CN210261986U - Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening - Google Patents
Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening Download PDFInfo
- Publication number
- CN210261986U CN210261986U CN201721188616.1U CN201721188616U CN210261986U CN 210261986 U CN210261986 U CN 210261986U CN 201721188616 U CN201721188616 U CN 201721188616U CN 210261986 U CN210261986 U CN 210261986U
- Authority
- CN
- China
- Prior art keywords
- graphite
- boat
- blackening
- unit
- stuck point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses an improve EL corner and blacken and tubular PERC battery graphite boat that stuck point blackened, including insulating rod and a plurality of unit boat piece, unit boat piece is the platelike body, has the clearance between the adjacent unit boat piece, the insulating rod runs through the periphery of each unit boat piece and connects whole unit boat piece together fixedly, and the tip of graphite boat separates unit boat piece through a plurality of graphite piece, and runs through graphite piece and unit boat piece through the connective rod to connect graphite piece and unit boat piece fixedly; at least one graphite block is a hollow graphite block. The unit boat is provided with a plurality of groups of clamping points for fixing the silicon wafers, each group of clamping points comprises a first clamping point positioned on the upper part, a second clamping point positioned on the bottom part and a third clamping point positioned in the middle part, the first clamping point is positioned at one end close to a furnace mouth of the graphite boat, and the second clamping point and the third clamping point are positioned at one end far away from the furnace mouth of the graphite boat. Adopt the utility model discloses, can reduce PERC battery EL corner blackened and stuck point blackened proportion.
Description
Technical Field
The utility model relates to a graphite boat field especially relates to an improve tubular PERC battery graphite boat that EL corner blackened and stuck point blackened.
Background
The tubular PERC solar cell adopts tubular PECVD coating equipment to deposit a passivation film on the back of a silicon wafer, a process gas outlet hole of the tubular PECVD coating equipment is formed in a furnace mouth, and process gas can be shielded by a graphite block on one side, close to the furnace mouth, of a graphite boat when being discharged, so that the deposition of the passivation film on the silicon wafer on one side, close to the furnace mouth, of the graphite boat is influenced, and the PERC cell generates EL edge blackening and stuck point blackening. The graphite blocks at the two ends of the conventional graphite boat are of solid structures, so that the shielding of process gas is more serious. In addition, because the bottom clamping point and the middle clamping point of the conventional graphite boat are arranged on one side close to the furnace opening, the upper clamping point is arranged on one side far away from the furnace opening, the bottom clamping point and the middle clamping point are blocked by the graphite block, and the blackening ratio of the bottom clamping point is very high.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem still in that, a tubular PERC battery graphite boat is provided, the proportion that PERC battery EL corner blackened and stuck point blackened can be reduced.
In order to solve the technical problem, the utility model provides an improve tubular PERC battery graphite boat that EL corner blackened and stuck point blackened, including insulating rod and a plurality of unit boat piece, unit boat piece is the platelike body, has the clearance between the adjacent unit boat piece, the insulating rod runs through the periphery of each unit boat piece and connects whole unit boat piece together fixedly, and the tip of graphite boat separates unit boat piece through a plurality of graphite blocks, and runs through graphite block and unit boat piece through the connective bar to connect graphite block and unit boat piece fixedly, and at least one graphite block is the hollow graphite block;
the unit boat is provided with a plurality of groups of clamping points for fixing the silicon wafers, each group of clamping points comprises a first clamping point positioned on the upper part, a second clamping point positioned on the bottom part and a third clamping point positioned in the middle part, the first clamping point is positioned at one end close to a furnace mouth of the graphite boat, and the second clamping point and the third clamping point are positioned at one end far away from the furnace mouth of the graphite boat.
As an improvement of the proposal, the graphite boat has two ends which separate the unit boat sheets by hollow graphite blocks.
As an improvement of the proposal, the graphite boat is provided with a hollow graphite block at one end close to the furnace mouth to separate the unit boat sheets.
As an improvement of the scheme, the graphite boat at each end is provided with at least two groups of graphite blocks which are arranged in the vertical direction.
As an improvement of the scheme, the group of graphite blocks positioned at the lower part are hollow graphite blocks.
