CN217496806U - Rotary translation device for wafer disc - Google Patents

Rotary translation device for wafer disc Download PDF

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Publication number
CN217496806U
CN217496806U CN202221391223.1U CN202221391223U CN217496806U CN 217496806 U CN217496806 U CN 217496806U CN 202221391223 U CN202221391223 U CN 202221391223U CN 217496806 U CN217496806 U CN 217496806U
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motor
support
clamping jaw
carousel
fixed
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CN202221391223.1U
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Chinese (zh)
Inventor
谢亮春
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Shenzhen Xin Jing Lu Electronic Technology Co ltd
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Shenzhen Xin Jing Lu Electronic Technology Co ltd
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Abstract

The utility model relates to a semiconductor processing technology field specifically is a rotary translation device for brilliant disc, first motor is installed to the one end of support, the drive end of first motor is provided with the lead screw that is located the support inboard, the outside of lead screw is rotated through the thread and is connected with the slip table, the inside both sides of slip table run through sliding connection have two guide arms, two the both ends of guide arm are all fixed with the inboard of support, the upside of slip table is rotated and is connected with down the carousel, the lower extreme of carousel is fixed with driven gear down. The utility model relates to a novelty, the structure is ingenious, through pressing from both sides tight actuating mechanism, drives three clamping jaw and removes, makes the clamping jaw fix the wafer dish at the upside of lifting rotary table, and wafer dish skew and landing when preventing to remove and rotate are favorable to improving the subsides mark precision, drive lifting rotary table through electric telescopic handle and reciprocate, make things convenient for the debugging between device and the labeller.

