CN216593476U - Sapphire measuring platform magnetic suspension type moving device and sapphire measuring device - Google Patents
Sapphire measuring platform magnetic suspension type moving device and sapphire measuring device Download PDFInfo
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- CN216593476U CN216593476U CN202122998681.3U CN202122998681U CN216593476U CN 216593476 U CN216593476 U CN 216593476U CN 202122998681 U CN202122998681 U CN 202122998681U CN 216593476 U CN216593476 U CN 216593476U
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Abstract
The utility model relates to sapphire measuring equipment, and provides a magnetic suspension type moving device for a sapphire measuring platform, which comprises a base, an X-direction moving platform, a Y-direction moving platform for bearing sapphire to measure, a first suspension mechanism, a second suspension mechanism, an X-direction driving mechanism and a Y-direction driving mechanism, wherein the X-direction moving platform is positioned between the base and the Y-direction moving platform, the base supports the X-direction moving platform through the first suspension mechanism, the X-direction moving platform can move along the X direction relative to the base under the drive of the X-direction driving mechanism, the X-direction moving platform supports the Y-direction moving platform through the second suspension mechanism, and the Y-direction moving platform can move along the Y direction relative to the X-direction moving platform under the drive of the Y-direction driving mechanism. The utility model also provides a sapphire measuring device comprising the magnetic suspension type moving device of the sapphire measuring platform. The magnetic suspension type moving device for the sapphire measuring platform can stably move the measuring platform, and measuring data are not influenced by jumping.
Description
Technical Field
The utility model relates to sapphire measuring equipment, in particular to a magnetic suspension type moving device of a sapphire measuring platform. In addition, the utility model also relates to a sapphire measuring device.
Background
Sapphire (Sapphire) crystal has excellent optical property, physical property and stable chemical property, is widely applied to high-brightness LED substrate materials, various optical components and window materials, and is often used in the fields of optical element materials exposed in radiation environment in aerospace, smart phone display screens, Home keys, camera protective covers and other consumer electronics products because of good radiation resistance.
In the production process of sapphire, the sapphire is required to be placed on a measuring platform for measurement, and different parts of the sapphire are measured by moving the measuring platform. The traditional moving device of the platform adopts the cooperation of guide rail sliding blocks, is driven by a servo motor to move left and right, and can cause the bounce (3-5um) of the measuring platform due to the generated resistance in the moving process because of mechanical friction, and the servo motor can also cause the deviation of the moving position due to the resistance. And because the guide rail slider that traditional platform mobile device used, need regular maintenance, along with the increase of time, can produce wearing and tearing, lead to the precision to reduce, the lubricating oil that uses also can cause the dirty of sapphire when maintaining.
Therefore, it is desirable to provide a mobile device to solve the above problems of the prior art.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide a magnetic suspension type moving device for a sapphire measuring platform, when the magnetic suspension type moving device for the sapphire measuring platform moves, the measuring platform is stable, the measured data is not influenced by the jumping of the measuring platform, the precision is not reduced due to long-time use, maintenance is not needed, and the product is not polluted.
In order to solve the technical problem, the utility model provides a magnetic suspension type moving device for a sapphire measuring platform, which comprises a base, an X-direction moving platform, a Y-direction moving platform for bearing sapphire to measure, a first suspension mechanism, a second suspension mechanism, an X-direction driving mechanism and a Y-direction driving mechanism, wherein the X-direction moving platform is positioned between the base and the Y-direction moving platform, the base supports the X-direction moving platform through the first suspension mechanism, the X-direction moving platform can move along the X direction relative to the base under the driving of the X-direction driving mechanism, the X-direction moving platform supports the Y-direction moving platform through the second suspension mechanism, and the Y-direction moving platform can move along the Y direction relative to the X-direction moving platform under the driving of the Y-direction driving mechanism.
