CN216975990U - Sliding type programmable micro valve - Google Patents

Sliding type programmable micro valve Download PDF

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Publication number
CN216975990U
CN216975990U CN202220089221.0U CN202220089221U CN216975990U CN 216975990 U CN216975990 U CN 216975990U CN 202220089221 U CN202220089221 U CN 202220089221U CN 216975990 U CN216975990 U CN 216975990U
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micro
sliding
cylinder
pdms
programmable
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CN202220089221.0U
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Chinese (zh)
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章安良
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Wuyi University
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Wuyi University
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Abstract

The utility model discloses a sliding type programmable micro valve, which comprises a substrate, a rectangular groove arranged on the substrate downwards from the upper surface of the substrate, a PDMS solidified body arranged in the rectangular groove, a micro channel arranged in the PDMS solidified body, and a sliding type cylinder used for blocking or conducting the micro channel, wherein two flow guide pipes are vertically arranged on the PDMS solidified body; the micro-valve has the advantages of simple structure, small size, easy integration in a micro-flow analysis system, convenient operation and no risk of micro-fluid leakage when the micro-valve is opened.

Description

Sliding type programmable micro valve
Technical Field
The utility model relates to a micro valve device for controlling the transport direction of microfluid in a microfluidic device, in particular to a sliding programmable micro valve.
Background
The micro-flow analysis system is the product of the development of micro-mechanical system, it is the result of the combination of micro-mechanical system and biochemical analysis system, it greatly promotes the development of analysis subject, makes the analysis system miniaturized and automatic, and greatly reduces the analysis cost and analysis time, and improves the analysis precision. Therefore, the application of microfluidic analysis systems is becoming more and more widespread, and has penetrated into various aspects of human life, and has been applied in the fields of DNA analysis, cell analysis, protein analysis, drug detection, environmental monitoring, food safety and the like.
The micro valve is the most basic unit in the micro-flow analysis system, and controls the flow direction of micro-flow in the micro-flow analysis system, so that biochemical reagents and samples flow in specific micro-channels at specific time according to the analysis requirement, thereby completing the micro-flow analysis target. Microvalves can be classified into two broad categories, passive microvalves and active microvalves, depending on whether they require an external energy source. The passive micro valve is mainly characterized in that an external energy source is not needed to provide power for micro valve operation, and micro fluid in a micro channel can be transported according to the flow direction of analysis requirements by depending on the self geometric structure or surface characteristics of the micro valve. Therefore, the passive micro valve is small in overall size and convenient to integrate in a microfluidic analysis system, but the passive micro valve is also limited greatly, namely, the internal structure of the passive micro valve is complex, so that the process steps are complex, fine process equipment is needed, the on-off time of the passive micro valve is long, the driving force of the passive micro valve is small, and the application is limited to a certain extent. Compared with a passive micro valve, the active micro valve needs an external energy source, namely an external power source, and the active micro valve has more types according to different driving modes of the external power source, and is commonly provided with a mechanical micro valve, an electric micro valve, a pneumatic micro valve, an electromagnetic micro valve, a phase change micro valve, a shape memory alloy micro valve, a thermal expansion micro valve and the like. The active microvalve has different advantages and disadvantages due to different external power sources, resulting in different microvalve structures and different microvalve operation mechanisms. For example, a mechanical microvalve needs to be switched on and off through mechanical rotation, and the mechanical microvalve has good stability, but often needs to be switched on and off manually; the pneumatic micro valve mainly depends on an external air pump to provide power for operating the micro valve, and the deformation of an inner diaphragm of the micro valve is changed by air of the external air pump to realize the switching operation of the micro valve; the shape memory alloy micro valve adopts the characteristic that the shape of a memory alloy material is different at different temperatures to realize the switching operation of the micro valve, and has the advantages that an external air pump is not needed, the overall size of the micro valve is greatly reduced compared with that of a pneumatic micro