CN217290414U

CN217290414U - Radio frequency plasma powder process device with powder passivation function

Info

Publication number: CN217290414U
Application number: CN202122930512.6U
Authority: CN
Inventors: 郭若冰; 韩刚; 戚延龄; 程兴德; 韩启航
Original assignee: Jiangsu Jicui Advanced Metal Material Institute Co ltd
Current assignee: Jiangsu Jicui Advanced Metal Material Institute Co ltd
Priority date: 2021-11-26
Filing date: 2021-11-26
Publication date: 2022-08-26
Anticipated expiration: 2031-11-26

Abstract

The utility model discloses a radio frequency plasma powder process device with powder passivation function, which comprises a radio frequency plasma powder process reactor, a powder feeding device, a vacuum pump, a powder collecting tank and a collecting and filtering device, wherein the radio frequency plasma powder process reactor is respectively connected with a passivation gas conveying device, the powder feeding device and the collecting and filtering device; the device can let the normal clearance after the miropowder safety passivation that the inner wall of reaction chamber produced after the long-time work of radio frequency plasma powder process system, avoids the danger of miropowder dust explosion.

Description

Radio frequency plasma powder process device with powder passivation function

Technical Field

The utility model belongs to radio frequency plasma powder process field especially relates to a radio frequency plasma powder process device with powder passivation function.

Background

The radio frequency plasma ionizes gas under the action of a high-frequency high-voltage power supply to generate plasma at 6000-10000 ℃. In recent years, radio frequency plasma is widely used for spheroidizing metal, alloy or refractory material micropowder because the plasma has extremely high temperature.

The metal material can take place to gasify under the high temperature effect of plasma 6000~10000 ℃ and form nanometer miropowder deposit at the reaction chamber inner wall afterwards under the cooling gas effect, and along with reaction time extension, the miropowder of reaction chamber inner wall deposit can be more and more. When using radio frequency plasma batch production high-purity powder, need every shift all to wash the reaction chamber inner wall, if directly open the reaction chamber during the washing, a large amount of air can enter into the reaction chamber, because nanometer miropowder activity is high this moment, can react rapidly after the nanometer miropowder of reaction chamber inner wall and the oxygen in the air contact, leads to the danger that the explosion takes place even.

Disclosure of Invention

The to-be-solved technical problem of the utility model is: aiming at the mass production of metal powder, when the inner wall of the reaction chamber is cleaned in a shift exchange mode, the explosion caused by rapid reaction after the inner wall of the reaction chamber is contacted with air is avoided. The technical scheme is as follows:

a radio frequency plasma powder making device with a powder passivation function comprises a passivation gas conveying device, a radio frequency plasma powder making reactor, a powder conveying device, a vacuum pump, a powder collecting tank and a collecting and filtering device; the passivation gas conveying device is connected with the radio frequency plasma milling reactor and can convey passivation gases such as compressed air into a reaction chamber of the radio frequency plasma reactor; the radio frequency plasma milling reactor is also respectively connected with a powder feeder, a collecting and filtering device and a powder collecting tank; the collecting and filtering device is connected with a vacuum pump; the vacuum pump can pump the reaction chamber of the radio frequency plasma reactor.

Specifically, the passivation gas conveying device is connected with the radio frequency plasma reactor through a passivation gas pipeline, and a passivation gas ball valve is arranged on the passivation gas pipeline and used for controlling the connection and the closure of the passivation gas conveying device and the radio frequency plasma reactor.

And a collecting tank ball valve is also arranged between the radio frequency plasma milling reactor and the powder collecting tank.

Furthermore, a system pressure gauge is further arranged on the radio frequency plasma milling reactor, so that the pressure in the reactor can be conveniently and timely read and controlled.

Furthermore, a collecting tank ball valve and a powder collecting tank are sequentially arranged below the collecting and filtering device.

The working principle is as follows: the utility model discloses a set up passivation gas conveyor on radio frequency plasma powder process reactor, divide the passivation gas of appropriate amount (like compressed air or oxygen) in the reaction chamber that lets in many times, let reactor inner wall miropowder progressively passivate, and repetitive cycle is many times, treats to open the reactor again after the whole passivation of miropowder, carries out normal washing to its inner wall sedimentary miropowder. Because the passivation gas is gradually and properly filled into the radio frequency plasma reactor, the violent reaction of the micro powder in the reaction chamber is avoided, and the micro powder reaction is limited in a closed space, so that the danger of micro powder explosion can be effectively avoided.