The first suspension mechanism and the second suspension mechanism are consistent in structure and comprise guide rails and supports matched with the guide rails, the guide rails are I-shaped guide rails, the bottom surfaces of the upper arms of the guide rails are provided with first magnets, and the supports are provided with suspension electromagnets which interact magnetically with the first magnets so as to enable the supports to suspend relative to the guide rails; the base is provided with the corresponding guide rail, and the support is arranged on the bottom surface of the X-direction moving platform so as to enable the X-direction moving platform to be suspended relative to the base; the X-direction moving platform is provided with corresponding guide rails, and the support is arranged on the bottom surface of the Y-direction moving platform, so that the Y-direction moving platform can be suspended relative to the X-direction moving platform.
Specifically, two outer side surfaces of the upper arm of the guide rail are provided with second magnets, and two inner side surfaces of the support are provided with guide electromagnets which are magnetically interacted with the second magnets, so that the support does not deviate in the length direction of the guide rail.
Preferably, a double-guide-rail structure is adopted between the base and the X-direction moving platform and between the X-direction moving platform and the Y-direction moving platform.
Specifically, the X-direction driving mechanism and the Y-direction driving mechanism have the same structure, and both are U-slot linear motors, each of the U-slot linear motors includes parallel magnetic tracks and a mover, the corresponding parallel magnetic tracks are mounted on the base, and the corresponding mover is mounted on one of the supports corresponding to the X-direction moving platform to drive the X-direction moving platform to move relative to the base along the X direction; the X-direction moving platform is provided with corresponding parallel magnetic tracks, and the support corresponding to the Y-direction moving platform is provided with corresponding rotors so as to drive the Y-direction moving platform to move along the Y direction relative to the X-direction moving platform.
Preferably, the X-direction positioning mechanism and the Y-direction positioning mechanism are further included, and the X-direction positioning mechanism arranged along the X direction is arranged between the base and the X-direction moving platform so as to confirm the moving position of the X-direction moving platform relative to the base along the X direction; and the Y-direction positioning mechanism arranged along the Y direction is arranged between the X-direction moving platform and the Y-direction moving platform so as to confirm the moving position of the Y-direction moving platform relative to the X-direction moving platform along the Y direction.
Specifically, the X-direction positioning mechanism and the Y-direction positioning mechanism have the same structure, and both are grating rulers, each grating ruler includes a scale grating and a grating reading head, the corresponding scale grating is mounted on the base, and the grating reading head corresponding to the scale grating mounted on the base is mounted on the bottom surface of the X-direction moving platform; x is to installing on the moving platform corresponding the scale grating, Y is to the bottom surface of moving platform installing with install X is to moving platform on the scale grating corresponds the grating reading head.
Preferably, the suspension height detection device further comprises a first suspension height detection mechanism and a second suspension height detection mechanism, wherein the first suspension height detection mechanism is arranged between the base and the X-direction moving platform so as to detect the suspension height between the base and the X-direction moving platform; and the second suspension height detection mechanism is arranged between the X-direction moving platform and the Y-direction moving platform so as to detect the suspension height between the X-direction moving platform and the Y-direction moving platform.
The first suspension height detection mechanism and the second suspension height detection mechanism are consistent in structure and comprise laser range finders and reflectors, the laser range finders corresponding to the X-direction moving platform are mounted on the bottom surface of the X-direction moving platform, and the reflectors corresponding to the laser range finders arranged on the bottom surface of the X-direction moving platform are mounted on the base along the X direction; y is to the bottom surface of moving platform installs correspondingly laser range finder, with set up Y is to the moving platform bottom surface laser range finder corresponding the speculum is installed along the Y direction on the X is to the moving platform.
Furthermore, the utility model also provides a sapphire measuring device, which comprises a measuring platform and a moving device for moving the measuring platform, wherein the moving device is a magnetic suspension type moving device for the sapphire measuring platform in any one of the technical schemes.
