CN213101569U

CN213101569U - Tail gas treatment device for germane

Info

Publication number: CN213101569U
Application number: CN202021701572.XU
Authority: CN
Inventors: 陈国富; 龚施健
Original assignee: Spectrum Materials Corp ltd
Current assignee: Spectrum Materials Corp ltd
Priority date: 2020-08-16
Filing date: 2020-08-16
Publication date: 2021-05-04
Anticipated expiration: 2030-08-16

Abstract

The utility model belongs to the technical field of tail gas treatment, in particular to a germane tail gas treatment device, which comprises a supporting table, a box body, a transmission bin and a first motor, wherein the box body is fixedly connected to the upper surface of the supporting table, the transmission bin is arranged in the box body, the first motor is fixedly connected to the inner wall of the transmission bin, a threaded column is fixedly connected to an output shaft of the first motor, and a rotating shaft is fixedly connected to the other end of the threaded column; the utility model discloses, through setting up first motor, screw thread post and screw cap, when people need adjust the position of handling the case, people need through the first motor function of control switch control, under the cooperation of screw thread post and screw cap, the drive is loaded the backup pad of handling the case and is removed, when handling the case and remove the assigned position, through the first motor of control switch control stop machine function, can accomplish the regulation to the position of handling the case, made things convenient for people to adjust the position of handling the case, lightened people's operating pressure.

Description

Tail gas treatment device for germane

Technical Field

The utility model belongs to the technical field of the tail gas treatment, concretely relates to tail gas processing apparatus of germane.

Background

Germane is an important raw material gas for semiconductor industry, and is gradually applied to metal organic compounds for preparing germanium-containing semiconductor materials or devices, such as germanium-silicon thin film solar cells, and the manufacturing method of germane includes the following types: decomposing the germanium alloy with acid or ammonia; alkaline solution electrolysis of germanium dioxide; the method for reducing germane salt or germanium oxide can generate hydrogen as a byproduct when germane is produced by the method, so that the main component of tail gas of a germane production system is hydrogen which usually contains trace germane, the hydrogen can be introduced into high altitude to be directly discharged according to environmental protection regulations, the tail gas of the germane production system can meet the discharge requirement after trace germane gas is removed, the germanium is a rare metal and is expensive, and the recovery of the germanium in the tail gas is very necessary, so that the germane in the tail gas of the germane production system needs to be recovered, the recovery of the germanium can be realized while the tail gas reaches the standard and the waste is reduced, but the existing tail gas treatment device is inconvenient in structure, is complex in operation, cannot well adjust the treatment device, cannot well clean a fixed body in a treatment box (16), and the following devices are provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

To solve the problems set forth in the background art described above. The utility model provides a tail gas processing apparatus of germane has simple structure, convenient operation, can be convenient adjust and convenient clearance handle the characteristics of case to handling the case.

In order to achieve the above object, the utility model provides a following technical scheme: a germane tail gas treatment device comprises a support table, a box body, a transmission bin and a first motor, wherein the box body is fixedly connected to the upper surface of the support table, the transmission bin is arranged in the box body, the first motor is fixedly connected to the inner wall of the transmission bin, a threaded column is fixedly connected to an output shaft of the first motor, a rotating shaft is fixedly connected to the other end of the threaded column, a bearing is fixedly connected to the inner wall of the transmission bin, the rotating shaft is arranged in the bearing in a penetrating mode, a threaded cap is connected to the surface of the threaded column in a threaded mode, a connecting plate is fixedly connected to the side surface of the threaded cap, a movable groove is formed in the surface of the transmission bin, the connecting plate is arranged in the movable groove in a penetrating mode, a treatment bin is arranged in the box body, a support plate is arranged, the other end of the telescopic rod is fixedly connected to the inner wall of the box body, a treatment box is arranged on the upper surface of the supporting plate, a treatment solution is arranged inside the treatment box, a sealing gasket is fixedly connected to the inner wall of the treatment bin, a second groove is formed in the lower surface of the sealing gasket, the treatment box is clamped in the second groove, an air inlet pipe is fixedly connected to the surface of the box body and communicated with the treatment box, the other end of the air inlet pipe is in the treatment solution, a first valve is fixedly connected to the surface of the air inlet pipe, an exhaust pipe is fixedly connected to the surface of the box body and communicated with the treatment box, and a second valve;

a collecting bin is arranged in the box body, a support is fixedly connected to the inner wall of the collecting bin, a second motor is arranged in the support, a gear is fixedly connected to the surface of an output shaft of the second motor, sliding plates are arranged in the collecting bin, racks are fixedly connected to the lower surface of each sliding plate and are meshed with the gear, a second fixed block is fixedly connected to the inner wall of the collecting bin, slide rails are arranged on the surface of the second fixed block, the sliding plates are slidably connected in the slide rails, the number of the second fixed blocks is two, the two second fixed blocks are symmetrically arranged on two sides of the collecting bin, a gas collecting bottle is fixedly connected to the upper surface of each sliding plate, a gas collecting pipe is arranged on each gas collecting bottle, a gas pressure alarm is fixedly connected to the surface of each gas collecting pipe, a third valve is fixedly connected to the surface of each gas collecting pipe, the exhaust pipe is fixedly connected with the other end of the quick connector.

