CN217809657U - Graphite boat piece and graphite boat containing same - Google Patents
Graphite boat piece and graphite boat containing same Download PDFInfo
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- CN217809657U CN217809657U CN202220769153.2U CN202220769153U CN217809657U CN 217809657 U CN217809657 U CN 217809657U CN 202220769153 U CN202220769153 U CN 202220769153U CN 217809657 U CN217809657 U CN 217809657U
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- graphite boat
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Abstract
The utility model discloses a graphite boat piece and a graphite boat containing the graphite boat piece, wherein the graphite boat piece comprises a boat piece body and two electrode connecting plates for connecting electrodes, and the two electrode connecting plates are respectively arranged at two sides of the boat piece body; the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting with other graphite boat pieces; the bearing part comprises a plurality of bearing positions, and clamping holes for installing graphite clamping points are formed in the plurality of bearing positions; the graphite boat comprises a connecting part and is characterized in that the connecting part is provided with a connecting hole for accommodating the connecting rod, the connecting part is provided with a space avoiding part for avoiding the spacer bush, and after the graphite boat is assembled, the space avoiding part corresponds to the connecting hole on the graphite boat piece of the opposite electrode in position. The graphite boat piece can be suitable for deposition of a non-conductive film and a conductive film.
Description
Technical Field
The utility model relates to a solar wafer production technical field, concretely relates to graphite boat piece and contain graphite boat of this graphite boat piece.
Background
The graphite boat is a bearing tool for carrying out film deposition on the surface of a polycrystalline or monocrystalline silicon wafer treated by texturing, diffusion and other processes in a plasma enhanced chemical vapor deposition tube furnace by adopting a plasma enhanced chemical vapor deposition process. The existing graphite boat comprises a plurality of graphite boat pieces, a plurality of graphite cushion blocks, a plurality of graphite boat feet, a plurality of ceramic rods, a plurality of graphite rods, a ceramic sleeve and a graphite nut; because one of the two adjacent graphite boat pieces is connected with the negative electrode of the power supply, and the other is connected with the positive electrode of the power supply, the two adjacent graphite boat pieces are connected together through the ceramic rod and the ceramic sleeve, and the conduction of the two adjacent graphite boat pieces is prevented. In the graphite boat, the deposited film is not conductive, and after the film to be deposited is a conductive material, the deposited conductive film is attached to the surfaces of the ceramic rod and the ceramic sleeve, so that two adjacent graphite boat pieces are conducted, and the requirements of the plasma enhanced chemical vapor deposition process are not met, so that the existing graphite boat pieces have great defects, and improvement is needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's not enough, provide a graphite boat piece, this graphite boat piece not only can be applicable to the film deposit that does not electrically conduct, can be applicable to electrically conductive film deposit moreover.
Another object of the present invention is to provide a graphite boat comprising the above graphite boat piece.
The utility model provides an above-mentioned technical problem's technical scheme be:
a graphite boat piece comprises a boat piece body and an electrode connecting plate for connecting electrodes, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting other graphite boat pieces; the graphite boat is characterized in that the connecting part is provided with a space avoiding part for avoiding the spacer bush, and the space avoiding part corresponds to the connecting hole on the graphite boat piece of the opposite electrode after the graphite boat is assembled.
The working principle of the graphite boat piece is as follows:
when assembling the graphite boat, the connecting rod penetrates through the connecting hole of the graphite boat piece, and the positive graphite boat piece and the negative connecting piece are arranged in a staggered mode sequentially, so that a plurality of graphite boat pieces are connected; the spacer bush is arranged between the graphite boat pieces with the same polarity and sleeved on the connecting rod, one end of the spacer bush is tightly propped against one of the graphite boat pieces, and the other end of the spacer bush is tightly propped against the other graphite boat piece, so that the graphite boat pieces with the same polarity are fixedly connected at intervals of the length of the spacer bush. In the graphite boat, the positive graphite boat pieces and the negative graphite boat pieces are arranged in a staggered manner, so that after the graphite boat pieces with the same polarity are connected by the spacer sleeves, the spacer sleeves can cross over the graphite boat pieces with opposite polarities. When a film is deposited, in the process of depositing a film, the conductive film can be deposited on the spacer bush to cause the spacer bush to be conductive, and the arrangement of the clearance part enables the graphite boat piece of the opposite electrode to avoid contacting with the spacer bush, so that the polarities of the two adjacent graphite boat pieces are opposite; for the deposited film of the non-conductive material, in the deposition process, the deposition of the film can not lead to the conduction of the spacer sleeve, and whether the clearance parts are arranged or not can ensure that the polarities of the two adjacent graphite boat pieces are opposite, so that the clearance parts are arranged on the graphite boat pieces, the graphite boat piece can be suitable for both the film of the deposited conductive material and the film of the non-conductive material, the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
The utility model discloses a preferred scheme, the electrode connecting plate has two, two the electrode connecting plate sets up the both sides at the boat piece body respectively.
