CN216229614U - Semiconductor processing silicon wafer cutting equipment - Google Patents

Abstract

The utility model discloses a semiconductor processing silicon wafer cutting device, which comprises a box body, wherein a servo motor is arranged at the middle position of an inner cavity of the box body close to the left side, an output shaft of the servo motor is fixedly connected with a cutting knife, and the top of the servo motor is fixedly connected with a connecting plate. The device is convenient to move and fix and convenient to use.

Description

Semiconductor processing silicon wafer cutting equipment

Technical Field

The utility model relates to the technical field of silicon wafers, in particular to a silicon wafer cutting device for semiconductor processing.

Background

A wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular, a round wafer is a silicon chip used for manufacturing a silicon semiconductor integrated circuit, and is called a round wafer because the wafer is circular, and a round wafer is a carrier used for manufacturing an integrated circuit.

Because traditional semiconductor processing silicon wafer cutting equipment, at the in-process that uses, be not convenient for adjust the cutting knife and place the board to lead to cutting inefficiency, traditional device does not have simultaneously and can removes and fix the mechanism to the wheel to the device, thereby leads to the practicality of device poor.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model aims to provide a silicon wafer cutting device for semiconductor processing.

One of the purposes of the utility model is realized by adopting the following technical scheme:

a cutting device for semiconductor processing silicon wafers comprises a box body, wherein a servo motor is arranged at the position, close to the left side, of the middle position of an inner cavity of the box body, an output shaft of the servo motor is fixedly connected with a cutting knife, a connecting plate is fixedly connected with the top of the servo motor, a rolling mechanism is arranged at the bottom of the box body, an opening is formed in the front side of the box body, a cutting mechanism is arranged at the position, close to the top, of the left side of the inner cavity of the box body, a workbench is arranged at the position, close to the right side, of the bottom of the inner cavity of the box body, a first sliding block is fixedly connected with the bottom of the workbench, a first sliding groove matched with the first sliding block is formed in the bottom of the inner cavity of the box body, the first sliding block is movably connected with the inner cavity of the first sliding groove, an adjusting mechanism is arranged on the right side of the workbench, a placing plate is fixedly connected with the top of the workbench, a cover plate is arranged at the top of the placing plate, and semicircular grooves are formed in the top of the placing plate and the bottom of the cover plate, two fixed plates of front side fixedly connected with of apron, and two the fixed plate sets up for controlling, two be equipped with the movable frame between the fixed plate, the movable frame left and right sides is close to top department and has all seted up first perforation, two first fenestrate inner chamber runs through jointly and is equipped with the pivot, both ends respectively with adjacent fixed plate swing joint about the pivot, the front side of placing the board is close to top department and is equipped with the L shaped plate, L shaped plate rear side fixedly connected with second slider, the front side of placing the board is close to top department and sets up the second spout that matches each other with the second slider, second slider swing joint is at the inner chamber of second spout, one side that the second slider was kept away from to the L shaped plate is pegged graft at the inner chamber of movable frame.

Furthermore, the rear side of the cover plate is provided with a plurality of hinges, and the cover plate is movably connected with the placing plate through the plurality of hinges.

Further, the cutting mechanism comprises a mounting plate, the mounting plate is fixedly connected to the left side of the inner cavity of the box body close to the top, a disc is arranged on the front side of the mounting plate, a fixed rod is fixedly connected to the front side of the disc close to the right side, a swing plate is arranged on the front side of the fixed rod, a rectangular opening is arranged in the middle of the front side of the swing plate, the front end of the fixed rod is inserted into the inner cavity of the rectangular opening, a first connecting shaft is fixedly connected to the front side of the mounting plate close to the left side, the front end of the first connecting shaft is movably connected with the swing plate, a side plate is arranged on the right side of the mounting plate, the rear side of the side plate is fixedly connected with the rear side of the inner cavity of the box body, a movable plate is arranged below the front side of the side plate, a third slide block is fixedly connected to the rear side of the movable plate, a third slide groove matched with the third slide block is arranged on the front side of the side plate, and the third slide block is movably connected to the inner cavity of the third slide groove, the movable plate is characterized in that a second connecting shaft is movably connected to the position, close to the top, of the front side of the movable plate, the front end of the second connecting shaft is fixedly connected with the swinging plate, and the bottom of the movable plate is fixedly connected with the connecting plate.

