, and the vacuum coating chamber is usually opened when coating and taking a workpiece by using the conventional coating equipment, so that the vacuum coating chamber needs to be repeatedly pumped to be vacuum, and the coating efficiency is seriously influenced. When the vacuum coating chamber is opened repeatedly, dust in the air can also enter the vacuum coating chamber, and the coating quality is influenced. When a sample is placed in a plating apparatus, the sample is generally sucked by a vacuum chuck or an electromagnetic chuck and is likely to fall off during the plating process. Therefore, the existing coating equipment has the problem of low automation degree, so that the coating efficiency is low, and the coating quality needs to be improved.

SUMMERY OF THE UTILITY MODEL

The utility model solves the problem of improving the film coating quality while improving the film coating efficiency.

To solve at least one of the above problems, the present invention provides a plating system comprising: the device comprises a chamber structure, a coating device and a control device, wherein the chamber structure comprises a transfer chamber and a coating chamber; the valve device is arranged between the transfer chamber and the coating chamber and is suitable for isolating or communicating the transfer chamber and the coating chamber; a sample transfer device disposed within the transfer chamber, the sample transfer device adapted to transfer the sample from the transfer chamber to the plating chamber and retrieve the sample from the plating chamber; the multifunctional base is arranged in the coating chamber and comprises a lifting device, a rotating device and a grabbing device, the rotating device is arranged on the lifting device, the grabbing device is connected with the rotating device, the grabbing device is suitable for grabbing the sample from the sample transfer device or putting the sample back to the transfer device, the lifting device is suitable for driving the grabbing device to move up and down, and the rotating device is suitable for driving the grabbing device to rotate.

Compared with the prior art, the utility model has the following beneficial effects: the sample is transferred between the transfer chamber and the coating chamber through the sample transfer device, the coating chamber is prevented from being in direct contact with air, a valve device is arranged between the transfer chamber and the coating chamber, the valve device can be closed during coating, the influence of the transfer chamber on the coating chamber is avoided, the vacuum degree of the coating chamber is guaranteed, the sample can be automatically grabbed from the sample transfer device under the matching of the lifting device on the multifunctional base and the grabbing device, the sample is placed back to the sample transfer device after coating is completed, the grabbing device can be driven to rotate by the rotating device on the multifunctional base, and the uniformity of the sample during coating is guaranteed, so that the coating efficiency and the coating quality of the coating system can be effectively improved.

Optionally, the assay transfer device comprises a transfer rod assembly, a fixed end and at least one support frame, wherein the fixed end is fixedly connected with the transfer chamber, one end of the transfer rod assembly is fixedly connected with the fixed end, the other end of the transfer rod assembly is suitable for telescopic movement relative to the fixed end, the support frame is arranged below the transfer rod assembly, and the support frame is suitable for supporting the transfer rod assembly. From this, the support frame can support the conveying rod subassembly, and the atress is too big and can not obtain reliable support when avoiding the conveying rod subassembly to stretch out, and long-time use can produce flagging, dislocation lamp problem, and this assay transfer device can effectively guarantee the stability and the transmission precision of transmission.

Optionally, the coating system further includes a tray, the sample is suitable for being placed on the tray, a supporting ring suitable for placing the tray is arranged at one end, away from the fixed end, of the conveying rod assembly, and the tray and the supporting ring form a clamping connection. Therefore, the sample can be conveniently placed on the supporting ring through the tray, the reliability of the tray on the supporting ring is ensured, and shaking is avoided.

Optionally, the retaining ring is provided with a positioning groove, the tray is provided with a positioning block matched with the positioning groove, and the positioning block is suitable for being connected with the positioning groove in a clamping manner when the tray is connected with the retaining ring. From this, the accuracy of tray placement position has been guaranteed in the setting of constant head tank and locating piece, and the grabbing device of being convenient for snatchs the accuracy of assay to the survey material.

Optionally, the lifting device comprises a fixed shaft, a lifting shaft, a connecting piece and a lifting motor, the fixed shaft is fixedly connected with the film coating chamber, the lifting shaft is sleeved on the fixed shaft, the rotation axis of the lifting motor is parallel to the axis of the lifting shaft, the lifting motor is connected with the lifting shaft through the connecting piece, and the lifting motor is suitable for driving the lifting shaft to lift relative to the fixed shaft. Therefore, the fixed shaft is fixedly connected with the film coating chamber, and the lifting shaft is arranged on the fixed shaft in a sleeved mode and moves up and down relative to the fixed shaft, so that the grabbing device moves up and down.