Preferably, the side fixedly connected with slider of screw cap, the spout has been seted up to the transmission storehouse inner wall, slider sliding connection is in the spout, handle case side fixedly connected with second handle, the second handle is total two, and the symmetry sets up in handling case both sides.

Preferably, fixed surface is connected with first fixed block in the backup pad, first fixed block is total two, and the symmetry sets up in the backup pad upper surface, the spacing groove has been seted up to first fixed block inside, wear to be equipped with spacing post in the spacing groove, spacing post one end fixedly connected with first in command, spacing post fixed surface is connected with the separation blade, the spring has been cup jointed on spacing post surface, handle the case side and seted up first recess, spacing post other end joint is in first recess.

Preferably, flexible groove has been seted up to the lower surface of brace table, flexible inslot portion fixedly connected with electric putter, electric putter's other end fixedly connected with wheel group, wheel group is total four, and is the rectangle and arranges at the brace table lower extreme, brace table lower surface fixedly connected with base, the base is total four to be the rectangle and arrange at the brace table lower surface.

Preferably, the box has first chamber door through hinge swing joint, first chamber door position is corresponding with the processing storehouse position, the inside glass window that has inlayed of first chamber door, the positive fixedly connected with third handle of first chamber door, the box has the second chamber door through hinge swing joint, second chamber door position is corresponding with the collection storehouse position, the positive fixedly connected with fourth handle of second chamber door.

Preferably, an energy storage bin is arranged inside the supporting table, a storage battery is fixedly connected inside the energy storage bin, a control switch is fixedly connected to the front side of the box body, and a microprocessor is arranged inside the control switch.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model, through setting the first motor, the screw thread post and the screw thread cap, when people need to adjust the position of the processing box, people need to control the first motor to operate through the control switch, under the matching of the screw thread post and the screw thread cap, the supporting plate with the processing box is driven to move, when the processing box moves to a designated position, the first motor is controlled to stop the operation through the control switch, the adjustment of the position of the processing box can be completed, people can adjust the position of the processing box conveniently, the working pressure of people is lightened, through setting the first handle, the limiting post and the first groove, when people need to fix the processing box, people need to pull the first handle, the limiting post is pulled into the limiting groove, then the second handle is pulled to place the processing bin on the supporting plate, the first handle is loosened, under the action of the spring, the limiting post is clamped in the first groove, can accomplish the fixed of handling the case, make things convenient for people to fix the case of handling, also made things convenient for people to the dismantlement of handling the case simultaneously, made things convenient for people to clear up and change new processing solution to the debris in handling the case.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 is a front sectional view of the present invention;

FIG. 2 is a front view of the present invention;

fig. 3 is a schematic structural view of the transmission assembly of the present invention;

FIG. 4 is an enlarged schematic view of the structure at A in FIG. 1;

FIG. 5 is an enlarged view of the structure at B in FIG. 1;

in the figure: 1. a support table; 2. a box body; 3. a transmission bin; 4. a first motor; 5. a threaded post; 6. a rotating shaft; 7. a bearing; 8. a threaded cap; 9. a slider; 10. a chute; 11. a connecting plate; 12. a movable groove; 13. a processing bin; 14. a support plate; 15. a telescopic rod; 16. a treatment tank; 17. a first fixed block; 18. a limiting groove; 19. a limiting column; 20. a first handle; 21. a baffle plate; 22. a spring; 23. a first groove; 24. treating the solution; 25. a second handle; 26. a gasket; 27. a second groove; 28. an air inlet pipe; 29. a first valve; 30. an exhaust pipe; 31. a second valve; 32. a collection bin; 33. a support; 34. a second motor; 35. a gear; 36. a slide plate; 37. a rack; 38. a second fixed block; 39. a slide rail; 40. a gas collection bottle; 41. a gas collecting pipe; 42. an air pressure alarm; 43. a third valve; 44. a quick connector; 45. a telescopic groove; 46. an electric push rod; 47. a wheel set; 48. a base; 49. an energy storage bin; 50. a storage battery; 51. a control switch; 52. a first door; 53. a glass window; 54. a third handle; 55. a second door; 56. and a fourth handle.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Examples

