CN217677749U

CN217677749U - Vacuum coating chamber

Info

Publication number: CN217677749U
Application number: CN202221494947.9U
Authority: CN
Inventors: 王君
Original assignee: Liaoning Zhuoyue Vacuum Equipment Co ltd
Current assignee: Liaoning Zhuoyue Vacuum Equipment Co ltd
Priority date: 2022-06-15
Filing date: 2022-06-15
Publication date: 2022-10-28
Anticipated expiration: 2032-06-15

Abstract

The utility model provides a vacuum coating chamber belongs to filming equipment technical field. The vacuum coating chamber comprises a coating chamber main body, a first door body and a second door body; the coating chamber main part is frame type structure, and the both sides of coating chamber main part all are formed with the opening portion, and the relative setting of first door body and second door body is in the both sides of coating chamber main part, and rotates with the coating chamber main part and be connected to seal or open the opening portion. Through the first door body and the second door body that set up respectively in the both sides of coating film chamber main part to make the first door body and the second door body rotate with coating film chamber main part and be connected, can open first door body or the second door body or open first door body and second door body are whole according to the demand when actual operation, thereby can avoid to a certain extent when putting the limited unable normal opening of the door body that leads to one side in space, the unable normal scheduling problem of getting and maintaining of revolving rack.

Description

Vacuum coating chamber

Technical Field

The utility model belongs to the technical field of filming equipment technique and specifically relates to a vacuum coating room is related to.

Background

In the coating chamber at the present stage, the access of the rotating frame and the maintenance in the coating chamber are mostly realized through a door body formed on one side.

However, the mode of opening the door at one side is limited by the space and the placing direction, and when the space is small and the placing direction is limited, the problems that the door body cannot be completely unfolded, the rotating frame cannot be smoothly transferred, the maintenance and the overhaul are difficult and the like can be caused.

Therefore, it is desirable to provide a vacuum coating chamber to solve the problems of the prior art to some extent.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum coating chamber to solve current vacuum coating chamber to a certain extent and overhaul and maintain inconveniently, and get the lower problem of putting the revolving rack flexibility ratio.

The utility model provides a vacuum coating chamber, which comprises a coating chamber main body, a first door body and a second door body; the coating chamber main body is of a frame structure, open parts are formed on two sides of the coating chamber main body, and the first door body and the second door body are oppositely arranged on two sides of the coating chamber main body and are rotatably connected with the coating chamber main body so as to close or open the open parts.

The bottom wall of the coating chamber main body is provided with a rotating frame driving mechanism, and the rotating frame driving mechanism comprises a driving assembly, a bearing disc and a transmission member; the bearing plate is used for bearing a rotating frame hung with a piece to be coated, the output end of the driving assembly is connected with the transmission member to drive the transmission member to rotate, and the transmission member is connected with the butt joint part of the rotating frame to enable the rotating frame to rotate.

Specifically, a guide groove is formed in the transmission member, the guide groove is sword-shaped, one end of the guide groove penetrates through the edge of the transmission member to form an opening portion, the shape and the size of the butt joint portion are matched with those of the guide groove, and the butt joint portion can enter the guide groove from the opening portion to enable the rotating frame to be connected with the rotating frame driving mechanism.

Furthermore, two parallel slideways are laid on the two sides of the bottom wall of the coating chamber main body and located on the two sides of the transmission member, the slideways extend along the first direction, and the slideways are used for bearing the rotating frame entering the coating chamber main body.

Furthermore, the rotating frame driving mechanism further comprises a lifting assembly, and the lifting assembly can lift the rotating frame and separate from the slide way.

Wherein, the utility model provides a vacuum coating chamber still includes locking mechanical system, locking mechanical system's one end is flexible end, flexible end can be followed vertical direction and stretched out and drawn back, the revolving rack corresponds the locating hole has been seted up to locking mechanical system's position, flexible end can insert in the locating hole, it is right the revolving rack is spacing in the week.

Specifically, the locking mechanism comprises a first locking component, a second locking component and a control component; the first locking component and the second locking component are arranged on two sides of the transmission component oppositely, the control component is arranged on the outer wall surface of the coating chamber main body, and the control component is in communication connection with the first locking component and the second locking component.