In a preferred embodiment of the present invention, the connecting portion includes an upper connecting portion located above the boat body and a lower connecting portion located below the boat body; the upper connecting part is provided with a plurality of connecting holes and a plurality of avoiding parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of avoiding parts.
According to a preferred scheme of the utility model, a plurality of connecting holes are uniformly distributed on the connecting part along the length direction of the boat sheet body; the plurality of clearance parts are uniformly distributed on the connecting part, and the plurality of connecting holes and the clearance parts are arranged in a staggered manner.
The utility model discloses a preferred scheme, keep away the vacancy and be broken limit hole.
The utility model discloses a preferred scheme, the bearing part includes a plurality of positions of bearing, and is a plurality of bear and be equipped with the screens hole that is used for installing the graphite stuck point on the position.
Preferably, the bearing position is arranged in the middle of the boat body and between the upper connecting part and the lower connecting part; the bearing positions are uniformly arranged along the length direction of the boat sheet body.
The utility model discloses a preferred scheme, still be equipped with the rectangular hole on bearing the weight of the position, the screens hole sets up around the rectangular hole.
The utility model discloses a preferred scheme sets up three screens hole on each bears the weight of the position, in the three screens hole, including setting up in the support screens hole that is located the rectangular hole below and setting up the side screens hole in the rectangular hole both sides.
In a preferred embodiment of the present invention, the graphite boat piece comprises an anode graphite boat piece connected to the positive electrode and a cathode graphite boat piece connected to the negative electrode; in the positive graphite boat piece, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged on two sides of the boat piece body and are positioned at the upper part of the boat piece body; in the negative graphite boat piece, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat piece body and are positioned at the lower part of the boat piece body.
A graphite boat comprises a boat sheet assembly and a connecting structure for connecting the boat sheet assembly; the boat piece assembly comprises the graphite boat piece, the graphite boat piece comprises a plurality of positive graphite boat pieces and a plurality of negative graphite boat pieces, and the positive graphite boat pieces and the negative graphite boat pieces are arranged in a staggered mode;
the connecting structure comprises a graphite nut, a spacer bush and a ceramic connecting rod, the ceramic connecting rod penetrates through a connecting hole in graphite boat pieces with the same polarity, the spacer bush is sleeved on the ceramic connecting rod and is positioned between adjacent graphite boat pieces with the same polarity, and the spacer bush is positioned at a clearance part on the graphite boat pieces with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod to connect and fix the boat piece assembly.
Compared with the prior art, the utility model following beneficial effect has:
1. the utility model discloses a graphite boat piece is through keeping away the vacancy in setting up on the boat piece body to can avoid the spacer sleeve between the graphite boat piece of opposite polarity, when the deposit coating film, no matter coating material is electrically conductive or non-conductive, graphite boat piece can all avoid the graphite boat piece contact with the opposite polarity, thereby can guarantee that polarity is opposite between the adjacent graphite boat piece, accords with the principle requirement of graphite boat deposit coating film.
2. The utility model discloses a graphite boat has set up the spacer sleeve between the graphite boat piece between the same polarity and has replaced traditional insulating cover, owing to set up on the graphite boat piece and kept away the vacancy, graphite boat piece staggers with the spacer sleeve, consequently the spacer sleeve does not influence the normal use of graphite boat under the electrically conductive condition yet, and the material of choosing of spacer sleeve is more diversified, can select conducting material also can select non-conducting material.
Drawings
Fig. 1 to 5 are schematic views showing a first embodiment of the present invention, in which fig. 1 is a front view of a positive graphite boat piece, fig. 2 is a front view of a negative graphite boat piece, fig. 3 is a front view of a middle graphite boat piece, and fig. 4 is a front view of an outer graphite boat piece; FIG. 5 is a perspective view of a graphite boat.
