CN217655861U - Transfer device and cleaning equipment - Google Patents

Abstract

The utility model belongs to the technical field of the semiconductor manufacturing, a transfer device and cleaning equipment is related to, the transfer device includes: the carrying table is used for carrying the slide glass basket; the drive link mechanisms are arranged into two groups and respectively located on two sides of the bearing platform, and each drive link mechanism comprises a driving piece and a plurality of link assemblies, each link assembly is connected between the driving piece and the bearing platform, the link assemblies are configured to convert reciprocating motion of the driving end of the driving piece into lifting motion of the bearing platform, and the two groups of drive link mechanisms move synchronously. The utility model can complete the transmission without soaking the manipulator in the liquid in the tank, thereby ensuring the cleanness of the manipulator and preventing the liquid between the tank bodies from being polluted; the device can realize the shaking of the slide glass basket, thereby accelerating the reaction in the tank body; the lifting motion amplitude of the manipulator is reduced, the motion stability of the manipulator is improved, and the lifting motion time is shortened.

Description

Transfer device and cleaning equipment

Technical Field

The utility model relates to a semiconductor manufacturing technology field especially relates to transfer device and cleaning equipment.

Background

During the manufacturing process of the wafer, due to the physical or chemical adsorption, the surface of the wafer may be contaminated by some organic matters, metal ions, dust and particles, and the contamination must be removed by cleaning to obtain a qualified product. Because there are many ways in the wafer cleaning process, different slide baskets are used, batch wafers are carried by the slide baskets, and the slide baskets are transplanted into corresponding tanks by a mechanical arm for cleaning.

In the prior art, the cell body is put into with the slide glass basket to the manipulator, and the manipulator can the internal process liquid of adhesion cell for the manipulator can be contaminated, and when the manipulator conveys between a plurality of cell bodies each other, the chemicals can pollute each other in the groove, thereby influences the cleaning performance and the wafer product quality of washing liquid.

SUMMERY OF THE UTILITY MODEL

In view of the defects of the prior art, the present application aims to provide a transfer device and a cleaning apparatus, and aims to solve the problems that a manipulator is easily polluted and chemicals in each tank body are mutually polluted in a wafer cleaning process.

The application provides a transfer device for the washing transfer of slide glass basket includes:

the carrying table is used for carrying the slide glass basket; and

the driving connecting rod mechanisms are arranged in two groups and are respectively positioned on two sides of the bearing platform, each driving connecting rod mechanism comprises a driving piece and a plurality of connecting rod assemblies, the connecting rod assemblies are connected between the driving pieces and the bearing platform, the connecting rod assemblies are configured to convert reciprocating motion of the driving ends of the driving pieces into lifting motion of the bearing platform, and the driving connecting rod mechanisms move synchronously.

According to the transfer device, the driving link mechanism and the receiving platform are arranged, so that the manipulator can complete transfer without soaking in liquid in the tank, the cleanness of the manipulator can be ensured, and the liquid among the tank bodies cannot be polluted by each other; the device can realize the shaking of the slide glass basket, thereby accelerating the reaction in the tank body; the lifting motion amplitude of the manipulator is reduced, the motion stability of the manipulator is improved, and the lifting motion time is shortened.

Optionally, the connecting rod assembly includes a connecting rod and a pull rod, the connecting rod is rotatably connected to the first fixed shaft, two ends of the connecting rod are respectively hinged to the driving end of the driving member and the first end of the pull rod, and the second end of the pull rod is hinged to the receiving platform. So, through looks articulated connecting rod and pull rod to, the connecting rod rotates to be connected and plays leverage on first fixed axle, makes the lift action at connecting rod both ends opposite, can convert the power of driving piece into the elevating movement of accepting the platform through link assembly, thereby realizes the lift operation of elevating platform.

Optionally, the number of the connecting rods is the same as that of the pull rods, and the connecting rods correspond to the pull rods one by one. So, can set up a plurality of link assemblies according to the user demand, including a connecting rod and a pull rod in every link assembly, the two corresponds the articulated.