Description

Rotary translation device for wafer disc
Technical Field
The utility model relates to a semiconductor processing technology field specifically is a rotary translation device for brilliant disc.
Background
The wafer disc is used as a carrier of the wafer, and after the wafer is mounted on the wafer disc, a label corresponding to the wafer needs to be pasted on the wafer disc, and the precision of the pasting position of the label needs to be ensured so as to ensure that the wafer can be used correctly later.
According to the patent application number: CN202023224080.9 discloses a crystal plate disc rotary translation device, include the base and be used for the drive the base is at the sliding component of horizontal direction translation, the upper surface of base is equipped with the revolving stage that is used for bearing crystal plate disc at the horizontal direction, the revolving stage with the base rotates to be connected, still be equipped with on the base and be used for the drive the revolving stage is around the first driving piece of vertical direction's rotation axis pivoted. Can remove brilliant disc to make the adaptation of wafer disc paste the mark process, and then reduce and paste the cost of mark equipment, however, this utility model can not fix placing the wafer disc at the upside, and in order to improve production efficiency, the device is very fast when driving brilliant disc removal and rotation, if brilliant disc can not obtain reliable fixed, takes place offset or even landing very easily, has reduced and has pasted the mark precision. Accordingly, one skilled in the art provides a rotational translation apparatus for a wafer disk to solve the problems set forth in the background above.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a rotary translation device for brilliant disc to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a rotary translation device for a wafer disc comprises a support, wherein a first motor is installed at one end of the support, a lead screw positioned on the inner side of the support is arranged at the driving end of the first motor, a sliding table is connected to the outer side of the lead screw in a rotating manner through a screw thread, two guide rods are connected to two inner sides of the sliding table in a penetrating and sliding manner, two ends of each guide rod are fixed to the inner side of the support, a lower rotating disc is connected to the upper side of the sliding table in a rotating manner, a driven gear is fixed to the lower end of the lower rotating disc, a second motor is arranged at a position, on one side of the driven gear, of the upper side of the sliding table, a driving gear is arranged at the driving end of the second motor and meshed with the driven gear through the screw thread, an electric telescopic rod is arranged on the upper side of the lower rotating disc, a lifting rotating disc is arranged at the telescopic end of the electric telescopic rod, three sliding grooves which are arranged in a circumferential manner are formed in the upper side of the lifting rotating disc, the inner sides of the three sliding grooves are all connected with clamping jaws in a sliding mode, and a clamping driving mechanism is arranged between each clamping jaw and the corresponding lifting turntable.
As a further aspect of the present invention: the clamping driving mechanism comprises a third motor and clamping jaw fixing rods, the third motor is mounted on the inner side of the lifting turntable and located at the center position, the clamping jaw fixing rods are fixed to one ends of three clamping jaws, three driving end fixing rods which are arranged in a circumferential mode are fixed to the driving end of the third motor, one ends of the three driving end fixing rods are connected with connecting rods in a rotating mode, and one ends of the three connecting rods are connected with one ends of the three clamping jaw fixing rods in a rotating mode.
As a further aspect of the present invention: and a protection pad is arranged on one side of each of the three clamping jaws, and the thickness of each protection pad is 5 mm.
As a further aspect of the present invention: two the equal symmetrical cover in outside both ends of guide arm is equipped with two cushion collar, the cushion collar all adopts the component of rubber material.
As a further aspect of the present invention: four support columns which are arranged in a rectangular shape are fixed on the lower side of the support.
As a further aspect of the present invention: the sliding table and the lower turntable are both made of aluminum alloy components.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model relates to a novelty, the structure is ingenious, through pressing from both sides tight actuating mechanism, drives three clamping jaw and removes, makes the clamping jaw fix the wafer dish at the upside of lifting rotary table, and wafer dish skew and landing when preventing to remove and rotate are favorable to improving the subsides mark precision, drive lifting rotary table through electric telescopic handle and reciprocate, make things convenient for the debugging between device and the labeller.
Drawings
FIG. 1 is a schematic view of a rotational translation apparatus for a wafer chuck;
FIG. 2 is a front view of a rotational translation apparatus for a wafer disk;
FIG. 3 is an enlarged view of a portion A of FIG. 2 of a rotary translation device for a wafer carrier;
FIG. 4 is an enlarged view of the structure at B in FIG. 1 in a rotary translation apparatus for a wafer table;
fig. 5 is a schematic view showing a structure of a chucking driving mechanism in a rotary translation apparatus for a wafer disk.
In the figure: 1. a support; 2. a first motor; 3. a screw rod; 4. a guide bar; 5. a sliding table; 6. a lower turntable; 7. a driven gear; 8. a second motor; 9. a driving gear; 10. an electric telescopic rod; 11. a lifting turntable; 12. a chute; 13. a clamping jaw; 14. a clamping jaw fixing rod; 15. a third motor; 16. a driving end fixing rod; 17. a connecting rod; 18. a protection pad; 19. a buffer sleeve; 20. and (4) a support column.
Detailed Description
Referring to fig. 1 to 5, in an embodiment of the present invention, a rotational translation device for a wafer disk includes a support 1, a first motor 2 is installed at one end of the support 1, a lead screw 3 located inside the support 1 is installed at a driving end of the first motor 2, a sliding table 5 is connected to an outer side of the lead screw 3 through a screw thread rotation, two guide rods 4 are connected to two inner sides of the sliding table 5 in a penetrating and sliding manner, two ends of the two guide rods 4 are both fixed to an inner side of the support 1, a lower rotary table 6 is connected to an upper side of the sliding table 5 in a rotating manner, a driven gear 7 is fixed to a lower end of the lower rotary table 6, a second motor 8 is installed at a position of one side of the driven gear 7 on an upper side of the sliding table 5, a driving gear 9 is installed at a driving end of the second motor 8, the driving gear 9 is engaged with the driven gear 7 through a gear, an electric motor 10 is installed at an upper side of the lower rotary table 6, a telescopic end of the electric telescopic rod 10 is provided with a lifting rotary table 11, three chutes 12 which are circumferentially arranged are formed in the upper side of the lifting turntable 11, clamping jaws 13 are connected to the inner sides of the three chutes 12 in a sliding manner, and a clamping driving mechanism is arranged between the three clamping jaws 13 and the lifting turntable 11.