Optionally, the rotating device includes a rotating motor and a rotating shaft, the rotating shaft is sleeved on the lifting shaft, the rotating motor is suitable for driving the rotating shaft to rotate around the lifting shaft, and the grabbing device is fixedly connected with the rotating shaft. From this, can realize grabbing device lift and rotatory function to the rotation axis rotates around the lift axle, guarantees rotatory and lift mutually noninterfere.

Optionally, the grabbing device comprises a connecting frame and a grabbing piece, one end of the connecting frame is fixedly connected with the rotating device, the other end of the connecting frame is connected with the grabbing piece, and the grabbing piece is suitable for grabbing the tray. From this, form fixed connection through the link with grabbing piece and rotary device to the piece of grabbing can realize the snatching of tray.

Optionally, the grabbing piece comprises a grabbing ring and grabbing hooks arranged on the grabbing ring, the number of the grabbing hooks is at least one, and the tray is provided with docking hooks matched with the grabbing hooks, and the grabbing hooks are suitable for being connected with the docking hooks. From this, realize grabbing the fastness of grabbing simultaneously guaranteeing to snatch of ring to the snatching of tray through the cooperation of grabbing hook and butt joint hook, avoid droing.

Optionally, a protrusion is arranged at the bottom of the butt hook, a groove matched with the protrusion is arranged at the top of the grabbing hook, and the protrusion and the groove form a clamping connection. Therefore, the reliability of connection between the butt hook and the grabbing hook is further improved.

Optionally, the coating system further comprises a heating lamp, the heating lamp is arranged at the bottom of the lifting device and located above the grabbing ring, and the heating lamp is suitable for heating the sample in the tray after the grabbing hook grabs the tray. Therefore, the heating lamp can heat the sample, and the quality of the coating film of the sample is improved.

Drawings

FIG. 1 is a schematic view of the overall structure of a coating system according to an embodiment of the present invention;

FIG. 2 is a schematic view of the overall structure of the multifunctional base in the coating chamber according to the embodiment of the present invention;

FIG. 3 is a schematic view of a configuration of a grasping element according to an embodiment of the present invention;

FIG. 4 is a front view of a tray in an embodiment of the present invention;

fig. 5 is a top view of a tray in an embodiment of the utility model.

Description of reference numerals:

1-a transfer chamber, 2-a coating chamber, 3-a fixed end, 4-a support frame, 5-a tray, 51-a positioning groove, 52-a butt hook, 521-a bump, 6-a conveying rod assembly, 61-a fixed rod, 62-a sliding rod, 7-a supporting ring, 71-a positioning block, 8-a lifting device, 81-a fixed shaft, 82-a lifting shaft, 83-a connecting piece, 84-a lifting motor, 9-a rotating device, 91-a rotating motor, 92-a rotating shaft, 10-a grabbing device, 11-a connecting frame, 12-a grabbing piece, 121-a grabbing ring, 122-a grabbing hook, 123-a groove, 13-a heating lamp, 14-a test port, 15-a gate valve, 16-a mechanical pump and 17-a lead hole, 18-conveying motor, 19-conveying screw rod, 20-butt joint groove and 21-connecting plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", "front", "back", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that are conventionally placed when the products of the present invention are used, and are used only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements to be referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. In the drawings of the embodiments of the present invention, a coordinate system XZ is provided, in which a forward direction of the X axis represents a forward direction, a reverse direction of the X axis represents a backward direction, a forward direction of the Z axis represents an upward direction, and a reverse direction of the Z axis represents a downward direction.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.

Referring to fig. 1 to 5, the present invention provides a coating system, which includes a chamber structure including a transfer chamber 1 and a coating chamber 2; the valve device is arranged between the transfer chamber 1 and the coating chamber 2 and is suitable for separating or communicating the transfer chamber 1 and the coating chamber 2; a sample transfer device provided in the transfer chamber 1, the sample transfer device being adapted to transfer a sample from the transfer chamber 1 to the film coating chamber 2 and to retrieve the sample from the film coating chamber 2; the multifunctional base is arranged in the coating chamber 2 and comprises a lifting device 8, a rotating device 9 and a grabbing device 10, the rotating device 9 is arranged on the lifting device 8, the grabbing device 10 is connected with the rotating device 9, the grabbing device 10 is suitable for grabbing a sample from the sample transfer device or putting the sample back to the sample transfer device, the lifting device 8 is suitable for driving the grabbing device 10 to move up and down, and the rotating device 9 is suitable for driving the grabbing device 10 to rotate.