Fig. 6 to 10 are schematic views of a second embodiment of the present invention, wherein fig. 6 is a front view of a negative graphite boat piece, fig. 7 is a front view of a positive graphite boat piece, fig. 8 is a front view of a middle graphite boat piece, fig. 9 is a front view of an outer graphite boat piece, and fig. 10 is a perspective view of a graphite boat.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
Example 1
Referring to fig. 1 to 5, a graphite boat sheet comprises a boat sheet body 1 and an electrode connecting plate for connecting electrodes, wherein the boat sheet body 1 comprises a bearing part 2 for bearing a silicon wafer and a connecting part 3 for connecting with other graphite boat sheets; the graphite boat is characterized in that a connecting hole 5 used for accommodating a connecting rod is formed in the connecting portion 3, a space avoiding portion 6 used for avoiding the spacer bush 14 is formed in the connecting portion 3, and after the graphite boat is assembled, the space avoiding portion 6 corresponds to the connecting hole 5 in the graphite boat piece of the opposite electrode in position.
Referring to fig. 1-5, there are two electrode connecting plates, and the two electrode connecting plates are respectively arranged on two sides of the boat sheet body 1.
Referring to fig. 1 to 5, the connecting portion 3 includes an upper connecting portion 3-1 located above the boat sheet body 1 and a lower connecting portion 3-2 located below the boat sheet body 1; wherein, the upper connecting part 3-1 is provided with a plurality of connecting holes 5 and a plurality of avoiding parts 6; the lower connecting part 3-2 is also provided with a plurality of connecting holes 5 and a plurality of avoiding parts 6. The connecting parts 3 are arranged, and when the graphite boat pieces are connected, the upper connecting parts 3-1 and the lower connecting parts 3-2 are respectively provided with the connecting holes 5, so that the upper parts and the lower parts of the graphite boat pieces are both provided with connecting rods to penetrate through, namely, the upper parts and the lower parts are both connected, and the connection is reliable, so that the graphite boat is more stably assembled.
Referring to fig. 1 to 5, along the length direction of the boat body 1, a plurality of connecting holes 5 are uniformly arranged on the connecting part 3; the plurality of space avoiding parts 6 are uniformly arranged on the connecting part 3, and the plurality of connecting holes 5 and the space avoiding parts 6 are arranged in a staggered mode. Thus, a plurality of connecting holes 5 are arranged, so that a plurality of connecting rods can penetrate in the length direction of the graphite boat piece, and the stability and reliability of the connection of the graphite boat piece are improved; set up a plurality of portions of keeping away 6, just can avoid the connecting rod on the graphite boat piece of opposite polarity, corresponding with the connecting rod on the boat piece body 1 of opposite polarity, this purpose all is when making graphite boat piece assemble the graphite boat promptly, has many connecting rods to connect in the length direction of graphite boat, improves the holistic stability of graphite boat and reliability.
Referring to fig. 1 to 5, the clearance portion 6 is a broken edge hole. The edge breaking hole with the structure is arranged, and the air avoiding part 6 is arranged on the upper part and the lower part of the boat sheet body 1, so that the distance between the outer edge of the hole and the outer boundary of the boat sheet body 1 is very small if the whole hole is arranged, the strength of the part is weak, on one hand, when the edge breaking hole is processed, the boat sheet body 1 is easy to crack, on the other hand, the boat sheet body 1 is easy to crack when the graphite boat is carried and assembled, and the manufacturing cost is increased. The blank avoiding part 6 is arranged as a broken edge hole, so that the problems can be avoided, and the production cost is reduced; the hollow portion 6 may also be a hole with a closed periphery, and the shape may be circular, square or other shapes.
Referring to fig. 1 to 5, the bearing part 2 includes a plurality of bearing positions, and a plurality of clamping holes 4 for installing graphite clamping points 10 are formed in the bearing positions.
Referring to fig. 1-5, the bearing position is arranged in the middle of the boat body 1 and between the upper connecting part 3-1 and the lower connecting part 3-2; the plurality of bearing positions are uniformly arranged along the length direction of the boat sheet body 1. The plurality of bearing positions are arranged, and each bearing position can be loaded with one silicon wafer, so that a plurality of silicon wafers can be loaded in the length direction of one graphite boat piece, namely, once, a plurality of silicon wafers can be deposited and coated, and the efficiency of depositing and coating the film on the silicon wafers is improved.
Referring to fig. 1-5, a rectangular hole 7 is further formed in the carrying position, and the position-locking hole 4 is formed around the rectangular hole 7. The bearing position with the structure is arranged, so that in the process of depositing and coating, the rectangular hole 7 effectively reduces the contact area between the graphite boat piece and the silicon wafer, and reduces the abnormity generated in the coating process, such as different film thicknesses, color difference and the like; on the other hand, the rectangular holes 7 are arranged on the bearing positions, so that the weight of the graphite boat piece can be greatly reduced, and meanwhile, the structural strength of the graphite boat piece is not influenced, and multiple purposes are achieved.