Through the scheme, the utility model has the following beneficial effects:
the sapphire measurement platform magnetic suspension type moving device realizes that an X-direction moving platform is suspended relative to a base through a first suspension mechanism, and then realizes that the X-direction moving platform moves relative to the base along the X direction through an X-direction driving mechanism; realize Y through the second suspension mechanism and to moving platform for X to moving platform suspension, realize Y again through Y to actuating mechanism and to moving platform for X to moving platform Y direction removal, do not have mechanical contact because of the suspension supports, so avoided the beating that arouses because of frictional resistance in the removal process, measured data is not influenced, and in long-time use, can not reduce the precision because of friction loss, also need not the maintenance, prevent that the emollient in the maintenance from polluting the product.
Additional features and advantages of the utility model will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model and not to limit the utility model. In the drawings:
FIG. 1 is a schematic structural diagram of a magnetic levitation type mobile device of a sapphire measuring platform according to the present invention;
FIG. 2 is a schematic structural diagram of a first suspension mechanism of the magnetic suspension type mobile device of the sapphire measurement platform of the present invention;
FIG. 3 is a front view of the magnetic levitation type mobile device of the sapphire measuring platform of the present invention;
fig. 4 is a right side view of the sapphire measuring platform magnetic levitation type mobile device of the present invention.
Description of the reference numerals
1 base 2X is to moving platform
3Y is to moving platform 4 suspension mechanism
5 drive mechanism 6 positioning mechanism
7 guide rail 8 support
9 suspension electromagnet 10 first magnet
11 guiding electromagnet 12 second magnet
13 parallel magnetic tracks 14 mover
15-scale grating 16-grating reading head
17 first suspension height detection mechanism 18 laser range finder
19 mirror 20 second suspension mechanism
21Y-direction driving mechanism and 22Y-direction positioning mechanism
23 second suspension height detection mechanism
Detailed Description
The following detailed description of the present invention is provided in conjunction with the accompanying drawings, and it is to be understood that the detailed description is provided only for the purpose of illustrating and explaining the present invention, and the scope of the present invention is not limited to the following detailed description.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "formed," "provided," "disposed," "connected," and the like are to be construed broadly, and for example, the connection may be a direct connection, an indirect connection via an intermediate medium, a fixed connection, a detachable connection, or an integral connection; either directly or indirectly through intervening connectors, either internally or in cooperative relationship to each other. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise specified, the terms "upper", "lower", and "bottom" are used to indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention; the directional terminology of the present invention should be understood in conjunction with the actual installation state.
In the prior art, a moving device of a sapphire measuring platform is usually matched with a guide rail and a sliding block and driven by a servo motor to move left and right around, and the measuring platform can bounce due to the existence of mechanical friction to influence measured data. The utility model provides a magnetic suspension type moving device of a sapphire measuring platform, moving parts are not contacted with each other in the moving process, the moving process of the measuring platform is stable, referring to figure 1, figure 1 is a structural schematic diagram of a specific embodiment of the magnetic suspension type moving device of the sapphire measuring platform, the magnetic suspension type moving device comprises a base 1, an X-direction moving platform 2, a Y-direction moving platform 3 for bearing sapphire for measurement, a first suspension mechanism 4, a second suspension mechanism 20, an X-direction driving mechanism 5 and a Y-direction driving mechanism 21, the X-direction moving platform 2 is positioned between the base 1 and the Y-direction moving platform 3, the base 1 supports the X-direction moving platform 2 through the first suspension mechanism 4, the X-direction moving platform 2 can move along the X direction relative to the base 1 under the driving of the X-direction driving mechanism 5, the X-direction moving platform 2 supports the Y-direction moving platform 3 through the second suspension mechanism 20, y can remove along the Y direction to moving platform 2 for X under Y drives to actuating mechanism 21, first suspension mechanism 4 and second suspension mechanism 20 set up and make the base, X does not have direct mechanical contact each other to moving platform and Y to moving platform three, when X direction and Y direction remove, X can not produce the beat to moving platform and Y to moving platform, ensure measured data's accuracy, and in the long-time use, can not reduce the precision because of the friction loss, need not the maintenance, thereby the risk that prior art used emollient when the maintenance caused product contamination has been avoided. In the above technical solution, the X direction and the Y direction are X axis and Y axis directions (labeled in fig. 1) in a two-dimensional coordinate system.
