CN216473581U - Graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment - Google Patents
Graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment Download PDFInfo
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- CN216473581U CN216473581U CN202220012029.1U CN202220012029U CN216473581U CN 216473581 U CN216473581 U CN 216473581U CN 202220012029 U CN202220012029 U CN 202220012029U CN 216473581 U CN216473581 U CN 216473581U
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- graphite
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- silicon carbide
- frame ring
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Abstract
The application provides a graphite quick detach device and carborundum epitaxial equipment for carborundum epitaxial equipment, the graphite subassembly has been held in the carborundum epitaxial equipment, the graphite subassembly includes graphite spare and lower graphite spare, its characterized in that, graphite quick detach device includes: the fixing frame ring is annular, and a clamping groove is formed in the inner peripheral part of the fixing frame ring; and a quick-dismantling ring, the quick-dismantling ring is circular, the quick-dismantling ring is located the radial inboard of mount circle, the peripheral part of quick-dismantling ring is provided with joint portion, the quick-dismantling ring is used for supporting in the silicon carbide epitaxial equipment graphite spare down, wherein, joint portion with when the draw-in groove is aligned, the quick-dismantling ring can pass the centre bore of mount circle, joint portion with when the draw-in groove staggers, the quick-dismantling ring can't pass the centre bore of mount circle, thereby the mount circle can support the quick-dismantling ring.
Description
Technical Field
The application belongs to the field of silicon carbide epitaxial equipment, and particularly relates to a graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment.
Background
When the lower graphite piece in the cavity is replaced, the cavity cover, the heating and heat-insulating device and the upper graphite piece are required to be completely detached, and then the lower graphite piece can be replaced. The parts that need dismantle like this are many, and frequent repeated dismantlement probably makes the life of part reduce, increases the risk that the part damaged to when installation will repeated positioning, increase the installation degree of difficulty, the inefficiency of graphite spare under the change.
SUMMERY OF THE UTILITY MODEL
The application aims at providing a graphite quick detach device for silicon carbide epitaxial equipment to graphite spare under can the quick replacement.
The application provides a graphite quick detach device for silicon carbide equipment of extending, silicon carbide holds the graphite subassembly in the equipment of extending, the graphite subassembly includes graphite spare and lower graphite spare, its characterized in that, graphite quick detach device includes:
the fixing frame ring is annular, and a clamping groove is formed in the inner peripheral part of the fixing frame ring; and
the quick-release frame ring is in a circular ring shape and is positioned on the radial inner side of the fixed frame ring, the peripheral part of the quick-release frame ring is provided with a clamping part, the quick-release frame ring is used for supporting the lower graphite piece in the silicon carbide epitaxial equipment,
wherein the content of the first and second substances,
when the clamping portion is aligned with the clamping groove, the quick-release frame ring can penetrate through the center hole of the fixed frame ring, and when the clamping portion is staggered with the clamping groove, the quick-release frame ring cannot penetrate through the center hole of the fixed frame ring, so that the fixed frame ring can support the quick-release frame ring.
Preferably, the circumferential length of the clamping groove is greater than or equal to the circumferential length of the clamping portion.
Preferably, a plurality of the clamping grooves are arranged in the circumferential direction of the fixed frame ring, and a plurality of the clamping portions are arranged in the circumferential direction of the quick-release frame ring.
Preferably, the lower graphite piece is located at the lower side of the upper graphite piece, and the graphite quick release device is used for dismounting the lower graphite piece.
Preferably, the bottom of the lower graphite piece is provided with a positioning ring, the positioning ring is located on the radial inner side of the quick-release frame ring, and the outer peripheral surface of the positioning ring is matched with the inner peripheral surface of the quick-release frame ring, so that the quick-release frame ring and the positioning ring are positioned in the radial direction.
Preferably, the inner periphery of the quick-release frame ring is provided with a positioning convex part, the periphery of the positioning ring is provided with a positioning groove, and the positioning convex part is embedded into the positioning groove.
The application also provides silicon carbide epitaxial equipment, which comprises the graphite quick release device in any one of the technical schemes.