Referring to fig. 1-5, three retaining holes 4 are formed in each carrying position, and each retaining hole 4 includes a supporting retaining hole 4 disposed below a rectangular hole 7 and side retaining holes 4 disposed on two sides of the rectangular hole 7. Set up above-mentioned screens hole 4, when assembling the graphite boat, install graphite stuck point 10 respectively on supporting screens hole 4 and side screens hole 4, like this, support graphite stuck point 10 in screens hole 4 and be used for supporting the weight of silicon chip, graphite stuck point 10 in side screens hole 4 is used for restricting the left and right directions of silicon chip, after the silicon chip loads to bearing the weight of position, has three support point to support the silicon chip in other words, the loading of silicon chip is safe and reliable.
Referring to fig. 1 to 5, the graphite boat piece includes a positive graphite boat piece 17 for connection with a positive electrode and a negative graphite boat piece 18 for connection with a negative electrode; in the positive graphite boat piece 17, the electrode connecting plates are positive electrode connecting plates 8, and the two positive electrode connecting plates 8 are respectively arranged on two sides of the boat piece body 1 and are positioned at the upper part of the boat piece body 1; in the negative graphite boat piece 18, the electrode connecting plates are negative electrode connecting plates 9, and the two negative electrode connecting plates 9 are arranged on two sides of the boat piece body 1 and are positioned at the lower part of the boat piece body 1. By adopting the graphite boat piece with the structure, when the graphite boat is assembled, the positive electrode graphite boat piece 17 and the negative electrode graphite boat piece 18 are sequentially arranged in a staggered manner, so that the positive electrode connecting plate 8 is positioned at the upper part of the graphite boat, and the negative electrode connecting plate 9 is positioned at the lower part of the graphite boat, thereby facilitating the connection of the graphite boat with the positive electrode and the negative electrode respectively.
Referring to fig. 1-5, a graphite boat includes boat components and connecting structures for connecting the boat components; the boat piece assembly comprises the graphite boat piece, the graphite boat piece comprises a plurality of positive graphite boat pieces 17 and a plurality of negative graphite boat pieces 18, and the positive graphite boat pieces 17 and the negative graphite boat pieces 18 are arranged in a staggered mode;
the connecting structure comprises a graphite nut 13, a spacer bush 14 and a ceramic connecting rod 16, wherein the ceramic connecting rod 16 penetrates through a connecting hole 5 on the graphite boat pieces with the same polarity, the spacer bush 14 is sleeved on the ceramic connecting rod 16 and is positioned between the adjacent graphite boat pieces with the same polarity, and the spacer bush 14 is positioned at a space avoiding part 6 on the graphite boat pieces with opposite polarities; the graphite nuts 13 are locked at two ends of the ceramic connecting rod 16 to connect and fix the boat assembly.
Referring to fig. 1 to 5, the working principle of the graphite boat piece is as follows:
when assembling the graphite boat, the connecting rod passes through the connecting hole 5 of the graphite boat piece, and the positive graphite boat piece 17 and the negative connecting piece are arranged in a staggered manner in sequence, so that a plurality of graphite boat pieces are connected; wherein, set up spacer bush 14 between the graphite boat piece of the same polarity, this spacer bush 14 cover is established on the connecting rod to one end supports tightly one of them graphite boat piece, and the other end supports tightly another graphite boat piece, thereby the graphite boat piece of the same polarity is according to the interval fixed connection of spacer bush 14 length. In the graphite boat, the positive pole graphite boat piece 17 and the negative pole graphite boat piece 18 are arranged in a staggered way, so that after the graphite boat pieces with the same polarity are connected by the spacer bush 14, the spacer bush 14 can cross over the graphite boat piece with the opposite polarity, and because the connecting part 3 of the graphite boat piece is provided with the space avoiding part 6, and the position of the space avoiding part 6 corresponds to the position of the connecting hole 5 on the graphite boat piece with the opposite polarity, after the graphite boat is assembled, the spacer bush 14 can not be connected with the graphite boat piece with the opposite polarity. During film deposition, for a deposited film of a conductive material, in the process of film deposition and coating, the conductive film can be deposited on the spacer bush 14 to cause the spacer bush 14 to be conductive, and the arrangement of the clearance part 6 enables the graphite boat pieces of the opposite electrodes to avoid contacting with the spacer bush 14, so that the polarities of the two adjacent graphite boat pieces are opposite; for the deposited film of the non-conductive material, in the deposition process, the spacer bush 14 is not caused to be conductive by the deposition of the film, and whether the clearance parts 6 are arranged or not can ensure that the polarities of the two adjacent graphite boat sheets are opposite, so that the clearance parts 6 arranged on the graphite boat sheets can be suitable for both the film of the deposited conductive material and the film of the non-conductive material, the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
Example 2
Referring to fig. 6 to 10, the difference between the present embodiment and embodiment 1 is that, in the positive electrode graphite boat piece 18, the electrode connecting plate is a positive electrode connecting plate 8, and two positive electrode connecting plates 8 are respectively disposed on two sides of the boat body 1 and located at the lower part of the boat body 1; in the negative graphite boat piece 17, the electrode connecting plates are negative electrode connecting plates 9, and the two negative electrode connecting plates 9 are arranged on two sides of the boat piece body 1 and are positioned on the upper part of the boat piece body 1.