In fig. 5: clamping driving mechanism is including installing in lifting turntable 11 inboard third motor 15 that is located central point and puts the department and being fixed in the clamping jaw dead lever 14 of three clamping jaw 13 one end, the drive end of third motor 15 is fixed with three drive end dead lever 16 that is the circumference and arranges, the one end of three drive end dead lever 16 all rotates and is connected with connecting rod 17, the one end of three connecting rod 17 rotates with the one end of three clamping jaw dead lever 14 respectively and is connected, through pressing from both sides tight actuating mechanism, drive three clamping jaw 13 and remove, make clamping jaw 13 fix the wafer dish at lifting turntable 11's upside, wafer dish skew and landing when preventing to remove and rotate, be favorable to improving the subsides mark precision.
In fig. 4: one side of each clamping jaw 13 is provided with a protection pad 18, the thickness of each protection pad 18 is 5 mm, and the protection pads 18 are soft and do not damage the outer side of the wafer disc.
In fig. 1: the equal symmetrical cover in outside both ends of two guide arms 4 is equipped with two cushion collar 19, and cushion collar 19 all adopts the component of rubber material, and cushion collar 19 prevents to bump between slip table 5 and the support 1.
In fig. 1: the lower side of the support 1 is fixed with four support columns 20 which are arranged in a rectangular shape, and the support columns 20 are used for supporting the whole device, so that the placing stability of the device is improved.
In fig. 1: the sliding table 5 and the lower rotary table 6 are both made of aluminum alloy materials, the aluminum alloy materials can reduce the weight of the device, the activity flexibility of the device is improved, and meanwhile the operation power consumption of the device is reduced.
The utility model discloses a theory of operation is: the operation of a first motor 2 is controlled to drive a screw rod 3 to rotate, the screw rod 3 is controlled to rotate to drive a sliding table 5 to horizontally move through screw tooth meshing, the sliding table 5 drives a lower rotary table 6 and a lifting rotary table 11 on the upper side of the sliding table 11 to horizontally move, so that a wafer disc on the upper side of the lifting rotary table 11 can be driven to horizontally move, a second motor 8 is controlled to operate to drive a driving gear 9 to rotate, the driving gear 9 drives a driven gear 7 to rotate through the tooth meshing, the driven gear 7 drives the lower rotary table 6 to rotate, the lower rotary table 6 drives the lifting rotary table 11 to rotate through an electric telescopic rod 10, so that the wafer disc on the upper side of the lifting rotary table 11 is driven to rotate, the telescopic end of the electric telescopic rod 10 is controlled to stretch, the lifting rotary table 11 is driven to vertically move, the debugging between a device and a labeling machine is facilitated, the labeling precision is improved, the wafer disc is placed on the upper side of the lifting rotary table 11, and a third motor 15 is controlled to operate to drive three fixing rods 16 to rotate, three drive end dead lever 16 rotates and drives three connecting rod 17 and rotate, and three connecting rod 17 drives three clamping jaw 13 synchronous motion respectively through clamping jaw dead lever 14, makes three clamping jaw 13 move to central point, and three clamping jaw 13 can be fixed with the tight clamp in wafer dish outside, prevents to remove with rotatory wafer dish skew and landing, is favorable to improving and pastes the mark precision.
The above-mentioned, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. The utility model provides a rotary translation device for brilliant disc, includes support (1), its characterized in that, first motor (2) is installed to the one end of support (1), the drive end of first motor (2) is provided with lead screw (3) that are located support (1) inboard, the outside of lead screw (3) is connected with slip table (5) through the rotation of screw tooth, sliding connection is run through to the inside both sides of slip table (5) has two guide arms (4), two the both ends of guide arm (4) all are fixed with the inboard of support (1), the upside rotation of slip table (5) is connected with down carousel (6), the lower extreme of carousel (6) is fixed with driven gear (7) down, one side position department that the upside of slip table (5) is located driven gear (7) is provided with second motor (8), the drive end of second motor (8) is provided with driving gear (9), driving gear (9) are through tooth and driven gear (7) meshing, the upside of carousel (6) is provided with electric telescopic handle (10) down, the flexible end of electric telescopic handle (10) is provided with lift carousel (11), three spout (12) that are the circumference and arrange are seted up to the upside of lift carousel (11), and are three the equal sliding connection in inboard of spout (12) has clamping jaw (13), and is three be provided with between clamping jaw (13) and lift carousel (11) and press from both sides tight actuating mechanism.
2. The device of claim 1, wherein the clamping driving mechanism comprises a third motor (15) and a clamping jaw fixing rod (14), the third motor (15) is installed inside the lifting turntable (11) and located at a central position, the clamping jaw fixing rod (14) is fixed at one end of three clamping jaws (13), three driving end fixing rods (16) arranged circumferentially are fixed at a driving end of the third motor (15), one end of each of the three driving end fixing rods (16) is rotatably connected with a connecting rod (17), and one end of each of the three connecting rods (17) is rotatably connected with one end of each of the three clamping jaw fixing rods (14).
3. A device for rototranslation of a wafer disk according to claim 1, characterized in that the three jaws (13) are each provided on one side with a protective pad (18), the three protective pads (18) each having a thickness of 5 mm.
4. The device for rotational translation of a wafer disk according to claim 1, wherein two buffer sleeves (19) are symmetrically sleeved on both outer ends of the two guide rods (4), and the buffer sleeves (19) are made of rubber.
5. A device for rototranslation of a wafer disk according to claim 1, characterized in that four support columns (20) in a rectangular arrangement are fixed to the underside of the support (1).
6. A device for rotary translation of a wafer disk according to claim 1, characterized in that the slide (5) and the lower turntable (6) are both made of aluminum alloy.
CN202221391223.1U 2022-06-06 2022-06-06 Rotary translation device for wafer disc Active CN217496806U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221391223.1U CN217496806U (en) 2022-06-06 2022-06-06 Rotary translation device for wafer disc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221391223.1U CN217496806U (en) 2022-06-06 2022-06-06 Rotary translation device for wafer disc

Publications (1)

Publication Number Publication Date
CN217496806U true CN217496806U (en) 2022-09-27

Family

ID=83357136

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221391223.1U Active CN217496806U (en) 2022-06-06 2022-06-06 Rotary translation device for wafer disc

Country Status (1)

Country Link
CN (1) CN217496806U (en)

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