In this embodiment, the chamber structure includes adjacent transfer chamber 1 and coating film chamber 2 that sets up, is provided with valve device between transfer chamber 1 and the coating film chamber 2, controls to separate between transfer chamber 1 and the coating film chamber 2 or link up between transfer chamber 1 and the coating film chamber 2 through opening or closing of valve device to avoid transfer chamber 1 to cause the influence to the vacuum of coating film chamber 2. The interior of the transfer chamber 1 is in a low vacuum environment, the interior of the coating chamber 2 is in a high vacuum environment, and the transfer chamber 1 and the coating chamber 2 are respectively pumped to required vacuum degrees through a mechanical pump 16. The sample transfer device is arranged in a chamber structure, wherein the main body of the sample transfer device is arranged in a transfer chamber 1, part of the motion structure of the sample transfer device can enter the film coating chamber 2, a test material opening 14 is arranged on the side wall of the transfer chamber 1, and a sample can be placed on the sample transfer device by opening the test material opening 14. The sample transfer device is used for transferring the sample placed on the sample transfer device to the film coating chamber 2, transferring the sample from the film coating chamber 2 to the transfer chamber 1 after the film coating is finished, and removing the sample from the sample transfer device through a sample port 14 on the transfer.

It should be noted that, in this embodiment, the valve device is a gate valve 15, when it needs to be opened, the movable valve plate on the gate valve 15 moves upward, so as to form an opening between the transfer chamber 1 and the coating chamber 2, and when it needs to be closed, the movable valve plate moves downward, so as to seal the passage opening. The valve device may be other conventional valves, and is not limited herein.

Referring to fig. 2, the multifunctional base is disposed above the coating chamber 2, the multifunctional base includes a lifting device 8, a rotating device 9 and a gripping device 10, the rotating device 9 is disposed on the lifting device 8, and the gripping device 10 is connected to the rotating device 9. The gripping device 10 is used for gripping the sample on the sample transfer device or placing the gripped sample back on the sample transfer device, the lifting device 8 is used for driving the rotating device 9 to lift, the gripping device 10 is fixedly arranged on the rotating device 9, therefore, the lifting device 8 drives the rotating device 9 to lift, simultaneously, the gripping device 10 lifts along with the rotating device 9, and the rotating device 9 can also drive the gripping device 10 to rotate. Thereby, the raising, lowering, and rotation of the grasping apparatus 10 are simultaneously achieved. When coating, the sample is transferred to the designated position of the coating chamber 2 by the sample transfer device, the lifting device 8 drives the gripping device 10 to move downwards, the gripping device 10 grips the sample on the sample transfer device, the lifting device 8 drives the gripping device 10 to move upwards, when the lifting device rises to the designated position, coating is started, and the rotating device 9 drives the gripping device 10 to rotate, so that the uniformity of coating of the sample is ensured.

Referring to fig. 1, the sample transfer device includes a transmission rod assembly 6, a fixed end 3 and at least one support frame 4, the fixed end 3 is disposed on the sidewall of the transfer chamber 1, one end of the transmission rod assembly 6 is fixedly connected to the fixed end 3, and the support frame 4 is disposed below the transmission rod assembly 6 and is used for supporting the transmission rod assembly 6, so as to prevent the transmission rod assembly from sagging due to too large stress and affecting the transfer precision.

In this embodiment, the transfer rod assembly 6 includes a fixed rod 61 and a sliding rod 62, the fixed rod 61 and the sliding rod 62 are circular rods, the sliding rod 62 is sleeved on the fixed rod 61 and slidably connected with the fixed rod 61, and the sample is transferred to the coating chamber 2 through the sliding rod 62.

In other embodiments, the conveying rod assembly 6 may be a structure with a sliding groove matched with a guide rail, and the function of transmission can also be realized.

It should be understood that the support frame 4 is disposed below the conveyor bar assembly 6 such that the support frame 4 abuts the conveyor bar assembly 6 and the conveyor bar assembly 6 is slidably coupled to the support frame 4 without limiting movement of the conveyor bar assembly 6. In this embodiment, the number of the supporting frames 4 may be plural, and the plural supporting frames may further improve the stability of the conveyance by the conveying rod assembly 6.