valve, but the shape memory alloy micro valve can realize the switching operation of the micro valve only by changing the temperature of a memory unit, so the switching operation time of the micro valve is longer compared with that of the pneumatic micro valve; similarly, the phase-change microvalve needs to change the temperature of the phase-change material to change the phase state of the phase-change material, so the phase-change microvalve also needs to integrate a heating unit, and the response time of the microvalve is relatively long; the thermal expansion micro valve is characterized in that a heating unit is used for heating to expand the volume of materials (such as gas or paraffin and other materials) in a cavity of the micro valve, so that the volume of the materials is changed, and a cavity die of the micro valve is driven to move. Other active microvalves, such as electrostatic microvalves, electromagnetic microvalves, hybrid microvalves, and the like, all have advantages and disadvantages and have been used in different applications.
The programmable micro valve which is manually determined to be switched on and off on site according to the analysis requirement belongs to a special active micro valve, and the micro valve is manually operated according to the analysis process, so that the requirements of on-site and low-cost micro-flow analysis are met, and the micro valve has practical significance. For example, journal "Sensors and Actuators, Sensors and Actuators a: physical, vol.265, No. 9, No. 224 and No. 230, which discloses a multifunctional plug micro-valve for microfluidic application, a versatil plug micro-valve for microfluidic applications, in 2017, and proposes an on-site programmable micro-valve, wherein a hole is drilled in a cylindrical polylactic acid rod by a 200 ℃ hot air gun, the cylindrical polylactic acid rod with the hole is inserted into a polydimethylsiloxane micro-channel, the hole in the inserted cylindrical polylactic acid rod and the polydimethylsiloxane micro-channel are on the same level, and when the cylindrical polylactic acid rod is manually rotated to enable the hole in the cylindrical polylactic acid rod and the polydimethylsiloxane micro-channel to be in the same direction, a micro-fluid can pass through the polydimethylsiloxane micro-channel and the micro-valve is opened; when the cylindrical polylactic acid rod is manually rotated by 90 degrees, the hole in the cylindrical polylactic acid rod cannot be connected with the polydimethylsiloxane micro-channel, microfluid cannot be transported in the polydimethylsiloxane micro-channel, and the micro valve is closed. Compared with the active micro valve, the programmable micro valve has the advantages that the manufacturing process is simple, the micro valve can be manufactured only by a hot air gun and drilling equipment, extra air pumps, heat sources and other off-chip devices are not needed, and the integration of a micro-flow analysis system is facilitated. However, when the programmable micro valve is manufactured, it is required to ensure that the hole in the cylindrical polylactic acid rod is strictly at the same height as the polydimethylsiloxane micro channel, so that when the micro valve is opened, microfluid in one side of the polydimethylsiloxane micro channel can pass through the hole in the cylindrical polylactic acid rod to reach the other side of the polydimethylsiloxane micro channel, and thus, the risk of microfluid leakage exists when the micro valve is opened, and the improvement is needed.
Disclosure of Invention
The technical problem to be solved by the utility model is to provide a sliding type programmable micro valve which has the advantages of simple structure, simple manufacturing process, no extra air pump, heat source and other off-chip devices, small size, easy integration in a micro-flow analysis system, convenient operation and no risk of micro-fluid leakage when the micro valve is opened.
The technical scheme adopted by the utility model for solving the technical problems is as follows: a sliding programmable microvalve characterized by: the micro-valve closing device comprises a substrate, a plurality of rectangular grooves which are formed in the substrate downwards from the upper surface of the substrate, a PDMS (polydimethylsiloxane) solidified body which is arranged in the rectangular grooves, a micro-channel which is arranged in the PDMS solidified body, and a sliding type cylinder which is used for blocking the micro-channel or conducting the micro-channel, wherein two guide pipes are vertically arranged on the PDMS solidified body, the bottom ends of the two guide pipes are positioned in the PDMS solidified body, the bottom end ports of the two guide pipes are communicated with the two end ports of the micro-channel in a one-to-one correspondence manner, the sliding type cylinder is positioned above the PDMS solidified body, the position of the sliding type cylinder corresponds to the position of the micro-channel, and the sliding type cylinder extrudes the PDMS solidified body to enable the micro-channel to be blocked to realize micro-valve closing when force is applied to the sliding type cylinder to enable the sliding type cylinder to slide to be vertical, and applying force to the sliding cylinder to enable the PDMS solidified body to restore the original state when the sliding cylinder slides to the inclined state so as to enable the micro-channel to be restored and conducted to open the micro-valve.