Further, the rear side of mounting panel is equipped with the bearing plate, the top and the box inner chamber top fixed connection of bearing plate, the front side of bearing plate is close to bottom department fixedly connected with driving motor, the rear side fixedly connected with first bearing of mounting panel, driving motor's output shaft runs through the inner chamber of first bearing to locate fixed connection with the centre of a circle of disc.

Furthermore, the rolling mechanism comprises a plurality of vertical plates, the vertical plates are respectively and fixedly connected to the bottom of the box body close to four corners, rollers are arranged on one sides of the vertical plates close to the center of the bottom of the box body, movable shafts are arranged on the bottom of the box body close to the left side and the right side, second bearings are respectively and fixedly connected to the positions of the vertical plates close to the bottom, the front ends of the two movable shafts respectively penetrate through the adjacent rollers and are inserted into the inner cavities of the adjacent second bearings, the rear ends of the two movable shafts respectively penetrate through the adjacent rollers and the second bearings and are respectively and fixedly connected with movable gears, clamping gears are respectively meshed with the tops of the two movable gears, a fourth sliding block is fixedly connected to the positions of the front sides of the clamping gears close to the tops, and fourth sliding grooves matched with the fourth sliding blocks are respectively formed in the positions of the rear sides of the box body close to the left side and the right side, two fourth slider swing joint is respectively at the inner chamber of adjacent fourth spout, two the rear side of loose gear is close to top department and has all seted up the second and perforate, two the fenestrate inner chamber of second has all run through the bolt, two blind holes have all been seted up to fourth spout inner chamber, and two the blind hole sets up from top to bottom, two peg graft respectively at the blind hole inner chamber that is located the bottom, two the outside of bolt all is overlapped and is equipped with the second spring, just both ends respectively with screens gear and bolt fixed connection around the second spring.

Furthermore, the adjusting mechanism comprises a transverse plate, the transverse plate is fixedly connected to the right side of the box body close to the bottom, a third bearing is fixedly connected to the top of the transverse plate close to the right side, a rotating rod penetrates through the inner cavity of the third bearing, a rotating handle is fixedly connected to the top end of the rotating rod, a rotating disc is fixedly connected to the bottom of the rotating rod, a vertical rod is fixedly connected to the bottom of the rotating disc close to the right side, a rectangular frame is arranged at the bottom of the rotating disc close to the right side, the bottom end of the vertical rod is inserted into the inner cavity of the rectangular frame, a connecting rod is fixedly connected to the left side of the rectangular frame, a first through hole matched with the connecting rod is formed at the position of the right side of the box body close to the top, the left end of the connecting rod penetrates through the inner cavity of the first through hole and is fixedly connected with the right side of the workbench, limiting plates are fixedly connected to the front side and the rear side of the rectangular frame, and second through holes are formed in the two limiting plates, the inner cavities of the two second through holes are movably connected with limiting rods, and the left ends of the limiting rods are fixedly connected with the box body.

Furthermore, a rotating gear is sleeved on the position, close to the top, of the outer side of the rotating rod, a groove is formed in the position, close to the middle position, of the right side of the box body, a first spring is fixedly connected to the left side of the inner cavity of the groove, a cross rod is fixedly connected to the right end of the first spring, a limiting tooth block is fixedly connected to the right end of the cross rod, the limiting tooth block and the rotating gear are meshed with each other, and a shifting piece is fixedly connected to the position, close to the middle position, of the top of the cross rod.