As a specific embodiment, the first suspension mechanism 4 and the second suspension mechanism 20 have the same structure, see fig. 2, and include a guide rail 7 and a bracket 8 that is matched with the guide rail 7, wherein the guide rail 7 is an "i" shaped guide rail, a first magnet 10 is disposed on the bottom surface of the upper arm of the guide rail 7, the bracket 8 is provided with a suspension electromagnet 9 that magnetically interacts with the first magnet 10, preferably, the suspension electromagnet 9 is disposed below the first magnet 10, the suspension electromagnet 9 is energized to generate a magnetic field, and under the action of the magnetic field, a magnetic force that attracts each other is formed between the suspension electromagnet 9 and the first magnet 10 to suspend the bracket 8 directly above the guide rail 7, and the magnetic field maintains a stable strength and suspension force by precisely controlling the current in the suspension electromagnet 9. It is conceivable that the bracket 8 may be suspended directly above the guide rail 7 by providing the first magnet 10 on the top surface of the upper arm of the guide rail 7, positioning the levitation electromagnet 9 provided on the bracket 8 above the first magnet 10, and forming a repulsive magnetic force between the levitation electromagnet 9 and the first electromagnet 10 by the magnetic field. Referring to fig. 3 to 4, a corresponding guide rail 7 is installed on the base 1, and a bracket 8 corresponding to the guide rail 7 is installed on the bottom surface of the X-direction moving platform 2, so that the X-direction moving platform 2 is suspended relative to the base 1, and the X-direction moving platform 2 moves in the X direction, and thus the guide rail 7 on the base 1 is arranged in the X direction; the X-direction moving table 2 is provided with a guide rail 7 for alignment, and a holder 8 corresponding to the guide rail 7 is attached to the bottom surface of the Y-direction moving table 3 so that the Y-direction moving table 3 floats with respect to the X-direction moving table 2 and the Y-direction moving table 3 moves in the Y-direction, whereby the guide rail 7 on the X-direction moving table 2 is arranged in the Y-direction.
As a specific embodiment, two outer sides of the upper arm of the guide rail 7 are provided with second magnets 12, two inner sides of the bracket 8 are provided with guide electromagnets 11 which magnetically interact with the second magnets 12, the guide electromagnets 11 are energized to generate a magnetic field, a certain gap is maintained between the bracket 8 and the two outer sides of the guide rail 7, when the bracket deflects during moving, the guide electromagnets 11 on the bracket 8 interact with the second magnets 12 under the action of the magnetic field to maintain the bracket stable and not to deflect, thereby achieving the purpose of controlling the moving direction of the X-direction moving platform 2 and the Y-direction moving platform 3.
As a preferred embodiment, a double-guide-rail structure is adopted between the base 1 and the X-direction moving platform 2 and between the X-direction moving platform 2 and the Y-direction moving platform 3, the double guide rails have higher precision when moving, and more stable suspension support is performed on the X-direction moving platform 2 or the Y-direction moving platform 3, specifically, two guide rails 7 are symmetrically installed on two sides of the base 1 along the X-direction, the X-direction moving platform 2 is suspended and supported by the corresponding support 8 in a matched manner, two guide rails 7 are symmetrically installed on two sides of the X-direction moving platform 2 along the Y-direction, and the Y-direction moving platform 3 is suspended and supported by the corresponding support 8 in a matched manner.