Optionally, the connecting rods are hinged to the driving end of the driving member through a first movable shaft, and the first movable shaft is parallel to the first fixed shaft. So, when the drive end drive first loose axle of driving piece made reciprocal elevating movement, can drive a plurality of connecting rods and make elevating movement in step with first loose axle articulated first end, because the connecting rod rotates to be connected on first fixed axle for the both ends of connecting rod go up and down to move reversely.

Optionally, a plurality of the pull rods are correspondingly hinged to the plurality of connecting rods through a second movable shaft, and the second movable shaft is parallel to the first fixed shaft. Therefore, when the connecting rod is in lifting motion with the second end hinged with the second movable shaft, the connecting rod can drive the pull rod to synchronously perform lifting motion through the second movable shaft.

Optionally, the receiving platform is hinged to the plurality of pull rods through a third movable shaft, and the third movable shaft is parallel to the first fixed shaft. Therefore, when the pull rod moves up and down under the action of the connecting rod, the third movable shaft synchronously drives the bearing platform to move up and down, so that the bearing platform is lifted up and down to carry out bearing, unloading and cleaning operations of the slide glass basket.

Optionally, the driving member includes an air cylinder or an oil cylinder, a cylinder body of the air cylinder or the oil cylinder is rotatably connected to a second fixed shaft, the second fixed shaft is parallel to the first fixed shaft, and the second fixed shaft is lower than the first fixed shaft. Therefore, the driving piece is used for driving the connecting rod assembly to move so as to lift the bearing table, and the driving piece is a cylinder or an oil cylinder, so that the structure is simple, the cost is low, the occupied space is small, and the control is easy; and, the cylinder body rotates to be connected on the second fixed axle, and at the driving piece in-process of carrying out reciprocating operation, the cylinder body can rotate around the second fixed axle for driving piece and link assembly can satisfy cooperation operation demand.

Optionally, the transfer device further includes two cover plates disposed opposite to each other, each of the cover plates has a free end and a rotating end, the rotating end is hinged to the driving end of the driving member, and the cover plates are configured to be opened or closed under the action of the driving member. So, through setting up the apron, can cover the apron when the cleaning operation, guarantee that the inslot liquid can not volatilize in a large number, and then guarantee environmental safety.

Optionally, each cover plate has a set angle with the corresponding connecting rod. Therefore, the cover plate can move synchronously when the driving piece drives the connecting rod to operate, and the operation requirement of opening or closing the cover plate is met.

Based on the same utility model design, this application still provides a cleaning equipment, including cell body, manipulator and as above transfer device.

The cleaning equipment enables the mechanical arm to transfer the slide glass basket by using the transfer device, and the transfer can be completed without soaking liquid in the tank, so that the cleanness of the mechanical arm can be ensured, and the liquid among the tank bodies cannot be polluted mutually; the device can realize the shaking of the slide glass basket, thereby accelerating the reaction in the tank body; the lifting motion amplitude of the manipulator is reduced, the motion stability of the manipulator is improved, and the lifting motion time is shortened.

Drawings

Fig. 1 is a schematic view of an overall structure of a transfer device according to an embodiment of the present invention;

fig. 2 is a schematic view of a closed state of a cover plate of the transfer device according to the embodiment of the present invention;

fig. 3 is a top view of a part of the structure of the transfer device according to the embodiment of the present invention;

fig. 4 is a first schematic view of an operation mode of the transfer device according to the embodiment of the present invention;

fig. 5 is a schematic view of a second operation mode of the transfer device according to the embodiment of the present invention;

fig. 6 is a third schematic view of an operation mode of the transfer device according to the embodiment of the present invention;

fig. 7 is a fourth schematic view of an operation mode of the transfer device according to the embodiment of the present invention;

fig. 8 is a schematic view of a fifth operation mode of the transfer device according to the embodiment of the present invention;

fig. 9 is a sixth schematic view of an operation mode of the transfer device according to an embodiment of the present invention.

