CN216229283U - X/Y two-axis precise air-floating motion platform - Google Patents
X/Y two-axis precise air-floating motion platform Download PDFInfo
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- CN216229283U CN216229283U CN202122766214.8U CN202122766214U CN216229283U CN 216229283 U CN216229283 U CN 216229283U CN 202122766214 U CN202122766214 U CN 202122766214U CN 216229283 U CN216229283 U CN 216229283U
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- air
- floating
- marble
- guide rail
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- 239000004579 marble Substances 0.000 claims abstract description 51
- 229920002635 polyurethane Polymers 0.000 claims description 10
- 239000004814 polyurethane Substances 0.000 claims description 10
- 229910000838 Al alloy Inorganic materials 0.000 claims description 9
- 210000000056 organ Anatomy 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 230000035939 shock Effects 0.000 claims description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
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Abstract
The utility model discloses an X/Y two-axis precise air-floating motion platform which comprises a rack supporting leg, a marble base arranged on the rack supporting leg, an X-axis air-floating moving table arranged on the marble base and a Y-axis air-floating moving table arranged on the X-axis air-floating moving table, wherein the X-axis air-floating moving table and the Y-axis air-floating moving table have the same structure and comprise marble guide rails, air-floating slide blocks and linear motors, two sides of each marble guide rail respectively form an outward convex part towards the outside, the whole marble guide rail is of a T-shaped structure, the slide blocks are arranged on the periphery of the marble guide rails in a matched manner, and two sides of each slide block are connected with the linear motors; the utility model has the beneficial effects that: through the marble guide rail of design, reduced because the guide rail warp and to the influence of air film thickness, utilize closed guide rail simultaneously, guarantee the even of air film thickness, ensure the precision of air supporting platform.
Description
Technical Field
The utility model relates to the technical field of precision positioning devices, in particular to an X/Y two-axis precision air-floating motion platform.
Background
The direct-drive air floating platform is a high-precision positioning device, is driven by a linear motor and supported by an air bearing, has the advantages of extremely low friction, no crawling, high motion precision, high rigidity of the linear motor drive, wide speed regulation range and high dynamic performance, realizes no friction and zero transmission, and is increasingly applied to the fields of micro-nano processing, IC packaging, large panel liquid crystal display manufacturing and detection, optical scanning detection and the like.
Along with the improvement of the requirement of the precision manufacturing field on the ultra-precision workbench, the motion stability, the composite motion diversity and the position of the air floating platform have certain influence on the precision of the precision platform. The air floating thickness of the air floating platform is generally close to nanometer level, so that the motion precision of the air floating platform is ensured, and in addition, the air floating platform can freely move in a plane in order to meet the requirements of precision machining or precision measurement platforms. The traditional air floating platform has the problems of low motion precision, slow reaction, poor stability and other reliability, can not meet the application requirements of increasingly developed technologies such as precision manufacturing, precision measurement and the like, and is applied to precision two-axis motion air floating platforms.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems in the prior art, the utility model provides an X/Y two-axis precise air floating motion platform with reasonable structural design, which can realize X/Y axis ultra-precise feeding and ensure the planar precision of the air floating platform.
The technical scheme of the utility model is as follows:
the utility model provides a precision air supporting motion platform of X Y diaxon, includes the frame supporting legs, sets up marble base on the frame supporting legs, sets up X axle air supporting mobile station on marble base and sets up the Y axle air supporting mobile station on X axle air supporting mobile station, X axle air supporting mobile station is the same with Y axle air supporting mobile station structure, including marble guide rail, air supporting slider and linear electric motor, marble guide rail both sides are outside extending formation outer convex part respectively, and are T type structure, the air supporting slider cooperation sets up in marble guide rail periphery, air supporting slider both sides link to each other with linear electric motor.
Further, the air-floating slide block comprises an upper air-floating plate of the slide block, an air-floating side plate in the slide block and a lower air-floating plate of the slide block, wherein the air-floating side plate in the slide block is arranged between the upper air-floating plate of the slide block and the lower air-floating plate of the slide block, so that the air-floating slide block is coated on the periphery of the marble guide rail.
Furthermore, two ends of the marble guide rail are respectively provided with a stop block, and the side surface of the air-floating slide block is provided with an aluminum alloy anti-collision block corresponding to the position of the stop block; and two opposite side surfaces of the stop block are provided with polyurethane shock absorption blocks corresponding to the aluminum alloy anti-collision blocks.
Furthermore, a grating feedback device is arranged between the X-axis air-floating moving table and the marble base.
Furthermore, the grating feedback device comprises a reading head, a mounting bracket, a grating ruler and a grating fixing strip; the grating fixing strip is fixedly connected with the marble base, the grating ruler is attached to the grating fixing strip, the reading head is arranged opposite to the grating ruler, and the reading head is arranged on the X-axis air floatation mobile platform through the mounting support.