As an improvement of the above scheme, the group of graphite blocks located below is a hollow graphite block, and the group of graphite blocks located above includes a hollow graphite block and a solid graphite block, and the solid graphite block is used for corresponding to the inductor.
As an improvement of the scheme, the group of graphite blocks positioned above also comprises hollow graphite blocks provided with notches.
As an improvement of the scheme, the hollow graphite block is provided with at least one through hole.
As an improvement of the scheme, the through holes are round holes, elliptical holes, square holes, rectangular holes or rhombic holes;
the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm.
As an improvement of the scheme, the connecting rod is a ceramic rod.
As an improvement of the scheme, the first stuck point, the second stuck point and the third stuck point are distributed in a triangular shape.
Implement the utility model discloses, following beneficial effect has:
the utility model discloses tubular PERC battery graphite boat, the tip of graphite boat separates the unit boat piece through a plurality of graphite piece to run through graphite piece and unit boat piece through the connective bar, with connect graphite piece and unit boat piece fixedly. At least one graphite block is a hollow graphite block, so that shielding of the graphite block on process gas can be reduced, and the proportion of blackening of EL black edges and clamping points of the tubular PERC battery is reduced. The unit boat is provided with a plurality of groups of clamping points for fixing the silicon wafers, each group of clamping points comprises a first clamping point positioned on the upper part, a second clamping point positioned on the bottom part and a third clamping point positioned in the middle part, the first clamping point is positioned at one end close to a furnace mouth of the graphite boat, and the second clamping point and the third clamping point are positioned at one end far away from the furnace mouth of the graphite boat. Because the second stuck point at the bottom is far away from the graphite block at the furnace mouth end, the influence of airflow blockage can be reduced, and the blacking proportion of the stuck point is reduced.
Drawings
FIG. 1 is a perspective view of a graphite boat according to the present invention;
FIG. 2 is a front view of the graphite boat of the present invention;
FIG. 3 is a top view of the graphite boat of the present invention;
FIG. 4 is a schematic view of a first embodiment of a graphite boat at an end near a furnace opening;
FIG. 5 is a schematic view of a first embodiment of a graphite boat at an end near the furnace end;
FIG. 6 is a schematic view of a second embodiment of a graphite boat at an end near a furnace opening;
FIG. 7 is a schematic view of a second embodiment of a graphite boat near the end of the furnace tail.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, 2 and 3, the utility model provides a tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening, which comprises an insulating rod 1 and a plurality of unit boat sheets 2, wherein the unit boat sheets 2 are sheet-shaped bodies, a gap is arranged between the adjacent unit boat sheets 2, the insulating rod 1 penetrates through the periphery of each unit boat sheet 2 to connect and fix all the unit boat sheets together, the end part of the graphite boat separates the unit boat sheets 2 by a plurality of graphite blocks 3, and penetrates through the graphite blocks 3 and the unit boat sheets 2 by a connecting rod 4 to connect and fix the graphite blocks 3 and the unit boat sheets 2; wherein at least one graphite block 3 is a hollow graphite block 3A. The utility model discloses the tip of graphite boat adopts the cavity graphite piece, can reduce graphite piece to the sheltering from of process gas, reduces the EL black border black angle and the proportion that the stuck point blackened of tubular PERC battery.
Specifically, the black edge and the black corner of the EL refers to a blackened edge and corner image of the solar cell after the solar cell is tested by the EL tester. An EL (electroluminescence) tester is used for testing the internal defects of a crystalline silicon solar cell and a crystalline silicon solar cell assembly, can effectively detect whether the cell has broken pieces, hidden cracks, broken grids, scratches, sintering defects, black chips, abnormal coating, mixed blocking of the cell pieces, uneven resistance of the cell pieces and the like, and can judge whether the cell has silicon wafer incoming material abnormality or abnormal process procedures through an EL image.
The graphite boat comprises a furnace mouth end 10 and a furnace tail end 20, when the coating process is operated, the graphite boat is positioned in a furnace tube of PECVD equipment, the furnace mouth end 10 is positioned at the tube opening of the furnace tube, process gas is introduced into the tube from the furnace mouth, the furnace tail end 20 is positioned at the tube tail of the furnace tube, process waste gas is pumped away from the furnace tail, and an electrode in the furnace tube is inserted into an electrode hole at the furnace tail end of the graphite boat.
