CN207888237U - A kind of ultrasonic wave added overcomes friction linear motion platform - Google Patents
A kind of ultrasonic wave added overcomes friction linear motion platform Download PDFInfo
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- CN207888237U CN207888237U CN201721781418.6U CN201721781418U CN207888237U CN 207888237 U CN207888237 U CN 207888237U CN 201721781418 U CN201721781418 U CN 201721781418U CN 207888237 U CN207888237 U CN 207888237U
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- motion platform
- workbench
- ultrasonic wave
- wave added
- linear motion
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Abstract
It includes the components such as workbench, piezoelectric stack, flexible hinge chain group, auxiliary body and driver that the ultrasonic wave added of the utility model, which overcomes friction linear motion platform mainly,.Wherein, the auxiliary body is made of the identical plate in four parts, and each plate is connected through a screw thread to be connect with each sliding block, and each plate is threadably connect by the flexible hinge chain group with the workbench.The driver applies driving force effect in the workbench, drives the flexible hinge that flexible deformation occurs, realizes the orientation displacement of entire motion platform.Piezoelectric stack is mounted in by stud between two plates of same side rail, the piezoelectric ceramics applies mechanical stress and acts on the sliding block, overcome the stiction between the sliding block and guide rail, prevent Frotteurism from switching sudden change of acceleration caused by moment, above-mentioned " shake " phenomenon is eliminated, positioning accuracy is improved.
Description
Technical field
The utility model is related to the technical fields of motion platform, overcome friction straight more particularly, to a kind of ultrasonic wave added
Line motion platform.
Background technology
Due to having the characteristics that small, high resolution, noiseless and easy to control, piezoelectric ceramics are flat in high speed and precision movement
It is widely applied in platform design.In high speed and precision motion platform, when motion platform starts, stops or carry out Fine Feed
When, relatively lower speed, the uncertainty of surface roughness can lead to the amplitude fluctuations of frictional resistance between kinematic pair, to
Motion platform is set " creeping " phenomenon occur.Under closed-loop control system effect, driver will be by way of increasing driving force
To overcome frictional resistance, the position error of compensation campaign platform.In above-mentioned compensation process, motion platform will be undergone frequently
" static → movement " state switching.During " static → movement ", the frictional resistance between kinematic pair can undergo " stiction
The state of → kinetic force of friction " switches, and the difference of confficient of static friction and the coefficient of kinetic friction can lead to above-mentioned state switching moment
Sudden change of acceleration causes " shake " of the motion platform near final position location, influences positioning accuracy.How to reduce and is opening
" shake " phenomenon caused by switching due to Frotteurism during dynamic, stopping and Fine Feed is to influence high speed and precision motion platform to hold
The major issue of row precision.
To solve the above problems, currently used solution has：
1. using the kinematic pair design without friction or low friction, for example, by using structures such as air-float guide rail, magnetic suspended guides.
Its existing main problem is that manufacturing cost and use cost is higher.
2. establishing accurate Frictional model, and driving force is compensated using motion control.Frictional force results from tool
Between having the contact surface of relative motion, by relative acceleration, displacement, lubrication circumstances and the shadow for showing many factors such as contact condition
It rings, so it is difficult to establish high-precision Frictional model, causes to need complicated compensating control method in motion control.
Invention content
The utility model is at least one defect overcome described in the above-mentioned prior art, provides a kind of ultrasonic wave added and overcomes and rubs
Linear motion platform is wiped, used technical solution is as follows.
A kind of ultrasonic wave added overcomes friction linear motion platform, which is characterized in that the motion platform includes：It is engine base, straight
Line guide rail, guide rail slide block, workbench, auxiliary body, flexible hinge chain group, linear motor driver, piezoelectric stack and displacement detecting
Device；The linear guide is mounted on the engine base；The guide rail slide block is set in the linear guide, and can be in institute
It states and is slided in the linear guide；The auxiliary body includes two plates, and the auxiliary body is mounted on the guide rail slide block；Institute
Workbench is stated to connect with the auxiliary body by the flexible hinge chain group；The linear motor driver applies the workbench
Add driving force, the driving force that can make the flexible hinge chain group that flexible deformation occur, and then so that the workbench is generated edge and lead
The straight-line displacement of rail length direction；The piezoelectric stack is fixed between described two plates of the auxiliary body；Institute's rheme
Move position of the detection device for workbench described in Real-time Feedback.