It should be noted that the structure of the X-direction driving mechanism 5 is the same as that of the Y-direction driving mechanism 21, both of which are linear motors, and the linear motors directly generate linear motion without passing through an intermediate conversion mechanism, so that the structure is greatly simplified, the motion inertia is reduced, the dynamic performance and the positioning accuracy are greatly improved, the reliability is also improved, and the cost is saved. The linear motor is preferably a U-slot linear motor, mainly comprising parallel magnetic tracks 13 and movers 14, the movers 14 are non-steel, meaning that there is no attraction force and no interference force is generated between the magnetic tracks and the thrust coils, corresponding parallel magnetic tracks 13 are installed on the base 1, the parallel magnetic tracks 13 are arranged along the X direction, corresponding movers 14 are installed on one support 8 corresponding to the X-direction moving platform 2 to drive the X-direction moving platform 2 to move along the X direction relative to the base 1; correspondingly, the X-direction moving platform 2 is provided with corresponding parallel magnetic tracks 13, the parallel magnetic tracks 13 are arranged along the Y direction, and one support 8 corresponding to the Y-direction moving platform 3 is provided with a corresponding mover 14 to drive the Y-direction moving platform 3 to move along the Y direction relative to the X-direction moving platform 2.
As a preferred embodiment, the magnetic suspension type moving device of the sapphire measurement platform further comprises an X-direction positioning mechanism 6 and a Y-direction positioning mechanism 22, wherein the X-direction positioning mechanism 6 arranged along the X direction is arranged between the base 1 and the X-direction moving platform 2 to confirm the moving position of the X-direction moving platform 2 relative to the base 1 along the X direction, so as to accurately confirm the position information of the X direction, and feed back the position information of the X direction to the X-direction driving mechanism 5, thereby realizing the accurate control of the moving amount of the magnetic suspension type moving device of the sapphire measurement platform in the X direction; and a Y-direction positioning mechanism 22 arranged along the Y direction is arranged between the X-direction moving platform 2 and the Y-direction moving platform 3 to confirm the moving position of the Y-direction moving platform 3 relative to the X-direction moving platform 2 along the Y direction, so that the position information of the Y direction is accurately confirmed, and the position information of the Y direction is fed back to the Y-direction driving mechanism 21, thereby realizing the accurate control of the Y-direction moving amount of the sapphire measurement platform magnetic suspension type moving device.
It should be noted that the X-direction positioning mechanism 6 and the Y-direction positioning mechanism 22 have the same structure, and both are grating scales, each grating scale includes a scale grating 15 and a grating reading head 16, the corresponding scale grating 15 is installed on the base 1, the scale grating 15 is arranged along the X direction, and the grating reading head 16 corresponding to the scale grating 15 is installed on the bottom surface of the X-direction moving platform 2; the X-direction moving platform 2 is provided with a corresponding scale grating 15, the scale grating 15 is arranged along the Y direction, the bottom surface of the Y-direction moving platform 2 is provided with a grating reading head 16 corresponding to the scale grating 15, and the grating reading head 16 acquires interference fringe variation parameters of the scale grating 15 so as to confirm the positions of the sapphire measuring platform magnetic suspension type moving device in the X direction and the Y direction.
As a preferred embodiment, the sapphire measurement magnetic levitation type moving device further comprises a first levitation height detection mechanism 17 and a second levitation height detection mechanism 23, wherein the first levitation height detection mechanism 17 is arranged between the base 1 and the X-direction moving platform 2 to detect the levitation height between the base 1 and the X-direction moving platform and feed back the levitation height to the first levitation mechanism 4 for adjustment; the second levitation height detection mechanism 23 is disposed between the X-direction moving stage 2 and the Y-direction moving stage 3 to detect the levitation height therebetween, and feeds back the detected levitation height to the second levitation mechanism 20 for adjustment.
The first flying height detecting means 17 and the second flying height detecting means 23 have the same structure, and are mainly composed of a laser range finder 18 and a reflecting mirror 19, the laser range finder 18 emits a ranging laser to the reflecting mirror 19, the ranging laser is received by the laser range finder 18 through the reflecting mirror 19, the distance between the laser range finder 18 and the reflecting mirror 19 is calculated through the time difference between emission and reception, the corresponding laser range finder 18 is installed on the bottom surface of the X-direction moving platform 2, and the reflecting mirror 19 corresponding to the laser range finder 18 is installed on the base 1 along the X-direction to measure the distance between the base 1 and the X-direction moving platform 2; a corresponding laser distance measuring device 18 is installed on the bottom surface of the Y-direction moving platform 3, and a reflecting mirror 19 corresponding to the laser distance measuring device 18 is installed on the X-direction moving platform 2 along the Y-direction to measure the distance between the X-direction moving platform 2 and the Y-direction moving platform 3.