Description of reference numerals:

10-a receiving platform; 20-a drive member; 30-a connecting-rod assembly; 31-a connecting rod; 32-a pull rod; 40-a cover plate; 51-a first fixed shaft; 52-a first movable shaft; 53-a second movable shaft; 54-a third movable shaft; 55-a second fixed shaft;

100-groove body; 200-a manipulator; 300-slide basket.

Detailed Description

To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

At present, wafers are usually carried out in batches when cleaning operation is carried out after manufacturing and processing, the wafers are carried in batches through the slide glass baskets, and the slide glass baskets are transferred in each cleaning tank body through a mechanical arm. When the slide basket is moved into or out of the groove body by the manipulator, the manipulator is often required to be contacted with the process liquid in the groove body, so that the manipulator is polluted, and when the manipulator is mutually transmitted among all the groove bodies, the mutual pollution of the liquid in the groove bodies is also caused, so that the cleaning effect and the quality of wafer products are influenced.

Based on this, the present application intends to provide a solution to the above technical problem, the details of which will be explained in the following embodiments.

Referring to fig. 1-3, the present application provides a transfer device for use in transferring a slide basket 300 during cleaning, comprising: the device comprises a receiving table 10 and a driving link mechanism, wherein the receiving table 10 is used for receiving a slide basket 300; the two sets of driving link mechanisms are respectively arranged on two sides of the bearing platform 10 and comprise a driving piece 20 and a plurality of link assemblies 30, the link assemblies 30 are connected between the driving piece 20 and the bearing platform 10, the link assemblies 30 are configured to convert reciprocating motion of the driving end of the driving piece 20 into lifting motion of the bearing platform 10, and the two sets of driving link mechanisms move synchronously.

Specifically, when the receiving table 10 is used, the receiving table is placed in the tank body 100 filled with the cleaning liquid, the two groups of driving link mechanisms are respectively positioned at two sides of the tank body 100, and the receiving table 10 can perform lifting motion under the combined action of the two groups of driving link mechanisms, so that the receiving table can replace the manipulator 200 to place the slide glass basket 300 in the tank body 100 for cleaning the wafer, the direct contact between the manipulator 200 and the liquid in the tank is avoided, and the pollution of the manipulator 200 can be avoided; in addition, the repeated action of the driving link mechanism can be used for making the receiving platform 10 perform reciprocating lifting motion, so that the slide glass basket 300 is shaken, the reaction of the liquid in the tank body 100 is accelerated, and the cleaning efficiency is improved.

In the transfer device, the driving link mechanism and the receiving platform 10 are arranged, so that the manipulator 200 can be transferred without soaking in liquid in the tank, thereby ensuring that the manipulator 200 is clean and the liquid in each tank 100 cannot be polluted; the device can realize the shaking of the slide glass basket 300, thereby accelerating the reaction in the groove body 100; due to the arrangement of the transfer device, the manipulator 200 does not need to extend into the tank body 100, so that the lifting motion amplitude of the manipulator 200 can be reduced, the motion stability of the manipulator 200 is improved, and the lifting motion time is shortened.