Further, the first locking assembly and the second locking assembly respectively comprise a mounting seat, a driving piece, a plug connector and a sleeve; the mounting seat is connected with the coating chamber main body, the driving piece is connected with the mounting seat, and the driving end of the driving piece penetrates through the bottom wall of the coating chamber main body to be connected with the plug connector; the sleeve set up in the coating film room main part, and be formed with and hold the chamber, the drive end with the plug connector all is located hold the intracavity, the plug connector is kept away from the one end of drive end is the toper structure, works as when the drive end extends, the plug connector can stretch out the sleeve with the locating hole is pegged graft.

The film coating chamber comprises a film coating chamber main body, a first door body and a second door body, wherein a first locking mechanism and a second locking mechanism are arranged on the film coating chamber main body; the first locking mechanism is connected with or separated from the first connecting mechanism so as to lock or unlock the first door body; the second locking mechanism is connected with or separated from the second connecting mechanism so as to lock or unlock the second door body.

Specifically, the coating chamber main body, the first door body and the second door body are enclosed to form an octagonal structure, two opposite wall bodies of the octagonal structure form a first functional position, and the first functional position is used for installing an etching mechanism; the etching mechanism comprises an IET etching mechanism and an ion source etching mechanism, and the IET etching mechanism and the ion source etching mechanism are respectively connected with two oppositely-arranged wall bodies of the film coating chamber main body.

Compared with the prior art, the utility model provides a vacuum coating room has following advantage:

the utility model provides a vacuum coating chamber, which comprises a coating chamber main body, a first door body and a second door body; the coating chamber main part is frame type structure, and the both sides of coating chamber main part all are formed with and open the oral area, and the relative both sides that set up in the coating chamber main part of first door body and second door body, and rotate with the coating chamber main part and be connected to seal or open and open the oral area.

From this analysis can know, be frame type structure through making the coating film room main part in this application, make the both sides of coating film room main part all form and open the oral area to open the portion at both sides and correspond and set up the first door body and the second door body, make the first door body all be connected with the rotation of coating film room main part with the second door body, thereby can open the first door body or the second door body wantonly according to the demand.

When the arrangement space is small and the arrangement direction is limited, the door body on one side can not be normally opened. Consequently, through the first door body and the second door body that this application set up, when first door body or second door body blockked that unable the opening, can realize getting of revolving rack and the indoor maintenance of coating film through the door body of opening the opposite side.

When the space is not limited, the first door body and the second door body are opened simultaneously in the process of overhauling and maintaining, so that the detection and the maintenance of a vacuum coating chamber without dead angles can be ensured to a certain extent, the overhauling and maintaining space is improved, and the operation efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of an opened state of a first door body and a second door body in a vacuum coating chamber provided by an embodiment of the present invention;

fig. 2 is a schematic structural view of a vacuum coating chamber according to an embodiment of the present invention, in which a first door and a second door are closed;

FIG. 3 is a partial sectional view of the bottom wall of the vacuum deposition chamber according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a transmission member in a vacuum coating chamber according to an embodiment of the present invention.

In the figure: 1-a film coating chamber main body; 101-an open portion; 102-a first function bit; 2-a first door body; 201-a second function bit; 202-third function bit; 3-a second door body; 4-a carrier tray; 5-a transmission member; 501-a guide groove; 6-a first locking assembly; 601-a mount; 602-a drive member; 603-a plug-in unit; 604-a sleeve; 7-a second locking assembly;

s1-first direction.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application.

In the description of the embodiments of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the present invention are usually placed in when used, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the embodiments of the present application, it should also be noted that, unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "communicated," and "connected" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.

For ease of description, spatial relationship terms such as "above 8230; …," upper "," above 8230; \8230;, "below" and "lower" may be used herein to describe the relationship of one element to another element as illustrated in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.

The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms are also intended to include the plural forms unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.

Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.

The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application. In addition, technical solutions between the embodiments may be combined with each other, but must be based on the realization of the technical solutions by a person skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope claimed in the present application.