Referring to fig. 1, preferably, in the present embodiment, two fixing rods 61 are provided, two fixing rods 61 are respectively fixed on the fixing end 3, the two fixing rods 61 are arranged in parallel, two sliding rods 62 are respectively sleeved on the two fixing rods 61, the two sliding rods 62 are connected together through a connecting plate 21, the coating system further includes a conveying motor 18, the conveying motor 18 is connected with a conveying screw 19, the conveying screw 19 is connected with the connecting plate 21, and the conveying motor 18 rotates the conveying screw 19, so as to push the two sliding rods 62 to move synchronously on the fixing rods 61. The two fixing rods 61 and the two sliding rods 62 can further improve the bearing capacity and further improve the stability of transmission.

As shown in fig. 1, 4 and 5, the coating system further includes a tray 5, the tray 5 is used for placing a sample, a supporting ring 7 is arranged at the extending end of the sliding rod 62, the tray 5 can be placed on the supporting ring 7, the tray 5 and the supporting ring 7 form a clamping connection, the placing reliability is guaranteed, and shaking during the conveying process is avoided.

Referring to fig. 1 and 5, a positioning groove 51 is formed in the tray 5, a positioning block 71 is arranged on the ring holder 7 and is matched with the positioning groove 51 formed in the tray 5, when the tray 5 is placed on the ring holder 7, the positioning block 71 formed in the ring holder 7 is matched with the positioning groove 51 formed in the tray 5, so that the position accuracy of the tray 5 placed on the ring holder 7 is ensured, and the sample can be accurately grabbed by the grabbing device 10.

Referring to fig. 2, the lifting device 8 includes a fixed shaft 81, a lifting shaft 82, a connecting member 83 and a lifting motor 84, the fixed shaft 81 is a circular shaft disposed on the top wall of the film coating chamber 2 and extending downward, the lifting shaft 82 is disposed on the fixed shaft 81, and the lifting shaft 82 and the fixed shaft 81 are slidably connected. The lifting motor 84 is arranged at one side of the lifting shaft 82, the rotating shaft 92 line of the lifting motor 84 is parallel to the axial direction of the lifting shaft 82, and the lifting motor 84 is connected with the lifting shaft 82 through the connecting piece 83, so that the lifting motor 84 transmits power to the lifting shaft 82 through the connecting piece 83 to drive the lifting shaft 82 to move on the fixed shaft 81.

In this embodiment, the lifting motor 84 is connected with a lifting screw, the lifting screw is connected with the lifting shaft 82 through a connecting piece 83, one end of the connecting piece 83 is connected with the lifting screw in a threaded manner, and the other end of the connecting piece 83 is fixedly connected with the lifting shaft 82, so that when the motor drives the lifting screw to rotate, the connecting piece 83 is driven to move up and down on the lifting screw, the lifting shaft 82 fixedly connected with the other end of the connecting piece 83 moves up and down synchronously with the connecting piece 83, and the lifting shaft 82 moves on the fixed shaft 81.

It should be understood that, in the present embodiment, the structure for driving the lifting shaft 82 to move up and down may also be in other forms, for example, a rack is disposed on the lifting shaft 82, a gear is disposed on the lifting motor 84, and the lifting movement of the lifting shaft 82 can also be realized through a connection manner of the gear and the rack; other common mechanical structures for converting the rotational motion of the motor into the linear motion may be adopted, and are not particularly limited herein.

Referring to fig. 2, the rotating device 9 includes a rotating motor 91 and a rotating shaft 92, the rotating shaft 92 is sleeved on the lifting shaft 82, the rotating shaft 92 is connected with the lifting shaft 82 through a bearing, gear teeth are arranged on the outer side of the rotating shaft 92, a gear is arranged on the rotating motor 91, the gear on the rotating motor 91 is meshed with the gear teeth on the outer side of the rotating shaft 92, and when the rotating motor 91 rotates, the rotating shaft 92 is driven to rotate on the lifting shaft 82, so as to realize the rotating function. Meanwhile, the rotating motor 91 is fixed on the lifting shaft 82, so that the displacement of the connection relationship between the rotating motor 91 and the lifting shaft 82 is avoided when the lifting shaft 82 performs lifting motion.