Referring to fig. 1-5, the present invention provides the following technical solutions: a germane tail gas treatment device comprises a support table 1, a box body 2, a transmission bin 3 and a first motor 4, wherein the box body 2 is fixedly connected to the upper surface of the support table 1, the transmission bin 3 is arranged inside the box body 2, the first motor 4 is fixedly connected to the inner wall of the transmission bin 3, an output shaft of the first motor 4 is fixedly connected with a threaded column 5, the other end of the threaded column 5 is fixedly connected with a rotating shaft 6, the inner wall of the transmission bin 3 is fixedly connected with a bearing 7, the rotating shaft 6 is arranged in the bearing 7 in a penetrating manner, a threaded cap 8 is in threaded connection with the surface of the threaded column 5, through the arrangement of the first motor 4, the threaded column 5 and the threaded cap 8, when people need to adjust the position of a treatment box 16, people need to control the first motor 4 to operate through a control switch 51, under the matching of the threaded column 5 and the threaded cap 8, a support plate 14 carrying, when the processing box 16 moves to a designated position, the first motor 4 is controlled by the control switch 51 to stop the operation of the machine, so that the position of the processing box 16 can be adjusted, people can adjust the position of the processing box 16 conveniently, the working pressure of people is reduced, the side surface of the screw cap 8 is fixedly connected with the connecting plate 11, the surface of the transmission bin 3 is provided with the movable groove 12, the connecting plate 11 is arranged in the movable groove 12 in a penetrating way, the inside of the box body 2 is provided with the processing bin 13, the inside of the processing bin 13 is provided with the supporting plate 14, one end of the connecting plate 11 is fixedly connected to the side surface of the supporting plate 14, the lower surface of the supporting plate 14 is fixedly connected with the telescopic rod 15, the other end of the telescopic rod 15 is fixedly connected to the inner wall of the box body 2, the upper surface of the supporting plate 14 is provided with the processing box, a second groove 27 is formed in the lower surface of the sealing gasket 26, the processing box 16 is clamped in the second groove 27, an air inlet pipe 28 is fixedly connected to the surface of the box body 2, the air inlet pipe 28 is communicated with the processing box 16, the other end of the air inlet pipe 28 is arranged in the processing solution 24, a first valve 29 is fixedly connected to the surface of the air inlet pipe 28, an exhaust pipe 30 is fixedly connected to the surface of the box body 2, the exhaust pipe 30 is communicated with the processing box 16, and a second valve 31 is fixedly connected to the surface of the exhaust pipe 30;

the collection bin 32 is arranged in the box body 2, the inner wall of the collection bin 32 is fixedly connected with the support 33, the second motor 34 is arranged in the support 33, the output shaft of the second motor 34 is fixedly connected with the gear 35, the collection bin 32 is internally provided with the sliding plate 36, the lower surface of the sliding plate 36 is fixedly connected with the rack 37, the rack 37 is meshed with the gear 35, the inner wall of the collection bin 32 is fixedly connected with the second fixed block 38, the surface of the second fixed block 38 is provided with the sliding rail 39, the sliding plate 36 is slidably connected in the sliding rail 39, the number of the second fixed blocks 38 is two, the sliding plate 36 is symmetrically arranged on two sides of the collection bin 32, the upper surface of the sliding plate 36 is fixedly connected with the gas collecting bottle 40, the gas collecting bottle 40 is provided with the gas collecting pipe 41, the surface of the gas collecting pipe 41 is fixedly connected with the, one end of the gas collecting pipe 41 is fixedly connected with a quick connector 44, the exhaust pipe 30 is communicated with the collecting bin 32, and the exhaust pipe 30 is fixedly connected with the other end of the quick connector 44.

Specifically, the side fixedly connected with slider 9 of screw cap 8, spout 10 has been seted up to transmission bin 3 inner wall, slider 9 sliding connection is in spout 10, handle 16 side fixedly connected with second handle 25 of case, second handle 25 is total two, and the symmetry sets up in handling 16 both sides of case.