Compared with the prior art, the utility model has the beneficial effects that:

1. according to the utility model, by arranging the cutting mechanism and the adjusting mechanism, the height of the cutting knife and the position of the placing plate can be conveniently adjusted through mutual matching of the parts such as the disc, the mounting plate, the driving motor, the fixed rod, the movable plate, the swinging plate, the rotating handle, the limiting tooth block, the first spring, the rotating gear, the rotating disc, the rectangular frame, the limiting plate, the limiting rod and the connecting rod, so that the silicon wafer placed in the placing plate can be conveniently cut;

2. according to the utility model, through the arrangement of the rolling mechanism and the mutual matching among the roller, the movable gear, the second spring, the clamping gear and the bolt, the device is convenient to move and fix, and the use is convenient.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.

Drawings

FIG. 1 is a front sectional view of the present embodiment;

FIG. 2 is a partial rear view of the mounting plate of the present embodiment;

FIG. 3 is a partial left side view of the mounting plate of the present embodiment;

FIG. 4 is a partial left side view of the case of the present embodiment;

FIG. 5 is an enlarged view of the embodiment at A in FIG. 1;

fig. 6 is an enlarged view of the embodiment at B in fig. 4.

In the figure: 1. a box body; 2. a cutting mechanism; 20. a disc; 21. mounting a plate; 22. a drive motor; 23. fixing the rod; 24. a side plate; 25. moving the plate; 26. a swing plate; 3. a connecting plate; 4. a cutting knife; 5. a servo motor; 6. an adjustment mechanism; 60. a handle is rotated; 61. a limit tooth block; 62. a first spring; 63. a rotating gear; 64. a turntable; 65. a rectangular frame; 66. a limiting plate; 67. a limiting rod; 68. a connecting rod; 7. placing the plate; 8. a cover plate; 9. a rolling mechanism; 90. a roller; 91. a movable gear; 92. a second spring; 93. a blocking gear; 94. a bolt; 10. a movable frame; 11. an L-shaped plate; 12. and (7) fixing the plate.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and the detailed description, and it should be noted that any combination of the embodiments or technical features described below can be used to form a new embodiment without conflict.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 6, a semiconductor processing silicon wafer cutting device comprises a box body 1, a servo motor 5 is arranged at the middle position of an inner cavity of the box body 1 near the left side, a cutting knife 4 is fixedly connected with an output shaft of the servo motor 5, a connecting plate 3 is fixedly connected with the top of the servo motor 5, a rolling mechanism 9 is arranged at the bottom of the box body 1, an opening is arranged at the front side of the box body 1, a cutting mechanism 2 is arranged at the left side of the inner cavity of the box body 1 near the top, a workbench is arranged at the bottom of the inner cavity of the box body 1 near the right side, a first sliding block is fixedly connected with the bottom of the workbench, a first sliding groove matched with the first sliding block is arranged at the bottom of the inner cavity of the box body 1, the first sliding block is movably connected with the inner cavity of the first sliding groove, an adjusting mechanism 6 is arranged at the right side of the workbench, a placing plate 7 is fixedly connected with the top of the workbench, a cover plate 8 is arranged at the top of the placing plate 7, a plurality of hinges are arranged at the rear side of the cover plate 8, the cover plate 8 is movably connected with the placing plate 7 through a plurality of hinges to be convenient for opening and closing the cover plate 8, the top of the placing plate 7 and the bottom of the cover plate 8 are both provided with semicircular grooves, the front side of the cover plate 8 is fixedly connected with two fixing plates 12, the two fixed plates 12 are arranged left and right, the movable frame 10 is arranged between the two fixed plates 12, first through holes are formed in the positions, close to the top, of the left side and the right side of the movable frame 10, inner cavities of the two first through holes are provided with rotating shafts in a penetrating mode, the left end and the right end of each rotating shaft are movably connected with the adjacent fixed plates 12 respectively, an L-shaped plate 11 is arranged on the position, close to the top, of the front side of the placing plate 7, a second sliding chute matched with the second sliding block is formed in the position, close to the top, of the front side of the placing plate 7, the second sliding block is movably connected to the inner cavity of the second sliding chute, and one side, far away from the second sliding block, of the L-shaped plate 11 is inserted into the inner cavity of the movable frame 10;