As shown in fig. 1 and fig. 2, the utility model provides a vacuum coating chamber, which comprises a coating chamber main body 1, a first door body 2 and a second door body 3; coating film chamber main part 1 is frame type structure, and the both sides of coating film chamber main part 1 all are formed with open portion 101, and first door body 2 and second door body 3 set up in the both sides of coating film chamber main part 1 relatively, and rotate with coating film chamber main part 1 and be connected to seal or open portion 101.

the utility model provides a vacuum coating chamber is frame type structure through making coating chamber main part 1 in this application, makes coating chamber main part 1's both sides all form and opens oral area 101 to open the portion 101 correspondence in both sides and set up first door body 2 and second door body 3, make first door body 2 and second door body 3 all rotate with coating chamber main part 1 and be connected, thereby can open first door body 2 or second door body 3 wantonly according to the demand.

When the arrangement space is small and the arrangement direction is limited, the door body on one side can not be normally opened. Therefore, when any one of the first door body 2 or the second door body 3 is blocked and can not be opened, the opening of the vacuum coating chamber, the taking and placing of the rotary frame and the overhauling and maintenance in the coating chamber can be realized by opening the door body on the other side.

When the space is not limited, the first door body 2 and the second door body 3 are opened simultaneously in the process of overhauling and maintaining, so that the detection and the maintenance of a dead angle in a vacuum coating chamber can be ensured to a certain extent, the overhauling and maintaining space is improved, and the operation efficiency is improved.

It can be understood that, all be equipped with the handrail on first door body 2 and the second door body 3 in this application, and the handrail extends along vertical direction to set up in the lateral part of first door body 2 and second door body 3, thereby can be convenient for operating personnel opens and shuts first door body 2 and second door body 3.

It should be added that, in the present application, the edges of the opening portions 101 at both sides of the coating chamber main body 1 are respectively provided with a sealing ring, and when the first door body 2 and the second door body 3 are in a closed state to close the opening portions 101, the sealing rings can be pressed, so that the sealing degree in the vacuum coating chamber can be ensured to a certain extent.

As shown in fig. 1 and fig. 2, when the first door 2 and the second door 3 are in a state of closing the opening 101, the first door 2, the second door 3 and the film plating chamber body 1 form an octagonal film plating chamber structure, wherein the frame-shaped film plating chamber body 1 occupies two sides thereof, and therefore, the film plating chamber comprises two first functional positions 102, and the first functional positions 102 are used for installing an etching mechanism. Preferably, the two first functional stations 102 in the present application are respectively provided with an IET etching mechanism and an ion source etching mechanism, and through the cooperation of the IET etching mechanism and the ion source etching mechanism, an even etching area with a larger coverage area can be formed, so that a workpiece can be better etched, and the film coating effect of the workpiece can be improved.

Wherein, first door body 2 and second door body 3 occupy wherein trilateral respectively, and wherein two wherein walls of first door body 2 and second door body 3 form second functional position 201, and second functional position 201 is used for installing arc source mechanism, consequently, the vacuum coating room that this application provided has four arc source mechanisms, and preferably, four arc source mechanism intervals in this application set up, consequently, correspondingly, all form third functional position 202 between two arc source mechanisms on the first door body 2 and two arc source mechanisms on the second door body 3, third functional position 202 is used for installing heating mechanism.

Therefore, the vacuum coating chamber provided by the application can form uniform and stable coating space, etching space and heating space through the four arc source mechanisms arranged at intervals, the two heating mechanisms arranged oppositely, and the IET etching mechanism and the ion source etching mechanism arranged oppositely, so that the coating effect can be improved to a certain extent.

It can be understood that, in order to ensure the sealing degree and the operation safety of the vacuum coating chamber, a first locking mechanism and a second locking mechanism are arranged on the coating chamber main body 1, a first connecting mechanism is arranged on the first door body 2 corresponding to the first locking mechanism, and a second connecting mechanism is arranged on the second door body 3 corresponding to the second locking mechanism; the first locking mechanism is connected with or separated from the first connecting mechanism so as to lock or unlock the first door body 2; the second locking mechanism is connected to or separated from the second connecting mechanism to lock or unlock the second door body 3.