In the above-described embodiments, "the first levitation mechanism 4 and the second levitation mechanism 20 are identical in structure", "the X-direction drive mechanism 5 is identical in structure with the Y-direction drive mechanism 21", "the X-direction positioning mechanism 6 is identical in structure with the Y-direction positioning mechanism 22", and "the first levitation height detection mechanism 17 is identical in structure with the second levitation height detection mechanism 23", where "identical in structure" merely means that the structures are identical, but the sizes and shapes of the structures are not necessarily identical.
In addition, the utility model also provides a sapphire measuring device which comprises a measuring platform and a moving device for moving the measuring platform, wherein the moving device is the sapphire measuring platform magnetic suspension type moving device in the technical scheme, the measuring platform is stable in the moving process of the sapphire measuring platform, the measured data is not influenced by the jumping of the measuring platform, and the data is accurate.
The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications all fall within the protection scope of the present invention.
It should be noted that the various features described in the above embodiments may be combined in any suitable manner without departing from the scope of the utility model. The utility model is not described in detail in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (10)
1. The utility model provides a sapphire measuring platform magnetic levitation formula mobile device, characterized in that, include base (1), X to moving platform (2), bear the weight of the sapphire and carry out measuring Y to moving platform (3), first suspension mechanism (4), second suspension mechanism (20), X to actuating mechanism (5) and Y to actuating mechanism (21), X is located to moving platform (2) base (1) with Y is to between moving platform (3), base (1) passes through first suspension mechanism (4) supports X is to moving platform (2), X is to moving platform (2) X can for under actuating mechanism (5) drive base (1) along X direction removal, X passes through second suspension mechanism (20) to moving platform (2) support Y is to moving platform (3), Y is to moving platform (3) Y can for under actuating mechanism (21) drive Y is to Y The X-direction moving platform (2) moves along the Y direction.
2. The sapphire measuring platform magnetic suspension type moving device as claimed in claim 1, wherein the first suspension mechanism (4) and the second suspension mechanism (20) are consistent in structure and comprise a guide rail (7) and a bracket (8) matched with the guide rail (7), the guide rail (7) is an I-shaped guide rail, a first magnet (10) is arranged on the bottom surface of the upper arm of the guide rail (7), and the bracket (8) is provided with a suspension electromagnet (9) magnetically interacting with the first magnet (10) so as to suspend the bracket (8) relative to the guide rail (7); the base (1) is provided with the corresponding guide rail (7), and the support (8) is arranged on the bottom surface of the X-direction moving platform (2) so that the X-direction moving platform (2) can be suspended relative to the base (1); the X is to installing on moving platform (2) correspondingly guide rail (7), support (8) are installed Y is to the bottom surface of moving platform (3), so that Y is to moving platform (3) for X is to moving platform (2) suspension.
3. The sapphire measuring platform magnetic suspension type moving device as claimed in claim 2, wherein two outer sides of the upper arm of the guide rail (7) are provided with second magnets (12), and two inner sides of the bracket (8) are provided with guide electromagnets (11) which magnetically interact with the second magnets (12), so that the bracket (8) does not deviate in the length direction of the guide rail (7).
4. The sapphire measurement platform magnetic suspension type moving device of claim 2, wherein a double-guide-rail structure is adopted between the base (1) and the X-direction moving platform (2) and between the X-direction moving platform (2) and the Y-direction moving platform (3).