Further, at least provided with two guide rail slide blocks in the linear guide described in each；Each described plate
It is separately mounted on two different guide rail slide blocks.
Further, the flexible hinge chain group includes multiple flexible hinges, and each plate is at least described soft with one
Property hinge connection.
Further, the shifting detection device includes：Grating scale open position moves sensor and grating scale；Grating scale open position move sensor with
Workbench connects, and together with loaded on the grating scale on pedestal, measures the displacement of motion platform in any case in real time.
Further, the linear motor driver includes linear motor rotor and linear motor stator electric, the linear motor
Mover applies driving force under electromagnetic force to the workbench.
Further, the flexible hinge is independent processing, detachable cut type flexible hinge.
Further, described two plates of the auxiliary body are rigid connection or do integral.Setting can be real in this way
Now better synchronous effect.
Compared with prior art, advantageous effect is：
1. eliminating the frictional resistance of guide rail using piezoelectric ceramics, the friction in pairs state under speed operation that avoids switches
Lead to " shake " phenomenon caused by sudden change of acceleration, is advantageously implemented higher positioning accuracy；
2. Platform Designing is more compact, simple in structure, cost is relatively low, applied widely.
Description of the drawings
Fig. 1 is the implementation schematic diagram of the utility model.
Fig. 2 is the implementation partial sectional view and partial enlarged view of the utility model.
Fig. 3 is the implementation front cross sectional view of the utility model.
Fig. 4 is the operation principle schematic diagram that ultrasonic wave added described in the utility model overcomes friction linear motion platform.
Fig. 5 is the force analysis schematic diagram of the sliding block of the utility model.
Reference sign：1. pedestal, 2. the linear guides, 3. auxiliary bodies, 4. flexible hinges, 5. piezoelectric stacks, 6. is straight
Line electric mover, 7. linear motor stator electrics, 8. grating scales, 9. workbench, 10,11,12 and 13. guide rail slide blocks, 14. anticollisions dress
It sets, 15. studs, 16. grating rule displacement sensors.
Specific implementation mode
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；It is attached in order to more preferably illustrate the present embodiment
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of position relationship described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figs. 1-3, it includes engine base 1 that this ultrasonic wave added, which overcomes friction linear motion platform, carries entire infrastructure.Directly
Line guide rail 2 is mounted on engine base.Linear motor driver is made of linear motor rotor 6 and linear motor stator electric 7.Its cathetus
Electric mover 6 can apply driving force under electromagnetic force to workbench 9.The driving force can make four flexible hinges 4
Flexible deformation occurs, and then entire motion platform is made to generate the straight-line displacement along rail length direction.Each flexible hinge 4 passes through
Thread connecting mode, upper even workbench 9, Xia Lian auxiliary bodies 3.Auxiliary body 3 is made of the identical plate in four parts, each plate
It is connect with each sliding block by screw thread, each plate is connect by flexible hinge 4 with workbench 9.In order to realize better synchronous effect,
Two plates before and after the guide rail of auxiliary body 3 can be rigidly connected or do respectively integral.Linear motor driver applies
Driving force effect drives flexible hinge 4 that flexible deformation occurs, realizes the orientation displacement of entire motion platform in workbench 9.Grating
Ruler open position moves sensor 16 and is connect with workbench 9, and motion platform together, is measured in real time arbitrary with loaded on the grating scale 8 on pedestal 1
In the case of displacement.Piezoelectric stack 5 is mounted in by stud between two plates of the auxiliary body of same side rail.Work as fortune
Moving platform starts, stop or when Fine Feed, relative velocity is relatively low, two piezoelectric stacks 5 under the action of high frequency electrical signal,
Generate high-frequency mechanical vibration shown in Fig. 4 (II).When piezoelectric stack 5 is in elongation state, sliding block 11 and 12 by thrust, into
And overcome stiction and carried out micro-displacement, and sliding block 10 and 13 under tensions are not enough to overcome stiction and keep quiet
Only；When piezoelectric stack 5 is in contraction state, sliding block stress is sliding just on the contrary, sliding block 10 and 13 has been carried out micro-displacement by thrust
Block 11 and 12 under tensions and remains stationary.Thus it recycles, the stiction of guide rail and sliding block is overcome by two piezoelectric stacks,
Prevent Frotteurism from switching sudden change of acceleration caused by moment, avoiding friction in pairs state switching under speed operation causes to add
" shake " phenomenon caused by velocity jump, is advantageously implemented higher positioning accuracy.Under high-speed working condition, piezoelectric stack not work
Make, motion platform moves under the driving of linear motor.