The end face of the bottom end of the sliding type cylinder is designed into an arc-shaped curved surface, the sliding type cylinder can well slide on the upper surface of the PDMS curing body due to the design of the arc-shaped curved surface, the sliding type cylinder can slide to a vertical state or an inclined state, and the upper surface of the PDMS curing body cannot be injured due to the arc-shaped curved surface when the sliding type cylinder slides.
The sliding programmable micro valve further comprises a screw rod, the screw rod is arranged above the PDMS solidified body, the length direction of the screw rod is spatially vertical to the length direction of the micro channel, and the top end of the sliding cylinder is in threaded connection with the screw rod. After the top end of the sliding type column body is in threaded connection with the screw, if the initial state of the sliding type column body is in an inclined state, force is applied to the sliding type column body to enable the sliding type column body to rotate on the screw until the sliding type column body is in a vertical state, and therefore the micro valve can be closed; applying force to the sliding type cylinder to enable the sliding type cylinder to rotate in the opposite direction on the screw rod to enable the sliding type cylinder to incline and the PDMS solidified body to restore to the original state, so that the micro valve can be opened, and the sliding type cylinder can easily rotate around the screw rod to slide by adopting the screw rod; in actual design, a cross rod with a part provided with an external thread can be used for replacing a screw rod, and other structures capable of driving the sliding type column body to slide can be designed.
The top end of the sliding type cylinder is drilled with a connecting ring, internal threads are arranged on the inner peripheral wall of the connecting ring, and the connecting ring is in threaded connection with the screw.
The sliding programmable micro valve further comprises at least two rigid supporting legs, the rigid supporting legs are vertically arranged on the substrate, and the top ends of the rigid supporting legs are fixedly connected with the screw, for example, the rigid supporting legs are fixedly connected through AB strong adhesive. When a plurality of rectangular grooves are formed, namely a plurality of PDMS solidified bodies are arranged and a plurality of micro-channels are arranged, more than two rigid supporting legs can be arranged so as to better support the screw rod.
And no gap exists between the PDMS solidified body and the rectangular groove, and the upper surface of the PDMS solidified body is flush with the upper surface of the substrate. During preparation, the PDMS solidified body is directly formed by solidifying PDMS in the rectangular groove, and a gap generally does not exist between the PDMS solidified body and the rectangular groove, so that the PDMS solidified body is always fixed and does not influence the micro-channel.
The substrate is a PCB (printed Circuit Board), the thickness of the substrate is 2.4 mm or 3.2 mm, and the depth of the rectangular groove is 1 mm-1.5 mm. The common PCB comprises a PCB with the thickness of 2.4 mm and a PCB with the thickness of 3.2 mm, and a rectangular groove with the depth of 1 mm-1.5 mm can be formed according to the thickness of the PCB.
The vertical distance between the central axis of the screw and the upper surface of the PDMS solidified body is La, the length from the central axis of the screw as the starting reference to the end surface of the bottom end of the sliding cylinder is Lb after the top end of the sliding cylinder is in threaded connection with the screw and the sliding cylinder is vertical, and the value of Lb-La is 0.8-1.2 mm. Because the top end of the sliding type column body is in threaded connection with the screw, namely the top end of the sliding type column body is fixed, in order to enable the sliding type column body to extrude the PDMS solidified body, the length of the sliding type column body is designed to be larger than the vertical distance between the screw and the upper surface of the PDMS solidified body, so that the sliding type column body inevitably extrudes the PDMS solidified body downwards when the sliding type column body is vertical, and the PDMS solidified body deforms to block a micro-channel; the value of Lb-La of 0.8 mm to 1.2 mm was determined by a number of experiments, and in the case where the depth of the rectangular groove (i.e., the height of the PDMS cured body) was 1 mm to 1.5 mm, the sliding cylinder blocked the microchannel when it was vertical regardless of the height position of the microchannel in the PDMS cured body.
The width of the rectangular groove is 5-6 mm, and the width of the sliding type cylinder in the same direction is 4.5-5.5 mm. The width of the sliding cylinder is designed to be smaller than that of the rectangular groove in general, i.e. the sliding cylinder does not exceed the PDMS curing body.