First locking mechanism and second locking mechanism can adopt the cylinder in this application, the flexible end of cylinder can be dismantled with first coupling mechanism and second coupling mechanism on the first door body 2 and the second door body 3 and be connected, when needs make the first door body 2 and the second door body 3 seal the portion 101 that opens the mouth, be connected first locking mechanism and second locking mechanism's flexible end and the first coupling mechanism and the second coupling mechanism that correspond, thereby can further compress tightly first door body 2 and the second door body 3 through the shrink of cylinder, and then guarantee the airtight degree of vacuum coating room.

As shown in fig. 3, a rotating stand driving mechanism is arranged on the bottom wall of the coating chamber main body 1 in the present application, and the rotating stand driving mechanism includes a driving assembly, a bearing disc 4 and a transmission member 5; the bearing plate 4 is used for bearing a rotating frame hung with a piece to be coated, the output end of the driving assembly is connected with the transmission member 5 so as to drive the transmission member 5 to rotate, and the transmission member 5 is connected with the butt joint part of the rotating frame so as to enable the rotating frame to rotate.

During operation, the first door body 2 or the second door body 3 on one side is opened, then the rotating frame is pushed into the coating chamber main body 1 through the opening part 101, the rotating frame is located on the bearing plate and is connected with the transmission member 5, and after the first door body 2 or the second door body 3 is closed, the driving assembly can drive the transmission member 5 to rotate, so that the rotating frame is driven to rotate in the vacuum coating chamber, and uniform coating of workpieces is achieved.

Preferably, as shown in fig. 3 and fig. 4, the transmission member 5 in the present application is formed with a guide slot 501, the guide slot 501 is sword-shaped, one end of the guide slot 501 penetrates through the edge of the transmission member 5 to form an opening, the shape and size of the butt-joint portion are matched with the shape and size of the guide slot 501, and the butt-joint portion can enter the guide slot 501 through the opening to connect the turret with the turret driving mechanism.

The entry of the docking portion on the turret can be facilitated by making the guide groove 501 formed in the transmission member 5 in a sword-like shape, and as shown in fig. 4, the side of the guide groove 501 away from the tip end penetrates the edge of the transmission member 5.

In the process of moving the rotating frame into the vacuum coating chamber, the butt joint part of the rotating frame enters the guide groove 501 from the opening part and continues to move along the extending direction of the guide groove 501 until the front end of the butt joint part is abutted against the tip of the guide groove 501. And because guide way 501 in this application is sword-shaped, consequently, when transmission component 5 rotates the butt joint portion that drives the revolving rack and rotates, can have two stress surfaces to can improve the stability of motion and transmission component 5's intensity to a certain extent.

Most of the transfer racks at the present stage need to pass through a transfer trolley in the process of being conveyed into the vacuum coating chamber, and in such a way, the transfer trolley needs to move the transfer racks into the vacuum coating chamber and then put down the transfer racks. However, the transfer trolley enters the vacuum coating chamber and is easily touched with components in the vacuum coating chamber to cause damage, and in such a way, the transfer trolley and a transfer trolley driving mechanism in the vacuum coating chamber cannot be aligned correctly, so that the position of the transfer trolley needs to be adjusted for many times, and the operation efficiency is reduced. Therefore, preferably, two parallel slideways are laid on the bottom wall of the coating chamber main body 1 and on two sides of the transmission member 5, the slideways extend along the first direction S1, and the size of the slideways is the same as that of the bottom wall of the coating chamber main body 1 in the first direction S1.

It can be understood that the pulleys are arranged at the positions, corresponding to the slide ways, of the bottoms of the rotating frames conveyed into the vacuum coating chamber, so that the rotating frames can smoothly reciprocate on the slide ways.

The laid slide way not only can quickly realize the taking out and the feeding in of the rotating frame, but also can ensure that the butt joint part of the rotating frame is accurately opposite to the guide groove 501 of the transmission component 5, thereby improving the working efficiency to a certain extent.

Further preferably, the revolving rack driving mechanism further comprises a lifting assembly, and the lifting assembly can lift the revolving rack and separate from the slide way.