Specifically, the upper surface of the supporting plate 14 is fixedly connected with two first fixing blocks 17, the two first fixing blocks 17 are symmetrically arranged on the upper surface of the supporting plate 14, a limiting groove 18 is formed in the first fixing block 17, a limiting post 19 penetrates through the limiting groove 18, one end of the limiting post 19 is fixedly connected with a first handle 20, the surface of the limiting post 19 is fixedly connected with a blocking piece 21, a spring 22 is sleeved on the surface of the limiting post 19, a first groove 23 is formed in the side surface of the processing box 16, through the arrangement of the first handle 20, the limiting post 19 and the first groove 23, when people need to fix the processing box 16, people need to pull the first handle 20 to draw the limiting post 19 into the limiting groove 18, pull the second handle 25 to place the processing box 13 on the supporting plate 14 to loosen the first handle 20, and under the action of the spring 22, the limiting post 19 is clamped in the first groove 23, can accomplish fixed to handling case 16, make things convenient for people to fix handling case 16, also made things convenient for people to the dismantlement of handling case 16 simultaneously, made things convenient for people to clear up and more renew the processing solution 24 in handling the debris in case 16, 19 other end joints of spacing post are in first recess 23.

Specifically, flexible groove 45 has been seted up to the lower surface of brace table 1, the inside fixedly connected with electric putter 46 in flexible groove 45, electric putter 46's other end fixedly connected with wheel group 47, wheel group 47 is total four, and is the rectangle and arranges at brace table 1 lower extreme, brace table 1 lower fixed surface is connected with base 48, base 48 is total four to be the rectangle and arrange at brace table 1 lower surface.

Specifically, box 2 has first chamber door 52 through hinge swing joint, first chamber door 52 position is corresponding with handling 13 positions, the inside glass window 53 that inlays of first chamber door 52, first chamber door 52 openly fixedly connected with third handle 54, box 2 has second chamber door 55 through hinge swing joint, second chamber door 55 position is corresponding with collection storehouse 32 position, second chamber door 55 openly fixedly connected with fourth handle 56.

Specifically, an energy storage bin 49 is arranged inside the supporting table 1, a storage battery 50 is fixedly connected inside the energy storage bin 49, a control switch 51 is fixedly connected to the front side of the box body 2, and a microprocessor is arranged inside the control switch 51.

The utility model discloses a theory of operation and use flow: the utility model discloses, when using, at first remove the device to the assigned position, then people control the electric putter 46 through control switch 51 and operate, thereby drive the car wheelset 47 and remove, when the car wheelset 47 breaks away from with ground, simultaneously when base 48 contacts with ground, people only need control the electric putter 46 through control switch 51 and stop operating, thereby guaranteed that the device can keep stable state in the process of carrying out normal operation, when people need adjust the position of processing box 16, people need control the operation of first motor 4 through control switch 51, drive the backup pad 14 that carries processing box 16 under the cooperation of threaded post 5 and screw cap 8 and remove, when processing box 16 moves to the assigned position, through control switch 51 control first motor 4 stop the machine operation can, when people need fix processing box 16, when people need to pull the first handle 20 to enable the limiting column 19 to be pulled into the limiting groove 18, and then pull the second handle 25 to place the processing bin 13 on the supporting plate 14, the first handle 20 is loosened, the limiting column 19 is clamped in the first groove 23 under the action of the spring 22, when people need to process germane tail gas, people need to connect the air inlet pipe 28 with a germane tail gas pipe, then open the first valve 29, the second valve 31 and the third valve 43 to enable the germane tail gas to enter the processing solution 24 through the air collecting pipe 41 to chemically react with the processing solution 24 to generate hydrogen and solid residues, the hydrogen enters the air collecting bottle 40 through the air outlet pipe 30 and the air collecting pipe 41, when people need to replace the air collecting bottle 40, people need to close the first valve 29, the second valve 31 and the third valve 43, then separate the quick connector 44, and control the second motor 34 through the control switch 51, under the coordination of the gear 35 and the rack 37, the sliding plate 36 carrying the gas collecting bottle 40 is driven to move, and when the sliding plate 36 moves to a specified position, the second motor 34 is controlled to stop operating through the control switch 51, so that the gas collecting bottle 40 is replaced.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a tail gas processing apparatus of germane, includes brace table (1), box (2), transmission storehouse (3) and first motor (4), its characterized in that: the box body (2) is fixedly connected to the upper surface of the supporting table (1), the transmission bin (3) is arranged inside the box body (2), the first motor (4) is fixedly connected to the inner wall of the transmission bin (3), the output shaft of the first motor (4) is fixedly connected with the threaded column (5), the other end of the threaded column (5) is fixedly connected with the rotating shaft (6), the inner wall of the transmission bin (3) is fixedly connected with the bearing (7), the rotating shaft (6) is arranged in the bearing (7) in a penetrating manner, the surface of the threaded column (5) is in threaded connection with the threaded cap (8), the side surface of the threaded cap (8) is fixedly connected with the connecting plate (11), the surface of the transmission bin (3) is provided with the movable groove (12), the connecting plate (11) is arranged in the movable groove (12) in a penetrating manner, the processing bin (13) is arranged inside the box body (2), the supporting plate, the utility model discloses a processing device, including connecting plate (11), connecting plate (11) one end fixed connection in backup pad (14) side, the lower fixed surface of backup pad (14) is connected with telescopic link (15), the other end fixed connection of telescopic link (15) is at box (2) inner wall, backup pad (14) upper surface is provided with handles case (16), it is provided with treatment solution (24) to handle case (16) inside, handle storehouse (13) inner wall fixed connection and seal up the pad (26), second recess (27) have been seted up to sealed pad (26) lower surface, handle case (16) joint in second recess (27), box (2) fixed surface is connected with intake pipe (28), intake pipe (28) are linked together with handling case (16), the intake pipe (28) other end is in treatment solution (24), intake pipe (28) fixed surface is connected with first valve (29), an exhaust pipe (30) is fixedly connected to the surface of the box body (2), the exhaust pipe (30) is communicated with the treatment box (16), and a second valve (31) is fixedly connected to the surface of the exhaust pipe (30);