The base plate is provided with a plurality of rectangular grooves which are arranged in parallel, the screw rod stretches across the upper parts of all the rectangular grooves, and the sliding cylinder is a PVC (Polyvinyl chloride) cylinder. The substrate is provided with the plurality of rectangular grooves, namely the substrate is integrated with the plurality of micro-channels, each micro-channel is additionally provided with the sliding type cylinder, the sliding type cylinders share one screw rod, the flow direction control of micro-fluids of the plurality of micro-channels at different moments can be realized, and the utilization rate of the sliding type programmable micro-valve is greatly increased on the premise of ensuring the small size of the sliding type programmable micro-valve.
Compared with the prior art, the utility model has the advantages that:
1) a sliding type cylinder is arranged above a PDMS solidified body, so that the sliding type cylinder extrudes the PDMS solidified body when the sliding type cylinder slides to a vertical state, the PDMS solidified body deforms, the micro-fluid circulation in a micro-channel is blocked, and a micro-valve is closed; sliding the sliding cylinder to an inclined state, wherein the sliding cylinder does not extrude the PDMS solidified body any more, the PDMS solidified body is restored to the original state, the microfluid in the microchannel is restored to flow, and the microvalve is opened; the micro valve is opened or closed by deforming the PDMS solidified body by utilizing the sliding of the sliding type cylinder, the structure is simple, and extra air pumps, heat sources and other off-chip devices are not needed, so that the whole size is small, and the micro valve is easy to integrate in a micro-flow analysis system.
2) The micro valve can be opened or closed only by applying force to the sliding type cylinder to enable the sliding type cylinder to slide, and the operation is very convenient.
3) Because the microchannel is overall structure, and only make slidingtype cylinder extrusion PDMS solidification body and then make PDMS solidification body take place deformation and block the microfluid circulation in the microchannel when realizing that the microvalve is closed, and do not destroy the wholeness of microchannel, consequently the microchannel just restores to the original state when the microvalve is opened, does not have the risk that microfluid was revealed.
4) The manufacturing method comprises the steps of forming a rectangular groove in a substrate during manufacturing, curing PDMS in the rectangular groove, presetting a micro-channel during curing, and arranging the sliding type cylinder above a PDMS cured body, wherein the manufacturing process is simple.
5) According to the instant requirement of microfluidic analysis, the sliding programmable micro valve can be flexibly programmed and controlled, and meanwhile, a sliding control mode can be adopted to control the sliding cylinder to carry out microfluidic control on different microchannels, so that the substrate utilization rate of the microfluidic device can be improved, more microfluidic units can be integrated, and the microfluidic integration level is improved.
Drawings
FIG. 1 is a simplified schematic structural diagram of a sliding programmable microvalve of the present invention;
fig. 2 is an enlarged schematic view of a portion a of fig. 1.
Detailed Description
The utility model is described in further detail below with reference to the accompanying examples.
The utility model provides a sliding programmable micro valve, as shown in the figure, which comprises a substrate 1, a plurality of rectangular grooves 2 arranged on the substrate 1 downwards from the upper surface of the substrate 1, a PDMS (polydimethylsiloxane) solidified body 3 arranged in the rectangular grooves 2, a micro channel 4 arranged in the PDMS solidified body 3, and a sliding cylinder 5 for blocking the micro channel 4 or conducting the micro channel 4, wherein the plurality of rectangular grooves 2 are arranged in parallel, two flow guide pipes 6 are vertically arranged on the PDMS solidified body 3, the two flow guide pipes 6 are respectively used as a micro fluid input pipe and a micro fluid output pipe, the bottom ends of the two flow guide pipes 6 are arranged in the PDMS solidified body 3, the bottom end ports of the two flow guide pipes 6 are correspondingly communicated with two end ports of the micro channel 4, the sliding cylinder 5 is arranged above the PDMS solidified body 3, and the position of the sliding cylinder 5 corresponds to the position of the micro channel 4, and applying force to the sliding type cylinder 5 to enable the sliding type cylinder 5 to slide to be vertical, the sliding type cylinder 5 extrudes the PDMS solidified body 3 to enable the micro-channel 4 to be blocked to realize micro-valve closing, and applying force to the sliding type cylinder 5 to enable the PDMS solidified body 3 to restore to the original state to enable the micro-channel 4 to restore to be conducted to realize micro-valve opening when the sliding type cylinder 5 slides to be inclined. The substrate 1 is provided with the plurality of rectangular grooves 2, namely the substrate 1 is integrated with the plurality of micro-channels 4, and then a sliding type cylinder 5 is added for each micro-channel 4, so that the flow direction control of the micro-fluids of the plurality of micro-channels 4 at different moments can be realized, and the utilization rate of the sliding type programmable micro-valve is greatly increased on the premise of ensuring the small size of the sliding type programmable micro-valve.