the cutting mechanism 2 comprises a mounting plate 21, the mounting plate 21 is fixedly connected to the left side of the inner cavity of the box body 1 near the top, a bearing plate is arranged on the rear side of the mounting plate 21, the top of the bearing plate is fixedly connected with the top of the inner cavity of the box body 1, a driving motor 22 is fixedly connected to the front side of the bearing plate near the bottom, a first bearing is fixedly connected to the rear side of the mounting plate 21, an output shaft of the driving motor 22 penetrates through the inner cavity of the first bearing and is fixedly connected with the center of the circle of the disc 20, the disc 20 is arranged on the front side of the mounting plate 21, a fixing rod 23 is fixedly connected to the front side of the disc 20 near the right side, a swing plate 26 is arranged on the front side of the fixing rod 23, a rectangular opening is arranged at the middle position of the front side of the swing plate 26, the front end of the fixing rod 23 is inserted into the inner cavity of the rectangular opening, a first connecting shaft is fixedly connected to the front side of the mounting plate 21 near the left side, and the front end of the first connecting shaft is movably connected with the swing plate 26, a side plate 24 is arranged on the right side of the mounting plate 21, the rear side of the side plate 24 is fixedly connected with the rear side of the inner cavity of the box body 1, a moving plate 25 is arranged below the front side of the side plate 24, a third slider is fixedly connected with the rear side of the moving plate 25, a third sliding groove matched with the third slider is formed in the front side of the side plate 24, the third slider is movably connected with the inner cavity of the third sliding groove, a second connecting shaft is movably connected with the front side of the moving plate 25 close to the top, the front end of the second connecting shaft is fixedly connected with a swinging plate 26, and the bottom of the moving plate 25 is fixedly connected with the connecting plate 3, so that the position of the cutting knife 4 can be adjusted conveniently, and the cutting work can be unfolded conveniently;

the rolling mechanism 9 comprises a plurality of vertical plates which are respectively fixedly connected at the bottom of the box body 1 near the four corners, one side of each vertical plate near the center of the bottom of the box body 1 is provided with a roller 90, the bottom of the box body 1 near the left side and the right side are provided with movable shafts, the positions of the plurality of vertical plates near the bottom are respectively fixedly connected with a second bearing, the front ends of the two movable shafts respectively penetrate through the adjacent rollers 90 and are inserted into the inner cavities of the adjacent second bearings, the rear ends of the two movable shafts respectively penetrate through the adjacent rollers 90 and the adjacent second bearings and are respectively fixedly connected with movable gears 91, the tops of the two movable gears 91 are respectively engaged with a clamping gear 93, the positions of the front sides of the clamping gear 93 near the tops are fixedly connected with a fourth sliding block, the positions of the rear sides of the box body 1 near the left side and the right side are respectively provided with fourth sliding grooves matched with the fourth sliding blocks, the two fourth sliding blocks are respectively movably connected with the inner cavities of the adjacent fourth sliding grooves, the rear sides of the two movable gears 91 close to the top are provided with second through holes, the inner cavities of the two second through holes are provided with bolts 94 in a penetrating manner, the inner cavities of the two fourth sliding chutes are provided with two blind holes which are arranged up and down, the front ends of the two bolts 94 are respectively inserted into the inner cavities of the blind holes at the bottom, the outer sides of the two bolts 94 are respectively sleeved with a second spring 92, the front end and the rear end of the second spring 92 are respectively fixedly connected with the clamping gear 93 and the bolts 94, the driving device is convenient to move and fix the idler wheel 90, and therefore the slipping phenomenon during working is avoided;