The utility model ultrasonic wave added overcomes the operation principle of friction linear motion platform as follows：
Fig. 4 (I) is when the startup of motion platform, and due to the presence of stiction, motion platform has friction " dead zone ", is driven
Dynamic device continues to increase driving force, until being more than stiction, motion platform could setting in motion.Fig. 4 (II) is that piezoelectric stack 5 exists
Under the action of high frequency electrical signal, high frequency sound signal (mechanical oscillation) is generated.
Fig. 5 is the two states when piezoelectric stack is run：(I) it when being in elongation state for piezoelectric stack 5, generates
Mechanical stress act on sliding block, for wherein sliding block A by thrust, slide block B under tension is sliding under the collective effect of driving force F
Block A overcomes stiction and has carried out micro-displacement, and slide block B is not enough to overcome stiction and remains stationary due under tension；
(II) when being in contraction state for piezoelectric stack 5, the stressing conditions of two sliding blocks are just on the contrary, slide block B is driven by thrust in motor
Under the collective effect of power F, slide block B overcomes stiction and has carried out micro-displacement, and sliding block A is not enough to overcome due under tension
Stiction and remains stationary.
Obviously, above-described embodiment of the utility model is only intended to clearly illustrate the utility model example, and
It is not the restriction to the embodiment of the utility model.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
It is exhaustive.All any modification, equivalent and improvement made within the spirit and principle of the present invention etc., should be included in
Within the protection domain of the utility model claims.
Claims (7)
1. a kind of ultrasonic wave added overcomes friction linear motion platform, which is characterized in that the motion platform includes：Engine base, straight line
Guide rail, guide rail slide block, workbench, auxiliary body, flexible hinge chain group, linear motor driver, piezoelectric stack and displacement detecting dress
It sets；
The linear guide is mounted on the engine base；
The guide rail slide block is set in the linear guide, and can be slided in the linear guide；
The auxiliary body includes two plates, and the auxiliary body is mounted on the guide rail slide block；
The workbench is connect by the flexible hinge chain group with the auxiliary body；
The linear motor driver applies driving force to the workbench, and the driving force can be such that the flexible hinge chain group sends out
Raw flexible deformation, and then the workbench is made to generate the straight-line displacement along rail length direction；
The piezoelectric stack is fixed between described two plates of the auxiliary body；
Position of institute's displacement sensing device for workbench described in Real-time Feedback.
2. ultrasonic wave added according to claim 1 overcomes friction linear motion platform, which is characterized in that straight described in each
At least provided with two guide rail slide blocks on line guide rail；Each described plate is separately mounted to two different guide rails
On sliding block.
3. ultrasonic wave added according to claim 1 or 2 overcomes friction linear motion platform, which is characterized in that the flexibility
Hinge set includes multiple flexible hinges, and each plate is at least connect with a flexible hinge.
4. ultrasonic wave added according to claim 1 or 2 overcomes friction linear motion platform, which is characterized in that the shifting inspection
Surveying device includes：Grating scale open position moves sensor and grating scale；Grating scale open position moves sensor and is connect with workbench, and loaded on pedestal
Grating scale together, measure motion platform displacement in any case in real time.
5. ultrasonic wave added according to claim 1 or 2 overcomes friction linear motion platform, which is characterized in that the straight line
Motor driver includes linear motor rotor and linear motor stator electric, and the linear motor rotor is under electromagnetic force to described
Workbench applies driving force.
6. ultrasonic wave added according to claim 1 or 2 overcomes friction linear motion platform, which is characterized in that the flexibility
Hinge is independent processing, detachable cut type flexible hinge.
7. ultrasonic wave added according to claim 1 or 2 overcomes friction linear motion platform, which is characterized in that the auxiliary
Described two plates of mechanism are rigid connection or do integral.
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| CN201721781418.6U CN207888237U (en) | 2017-12-19 | 2017-12-19 | A kind of ultrasonic wave added overcomes friction linear motion platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015564A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of ultrasonic wave added overcomes friction linear motion platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015564A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of ultrasonic wave added overcomes friction linear motion platform |
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