The above is the preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and all are included in the scope of the present invention.
Claims (10)
1. A graphite boat piece comprises a boat piece body and an electrode connecting plate for connecting electrodes, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting other graphite boat pieces; the graphite boat is characterized in that the connecting part is provided with a space avoiding part for avoiding the spacer bush, and the space avoiding part corresponds to the connecting hole on the graphite boat piece of the opposite electrode after the graphite boat is assembled.
2. The graphite boat piece of claim 1, wherein the connecting portions comprise an upper connecting portion located above the boat piece body and a lower connecting portion located below the boat piece body; the upper connecting part is provided with a plurality of connecting holes and a plurality of avoiding parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of avoiding parts.
3. The graphite boat piece of claim 2, wherein a plurality of the connection holes are uniformly arranged on the connection part along the length direction of the boat piece body; the plurality of clearance parts are uniformly distributed on the connecting part, and the plurality of connecting holes and the clearance parts are arranged in a staggered mode.
4. The graphite boat piece of claim 3, wherein the void-avoiding portions are edge-breaking holes.
5. The graphite boat piece of claim 1, wherein the bearing part comprises a plurality of bearing positions, and a plurality of the bearing positions are provided with clamping position holes for installing graphite clamping points.
6. The graphite boat piece of claim 5, wherein the bearing position is arranged at the middle position of the boat piece body and is positioned between the upper connecting part and the lower connecting part; the bearing positions are uniformly arranged along the length direction of the boat body.
7. The graphite boat piece of claim 6, wherein the carrying site is further provided with a rectangular hole, and the clamping site hole is arranged around the rectangular hole.
8. The graphite boat sheet of claim 7, wherein three retaining holes are provided in each of the plurality of load-bearing sites, the three retaining holes including a support retaining hole provided below the rectangular hole and side retaining holes provided on both sides of the rectangular hole.
9. The graphite boat piece of claim 1, wherein the graphite boat piece comprises a positive graphite boat piece for connection with a positive electrode and a negative graphite boat piece for connection with a negative electrode; in the positive graphite boat piece, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged on two sides of the boat piece body and are positioned at the upper part of the boat piece body; in the negative graphite boat piece, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat piece body and are positioned at the lower part of the boat piece body.
10. A graphite boat is characterized by comprising a boat sheet assembly and a connecting structure for connecting the boat sheet assembly; the boat assembly comprises the graphite boat piece of any one of claims 1 to 9, the graphite boat piece comprises a plurality of positive graphite boat pieces and a plurality of negative graphite boat pieces, and the positive graphite boat pieces and the negative graphite boat pieces are arranged in a staggered manner;
the connecting structure comprises a graphite nut, a spacer bush and a ceramic connecting rod, the ceramic connecting rod penetrates through a connecting hole in the graphite boat pieces with the same polarity, the spacer bush is sleeved on the ceramic connecting rod and is positioned between the adjacent graphite boat pieces with the same polarity, and the spacer bush is positioned at a clearance avoiding part on the graphite boat pieces with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod to connect and fix the boat piece assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220769153.2U CN217809657U (en) | 2022-03-31 | 2022-03-31 | Graphite boat piece and graphite boat containing same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220769153.2U CN217809657U (en) | 2022-03-31 | 2022-03-31 | Graphite boat piece and graphite boat containing same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217809657U true CN217809657U (en) | 2022-11-15 |
Family
ID=83979098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220769153.2U Active CN217809657U (en) | 2022-03-31 | 2022-03-31 | Graphite boat piece and graphite boat containing same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217809657U (en) |
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2022
- 2022-03-31 CN CN202220769153.2U patent/CN217809657U/en active Active
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