the adjusting mechanism 6 comprises a transverse plate which is fixedly connected to the right side of the box body 1 and close to the bottom, a third bearing is fixedly connected to the top of the transverse plate and close to the right side, a rotating rod is arranged in an inner cavity of the third bearing in a penetrating mode, a rotating gear 63 is sleeved on the outer side of the rotating rod and close to the top, a groove is formed in the right side of the box body 1 and close to the middle, a first spring 62 is fixedly connected to the left side of the inner cavity of the groove, a transverse rod is fixedly connected to the right end of the first spring 62, a limiting gear block 61 is fixedly connected to the right end of the transverse rod, the limiting gear block 61 and the rotating gear 63 are meshed with each other, a shifting piece is fixedly connected to the top of the transverse rod and close to the middle, the rotating handle 60 is conveniently clamped and fixed to avoid rotating accidentally, a rotating handle 60 is fixedly connected to the top end of the rotating rod, a rotating disk 64 is fixedly connected to the bottom of the rotating rod, a vertical rod is fixedly connected to the bottom of the rotating disk 64 and close to the right side, the bottom of carousel 64 is close to right side department and is equipped with rectangle frame 65, peg graft in the inner chamber of rectangle frame 65 the bottom of montant, the left side fixedly connected with connecting rod 68 of rectangle frame 65, 1 right side of box is close to top department and offers the first through-hole with connecting rod 68 assorted, the inner chamber of first through-hole is passed to the left end of connecting rod 68, and with the right side fixed connection of workstation, the equal fixedly connected with limiting plate 66 of both sides department around rectangle frame 65, the second through-hole has all been seted up on two limiting plate 66, the equal swing joint in inner chamber of two second through-holes has gag lever post 67, the left end of two gag lever posts 67 all with 1 fixed connection of box, be convenient for adjust the position of workstation, thereby conveniently adjust the length of cutting.

The working principle is as follows: firstly, in the using process, the device can be moved by arranging a plurality of rollers 90, after the device is moved to a designated position, two pins 94 are pulled backwards, the front ends of the two pins 94 are separated from the adjacent blind hole inner cavities by the backward extension of two adjacent second springs 92, then two clamping gears 93 are pushed to move downwards under the limit of a fourth sliding block and a fourth sliding chute, so that the front ends of the two pins 94 are inserted into the blind hole inner cavities at the bottom, further the clamping gears 93 are meshed with the movable gear 91, the rollers 90 can be fixed, the stability of the box body 1 in operation is ensured, when the device needs to be moved, after the two pins 94 are pulled backwards, the two clamping gears 93 move upwards, then the two pins 94 are inserted into the blind hole inner cavities at the top, the fixation of the rollers 90 can be released, then the L-shaped plate 11 is pushed to move upwards under the limit of the second sliding block and the second sliding chute, when the L-shaped plate 11 moves upwards, the movable frame 10 is pulled to move forwards so that the L-shaped plate 11 is separated from the inner cavity of the movable frame 10, then the cover plate 8 can be opened through the arrangement of a plurality of hinges, the monocrystalline silicon rod is placed in the semicircular groove on the placing plate 7, then the cover plate 8 is closed to clamp and limit the monocrystalline silicon rod, the placing plate 7 and the cover plate 8 can be clamped and fixed through reverse operation, then the plectrum is stirred leftwards, the plectrum moves leftwards to drive the transverse rod to move leftwards and extrude and contract the first spring 62, the transverse rod moves leftwards to drive the limiting tooth block 61 to be far away from the rotating gear 63, so that the limit on the rotating gear 63 is released, then the rotating handle 60 is rotated, the rotating handle 60 can drive the rotating rod to rotate, the rotating rod can drive the rotating disk 64 to rotate, the rotating disk 64 can drive the vertical rod to rotate, the vertical rod can drive the rectangular frame 65 to move leftwards under the limit of the limiting plate 66 and the limiting rod 67 through the rotation of the rectangular frame 65, the rectangular frame 65 moves leftwards to drive the connecting rod 68 to move leftwards, the connecting rod 68 moves leftwards to drive the workbench to move leftwards under the limit of the first sliding block and the first sliding chute, so as to drive the monocrystalline silicon rod to move leftwards, after the monocrystalline silicon rod is adjusted to a proper position, the rotating handle 60 stops rotating, then the shifting sheet is loosened, the transverse rod and the limiting toothed block 61 move rightwards under the action of the elastic force of the first spring 62, so that the limiting toothed block 61 is continuously meshed with the rotating gear 63, the rotating handle 60 is prevented from rotating accidentally, then the driving motor 22 and the servo motor 5 are started through an external power supply, the output shaft of the servo motor 5 drives the cutting knife 4 to rotate when the servo motor 5 works, the output shaft of the driving motor 22 rotates the disc 20 when the driving motor 22 works, the disc 20 rotates to drive the fixing rod 23 to rotate, and the fixing rod 23 rotates in the inner cavity of the rectangular opening and drives the swinging plate 26 to move upwards and downwards, through mutually supporting between first even axle and the second even axle swing board 26 left side motionless, swing board 26 right side skew also can drive movable plate 25 and reciprocate under the spacing of third slider and third spout, when swing board 26 skew can drive movable plate 25 downstream down, can cut it when cutting knife 4 and monocrystalline silicon stick laminating, it is convenient to use.