Referring to fig. 1 to 3, in some embodiments, the link assembly 30 includes a connecting rod 31 and a pull rod 32, the connecting rod 31 is rotatably connected to a first fixed shaft 51, two ends of the connecting rod 31 are respectively hinged to the driving end of the driving member 20 and the first end of the pull rod 32, and a second end of the pull rod 32 is hinged to the receiving platform 10. Specifically, the first fixing shaft 51 is fixedly arranged near the side wall of the tank body 100, the connecting rod 31 is rotatably connected to the first fixing shaft 51, the first end of the connecting rod 31 is connected with the driving end of the driving part 20, the second end of the connecting rod 31 is connected with the first end of the pull rod 32, and the connecting rod 31 can be driven to swing around the first fixing shaft 51 by reciprocating motion of the driving end of the driving part 20, so that the connecting rod 31 drives the pull rod 32 to move, and the lifting platform can move up and down. When the driving ends of the driving pieces 20 of the two groups of driving link mechanisms synchronously extend out, the connecting rod assemblies 30 act on the receiving platform 10 to enable the receiving platform 10 to descend; when the driving ends of the driving members 20 of the two sets of driving link mechanisms are synchronously retracted, the plurality of link assemblies 30 act on the receiving table 10 to lift the receiving table 10. In this way, the connecting rod 31 and the pull rod 32 are hinged to each other, and the connecting rod 31 is rotatably connected to the first fixed shaft 51 to perform a leverage effect, so that the lifting operations of both ends of the connecting rod 31 are opposite to each other, and the reciprocating motion of the driving member 20 can be converted into the lifting motion of the receiving table 10 by the link assembly 30, thereby realizing the lifting operation of the lifting table.

In the above embodiment, the number of the connecting rods 31 is the same as that of the pull rods 32, and corresponds to one another. Specifically, in the present embodiment, four connecting rod assemblies 30 are provided and connected to the periphery of the receiving platform 10, and each connecting rod assembly includes a connecting rod 31 and a pull rod 32. In other embodiments, a plurality of connecting rod assemblies 30 may be provided according to the use requirement, and each connecting rod assembly 30 includes a connecting rod 31 and a pull rod 32, which are hinged to each other. The number and arrangement of the connecting rod assemblies 30 can ensure the stress balance of the receiving platform 10 and the motion stability of the receiving platform 10.

In some embodiments, a plurality of the connecting rods 31 are hinged to the driving end of the driving member 20 through a first movable shaft 52, and the first movable shaft 52 is disposed parallel to the first fixed shaft 51. Specifically, the driving member 20 can simultaneously drive the plurality of connecting rod assemblies 30 by hinging the first movable shaft 52 with the driving end of the driving member 20 and the plurality of connecting rods 31, in this embodiment, each driving member 20 simultaneously drives two connecting rod assemblies 30 by the first movable shaft 52, so as to transmit the power of the driving member 20 to the connecting rod assemblies 30. Thus, when the driving end of the driving member 20 drives the first movable shaft 52 to perform reciprocating up-down movement, the connecting rods 31 and the first ends of the first movable shaft 52 hinged to each other are driven to perform up-down movement synchronously, and because the connecting rods 31 are rotatably connected to the first fixed shaft 51, the up-down movement of the two ends of the connecting rods 31 is opposite. When the driving end of the driving member 20 is extended, the first end of the connecting rod 31 is raised, and the second end of the connecting rod 31 is lowered; when the driving end of the driver 20 is retracted, the first end of the connecting rod 31 is lowered while the second end of the connecting rod 31 is raised.

It can be understood that a plurality of the pull rods 32 are correspondingly hinged with a plurality of the connecting rods 31 through a second movable shaft 53, and the second movable shaft 53 is arranged parallel to the first fixed shaft 51. Wherein, make pull rod 32 and the articulated connecting rod 31 that corresponds through second loose axle 53, guarantee that connecting rod 31 can drive pull rod 32 in the swing in-process and go up and down, transmit the power of connecting rod 31 to pull rod 32 promptly. Thus, when the second end of the connecting rod 31 hinged to the second movable shaft 53 moves up and down, the second movable shaft 53 drives the pull rod 32 to move up and down synchronously. When the first end of the connecting rod 31 rises, the second end of the connecting rod 31 descends at the same time, and the pull rod 32 is driven to descend; when the first end of the connecting rod 31 descends, the second end of the connecting rod 31 ascends at the same time, and the pull rod 32 is driven to ascend.