In this embodiment, the end surface of the bottom end of the sliding cylinder 5 is designed to be the arc-shaped curved surface 51, the design of the arc-shaped curved surface 51 enables the sliding cylinder 5 to slide on the upper surface of the PDMS cured body 3 well, so that the sliding cylinder 5 can slide to a vertical state or to an inclined state, and the arc-shaped curved surface 51 prevents the sliding cylinder 5 from damaging the upper surface of the PDMS cured body 3 when sliding.
In this embodiment, the sliding type programmable microvalve further includes a screw 7 and two rigid supporting legs 8, the screw 7 is disposed above the PDMS solidified body 3, that is, the screw 7 spans over all the rectangular grooves 2, and the length direction of the screw 7 is spatially perpendicular to the length direction of the microchannel 4, a connecting ring 52 is formed in a top end drilling hole of the sliding type cylinder 5, an internal thread is disposed on an inner peripheral wall of the connecting ring 52, the connecting ring 52 is screwed with the screw 7, the rigid supporting legs 8 are vertically mounted on the substrate 1, and top ends of the rigid supporting legs 8 are fixedly connected with the screw 7, for example, by an AB strong adhesive. After the top end of the sliding type cylinder 5 is in threaded connection with the screw 7, if the initial state of the sliding type cylinder 5 is an inclined state, force is applied to the sliding type cylinder 5 to enable the sliding type cylinder 5 to rotate on the screw 7 until the sliding type cylinder 5 is in a vertical state, and therefore the micro valve can be closed; force is applied to the sliding cylinder 5 to enable the sliding cylinder 5 to rotate in the opposite direction on the screw 7, so that the sliding cylinder 5 tilts (as shown in fig. 1) and the PDMS cured body 3 recovers to the original state, and thus, the micro-valve can be opened, and the sliding cylinder 5 can easily rotate around the screw 7 to slide by adopting the screw 7; in actual design, a cross rod with a part provided with an external thread can be used for replacing the screw 7, and other structures capable of driving the sliding type column 5 to slide can be designed. When a plurality of rectangular grooves 2 are formed, that is, a plurality of PDMS curing bodies 3 and a plurality of microchannels 4 are formed, more than two rigid support legs 8 may be provided to better support the screws 7.
In this embodiment, there is no gap between the PDMS cured body 3 and the rectangular groove 2, the upper surface of the PDMS cured body 3 is flush with the upper surface of the substrate 1, the PDMS cured body 3 is directly formed by curing PDMS in the rectangular groove 2 during preparation, there is generally no gap between the PDMS cured body 3 and the rectangular groove 2, which also makes the PDMS cured body 3 fixed all the time without affecting the microchannel 4; the substrate 1 is a PCB (printed circuit board), the sliding type cylinder 5 is a PVC (Polyvinyl chloride) cylinder, the thickness of the substrate 1 is 2.4 mm or 3.2 mm, the depth of the rectangular groove 2 is 1 mm-1.5 mm, the common PCB comprises a PCB with the thickness of 2.4 mm and a PCB with the thickness of 3.2 mm, and the rectangular groove 2 with the depth of 1 mm-1.5 mm can be formed according to the thickness of the PCB; the width of the rectangular groove 2 is 5 mm to 6 mm, the width of the sliding cylinder 5 in the same direction is 4.5 mm to 5.5 mm, and the width of the sliding cylinder 5 is generally designed to be smaller than the width of the rectangular groove 2, i.e. the sliding cylinder 5 does not exceed the PDMS solidified body 3.
In this embodiment, a vertical distance between the central axis of the screw 7 and the upper surface of the PDMS cured body 3 is La, a length from the central axis of the screw 7 to the end surface of the bottom end of the sliding cylinder 5 when the sliding cylinder 5 is vertical after the top end of the sliding cylinder 5 is screwed to the screw 7 is Lb, and a value of Lb-La is 0.8 mm to 1.2 mm. Because the top end of the sliding type cylinder 5 is in threaded connection with the screw 7, namely the top end of the sliding type cylinder 5 is fixed, in order to enable the sliding type cylinder 5 to extrude the PDMS solidified body 3, the length of the sliding type cylinder 5 is designed to be larger than the vertical distance between the screw 7 and the upper surface of the PDMS solidified body 3, so that the sliding type cylinder 5 inevitably extrudes the PDMS solidified body 3 downwards when the sliding type cylinder 5 is vertical, and the PDMS solidified body 3 deforms to block the micro-channel 4; the value of Lb-La of 0.8 mm to 1.2 mm is determined by a number of experiments, and in the case where the depth of the rectangular groove 2 (i.e., the height of the PDMS cured body 3) is 1 mm to 1.5 mm, the sliding pillar 5 blocks the microchannel 4 when it is vertical regardless of the height position of the microchannel 4 in the PDMS cured body 3.