Further, be provided with the organ cover on the marble base, prevent on the one hand that the dust from causing the influence to linear electric motor's work, on the other hand prevents that operator's is close to, prevents to take place the incident.
Furthermore, the lower surface of the air floating plate on the sliding block is provided with a polyurethane shock absorption block pointing to the marble base.
The utility model has the beneficial effects that: through the marble guide rail of design, reduced because the guide rail warp and to the influence of air film thickness, utilize closed guide rail simultaneously, guarantee the even of air film thickness, ensure the precision of air supporting platform.
Drawings
FIG. 1 is a side view of a two-axis air bearing motion platform of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic view of the feed system configuration of the present invention;
FIG. 4 is a schematic diagram of a closed model of the X/Y-axis air-floating motion platform of the present invention.
In the figure: 1. the frame supports; 2. a marble base; 3. an X-axis air-floating moving table; 301. a slider lower air floating plate; 302. an air floating side plate in the sliding block; 303. a linear motor; 304. an air floating plate is arranged on the sliding block; 305. an aluminum alloy anti-collision block; 306. a grating feedback device; 307. a marble guide rail; 308. an outer convex portion; 4. a Y-axis air-floating moving table; 5. an organ cover; 6. and a stop block.
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
As shown in fig. 1-4, an X/Y two-axis precise air-floating motion platform includes a frame supporting foot 1, a marble base 2, an X-axis air-floating moving stage 3, an upper air-floating plate 304 of a slider, an air-floating side plate 302 of the slider, a linear motor 303, a lower air-floating plate 301 of the slider, an aluminum alloy anti-collision block 305, a grating feedback device 306, a marble guide rail 307, an outer convex portion 308, a Y-axis air-floating moving stage 4, an organ cover 5, and a stopper 6.
Example (b):
the air-floating motion platform comprises an X-axis air-floating moving platform 3 and a Y-axis air-floating moving platform 4. The X/Y axis air-floating motion platform is similar in structure and only different in size.
Further explaining by taking an X-axis as an example, the X-axis air-floating moving stage 3 includes a slider lower air-floating plate 301, a slider air-floating side plate 302, a linear motor 303, a slider upper air-floating plate 304, a grating feedback device 306 and a marble guide rail 307; the air-bearing side plate 302 in the slider is arranged between the lower air-bearing plate 301 of the slider and the upper air-bearing plate 304 of the slider, so that the upper, middle and lower air-bearing plates of the slider are coated on the periphery of the marble guide rail 307.
The marble base 2 is supported on the frame supporting leg 1, so that the platform is located at a proper machining height, is convenient to set a control module and is convenient to move. In this embodiment, marble guide rail 307 both sides upper portion outwards protrudes and forms outer convex part 308 for effect outer convex part 308 and marble guide rail 307 integrated into one piece, marble material stability is strong, and surface accuracy is high, receives the temperature influence less, thereby has reduced greatly because marble guide rail 307 warp and to the influence of air film thickness. Meanwhile, the marble guide rail 307 protrudes from the upper part of the base to two sides, so the outer convex part 308 is suspended, and thus the X-axis air-floating moving table 3 and the marble guide rail 307 are combined into a closed state in this embodiment.
In this embodiment, since the X-axis air-floating mobile stage 3 covers the marble guide 307 from both sides and above, in order to push the X-axis air-floating mobile stage 3, the mover of the linear motor 303 is connected to the air-floating side plate 302 in the slider. No transmission element is arranged between the rotor and the stator of the linear motor 303, so that the friction force generated by the transmission element is saved, the near-zero friction transmission is realized, and the motion precision of the X-axis air-floatation mobile table 3 is greatly improved. In this embodiment, in order to ensure the position stability of the material placed on the air-floating moving platform, a transport fixing plate is connected to the upper air-floating plate 304 of the slider of the Y-axis air-floating moving stage 4.
Further, air supporting plate lower surface is provided with the sensing on the slider of X axle air supporting mobile station 3 the polyurethane snubber block of marble base 2, polyurethane snubber block are for taking screw polyurethane snubber block, and polyurethane snubber block passes through the mounting screw in X axle air supporting mobile station 3 below for X axle air supporting mobile station 3 damages with the contact of marble face when preventing the outage.
In order to prevent the linear motor 303 from galloping, aluminum alloy anti-collision blocks 305 are arranged at two ends of the X-axis air-floatation mobile platform 3, two ends of the marble guide rail 307 are respectively connected with a stop block 6, and polyurethane shock absorption blocks corresponding to the aluminum alloy anti-collision blocks are arranged on two opposite side surfaces of the stop block 6. If the linear motor 303 fails, the X-axis air-floating moving table 3 continuously moves towards the end of the marble base 2, and the aluminum alloy anti-collision block 305 collides with the polyurethane shock-absorbing block to form a buffer, so that safety accidents are prevented. Reference to
In order to protect each component in the air floating platform, an organ cover is further arranged between the moving platform 3 and the baffle plate in the embodiment. On one hand, the influence of dust on the work of the linear motors 3-3 and the like is prevented, on the other hand, the approach of operators is prevented, and safety accidents are prevented.