It should be understood that, in the present embodiment, the rotation of the rotating shaft 92 may also be realized by other mechanical structures, for example, a driven wheel is disposed outside the rotating shaft 92, a driving wheel is disposed on the rotating motor 91, and the rotation of the rotating shaft 92 may also be realized by a belt wheel transmission, which is not limited in particular. It should be noted that the rotating motor 91 should move synchronously with the lifting shaft 82 to avoid the connection between the rotating motor 91 and the rotating shaft 92 from being misaligned.

Referring to fig. 2 and 3, the gripping device 10 includes a connecting frame 11 and a gripping member 12, one end of the connecting frame 11 is fixedly connected to the rotating device 9, the other end of the connecting frame 11 is connected to the gripping member 12, the gripping member 12 is used for the tray 5 on the support ring 7 of the sample transfer device, during the gripping process, the lifting device 8 drives the rotating device 9 and the gripping device 10 to move downward, and after the specified position is reached, the gripping member 12 grips the tray 5 on the support ring 7, so as to complete the gripping operation.

Preferably, the grabbing member 12 comprises a grabbing ring 121 and grabbing hooks 122, the grabbing ring 121 is a hollow ring structure, the grabbing hooks 122 are arranged at the bottom of the grabbing ring 121, and the docking hooks 52 matched with the grabbing hooks 122 are arranged on corresponding positions on the tray 5. When grabbing, the grabbing hook 122 is matched with the butt-joint hook 52, so that the tray 5 is grabbed, and then the sample in the tray 5 is coated.

Referring to fig. 4 and 5, preferably, in this embodiment, the grabbing hook 122 is L-shaped, the tray 5 is provided with a docking slot 20, the docking hook 52 is disposed on a side wall of the docking slot 20, the docking slot 20 is sufficient for the grabbing hook 122 to enter, during grabbing, the grabbing hook 122 first enters the docking slot 20, and the rotating device 9 drives the grabbing ring 121 to rotate clockwise by a corresponding angle, so that the grabbing hook 122 and the docking hook 52 are engaged to ensure reliable docking. Conversely, when the grabbing member 12 needs to release the tray 5, the rotating device 9 drives the grabbing ring 121 to rotate counterclockwise by a corresponding angle, so that the grabbing hook 122 and the docking hook 52 are misaligned to release the docking, thereby completing the releasing of the grabbing member 12 from the tray 5.

As shown in fig. 5, preferably, in order to increase the stability after grabbing, three grabbing hooks 122 are uniformly distributed along the circumferential direction of the grabbing ring 121, that is, at intervals of 120 °, and three grabbing rings 121 matched with the grabbing hooks 122 are correspondingly arranged on the tray 5. Therefore, synchronous grabbing is performed from three directions simultaneously, stability of the grabbing piece 12 after grabbing the tray 5 is guaranteed, and phenomena such as inclination are avoided.

As shown in fig. 4, preferably, the bottom surface of the docking hook 52 is provided with a protrusion 521 protruding outward, the top surface of the grabbing hook 122 is provided with a groove 123 matching with the protrusion 521, and when the docking hook 52 is matched with the grabbed object, the protrusion 521 on the docking hook 52 is embedded into the groove 123 of the grabbing hook 122, so that the docking hook 52 is prevented from sliding after being matched with the grabbing hook 122, and the grabbing firmness is further improved.

As shown in fig. 2, the coating system further includes a heating lamp 13, the heating lamp 13 is disposed at the bottom of the elevating device 8, and the heating lamp 13 is used for heating the sample in the tray 5, thereby improving the coating quality of the sample. Because the rotating device 9 is arranged on the lifting device 8, one end of the connecting frame 11 is fixedly connected with the rotating device 9, and the other end is connected with the grabbing piece 12, after the grabbing piece 12 grabs the tray 5, the distance between the sample on the tray 5 and the heating lamp 13 cannot change along with the lifting movement of the lifting device 8, and the heating lamp 13 is ensured to continuously heat the sample.

Preferably, the heating lamps 13 are disposed at the bottom of the fixed shaft 81, the fixed shaft 81 is hollow, and the side wall of the fixed shaft 81 is provided with the lead holes 17, so that a power line can be conveniently inserted into the fixed shaft 81 from the lead holes 17, and the power line is electrically connected to the heating lamps 13 at the bottom of the fixed shaft 81, so as to provide power for the heating lamps 13 without hindering the movement of the lifting shaft 82 on the fixed shaft 81. Among them, the heating lamp 13 is preferably an IR heating lamp 13.