The unit boat pieces 2 are provided with a plurality of groups of clamping points 6 for fixing the silicon chips, each group of clamping points comprises a first clamping point 61 positioned at the upper part, a second clamping point 62 positioned at the bottom part and a third clamping point 63 positioned in the middle part, the first clamping point 61 is positioned at one end close to the furnace mouth 10 of the graphite boat, and the second clamping point 62 and the third clamping point 63 are positioned at one end far away from the furnace mouth of the graphite boat, namely the furnace tail end 20. The first, second and third stuck points 61, 62, 63 are preferably distributed in a triangular shape. Because the second stuck point 62 at the bottom is far away from the graphite block at the furnace mouth end, the influence of airflow blockage can be reduced, and the black ratio of the stuck point is reduced.
Wherein, the embodiment of the hollow graphite block of the utility model has two kinds of conditions:
referring to fig. 4 and 5, the utility model provides a first embodiment of graphite boat, the both ends of graphite boat are all separated the unit boat piece through cavity graphite piece 3A, that is to say, the fire door and the stove tail both ends of graphite boat are all separated the unit boat piece through cavity graphite piece 3A, can reduce sheltering from of graphite piece to process gas to the at utmost, reduce the proportion of the black angle of the black limit of EL of tubular PERC battery, and at this moment, the clearance rate of the black angle of the black limit of EL is up to 80-90%. It should be noted that the graphite block at the furnace tail needs to be provided with at least two electrode holes 5, and the electrode holes 5 are used for inserting the graphite boat into the electrodes.
Referring to fig. 6 and 7, the present invention provides a second embodiment of the graphite boat, wherein the graphite boat is close to the furnace mouth and the unit boat piece is separated by the hollow graphite block 3A, and the unit boat piece is separated by the solid graphite block 3B at the end close to the furnace tail. However, the graphite block of the furnace tail needs to be provided with at least two electrode holes 5, which electrode holes 5 are used for inserting the graphite boat into the electrodes.
Specifically, the graphite boat at each end is provided with at least two groups of graphite blocks, and the at least two groups of graphite blocks are arranged in the vertical direction. Preferably, the graphite boat at each end is provided with two sets of graphite blocks.
As shown in fig. 4 and 6, at the end of the graphite boat near the furnace opening, two sets of graphite blocks are provided, including a first set of graphite boat 31 located at the upper side and a second set of graphite boat 32 located at the lower side. The graphite blocks of the second group of graphite boats 32 positioned below are provided with supporting legs 3E.
Among them, the first group of graphite boats 31 and the second group of graphite boats 32 have various embodiments, for example:
1. the second group of graphite boats 32 located below are hollow graphite blocks 3A, and the first group of graphite boats 31 located above are solid graphite blocks 3B (not shown in the figure).
2. The second group of graphite boats 32 located below is hollow graphite blocks 3A, and the first group of graphite boats 31 located above includes hollow graphite blocks 3A and solid graphite blocks 3B, and the solid graphite blocks 3B are used to correspond to the inductors. The sensor is arranged on other devices and used for sensing the working state of the graphite boat, so that the automatic operation of the graphite boat is realized (as shown in figures 4 and 6).
The hollow graphite block 3A of the utility model is defined as follows: at least one through hole 3D is arranged on the common graphite block. The shape of the through-hole 3D may be various, such as a circular hole, an elliptical hole, a square hole, a rectangular hole, or a diamond hole, but is not limited thereto. Further, the shape and size of the through holes of the graphite blocks at different positions should be set according to the actual working conditions, and are not exemplified here.
The through holes should be set as large as possible to reduce the shielding of the air flow. However, in order to ensure the desired strength of the hollow graphite block, the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm.
Because the air current shelters from the most serious is the region that the middle graphite piece of one row below corresponds, consequently, blackens and the card point blackens the effect in order to obtain the improvement EL corner of ideal, the utility model discloses this group's graphite boat that will guarantee to be located the below at least, 8 at least graphite pieces are hollow structure.