In the above embodiment, the receiving platform 10 is hinged to the plurality of tie rods 32 by the third movable shaft 54, and the third movable shaft 54 is disposed parallel to the first fixed shaft 51. Specifically, the receiving platform 10 is hinged to the pull rods 32 through the third movable shaft 54, and when the pull rods 32 synchronously descend, the receiving platform 10 is driven to descend at the same time; when the plurality of tie rods 32 are synchronously raised, the receiving platform 10 is simultaneously driven to be raised. Thus, when the pull rod 32 moves up and down under the action of the connecting rod 31, the third movable shaft 54 synchronously drives the receiving platform 10 to move up and down, so that the receiving, unloading and cleaning operations of the slide glass basket 300 are performed by the lifting and lowering of the receiving platform 10.

It will be understood that the actuating member 20 comprises an air cylinder or an oil cylinder, the body of which is rotatably connected to a second fixed shaft 55, the second fixed shaft 55 being parallel to the first fixed shaft 51, and the second fixed shaft 55 being lower than the first fixed shaft 51. The driving member 20 is used for providing motion power to drive the connecting rod assembly 30 to move, so as to raise and lower the receiving table 10. The driving part 20 is a cylinder or an oil cylinder, and has the advantages of simple structure, low cost, small occupied space and easy control; and, the cylinder body is connected to the second fixed shaft 55 in a rotating manner, and during the reciprocating operation of the driving member 20, the cylinder body can rotate around the second fixed shaft 55, so that the driving member 20 and the connecting rod assembly 30 can meet the requirement of the matching operation. In this embodiment, the driving member 20 is a linear cylinder, which meets the linear driving requirement; the driving end of the driving member 20 reciprocates in the vertical direction, and then drives the connecting rod assembly 30 to lift the receiving platform 10.

In some embodiments, the transfer device further comprises two oppositely disposed cover plates 40, each of the cover plates 40 has a free end and a rotating end, the rotating end is hinged to the driving end of the driving member 20, and the cover plates 40 are configured to be opened or closed under the action of the driving member 20. Specifically, the free end of the cover plate 40 is opposite to the rotating end, and the rotating end of the cover plate 40 is hinged to the driving end of the driving member 20 through a first movable shaft 52. The two cover plates 40 are matched to synchronously act and are simultaneously opened or closed, the action of the cover plates 40 is synchronous with that of the driving piece 20, so that when the driving end of the driving piece 20 extends out, the cover plates 40 are closed, and the liquid in the groove is prevented from excessively volatilizing; as the driven end of actuator 20 is retracted, cover 40 is opened to facilitate movement of robot 200 into and out of slide basket 300. So, through setting up apron 40, can cover apron 40 when the cleaning operation, guarantee that the inslot liquid can not volatilize in a large number, and then guarantee environmental safety.

In the above embodiment, each of the cover plates 40 has a set angle with the corresponding connecting rod 31. Therefore, the cover plate 40 can move synchronously when the driving element 20 drives the connecting rod 31 to work, and the working requirement of opening or closing the cover plate 40 is met.

Based on the same utility model concept, the application also provides a cleaning device, which comprises a tank body 100, a manipulator 200 and the transfer device.

The transfer device of the application is implemented in a specific operation process as follows:

put into slide basket 300: referring to fig. 4, in an initial state, the transfer device is disposed at a corresponding position of the tank body 100, the receiving platform 10 is placed in the tank body 100, the cover plate 40 is in a closed state, and the slide basket 300 is moved above the tank body 100 by the manipulator 200; referring to fig. 5, the driving ends of the driving members 20 of the two sets of driving link mechanisms synchronously perform a retracting motion, so that the two cover plates 40 are synchronously opened, and the receiving platform 10 is lifted; referring to fig. 6, the robot arm 200 descends and places the slide basket 300 on the receiving stage 10; referring to fig. 7, the robot 200 releases the slide basket 300; referring to fig. 8, the robot 200 ascends and moves away from the bath 100; referring to fig. 9, the driving ends of the driving members 20 of the two sets of driving link mechanisms make synchronous extending movement, so that the two cover plates 40 are closed synchronously, and the receiving table 10 descends at the same time, so that the slide basket 300 is submerged in the liquid in the tank for cleaning operation.