the collecting bin (32) is arranged in the box body (2), the inner wall of the collecting bin (32) is fixedly connected with a support (33), a second motor (34) is arranged in the support (33), the output shaft of the second motor (34) is fixedly connected with a gear (35), a sliding plate (36) is arranged in the collecting bin (32), a rack (37) is fixedly connected to the lower surface of the sliding plate (36), the rack (37) is meshed with the gear (35), a second fixing block (38) is fixedly connected to the inner wall of the collecting bin (32), a sliding rail (39) is arranged on the surface of the second fixing block (38), the sliding plate (36) is slidably connected into the sliding rail (39), the number of the second fixing blocks (38) is two, the second fixing blocks are symmetrically arranged on two sides of the collecting bin (32), and a gas collecting bottle (40) is fixedly connected to the upper surface of the sliding plate, gas collecting bottle (40) are provided with gas collecting tube (41), gas collecting tube (41) fixed surface is connected with atmospheric pressure alarm (42), the fixed surface of gas collecting tube (41) is connected with third valve (43), the one end fixedly connected with quick connector (44) of gas collecting tube (41), what blast pipe (30) were linked together with collection storehouse (32), the other end fixed connection of blast pipe (30) and quick connector (44).

2. The device for treating the tail gas of germane according to claim 1, wherein: side fixedly connected with slider (9) of screw cap (8), spout (10) have been seted up to transmission storehouse (3) inner wall, slider (9) sliding connection is in spout (10), handle case (16) side fixedly connected with second handle (25), second handle (25) are total two, and the symmetry sets up and handling case (16) both sides.

3. The device for treating the tail gas of germane according to claim 1, wherein: fixed surface is connected with first fixed block (17) on backup pad (14), first fixed block (17) are total two, and the symmetry sets up in backup pad (14) upper surface, spacing groove (18) have been seted up to first fixed block (17) inside, wear to be equipped with spacing post (19) in spacing groove (18), spacing post (19) one end fixedly connected with first in command (20), spacing post (19) fixed surface is connected with separation blade (21), spring (22) have been cup jointed on spacing post (19) surface, first recess (23) have been seted up to handling case (16) side, spacing post (19) other end joint is in first recess (23).

4. The device for treating the tail gas of germane according to claim 1, wherein: flexible groove (45) have been seted up to the lower surface of brace table (1), flexible groove (45) inside fixedly connected with electric putter (46), the other end fixedly connected with wheel group (47) of electric putter (46), wheel group (47) are total four, and are the rectangle and arrange at brace table (1) lower extreme, brace table (1) lower fixed surface is connected with base (48), base (48) are total four to be the rectangle and arrange at brace table (1) lower surface.

5. The device for treating the tail gas of germane according to claim 1, wherein: box (2) have first chamber door (52) through hinge swing joint, first chamber door (52) position is corresponding with handling storehouse (13) position, first chamber door (52) inside is inlayed and is had glass window (53), first chamber door (52) openly fixedly connected with third handle (54), box (2) have second chamber door (55) through hinge swing joint, second chamber door (55) position is corresponding with collection storehouse (32) position, second chamber door (55) openly fixedly connected with fourth handle (56).

6. The device for treating the tail gas of germane according to claim 1, wherein: an energy storage bin (49) is arranged inside the supporting table (1), a storage battery (50) is fixedly connected inside the energy storage bin (49), a control switch (51) is fixedly connected to the front side of the box body (2), and a microprocessor is arranged inside the control switch (51).