More preferably, the group of graphite blocks 31 located above further includes a hollow graphite block 3C provided with a notch for releasing stress generated in the working process of the graphite boat, thereby avoiding deformation or damage of the graphite boat. The notches may be linear or curvilinear to accommodate stress relief requirements under different conditions. The hollow graphite block 3C shown in fig. 4 is provided with a notch, and the notch is linear and is communicated with the through hole.
The width of the notch is preferably 2-8mm, so that the stress of the graphite boat caused by temperature difference can be reduced, and the deformation or damage of the graphite boat can be avoided.
As shown in fig. 5 and 7, at the end of the graphite boat near the furnace tail, two sets of graphite blocks are provided, including a third set of graphite boat 33 at the upper side and a fourth set of graphite boat 34 at the lower side. The fourth group of graphite boats 34 located below are provided with graphite blocks having support legs 3E.
When the furnace ends of the graphite boats are also separated from the unit boat sheets by the hollow graphite blocks 3A, the third group of graphite boats 33 and the fourth group of graphite boats 34 have various embodiments, such as:
1. the fourth group 34 of lower graphite boats is hollow graphite blocks 3A, and the third group 33 of upper graphite boats is solid graphite blocks 3B (not shown).
2. The second group of graphite boats 34 positioned below and the third group of graphite boats 33 positioned above comprise hollow graphite blocks 3A and solid graphite blocks 3B, and the solid graphite blocks 3B are provided with electrode holes 5.
More preferably, the graphite blocks 33 and 34 further include a graphite block 3F having a notch, and the notch is used for releasing the stress generated during the operation of the graphite boat, so as to prevent the graphite boat from deforming or breaking.
Furthermore, the connecting rods are ceramic rods and have good insulating effect, so that the graphite blocks 3 and the unit boat pieces 2 are connected and fixed.
The utility model discloses the application method of graphite boat is as follows:
s1, placing solar silicon wafers at corresponding positions of the unit boat wafers, wherein each solar silicon wafer is fixed on the unit boat wafer through a group of clamping points (namely a first clamping point 61 at the upper part, a second clamping point 62 at the bottom part and a third clamping point 63 in the middle part);
s2, placing the graphite boat into a vacuum process quartz tube for film coating;
and S3, when the solar silicon wafer is coated, introducing process gas and turning on a radio frequency power supply, and uniformly depositing a passivation film on the solar silicon wafer.
Because the utility model discloses graphite adopts hollow structure at the graphite piece that is close to fire door one end, and perhaps the graphite piece at both ends all adopts hollow structure, can reduce graphite piece and to the sheltering from of process gas, reduce the black angle in EL black border and the proportion that the stuck point blackened of tubular PERC battery. Through the practice of production application many times, the utility model discloses can reduce to 0.2% by original 5% with the emergence probability that tubular PERC battery's EL black border black angle and stuck point blackened.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. A tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening comprises an insulating rod and a plurality of unit boat sheets, wherein the unit boat sheets are sheet-shaped bodies, gaps are formed between every two adjacent unit boat sheets, the insulating rod penetrates through the periphery of each unit boat sheet to connect and fix all the unit boat sheets together, the tubular PERC battery graphite boat is characterized in that the unit boat sheets are separated by a plurality of graphite blocks at the end part of the graphite boat, the graphite blocks and the unit boat sheets are connected and fixed by the connecting rod penetrating through the graphite blocks and the unit boat sheets, and at least one graphite block is a hollow graphite block;
the unit boat is provided with a plurality of groups of clamping points for fixing the silicon wafers, each group of clamping points comprises a first clamping point positioned on the upper part, a second clamping point positioned on the bottom part and a third clamping point positioned in the middle part, the first clamping point is positioned at one end close to a furnace mouth of the graphite boat, and the second clamping point and the third clamping point are positioned at one end far away from the furnace mouth of the graphite boat.
2. The tubular PERC cell graphite boat for improving EL edge blackening and stuck point blackening of claim 1 wherein the graphite boat is divided into unit boat pieces at both ends by hollow graphite blocks.
3. The tubular PERC cell graphite boat for improving EL edge blackening and stuck point blackening of claim 1 wherein the graphite boat is separated from the unit boat pieces by a hollow graphite block at the end near the furnace opening.