In order to form a closed-loop feedback for the motion of the linear motor 303, in this embodiment, the grating feedback device 4 is disposed between the X-axis air-floating moving stage 3 and the marble base 2. The grating feedback device 4 comprises a reading head, a mounting bracket, a grating ruler and a grating fixing strip; the grating feedback device comprises a reading head, a mounting bracket, a grating ruler and a grating fixing strip, the grating fixing strip is fixedly connected with the marble base, the grating ruler is attached to the grating fixing strip, the reading head is arranged opposite to the grating ruler, and the reading head is arranged on the moving platform (the X-axis air floatation moving platform 3) through the mounting bracket; the mounting bracket is connected with the moving platform through a waist-shaped hole, the waist-shaped hole is arranged along the direction of the reading head pointing to the grating ruler, and the grating fixing strip is a marble strip.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the utility model is all within the protection scope of the utility model. The protection scope of the utility model is subject to the claims.
Claims (7)
1. The utility model provides a precision air-float motion platform of X/Y diaxon, its characterized in that, includes frame supporting legs (1), sets up marble base (2) on frame supporting legs (1), sets up X axle air-float mobile station (3) on marble base (2) and sets up Y axle air-float mobile station (4) on X axle air-float mobile station (3), X axle air-float mobile station (3) are the same with Y axle air-float mobile station (4) structure, including marble guide rail (307), air-float slider and linear electric motor (303), marble guide rail (307) both sides outwards extend respectively and form outer convex part (308), and are T type structure, the cooperation of air-float slider sets up in marble guide rail (307) periphery, air-float slider both sides link to each other with linear electric motor (303).
2. The X/Y two-axis precise air-bearing motion platform as claimed in claim 1, wherein the air-bearing slider comprises an upper slider air-bearing plate (304), a middle slider air-bearing side plate (302) and a lower slider air-bearing plate (301), and the middle slider air-bearing side plate (302) is disposed between the upper slider air-bearing plate (304) and the lower slider air-bearing plate (301) so as to cover the periphery of the marble guide rail (307).
3. The X/Y two-axis precise air-floating motion platform as claimed in claim 1, wherein two ends of the marble guide rail (307) are respectively provided with a stopper (6), and the side surface of the air-floating slide block is provided with an aluminum alloy anti-collision block (305) corresponding to the position of the stopper (6); and two opposite side surfaces of the stop block (6) are provided with polyurethane shock absorption blocks corresponding to the aluminum alloy anti-collision blocks (305).
4. The X/Y two-axis precise air-floating motion platform as claimed in claim 1, wherein a grating feedback device (306) is arranged between the X-axis air-floating moving table (3) and the marble base (2).
5. The X/Y two-axis precise air-floating motion platform as claimed in claim 4, wherein the grating feedback device (306) comprises a reading head, a mounting bracket, a grating ruler and a grating fixing strip; the grating fixing strip is fixedly connected with the marble base (2), the grating ruler is attached to the grating fixing strip, the reading head is arranged opposite to the grating ruler, and the reading head is arranged on the X-axis air floatation mobile platform (3) through the mounting support.
6. The X/Y two-axis precise air-floating motion platform as claimed in claim 1, wherein an organ cover (7) is arranged on the marble base (2).
7. The X/Y two-axis precise air-bearing motion platform as claimed in claim 2, wherein the lower surface of the air-bearing plate (304) on the slide block is provided with a polyurethane shock-absorbing block pointing to the marble base (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122766214.8U CN216229283U (en) | 2021-11-12 | 2021-11-12 | X/Y two-axis precise air-floating motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122766214.8U CN216229283U (en) | 2021-11-12 | 2021-11-12 | X/Y two-axis precise air-floating motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216229283U true CN216229283U (en) | 2022-04-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122766214.8U Expired - Fee Related CN216229283U (en) | 2021-11-12 | 2021-11-12 | X/Y two-axis precise air-floating motion platform |
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| CN (1) | CN216229283U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115648132A (en) * | 2022-12-13 | 2023-01-31 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | High-bearing precision motion platform for flip chip bonding |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
-
2021
- 2021-11-12 CN CN202122766214.8U patent/CN216229283U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115648132A (en) * | 2022-12-13 | 2023-01-31 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | High-bearing precision motion platform for flip chip bonding |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
| CN117074739B (en) * | 2023-10-18 | 2024-01-30 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220408 |