Preferably, silicon carbide epitaxial equipment still includes the cavity, the cavity includes cavity base, cavity main part and chamber lid, cavity base detachably connect in the bottom of cavity main part, the chamber lid connect in the top of cavity main part.
Preferably, the silicon carbide epitaxial equipment further comprises a heating and heat-insulating device, and the heating and heat-insulating device is positioned between the cavity body and the graphite assembly.
Preferably, the upper graphite piece and the heating and heat-preserving device are fixedly connected to the cavity body and/or the cavity cover.
Through adopting above-mentioned technical scheme, can follow the lower part of cavity and dismantle graphite spare, the part that need demolish is less, and easy operation is convenient, and the efficiency of graphite spare is higher under the change, can also reduce the risk that the part damaged.
Drawings
Fig. 1 shows a schematic structural view of a silicon carbide epitaxial apparatus according to an embodiment of the present application.
Fig. 2 shows a schematic bottom view of a silicon carbide epitaxial apparatus (without a chamber base) according to an embodiment of the present application.
Fig. 3 shows a schematic structural view of a mount ring of a silicon carbide epitaxial apparatus according to an embodiment of the present application.
Fig. 4 shows a schematic structural diagram of a quick-release ring of a silicon carbide epitaxial apparatus according to an embodiment of the present application.
Fig. 5 shows a schematic structural diagram of a retaining ring of a silicon carbide epitaxial apparatus according to an embodiment of the present application.
Description of the reference numerals
1 cavity 11 cavity base 12 cavity body 13 cavity cover
2 positioning groove of positioning ring 231 of upper graphite piece 22 and lower graphite piece 23 of graphite assembly 21
3 heating and heat preservation device
4 clamping groove of fixing frame ring 41
5 quick-release frame ring 51 clamping part 52 positioning convex part
The A axis is towards the C circumference.
Detailed Description
In order to more clearly illustrate the above objects, features and advantages of the present application, a detailed description of the present application is provided in this section in conjunction with the accompanying drawings. This application is capable of embodiments in addition to those described herein, and is intended to cover such departures from the present disclosure as come within known or customary practice in the art to which this application pertains and which fall within the limits of the appended claims. The protection scope of the present application shall be subject to the claims.
As shown in fig. 1 to 5, the present application proposes a silicon carbide epitaxial apparatus, which is an apparatus for growing a homogeneous silicon carbide epitaxial layer on a silicon carbide single crystal substrate. The silicon carbide epitaxial equipment comprises a cavity 1, a heating and heat-preserving device 3, a fixed frame ring 4 and a quick-dismantling frame ring 5. The heating and heat-insulating device 3, the fixed frame ring 4 and the quick-release frame ring 5 are all accommodated in the cavity 1.
The chamber 1 includes a chamber base 11, a chamber body 12, and a chamber cover 13. The chamber body 12 may be cylindrical, the chamber base 11 may be detachably coupled to the bottom of the chamber body 12, for example, by screws, and the chamber cover 13 may be coupled to the top of the chamber body 12.
The interior of the chamber 1 is also provided with a graphite assembly 2. The graphite assembly 2 includes an upper graphite member 21 and a lower graphite member 22, and each of the upper graphite member 21 and the lower graphite member 22 may have a cylindrical shape. The upper graphite member 21 may be fixedly coupled to the chamber body 12 and/or the chamber cover 13 such that the upper graphite member 21 may be lifted up with the chamber body 12 or the chamber cover 13. The lower graphite piece 22 is located on one side (lower side in fig. 1) in the axial direction a of the upper graphite piece 21.
The bottom of the lower graphite part 22 may be provided with a positioning ring 23, and the positioning ring 23 may be positioned in cooperation with the quick release ring 5. Alternatively, the outer periphery of the positioning ring 23 is provided with a positioning groove 231, and the positioning groove 231 may be recessed upward from the lower surface of the outer peripheral portion of the positioning ring 23. The positioning convex part 52 of the quick-release frame ring 5 is embedded into the positioning groove 231, so that the mounting position of the lower graphite piece 22 can be accurately positioned.
The heating and heat-preserving device 3 is arranged in the cavity 1, and the heating and heat-preserving device 3 can heat the interior of the cavity. For example, the heating and insulating device 3 may be cylindrical, and the heating and insulating device 3 may be disposed between the graphite assembly 2 and the chamber 1.