In the description herein, references to the terms "an embodiment," "one embodiment," and "one implementation," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or implementation is included in at least one embodiment or example implementation of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or implementation. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.

Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A coating system, comprising:

the device comprises a chamber structure, a coating device and a control device, wherein the chamber structure comprises a transfer chamber (1) and a coating chamber (2);

the valve device is arranged between the transfer chamber (1) and the coating chamber (2), and is suitable for isolating or communicating the transfer chamber (1) and the coating chamber (2);

a sample transfer device disposed in the transfer chamber (1), the sample transfer device being adapted to transfer the sample from the transfer chamber (1) to the coating chamber (2) and to retrieve the sample from the coating chamber (2);

the multifunctional base is arranged in the coating chamber (2) and comprises a lifting device (8), a rotating device (9) and a grabbing device (10), the rotating device (9) is arranged on the lifting device (8), the grabbing device (10) is connected with the rotating device (9), the grabbing device (10) is suitable for grabbing the sample from the sample transfer device or putting the sample back to the sample transfer device, the lifting device (8) is suitable for driving the grabbing device (10) to move up and down, and the rotating device (9) is suitable for driving the grabbing device (10) to rotate.

2. The plating system according to claim 1, wherein the sample transfer device comprises a transfer rod assembly (6), a fixed end (3), and at least one support frame (4), the fixed end (3) is fixedly connected with the transfer chamber (1), one end of the transfer rod assembly (6) is fixedly connected with the fixed end (3), the other end of the transfer rod assembly (6) is suitable for telescopic movement relative to the fixed end (3), the support frame (4) is arranged below the transfer rod assembly (6), and the support frame (4) is suitable for supporting the transfer rod assembly (6).

3. The plating system according to claim 2, further comprising a tray (5), wherein the sample is suitable for being placed on the tray (5), a supporting ring (7) suitable for placing the tray (5) is arranged at one end of the conveying rod assembly (6) far away from the fixed end (3), and the tray (5) is in clamping connection with the supporting ring (7).

4. The coating system according to claim 3, wherein the ring (7) is provided with a positioning groove (51), the tray (5) is provided with a positioning block (71) which is matched with the positioning groove (51), and the positioning block (71) is suitable for forming a clamping connection with the positioning groove (51) when the tray (5) is connected with the ring (7).

5. The coating system according to claim 1, wherein the lifting device (8) comprises a fixed shaft (81), a lifting shaft (82), a connecting member (83) and a lifting motor (84), the fixed shaft (81) is fixedly connected with the coating chamber (2), the lifting shaft (82) is sleeved on the fixed shaft (81), the rotation axis of the lifting motor (84) is parallel to the axis of the lifting shaft (82), the lifting motor (84) is connected with the lifting shaft (82) through the connecting member (83), and the lifting motor (84) is suitable for driving the lifting shaft (82) to lift relative to the fixed shaft (81).

6. The coating system according to claim 5, wherein the rotating device (9) comprises a rotating motor (91) and a rotating shaft (92), the rotating shaft (92) is sleeved on the lifting shaft (82), the rotating motor (91) is suitable for driving the rotating shaft (92) to rotate around the lifting shaft (82), and the grabbing device (10) is fixedly connected with the rotating shaft (92).

7. The coating system according to claim 3, wherein the gripping device (10) comprises a connecting frame (11) and a gripping member (12), one end of the connecting frame (11) is fixedly connected with the rotating device (9), the other end of the connecting frame (11) is connected with the gripping member (12), and the gripping member (12) is suitable for gripping the tray (5).

8. The coating system according to claim 7, wherein the grab member (12) comprises a grab ring (121) and a grab hook (122) provided on the grab ring (121), the number of the grab hook (122) is at least one, the tray (5) is provided with a docking hook (52) mating with the grab hook (122), and the grab hook (122) is adapted to be connected with the docking hook (52).

9. The plating system of claim 8, wherein a protrusion (521) is disposed at the bottom of the docking hook (52), a groove (123) matched with the protrusion (521) is disposed at the top of the grabbing hook (122), and the protrusion (521) and the groove (123) form a snap-fit connection.

10. The plating system according to claim 8, further comprising a heating lamp (13), wherein the heating lamp (13) is disposed at the bottom of the lifting device (8), and the heating lamp (13) is located above the gripping ring (121), and the heating lamp (13) is adapted to heat the sample in the tray (5) after the gripping hook (122) grips the tray (5).

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