It can be understood that the hoisting assemblies in the application can be a plurality of, and a plurality of hoisting assemblies are uniformly distributed along the circumference of the rotating stand, and the rotating stand can be lifted up or the bearing plate 4, the transmission member 5 and the rotating stand can be lifted up together to be separated from the slide way after the rotating stand is in butt joint with the transmission member 5 through the hoisting assembly price, so that the stable rotation of the rotating stand is realized.

As shown in FIG. 3, the vacuum coating chamber provided by the utility model further comprises a locking mechanism, one end of the locking mechanism is a telescopic end, the telescopic end can stretch out and draw back along the vertical direction, the position of the rotating frame corresponding to the locking mechanism is provided with a positioning hole, and the telescopic end can be inserted into the positioning hole so as to limit the rotating frame in the circumferential direction.

For avoiding when first door body 2 and second door body 3 are opened, operating personnel accident touches the revolving rack and leads to the revolving rack to produce the position drunkenness, the problem of roll-off vacuum coating room even, consequently, this application is through setting up locking mechanical system in the vacuum coating room, and correspondingly, the revolving rack has seted up the locating hole corresponding locking mechanical system's position.

When the rotating frame needs to be locked, the telescopic end extends out and enters the positioning hole of the rotating frame, so that the rotating frame can be limited, and the rotating frame is prevented from moving. When the rotating frame needs to be moved out, the telescopic end is retracted, so that the rotating frame can be quickly moved.

Alternatively, as shown in fig. 3, the locking mechanism in the present application includes a first locking member 6, a second locking member 7, and a control member; the first locking component 6 and the second locking component 7 are oppositely arranged on two sides of the transmission member 5, the control component is arranged on the outer wall surface of the coating chamber main body 1, and the control component is in communication connection with the first locking component 6 and the second locking component 7.

Through the arrangement of the first locking assembly 6 and the second locking assembly 7, the rotating frame can be locked on two sides of the rotating frame at the same time, so that the stability of the rotating frame can be improved to a certain extent.

It should be added that the number of the locking assemblies in the present application can be set and arranged according to specific requirements and layout requirements, and is not limited to the number and arrangement described above.

Preferably, as shown in fig. 4, each of the first locking component 6 and the second locking component 7 includes a mounting seat 601, a driving member 602, a plug 603, and a sleeve 604; the mounting base 601 is connected with the coating chamber body 1, the driving part 602 is connected with the mounting base 601, and the driving end of the driving part 602 penetrates through the bottom wall of the coating chamber body 1 to be connected with the plug connector 603; sleeve 604 sets up in coating chamber main part 1, and is formed with and holds the chamber, and drive end and plug connector 603 all are located and hold the intracavity, and the one end that the drive end was kept away from to plug connector 603 is the toper structure, and when the drive end extended, plug connector 603 can stretch out sleeve 604 and peg graft with the locating hole.

The telescopic end of the driving piece 602 and the plug connector 603 are arranged in the accommodating cavity of the sleeve 604, so that the driving end and the plug connector 603 can be protected to a certain degree, a guiding effect to a certain degree can be achieved, and the problem that the plug connector 603 inclines in the process of reciprocating motion along the vertical direction is avoided.

It should be added here that the driving component 602 in this application is a driving oil cylinder or an air cylinder, the driving oil cylinder or the air cylinder is connected to the film coating chamber main body 1 through the mounting base 601, and the driving oil cylinder or the air cylinder extends and retracts in the vertical direction, so as to drive the plug connector 603 to reciprocate in the vertical direction.

It should be further added that the control assembly in this application includes a controller and a control button, the control button is disposed on the outer wall surface of the film coating chamber main body 1, the control button is in communication connection or line connection with the controller, the controller is in communication connection with the driving oil cylinder or air cylinder, and when the control button is pressed, the controller controls the driving end of the driving oil cylinder or air cylinder to extend, so that the plug connector 603 enters the positioning hole, and the rotating frame is locked.

When the control button is pressed again, the controller controls the driving end of the driving oil cylinder or the air cylinder to contract, so that the plug connector 603 leaves the positioning hole, and the rotating frame is unlocked.

Preferably, the one end that plug connector 603 kept away from the drive end is the toper structure in this application to can play the effect of direction to a certain extent when plug connector 603 gets into to the locating hole.