The retainer ring 4 may be annular and the retainer ring 4 may be attached to the chamber body 12. The inner peripheral surface of the mount ring 4 is provided with a snap groove 41, the snap groove 41 is recessed radially outward from the inner peripheral surface of the mount ring 4, and the inner diameter of the snap groove 41 is larger than the inner diameter of the other position of the mount ring 4. The plurality of the clamping grooves 41 may be arranged in the circumferential direction C of the fixing frame ring 4, for example, the fixing frame ring 4 may be provided with 4 clamping grooves 41, and the 4 clamping grooves 41 are arranged at regular intervals.
The inner diameter of the fixed frame ring 4 is larger than or equal to the outer diameter of the lower graphite piece 22, and the lower graphite piece 22 can move along the axial direction A in the central hole of the fixed frame ring 4.
The quick-release frame ring 5 can be in a circular ring shape, the quick-release frame ring 5 is located on the radial inner side of the fixed frame ring 4, the periphery of the quick-release frame ring 5 is provided with a clamping portion 51, the clamping portion 51 protrudes from the outer peripheral surface of the quick-release frame ring 5 to the radial outer side, and the outer diameter of the clamping portion 51 is larger than the outer diameters of other positions of the quick-release frame ring 5. The plurality of snap-in portions 51 may be provided in the circumferential direction C of the quick release ring 5. The number of the clamping portions 51 is the same as that of the clamping slots 41, for example, the quick release frame ring 5 may be provided with 4 clamping portions 51, and the 4 clamping portions 51 are uniformly arranged at intervals.
The circumferential dimension of the snap-in portion 51 is smaller than or equal to the circumferential dimension of the snap groove 41, and the outer diameter of the snap-in portion 51 is smaller than or equal to the inner diameter of the snap groove 41. When the clamping portion 51 and the clamping groove 41 are aligned, the quick release frame ring 5 can pass through the center hole of the fixed frame ring 4, and when the clamping portion 51 and the clamping groove 41 are staggered, the quick release frame ring 5 cannot pass through the center hole of the fixed frame ring 4.
The quick release ring 5 is located below the lower graphite member 22 and is capable of supporting the lower graphite member 22. The inner peripheral surface of the quick-release frame ring 5 is matched with the outer peripheral surface of the positioning ring 23, so that the lower graphite piece 22 and the quick-release frame ring 5 are positioned and installed, relative movement of the lower graphite piece and the quick-release frame ring 5 in the radial direction is limited, and the lower graphite piece 22 is positioned and installed conveniently.
The mount ring 4 or the quick-release frame ring 5 can be provided with a limiting part, the joint part 51 and the clamping groove 41 are limited by the limiting part to stagger the angle, the quick-release frame ring 5 is prevented from rotating excessively, the overlapping part of the joint part 51 and the mount ring 4 is too small, and the weight of the graphite piece 22 is difficult to stably support.
Alternatively, the inner periphery of the quick release ring 5 is provided with positioning projections 52, and the positioning projections 52 may project radially inward from the inner periphery of the quick release ring 5. The mounting position of the lower graphite member 22 can be accurately positioned by the positioning projection 52 and the positioning ring 23.
When the lower graphite member 22 is replaced, the chamber body 12 and the chamber body 12 are lifted to a certain height by separating the chamber body 11 from the chamber body 12. The quick release ring 5 is then rotated to align the snap-fit portion 51 with the snap-fit slot 41, and the quick release ring 5 and the lower graphite member 22 can be removed from the chamber body 12. A new lower graphite piece 22 is placed over the quick release ring 5 so that the inner circumferential surface of the quick release ring 5 mates with the outer circumferential surface of the retaining ring 23. Then, the clamping portion 51 and the clamping groove 41 are aligned, the quick-release frame ring 5 penetrates through the center hole of the fixed frame ring 4 from bottom to top, then the quick-release frame ring 5 is rotated to stagger the clamping portion 51 and the clamping groove 41, and the fixed frame ring 4 can support the quick-release frame ring 5 and the lower graphite piece 22. The chamber body 12 is then lowered and coupled to the chamber base 11 to complete the replacement of the lower graphite member 22.