Taking out the slide basket 300: the process of removing slide basket 300 is the reverse of the process of placing slide basket 300. Referring to fig. 9, the slide basket 300 is cleaned in the tank 100; referring to fig. 8, when the manipulator 200 moves above the tank 100, the driving ends of the driving members 20 of the two driving link mechanisms move back synchronously, so that the two cover plates 40 are opened synchronously, and the receiving platform 10 is lifted; referring to fig. 7, the robot 200 descends to the slide basket 300; referring to fig. 6, the robot arm 200 clamps the slide basket 300; referring to fig. 5, the robot 200 moves the slide basket 300 out of the tank 100; referring to fig. 4, the driving ends of the driving members 20 of the two sets of driving link mechanisms make a synchronous extending motion, so that the two cover plates 40 are synchronously closed, and the receiving platform 10 descends to return to the initial state.

Through the operation process, the slide basket 300 can be cleaned and transferred between the tanks 100 by the manipulator 200 through the transfer device, the cleanness of the manipulator 200 is ensured, and the liquids between the tanks 100 cannot be polluted by each other; meanwhile, the cover plate 40 is arranged, so that a large amount of liquid can be prevented from volatilizing, and the environmental safety is ensured.

It should be understood that the application of the present invention is not limited to the above examples, and that modifications or changes can be made by those skilled in the art based on the above description, and all such modifications and changes are intended to fall within the scope of the appended claims.

Claims (10)

1. A transfer device for use in the cleaning of a slide basket, comprising:

the carrying table is used for carrying the slide glass basket; and

the driving connecting rod mechanisms are arranged in two groups and are respectively positioned on two sides of the bearing platform, each driving connecting rod mechanism comprises a driving piece and a plurality of connecting rod assemblies, the connecting rod assemblies are connected between the driving pieces and the bearing platform, the connecting rod assemblies are configured to convert reciprocating motion of the driving ends of the driving pieces into lifting motion of the bearing platform, and the driving connecting rod mechanisms move synchronously.

2. The transfer apparatus as claimed in claim 1, wherein the link assembly comprises a connecting rod and a pull rod, the connecting rod is rotatably connected to the first fixed shaft, two ends of the connecting rod are respectively hinged to the driving end of the driving member and the first end of the pull rod, and the second end of the pull rod is hinged to the receiving platform.

3. The relay according to claim 2, wherein the number of said connecting rods is the same as the number of said tie rods, and corresponds to one another.

4. The transfer device of claim 2, wherein a plurality of said connecting rods are hinged to said driving end of said driving member by a first movable shaft, said first movable shaft being disposed parallel to said first fixed shaft.

5. The transfer apparatus as claimed in claim 2, wherein a plurality of said pull rods are hinged to a plurality of said connecting rods by a second movable shaft, and said second movable shaft is disposed parallel to said first fixed shaft.

6. The transfer device of claim 2, wherein said receiving platform is hinged to said plurality of tie bars by a third movable shaft, said third movable shaft being disposed parallel to said first fixed shaft.

7. The transfer apparatus of claim 2, wherein said driving member comprises a cylinder or an oil cylinder, and a cylinder body of said cylinder or said oil cylinder is rotatably connected to a second fixed shaft, said second fixed shaft is parallel to said first fixed shaft, and said second fixed shaft is lower than said first fixed shaft.

8. The transfer device of claim 2, further comprising two oppositely disposed cover plates, each cover plate having a free end and a rotatable end, the rotatable end being hingedly connected to the drive end of the actuator, the cover plates being configured to open or close under the action of the actuator.

9. The transfer apparatus of claim 8, wherein each of said cover plates has a set angle with respect to a corresponding one of said tie bars.

10. A cleaning apparatus, comprising: a trough body, a manipulator and a transfer device as claimed in any one of claims 1-9.

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