In operation, when the rotating turret needs to be locked, the driving end of the driving element 602 extends to drive the plug connector 603 to move towards the direction close to the rotating turret and enter the positioning hole of the rotating turret, so that the rotating turret is locked. When the rotating frame needs to be unlocked, the driving end of the driving part 602 is retracted to drive the plug connector 603 to move in the direction away from the rotating frame, and the positioning hole of the rotating frame is removed to unlock the rotating frame.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum coating chamber is characterized by comprising a coating chamber main body, a first door body and a second door body;

the coating chamber main body is of a frame structure, open parts are formed on two sides of the coating chamber main body, and the first door body and the second door body are oppositely arranged on two sides of the coating chamber main body and are rotatably connected with the coating chamber main body so as to close or open the open parts.

2. The vacuum coating chamber of claim 1, wherein the bottom wall of the coating chamber main body is provided with a rotating frame driving mechanism, and the rotating frame driving mechanism comprises a driving assembly, a bearing plate and a transmission component;

the bearing plate is used for bearing a rotating frame hung with a piece to be coated, the output end of the driving assembly is connected with the transmission member to drive the transmission member to rotate, and the transmission member is connected with the butt joint part of the rotating frame to enable the rotating frame to rotate.

3. The vacuum coating chamber of claim 2, wherein the transmission member is formed with a guide slot, the guide slot is sword-shaped, one end of the guide slot penetrates through the edge of the transmission member to form an opening, the shape and size of the butt joint part are matched with those of the guide slot, and the butt joint part can enter the guide slot from the opening to connect the rotating frame with the rotating frame driving mechanism.

4. The vacuum coating chamber of claim 2 wherein two parallel slides are provided on the bottom wall of the coating chamber body and on either side of the drive member, the slides extending in a first direction and being adapted to carry a turret into the coating chamber body.

5. The vacuum coating chamber of claim 4 wherein the turret drive mechanism further comprises a lift assembly capable of lifting the turret off of the slide.

6. The vacuum coating chamber of claim 2, further comprising a locking mechanism, wherein one end of the locking mechanism is a telescopic end, the telescopic end can be stretched in the vertical direction, a positioning hole is formed in the position of the rotating frame corresponding to the locking mechanism, and the telescopic end can be inserted into the positioning hole to limit the rotating frame in the circumferential direction.

7. The vacuum coating chamber of claim 6 wherein the locking mechanism comprises a first locking assembly, a second locking assembly, and a control assembly;

the first locking component and the second locking component are arranged on two sides of the transmission component relatively, the control component is arranged on the outer wall surface of the coating chamber main body, and the control component is in communication connection with the first locking component and the second locking component.

8. The vacuum coating chamber of claim 7 wherein the first and second locking assemblies each comprise a mount, a drive member, a socket member, and a sleeve;

the mounting seat is connected with the coating chamber main body, the driving piece is connected with the mounting seat, and the driving end of the driving piece penetrates through the bottom wall of the coating chamber main body to be connected with the plug connector;

the sleeve set up in the coating film room main part, and be formed with and hold the chamber, the drive end with the plug connector all is located hold the intracavity, the plug connector is kept away from the one end of drive end is the toper structure, works as when the drive end extends, the plug connector can stretch out the sleeve with the locating hole is pegged graft.

9. The vacuum coating chamber of claim 1, wherein a first locking mechanism and a second locking mechanism are arranged on the coating chamber main body, a first connecting mechanism is arranged on the first door body at a position corresponding to the first locking mechanism, and a second connecting mechanism is arranged on the second door body at a position corresponding to the second locking mechanism;

the first locking mechanism is connected with or separated from the first connecting mechanism so as to lock or unlock the first door body;

the second locking mechanism is connected with or separated from the second connecting mechanism so as to lock or unlock the second door body.

10. The vacuum coating chamber of claim 1, wherein the coating chamber main body, the first door body and the second door body are enclosed into an octagonal structure, and two opposite wall bodies of the octagonal structure form a first functional position for installing an etching mechanism;

the etching mechanism comprises an IET etching mechanism and an ion source etching mechanism, and the IET etching mechanism and the ion source etching mechanism are respectively connected with two oppositely-arranged wall bodies of the film coating chamber main body.