The above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention are within the protection scope of the present invention.

Claims (7)

1. The utility model provides a semiconductor processing silicon wafer cutting equipment, includes box (1), box (1) inner chamber intermediate position is close to left side department and is equipped with servo motor (5), the output shaft fixedly connected with cutting knife (4) of servo motor (5), the top fixedly connected with connecting plate (3) of servo motor (5), its characterized in that: the bottom of the box body (1) is provided with a rolling mechanism (9), the front side of the box body (1) is provided with an opening, the left side of the inner cavity of the box body (1) is provided with a cutting mechanism (2) near the top, the bottom of the inner cavity of the box body (1) is provided with a workbench near the right side, the bottom of the workbench is fixedly connected with a first sliding block, the bottom of the inner cavity of the box body (1) is provided with a first sliding groove matched with the first sliding block, the first sliding block is movably connected with the inner cavity of the first sliding groove, the right side of the workbench is provided with an adjusting mechanism (6), the top of the workbench is fixedly connected with a placing plate (7), the top of the placing plate (7) is provided with a cover plate (8), the top of the placing plate (7) and the bottom of the cover plate (8) are both provided with semicircular grooves, and the front side of the cover plate (8) is fixedly connected with two fixing plates (12), and two fixed plate (12) are for controlling setting, two be equipped with movable frame (10) between fixed plate (12), the first perforation has all been seted up, two to the movable frame (10) left and right sides near top department, first fenestrate inner chamber runs through jointly and is equipped with the pivot, both ends respectively with adjacent fixed plate (12) swing joint about the pivot, the front side of placing board (7) is close to top department and is equipped with L shaped plate (11), L shaped plate (11) rear side fixedly connected with second slider, the front side of placing board (7) is close to top department and sets up the second spout that matches each other with the second slider, second slider swing joint is at the inner chamber of second spout, one side that the second slider was kept away from to L shaped plate (11) is pegged graft at the inner chamber of movable frame (10).

2. A semiconductor processing silicon wafer dicing apparatus according to claim 1, characterized in that: the rear side of the cover plate (8) is provided with a plurality of hinges, and the cover plate (8) is movably connected with the placing plate (7) through the hinges.

3. A semiconductor processing silicon wafer dicing apparatus according to claim 1, characterized in that: the cutting mechanism (2) comprises a mounting plate (21), the mounting plate (21) is fixedly connected to the left side of an inner cavity of the box body (1) and close to the top, a disc (20) is arranged on the front side of the mounting plate (21), a fixing rod (23) is fixedly connected to the front side of the disc (20) and close to the right side, a swinging plate (26) is arranged on the front side of the fixing rod (23), a rectangular opening is formed in the middle position of the front side of the swinging plate (26), the front end of the fixing rod (23) is inserted into the inner cavity of the rectangular opening, a first connecting shaft is fixedly connected to the front side of the mounting plate (21) and close to the left side, the front end of the first connecting shaft is movably connected with the swinging plate (26), a side plate (24) is arranged on the right side of the mounting plate (21), the rear side of the side plate (24) is fixedly connected with the rear side of the inner cavity of the box body (1), a moving plate (25) is arranged below the front side of the side plate (24), the rear side fixedly connected with third slider of movable plate (25), the front side of curb plate (24) is opened and is equipped with the third spout with third slider assorted, third slider swing joint is in the inner chamber of third spout, movable plate (25) front side is close to top department swing joint and is had the second even axle, the second is even an axle front end and swing board (26) fixed connection, just the bottom and connecting plate (3) fixed connection of movable plate (25).