Claims (10)

1. A sliding programmable microvalve characterized by: the micro-valve closing device comprises a substrate, a plurality of rectangular grooves formed in the substrate downwards from the upper surface of the substrate, a PDMS curing body arranged in the rectangular grooves, a micro-channel arranged in the PDMS curing body, and a sliding type cylinder used for blocking the micro-channel or conducting the micro-channel, wherein two guide pipes are vertically arranged on the PDMS curing body, the bottom ends of the two guide pipes are positioned in the PDMS curing body, the bottom end ports of the two guide pipes are communicated with the two end ports of the micro-channel in a one-to-one correspondence manner, the sliding type cylinder is positioned above the PDMS curing body, the position of the sliding type cylinder corresponds to the position of the micro-channel, and when force is applied to the sliding type cylinder to enable the sliding type cylinder to slide to be vertical, the sliding type cylinder extrudes the PDMS curing body to enable the micro-channel to be blocked to realize micro-valve closing, and applying force to the sliding cylinder to enable the PDMS solidified body to restore the original state when the sliding cylinder slides to the inclined state so as to enable the micro-channel to be restored and conducted to open the micro-valve.
2. A sliding programmable microvalve of claim 1, wherein: the end face of the bottom end of the sliding cylinder is designed into an arc-shaped curved surface.
3. A sliding programmable microvalve of claim 1 or 2, wherein: the sliding programmable micro valve further comprises a screw rod, the screw rod is arranged above the PDMS solidified body, the length direction of the screw rod is spatially vertical to the length direction of the micro channel, and the top end of the sliding cylinder is in threaded connection with the screw rod.
4. A sliding programmable microvalve of claim 3, wherein: the top end of the sliding type cylinder is drilled with a connecting ring, internal threads are arranged on the inner peripheral wall of the connecting ring, and the connecting ring is in threaded connection with the screw.
5. A sliding programmable microvalve of claim 3, wherein: the sliding programmable micro valve further comprises at least two rigid supporting legs, the rigid supporting legs are vertically arranged on the base plate, and the top ends of the rigid supporting legs are fixedly connected with the screw.
6. A sliding programmable microvalve of claim 5, wherein: and a gap does not exist between the PDMS solidified body and the rectangular groove, and the upper surface of the PDMS solidified body is flush with the upper surface of the substrate.
7. A sliding programmable microvalve of claim 6, wherein: the substrate is a PCB (printed Circuit Board), the thickness of the substrate is 2.4 mm or 3.2 mm, and the depth of the rectangular groove is 1 mm-1.5 mm.
8. A sliding programmable microvalve of claim 7, wherein: the vertical distance between the central axis of the screw and the upper surface of the PDMS solidified body is La, the length from the central axis of the screw as the starting reference to the end surface of the bottom end of the sliding cylinder is Lb after the top end of the sliding cylinder is in threaded connection with the screw and the sliding cylinder is vertical, and the value of Lb-La is 0.8-1.2 mm.
9. A sliding programmable microvalve of claim 8, wherein: the width of the rectangular groove is 5-6 mm, and the width of the sliding type column body in the same direction is 4.5-5.5 mm.
10. A sliding programmable microvalve of claim 3, wherein: the base plate is provided with a plurality of rectangular grooves which are arranged in parallel, the screw rod stretches across the upper parts of all the rectangular grooves, and the sliding cylinder is a PVC cylinder.
CN202220089221.0U 2022-01-13 2022-01-13 Sliding type programmable micro valve Expired - Fee Related CN216975990U (en)

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CN202220089221.0U CN216975990U (en) 2022-01-13 2022-01-13 Sliding type programmable micro valve

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Application Number Priority Date Filing Date Title
CN202220089221.0U CN216975990U (en) 2022-01-13 2022-01-13 Sliding type programmable micro valve

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CN216975990U true CN216975990U (en) 2022-07-15

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