Drawings

FIG. 1 is a schematic structural view of the present invention;

wherein: the device comprises a 1-passivation gas conveying device, a 2-passivation gas flow switch, a 3-passivation gas pipe, a 4-passivation gas ball valve, a 5-system pressure gauge, 6-nano micro powder, a 7-collection tank ball valve, an 8-powder collection tank, a 9-radio frequency plasma milling reactor, a 10-vacuum pump, an 11-powder feeder and a 12-collection filtering device.

Detailed Description

The present invention will be described in further detail with reference to the following drawings and specific embodiments.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

Referring to fig. 1, a radio frequency plasma powder manufacturing device with powder passivation function includes a passivation gas conveying device 1, a radio frequency plasma powder manufacturing reactor 9, a powder conveying device 11, a vacuum pump 10, a powder collecting tank 8, and a collecting and filtering device 12; the passivation gas conveying device 1 is provided with a passivation gas flow switch 2 and a passivation gas pipeline 3, and the other end of the passivation gas pipeline 3 is communicated with a radio frequency plasma milling reactor 9; the radio frequency plasma milling reactor 9 is also respectively connected with a powder feeding device 11, a powder collecting tank 8 and a collecting and filtering device 12; a collecting tank ball valve 7 is also arranged between the radio frequency plasma milling reactor 9 and the powder collecting tank 8; the collecting and filtering device 12 is connected with a vacuum pump 10.

The passivation gas pipeline 3 is also provided with a passivation gas ball valve 4.

Still set up system pressure table 5 on the radio frequency plasma powder process reactor 9, conveniently read and control the internal pressure of radio frequency plasma powder process reactor 9.

Further, a collecting tank ball valve 7 and a powder collecting tank 8 are sequentially arranged below the collecting and filtering device 12. During the processes of pumping and charging the rf plasma reactor 9, a small portion of the metal powder may move along with the gas flow toward the vacuum pump 10, and the metal powder may be collected by the collecting and filtering device 12.

The method comprises the following specific working steps:

step one, after one shift of production is finished, closing the powder feeder 11, extinguishing plasma, closing a collecting tank ball valve 7 on the radio frequency plasma reactor, and taking down the powder collecting tank 8;

step two, opening a vacuum pump 10 to pump the pressure of the reaction chamber to 85-90kPa, then closing the vacuum pump 10, opening a passivation gas ball valve 4, opening a passivation gas flow switch 2 on a passivation gas conveying device 1 to charge compressed air into the reaction chamber to enable the pressure in the reaction chamber to return to an atmospheric pressure, closing the passivation gas ball valve 4 and the passivation gas flow switch 2, and maintaining the pressure for 3-5 min; this step was repeated three times;

and step three, opening a collecting tank ball valve 7 below the radio frequency plasma reactor 9, and then normally cleaning the nano-scale micro-powder 6 on the inner wall of the reaction chamber.

Claims

1. A radio frequency plasma powder making device with a powder passivation function is characterized by comprising a passivation gas conveying device, a radio frequency plasma powder making reactor, a powder conveying device, a collecting and filtering device and a vacuum pump; the radio frequency plasma powder making reactor is respectively connected with a passivation gas conveying device, a powder feeding device and a collecting and filtering device; the collecting and filtering device is also connected with a vacuum pump; the passivation gas conveying device is connected with the radio frequency plasma milling reactor through a passivation gas pipeline, and a passivation gas ball valve is further arranged on the passivation gas pipeline; still set up the powder collecting tank on the radio frequency plasma powder process reactor, set up the ball valve between reactor and the powder collecting tank.

2. A RF plasma pulverizing apparatus with powder passivation function as claimed in claim 1, wherein the passivation gas pipeline is provided with a passivation gas flow switch.

3. The apparatus of claim 1, wherein a system pressure gauge is further disposed on the RF plasma milling reactor.

4. A RF plasma pulverizing apparatus with powder passivation function as claimed in claim 1, wherein the collecting and filtering device is provided with a powder collecting tank, and a collecting tank ball valve is arranged between the collecting and filtering device and the powder collecting tank.