4. A semiconductor processing silicon wafer dicing apparatus according to claim 3, characterized in that: the rear side of mounting panel (21) is equipped with the bearing plate, the top and box (1) inner chamber top fixed connection of bearing plate, the front side of bearing plate is close to bottom fixedly connected with driving motor (22), the first bearing of rear side fixedly connected with of mounting panel (21), the output shaft of driving motor (22) runs through the inner chamber of first bearing to locate fixed connection with the centre of a circle of disc (20).

5. A semiconductor processing silicon wafer dicing apparatus according to claim 1, characterized in that: rolling mechanism (9) includes a plurality of riser, a plurality of riser fixed connection is close to four corners department respectively in the bottom of box (1), a plurality of one side that the riser is close to box (1) bottom center all is equipped with gyro wheel (90), the bottom of box (1) is close to left and right sides department and all is equipped with the loose axle, a plurality of be close to the equal fixedly connected with second bearing of bottom department, two on the riser the front end of loose axle runs through adjacent gyro wheel (90) respectively, and plug-in is at adjacent second bearing inner chamber, and two adjacent gyro wheel (90) and second bearing are run through respectively to the rear end of loose axle to equal fixedly connected with loose gear (91), two the top of loose gear (91) all meshes has screens gear (93), just screens gear (93) front side is close to top fixedly connected with fourth slider, box (1) rear side is close to left and right sides department and all sets up with fourth slider assorted fourth spout The fourth slider is swing joint respectively in the inner chamber of adjacent fourth spout, two the rear side of loose gear (91) is close to top department and has all seted up the second and perforate, two bolt (94) have all been run through to the fenestrate inner chamber of second, two blind holes, and two have all been seted up to fourth spout inner chamber the blind hole sets up from top to bottom, two peg graft respectively at the blind hole inner chamber that is located the bottom, two the outside of bolt (94) all is overlapped and is equipped with second spring (92), just both ends respectively with screens gear (93) and bolt (94) fixed connection around second spring (92).

6. A semiconductor processing silicon wafer dicing apparatus according to claim 1, characterized in that: the adjusting mechanism (6) comprises a transverse plate, the transverse plate is fixedly connected to the right side of the box body (1) and close to the bottom, the top of the transverse plate is fixedly connected with a third bearing close to the right side, an inner cavity of the third bearing is provided with a rotating rod in a penetrating manner, the top end of the rotating rod is fixedly connected with a rotating handle (60), the bottom of the rotating rod is fixedly connected with a rotating disc (64), the bottom of the rotating disc (64) is fixedly connected with a vertical rod close to the right side, the bottom of the rotating disc (64) is provided with a rectangular frame (65) close to the right side, the bottom end of the vertical rod is inserted into the inner cavity of the rectangular frame (65), the left side of the rectangular frame (65) is fixedly connected with a connecting rod (68), the right side of the box body (1) is provided with a first through hole matched with the connecting rod (68) close to the top, the left end of the connecting rod (68) passes through the inner cavity of the first through hole and is fixedly connected with the right side of the workbench, equal fixedly connected with limiting plate (66) of both sides department around rectangle frame (65), two the second through-hole has all been seted up on limiting plate (66), two the equal swing joint in inner chamber of second through-hole has gag lever post (67), two the left end of gag lever post (67) all with box (1) fixed connection.

7. A semiconductor processing silicon wafer dicing apparatus according to claim 6, characterized in that: the utility model discloses a spacing gear piece of box, including box (1), box, rotating rod, recess inner chamber, right-hand member fixedly connected with horizontal pole, the outside of bull stick is close to top department cover and is equipped with running gear (63), box (1) right side is close to intermediate position department and sets up flutedly, the first spring of recess inner chamber left side department fixedly connected with (62), the right-hand member fixedly connected with horizontal pole of first spring (62), the right-hand member fixedly connected with spacing tooth piece (61) of horizontal pole, just intermeshing between spacing tooth piece (61) and running gear (63), the top of horizontal pole is close to intermediate position department fixedly connected with plectrum.

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