In the process of replacing the lower graphite piece 22, the number of detached parts is small, the operation is simple and convenient, the efficiency of replacing the lower graphite piece 22 is high, the risk of part damage can be reduced, and the difficulty in disassembly and assembly is reduced.
While the present application has been described in detail with reference to the above embodiments, it will be apparent to those skilled in the art that the present application is not limited to the embodiments described in the present specification. The present application can be modified and implemented as a modified embodiment without departing from the spirit and scope of the present application defined by the claims. Therefore, the description in this specification is for illustrative purposes and does not have any limiting meaning for the present application.
Claims (10)
1. The utility model provides a graphite quick detach device for silicon carbide epitaxial equipment, the silicon carbide epitaxial equipment is inside to be held graphite assembly, graphite assembly includes graphite spare and lower graphite spare, its characterized in that, graphite quick detach device includes:
the fixing frame ring is annular, and a clamping groove is formed in the inner peripheral part of the fixing frame ring; and
the quick-release frame ring is in a circular ring shape and is positioned on the radial inner side of the fixed frame ring, the peripheral part of the quick-release frame ring is provided with a clamping part, the quick-release frame ring is used for supporting the lower graphite piece in the silicon carbide epitaxial equipment,
wherein the content of the first and second substances,
when the clamping portion is aligned with the clamping groove, the quick-release frame ring can penetrate through the center hole of the fixed frame ring, and when the clamping portion is staggered with the clamping groove, the quick-release frame ring cannot penetrate through the center hole of the fixed frame ring, so that the fixed frame ring can support the quick-release frame ring.
2. The graphite quick release device for silicon carbide epitaxial equipment according to claim 1, wherein the circumferential length of the clamping groove is greater than or equal to the circumferential length of the clamping portion.
3. The graphite quick release device for silicon carbide epitaxial equipment as claimed in claim 1, wherein a plurality of the clamping grooves are arranged in the circumferential direction of the fixed frame ring, and a plurality of the clamping portions are arranged in the circumferential direction of the quick release frame ring.
4. The graphite quick release device for silicon carbide epitaxial equipment according to claim 1, wherein the lower graphite piece is located at the lower side of the upper graphite piece, and the graphite quick release device is used for dismounting the lower graphite piece.
5. The graphite quick release device for silicon carbide epitaxial equipment according to claim 1, wherein the bottom of the lower graphite piece is provided with a positioning ring, the positioning ring is located at the radial inner side of the quick release frame ring, and the outer peripheral surface of the positioning ring is matched with the inner peripheral surface of the quick release frame ring, so that the quick release frame ring and the positioning ring are radially positioned.
6. The graphite quick release device for silicon carbide epitaxy equipment as claimed in claim 5, wherein the inner circumference of the quick release ring is provided with a positioning protrusion, the outer circumference of the positioning ring is provided with a positioning groove, and the positioning protrusion is embedded into the positioning groove.
7. Silicon carbide epitaxial equipment, characterized in that it comprises the graphite quick release device of any one of claims 1 to 6.
8. Silicon carbide epitaxy apparatus according to claim 7 further comprising a chamber base detachably connected to the bottom of the chamber body, a chamber body and a chamber cover connected to the top of the chamber body.
9. Silicon carbide epitaxy apparatus according to claim 8, further comprising heating and temperature maintenance means located between the chamber body and the graphite assembly.
10. Silicon carbide epitaxy apparatus according to claim 9, wherein the upper graphite element and the thermal holding means are fixedly attached to the chamber body and/or the chamber cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220012029.1U CN216473581U (en) | 2022-01-05 | 2022-01-05 | Graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220012029.1U CN216473581U (en) | 2022-01-05 | 2022-01-05 | Graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216473581U true CN216473581U (en) | 2022-05-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220012029.1U Active CN216473581U (en) | 2022-01-05 | 2022-01-05 | Graphite quick-release device for silicon carbide epitaxial equipment and silicon carbide epitaxial equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216473581U (en) |
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- 2022-01-05 CN CN202220012029.1U patent/CN216473581U/en active Active
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