4. The tubular PERC cell graphite boat for improving EL edge blackening and stuck point blackening of claim 1 wherein the graphite boat at each end has at least two sets of graphite blocks, at least two sets of graphite blocks being arranged in a vertical orientation.
5. The tubular PERC cell graphite boat for improving EL corner blackening and stuck point blackening of claim 4, wherein said lower set of graphite blocks is hollow.
6. The tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening of claim 4, wherein the lower set of graphite blocks is a hollow graphite block, and the upper set of graphite blocks comprises a hollow graphite block and a solid graphite block, said solid graphite block being adapted to correspond to an inductor.
7. The tubular PERC cell graphite boat for improving EL corner blackening and stuck point blackening of claim 6 wherein the upper set of graphite blocks further comprises hollow graphite blocks having notches.
8. The tubular PERC cell graphite boat for improving EL corner blackening and stuck point blackening of any one of claims 1 to 7, wherein said hollow graphite block is provided with at least one through hole.
9. The tubular PERC battery graphite boat for improving EL corner blackening and stuck point blackening as claimed in claim 8, wherein said through holes have a shape of a circular hole, an elliptical hole, a square hole, a rectangular hole or a diamond hole;
the distance between the edge of the through hole and the edge of the graphite block is controlled within 5 mm.
10. The tubular PERC cell graphite boat for improving EL corner blackening and stuck point blackening of claim 1, wherein said first stuck point, said second stuck point and said third stuck point are arranged in a triangular shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721188616.1U CN210261986U (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721188616.1U CN210261986U (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210261986U true CN210261986U (en) | 2020-04-07 |
Family
ID=70009491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721188616.1U Active CN210261986U (en) | 2017-09-15 | 2017-09-15 | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210261986U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107641798A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
-
2017
- 2017-09-15 CN CN201721188616.1U patent/CN210261986U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107641798A (en) * | 2017-09-15 | 2018-01-30 | 浙江爱旭太阳能科技有限公司 | Improve the tubular type PERC battery graphite boats that EL corners black and stuck point blacks |
| CN107641798B (en) * | 2017-09-15 | 2024-01-12 | 浙江爱旭太阳能科技有限公司 | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9624595B2 (en) | Electroplating apparatus with improved throughput | |
| CN210261986U (en) | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening | |
| CN210261987U (en) | Tubular PERC battery graphite boat for improving EL edge blackening and stuck point blackening | |
| CN102487091A (en) | Novel back contact solar cell and method for manufacturing the same | |
| DE10340751B4 (en) | Dry etching device, dry etching method and plate used therein | |
| CN107641798B (en) | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening | |
| CN107641799B (en) | Tubular PERC battery graphite boat capable of improving EL corner blackening and stuck point blackening | |
| CN206502866U (en) | A kind of adjustable graphite boat in stuck point position | |
| CN206505900U (en) | A kind of graphite boat of stuck point position optimization | |
| US20160049276A1 (en) | Integrated gas discharge tube and preparation method therefor | |
| CN105785251B (en) | A kind of minority carrier life time detection method of silico briquette | |
| CN107636845A (en) | A kind of secondary printing process and half tone for improving cell plate electrode pulling force | |
| CN209607715U (en) | It is silicon chip film-coated to use graphite boat | |
| CN215896428U (en) | Novel inclined quartz boat | |
| CN210394518U (en) | Graphite boat and PECVD equipment using same | |
| CN204434771U (en) | A kind of crucible of polycrystalline silicon ingot furnace guard plate apparatus | |
| CN108878579B (en) | Preparation method of MWT solar cell cathode with low cost | |
| CN206502864U (en) | A kind of Novel film-coated graphite boat | |
| CN110060951A (en) | One kind is silicon chip film-coated to use graphite boat | |
| CN209880575U (en) | MWT laser drilling mesa | |
| CN101471395B (en) | Reaction chamber structure of solar battery edge-engraving machine | |
| CN203491232U (en) | Graphit boat | |
| CN205177803U (en) | Graphite boat | |
| CN112847851A (en) | Processing method of single crystal silicon rod, silicon wafer, battery piece and photovoltaic module | |
| CN217809657U (en) | Graphite boat piece and graphite boat containing same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |