CN217069866U - Angle-adjustable spray pipe of degumming machine - Google Patents
Angle-adjustable spray pipe of degumming machine Download PDFInfo
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- CN217069866U CN217069866U CN202220548379.XU CN202220548379U CN217069866U CN 217069866 U CN217069866 U CN 217069866U CN 202220548379 U CN202220548379 U CN 202220548379U CN 217069866 U CN217069866 U CN 217069866U
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- shower
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Abstract
The utility model discloses a spray pipe of a degumming machine with an adjustable angle, which relates to the technical field of silicon wafer cleaning and comprises a box body, a spraying frame is arranged in the box body, a cylinder is arranged in the middle of the outer surface of one side of the box body, a spraying pipe penetrates through the side wall of the box body and two sides of the air cylinder, one end of the spraying pipe is provided with one end of the clamping plate, the movable end of the cylinder is provided with the middle position of a lifting rod, two ends of the lifting rod are provided with sliding rods, a transmission rod is arranged on the sliding rod and is connected with the other end of the clamping and connecting plate in a sliding way, a bracket is arranged between the slide bar and the box body, a spray pipe is arranged in the degumming machine, rinse after the debonding post, replace traditional fixed mounting's shower, wash the angle when can changing and wash for wash the position abundanter, actually wash the result better.
Description
Technical Field
The utility model relates to a silicon chip washs technical field, concretely relates to angularly adjustable degumming machine shower.
Background
In the process of silicon wafer production, the silicon wafer must be strictly cleaned, trace pollution can also cause device failure, the purpose of cleaning is to remove surface pollution impurities, including organic matters and inorganic matters, some of the impurities exist on the surface of the silicon wafer in an atomic state or an ionic state and some exist on the surface of the silicon wafer in a film form or a particle form, various defects can be caused, the method for removing the pollution comprises two types of physical cleaning and chemical cleaning, after the silicon wafer insert enters the insert flower basket, the silicon wafer insert generally flows to the inside of a degumming machine to be subjected to degumming treatment, the degumming machine adopts an ultrasonic oscillation mode to carry out degumming, a spray pipe is arranged in the degumming machine, the degumming machine is flushed after degumming, but the common spray pipe is fixedly arranged, the flushing angle is fixed during flushing, so that the flushing effect part is single, and the actual flushing result is poor.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an angularly adjustable degumming machine shower, in order to solve and to provide among the above-mentioned background art after the silicon chip inserted sheet enters into the inserted sheet basket, generally can circulate to the inside processing of coming unstuck of degumming machine, and the degumming machine is that the mode that adopts the ultrasonic wave to vibrate comes unstuck, through having the shower at degumming machine internally mounted, wash after the degumming machine, but general shower all is fixed mounting, it is fixed to wash the angle when washing, this makes to wash the effect position comparatively single, actually wash the relatively poor problem of result.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an angularly adjustable degumming machine shower, includes the box, the inside of box is equipped with sprays the frame, one side surface intermediate position of box is equipped with the cylinder, the lateral wall of box just is in the both sides of cylinder are run through and are equipped with the shower, the one end of shower is equipped with the one end of joint board, the expansion end of cylinder is equipped with the intermediate position of lifter, the both ends of lifter are equipped with the slide bar, be equipped with the transfer line on the slide bar, the transfer line with the other end sliding connection of joint board, the slide bar with be equipped with the support between the box.
Preferably, one end of the clamping plate is sleeved on the spray pipe, a fastening seam is arranged at a position of the clamping plate corresponding to the spray pipe, the fastening seam is fastened through a threaded connection bolt, a transmission groove is formed in a position of the other end of the clamping plate corresponding to the transmission rod, and the transmission rod is arranged inside the transmission groove in a sliding mode.
Preferably, the spray rack is arranged in the box body through welding, two ends of the spray pipe are rotatably connected with the box body through bearings, the spray pipe penetrates through the spray rack, and the outer surface of one side, close to each other, of the spray pipe penetrates through and is communicated with a spray nozzle.
Preferably, the expansion end of cylinder runs through the lifter, sliding connection has the joint piece on the lifter, the joint piece with the expansion end joint of cylinder.
Preferably, the sliding rod is connected with the bracket in a sliding manner.
Compared with the prior art, the beneficial effects of the utility model are that: the removal of direction about the motion through the cylinder drives the lifter carries out, thereby it reciprocates to drive the slide bar and carry out the one end that the removal of direction about going on under the support of support drives the joint board through the drive rod, the other end of joint board drives the shower and rotates, after the silicon chip inserted sheet enters into the inserted sheet basket of flowers, can circulate to the degumming machine inside and handle that comes unstuck, and the degumming machine is that the mode that adopts the ultrasonic wave to vibrate comes unstuck, through there is the shower at degumming machine internally mounted, wash after degumming, replace traditional fixed mounting's shower, can change and wash the angle when washing, make and wash the position abundanter, the actual washing result is better.
Drawings
Fig. 1 is an axonometric view of the main structure of the present invention;
FIG. 2 is a front sectional view of the main structure of the present invention;
FIG. 3 is a schematic front view of the main structure of the present invention;
fig. 4 is a left side view of the main structure of the present invention;
fig. 5 is a schematic top view of the main structure of the present invention.
In the figure: 1-box body, 2-spray frame, 3-cylinder, 4-spray pipe, 5-clamping plate, 6-lifting rod, 7-sliding rod, 8-transmission rod, 9-bracket, 10-fastening seam, 11-transmission groove, 12-spray nozzle and 13-clamping block.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Please refer to fig. 1-5, the utility model provides an angularly adjustable degumming machine shower, including box 1, the inside of box 1 is equipped with spray rack 2, one side surface intermediate position of box 1 is equipped with cylinder 3, the lateral wall of box 1 just the both sides of cylinder 3 are run through and are equipped with shower 4, the one end of shower 4 is equipped with the one end of joint board 5, the expansion end of cylinder 3 is equipped with the intermediate position of lifter 6, the both ends of lifter 6 are equipped with slide bar 7, be equipped with transfer line 8 on the slide bar 7, transfer line 8 with the other end sliding connection of joint board 5, slide bar 7 with be equipped with support 9 between the box 1.
During the use, the inside of spray rack 2 is placed to the basket of flowers of silicon chip that will place, rotate shower 4 through the bearing and be connected to the inside of box 1, be connected shower 4 with outside water source equipment through the hose afterwards, at shower 4 during operation, fix cylinder 3 on box 1 through the section bar, cylinder 3 begins work, the expansion end carries out the removal of direction from top to bottom, it carries out the removal of direction from top to bottom to drive lifter 6, lifter 6's both ends drive slide bar 7 and carry out the removal of direction from top to bottom under the support of support 9, the one end that drives joint board 5 is moved in the up-and-down movement of slide bar 7 through transfer line 8, make the other end of joint board 5 drive shower 4 and rotate, the rotation through shower 4 carries out the spraying of multi-angle to the silicon chip.
One end of joint board 5 cup joints on shower 4, joint board 5 with the position that shower 4 corresponds is equipped with the fastening seam 10, fastening seam 10 is fastened through threaded connection bolt, joint board 5's the other end with transmission line 8 corresponds the position seted up transmission groove 11, transmission line 8 slides and sets up the inside of transmission groove 11 carries out the joint through fastening seam 10 with joint board 5's one end and shower 4, fixes joint board 5 at shower 4, avoids the relative rotation between joint board 5 and shower 4, sets up transmission groove 11 at joint board 5's the other end, sets up transmission line 8 in transmission groove 11's inside for transmission line 8 and transmission groove 11 can carry out the relative slip.
The expansion end of cylinder 3 runs through lifter 6, sliding connection has joint piece 13 on lifter 6, joint piece 13 with the expansion end joint of cylinder 3, through joint piece 13 with the intermediate position of lifter 6 is received in the activity end joint of cylinder 3, with cylinder 3 and 6 fixed connection of lifter.
The sliding rod 7 is connected with the bracket 9 in a sliding manner, so that the sliding rod 7 can move up and down under the support of the bracket 9.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an angularly adjustable degumming machine shower which characterized in that: including box (1), the inside of box (1) is equipped with sprays frame (2), one side surface intermediate position of box (1) is equipped with cylinder (3), the lateral wall of box (1) just is in the both sides of cylinder (3) are run through and are equipped with shower (4), the one end of shower (4) is equipped with the one end of joint board (5), the expansion end of cylinder (3) is equipped with the intermediate position of lifter (6), the both ends of lifter (6) are equipped with slide bar (7), be equipped with transfer line (8) on slide bar (7), transfer line (8) with the other end sliding connection of joint board (5), slide bar (7) with be equipped with support (9) between box (1).
2. The angle-adjustable degumming machine spray pipe according to claim 1, characterized in that: one end of the clamping plate (5) is sleeved on the spray pipe (4), a fastening seam (10) is arranged at a position, corresponding to the spray pipe (4), of the clamping plate (5), the fastening seam (10) is fastened through a threaded connecting bolt, a transmission groove (11) is formed in a position, corresponding to the transmission rod (8), of the other end of the clamping plate (5), and the transmission rod (8) is arranged inside the transmission groove (11) in a sliding mode.
3. The angle-adjustable degumming machine spray pipe according to claim 1, characterized in that: the spraying frame (2) is arranged inside the box body (1) through welding, two ends of the spraying pipe (4) are connected with the box body (1) in a rotating mode through bearings, the spraying pipe (4) penetrates through the spraying frame (2), and the outer surface of one side, close to each other, of the spraying pipe (4) is connected with a spraying nozzle (12) in a penetrating and communicating mode.
4. The angle-adjustable degumming machine spray pipe according to claim 1, characterized in that: the expansion end of cylinder (3) runs through lifter (6), sliding connection has joint piece (13) on lifter (6), joint piece (13) with the expansion end joint of cylinder (3).
5. The angle-adjustable degumming machine spray pipe according to claim 1, characterized in that: the sliding rod (7) is connected with the bracket (9) in a sliding manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220548379.XU CN217069866U (en) | 2022-03-14 | 2022-03-14 | Angle-adjustable spray pipe of degumming machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220548379.XU CN217069866U (en) | 2022-03-14 | 2022-03-14 | Angle-adjustable spray pipe of degumming machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217069866U true CN217069866U (en) | 2022-07-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220548379.XU Active CN217069866U (en) | 2022-03-14 | 2022-03-14 | Angle-adjustable spray pipe of degumming machine |
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| CN (1) | CN217069866U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115889318A (en) * | 2022-12-07 | 2023-04-04 | 西安奕斯伟材料科技有限公司 | Device and equipment for degumming silicon wafer |
-
2022
- 2022-03-14 CN CN202220548379.XU patent/CN217069866U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115889318A (en) * | 2022-12-07 | 2023-04-04 | 西安奕斯伟材料科技有限公司 | Device and equipment for degumming silicon wafer |
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