5. The sapphire measurement platform magnetic suspension type moving device as claimed in claim 2, wherein the X-direction driving mechanism (5) and the Y-direction driving mechanism (21) are consistent in structure, and both are U-slot type linear motors, each of the U-slot type linear motors comprises a parallel magnetic track (13) and a mover (14), the corresponding parallel magnetic track (13) is mounted on the base (1), and the corresponding mover (14) is mounted on one of the supports (8) corresponding to the X-direction moving platform (2) so as to drive the X-direction moving platform (2) to move in the X direction relative to the base (1); x is to installing on moving platform (2) corresponding parallel magnetic track (13), with Y is to moving platform (3) corresponding one install on support (8) corresponding active cell (14) to the drive Y is to moving platform (3) for X moves along the Y direction to moving platform (2).
6. The sapphire measurement platform magnetic suspension type moving device as claimed in claim 1, further comprising an X-direction positioning mechanism (6) and a Y-direction positioning mechanism (22), wherein the X-direction positioning mechanism (6) arranged along the X direction is arranged between the base (1) and the X-direction moving platform (2) to confirm the moving position of the X-direction moving platform (2) relative to the base (1) along the X direction; and a Y-direction positioning mechanism (22) arranged along the Y direction is arranged between the X-direction moving platform (2) and the Y-direction moving platform (3) so as to confirm the moving position of the Y-direction moving platform (3) relative to the X-direction moving platform (2) along the Y direction.
7. The sapphire measurement platform magnetic suspension type moving device according to claim 6, wherein the X-direction positioning mechanism (6) and the Y-direction positioning mechanism (22) are consistent in structure, both are grating rulers, each grating ruler comprises a scale grating (15) and a grating reading head (16), the corresponding scale grating (15) is installed on the base (1), and the grating reading head (16) corresponding to the scale grating (15) installed on the base (1) is installed on the bottom surface of the X-direction moving platform (2); x installs the correspondence to moving platform (2) scale grating (15), Y is installed and is installed to the bottom surface of moving platform (3) X is to moving platform (2) on scale grating (15) correspond grating reading head (16).
8. The sapphire measurement platform magnetic suspension type mobile device according to claim 1, further comprising a first suspension height detection mechanism (17) and a second suspension height detection mechanism (23), wherein the first suspension height detection mechanism (17) is arranged between the base (1) and the X-direction mobile platform (2) to detect the suspension height between the base and the X-direction mobile platform; and a second suspension height detection mechanism (23) is arranged between the X-direction moving platform (2) and the Y-direction moving platform (3) to detect the suspension height between the X-direction moving platform and the Y-direction moving platform.
9. The sapphire measuring platform magnetic suspension type moving device as claimed in claim 8, wherein the first suspension height detecting mechanism (17) and the second suspension height detecting mechanism (23) are consistent in structure and comprise laser range finders (18) and reflecting mirrors (19), the laser range finders (18) corresponding to the bottom surfaces of the X-direction moving platform (2) are mounted on the base (1) along the X direction, and the reflecting mirrors (19) corresponding to the laser range finders (18) arranged on the bottom surfaces of the X-direction moving platform (2) are mounted on the base (1) along the X direction; y is to the bottom surface of moving platform (3) install corresponding laser range finder (18), with set up Y is to moving platform (3) bottom surface laser range finder (18) corresponding speculum (19) are installed along the Y direction on X is to moving platform (2).
10. A sapphire measuring device, comprising a measuring platform and a moving device for moving the measuring platform, wherein the moving device is the sapphire measuring platform magnetic suspension type moving device in any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122998681.3U CN216593476U (en) | 2021-12-01 | 2021-12-01 | Sapphire measuring platform magnetic suspension type moving device and sapphire measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122998681.3U CN216593476U (en) | 2021-12-01 | 2021-12-01 | Sapphire measuring platform magnetic suspension type moving device and sapphire measuring device |
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| Publication Number | Publication Date |
|---|---|
| CN216593476U true CN216593476U (en) | 2022-05-24 |
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| CN202122998681.3U Active CN216593476U (en) | 2021-12-01 | 2021-12-01 | Sapphire measuring platform magnetic suspension type moving device and sapphire measuring device |
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| CN (1) | CN216593476U (en) |
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2021
- 2021-12-01 CN CN202122998681.3U patent/CN216593476U/en active Active
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