CN215869314U - Graphite boat - Google Patents
Graphite boat Download PDFInfo
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- CN215869314U CN215869314U CN202122281243.5U CN202122281243U CN215869314U CN 215869314 U CN215869314 U CN 215869314U CN 202122281243 U CN202122281243 U CN 202122281243U CN 215869314 U CN215869314 U CN 215869314U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model is suitable for the technical field of graphite boats, and provides a graphite boat, wherein the width of a clamping groove at one end of the clamping groove close to a unit boat sheet is limited to enable the clamping groove to be larger than the thickness of a battery sheet and smaller than 2 times of the thickness of the battery sheet, after a new clamping point is replaced, compared with the existing graphite boat, the distance between the unit boat sheet of the graphite boat and the clamping point is reduced, the moving distance of each battery sheet is smaller under the action of air flow blowing force of the battery sheet in a furnace tube and high temperature, the battery sheet can be attached to the clamping point by grinding a smaller groove on the new clamping point, the time and the times of grinding the clamping point and the battery sheet are reduced, the clamping point printing of the battery sheet is remarkably reduced, the generation of B-grade products is further reduced, and the production cost of the battery products is reduced.
Description
Technical Field
The utility model belongs to the technical field of graphite boats, and particularly relates to a graphite boat.
Background
At present, a graphite boat is mainly used as a carrier in the solar cell film coating process, a silicon wafer is limited in a graphite cavity by utilizing a graphite boat clamping point, and then a front film layer and a back film layer are deposited by a Plasma Enhanced Chemical Vapor Deposition (PECVD) method. Because the current graphite boat design bears the battery piece through two graphite boat blades and a plurality of stuck point, and the battery piece can not laminate graphite boat blade completely, under the air current blowing power and the high temperature effect in the boiler tube, the battery piece will puncture the phenomenon of scorching with stuck point contact not laminating.
At present, the photovoltaic enterprise generally limits the silicon chip in the graphite intracavity with graphite boat stuck point, mainly solves the problem of stuck point burn through the modes such as the structure that improves the stuck point at present. However, due to the overlarge interval, under the action of air flow blowing force and high temperature in the furnace tube, the battery piece can be attached to the clamping point only by grinding a larger groove on a new clamping point, each grinding-in after the clamping point is replaced is just the production of a B-grade product, the longer the grinding-in time is, the greater the probability of B-grade product generation is, and the higher the cost is caused by consumption of manpower and material resources.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model aims to provide a graphite boat, and aims to solve the problem that the cost is too high due to the fact that the existing solar cell is large in point printing.
The graphite boat comprises a fixed rod and a plurality of unit boat sheets, wherein a gap is formed between every two adjacent unit boat sheets, the fixed rod penetrates through the periphery of each unit boat sheet to fixedly connect the unit boat sheets, each unit boat sheet is provided with a plurality of groups of clamping points for fixing battery sheets, and the unit boat sheets and the clamping points on the unit boat sheets form clamping grooves for clamping the battery sheets; the width of the clamping groove at one end of the clamping groove close to the unit boat sheet is larger than the thickness of the battery sheet and smaller than 2 times of the thickness of the battery sheet.
Further, each group of clamping points comprises a first clamping point, a second clamping point and a third clamping point, wherein the first clamping point is located on the upper portion of the first side of the battery piece and used for clamping the first side, the second clamping point is located below the second side of the battery piece and used for clamping the second side, the third clamping point is located at the bottom end of the battery piece and close to the second side, and the first side and the second side are two sides of the battery piece which are arranged oppositely.
Furthermore, the first clamping point, the second clamping point and the third clamping point are distributed in a triangular shape to stably fix the battery piece.
Further, the opening angle of the clamping groove is 30-60 degrees.
Furthermore, a plurality of mounting holes for inserting the fixing rods are formed at the top end and the bottom end of the unit boat sheet at intervals.
Furthermore, a plurality of clamping grooves for positioning the unit boat sheets are uniformly arranged on the outer circle of the fixed rod at intervals.
Furthermore, a distance separating sleeve is arranged between the unit boat sheets on the excircle of the fixed rod to keep the distance between the unit boat sheets.
Further, the inner diameter of the distance sleeve is matched with the outer diameter of the fixing rod.
Furthermore, a plurality of graphite blocks are arranged at the end part of the graphite boat to separate the unit boat sheets, and the graphite blocks and the unit boat sheets are penetrated through by connecting rods so as to fixedly connect the graphite blocks and the unit boat sheets.
Further, the width of the clamping groove ranges from 0.2cm to 0.29 cm.
According to the graphite boat provided by the embodiment of the utility model, the width of the clamping groove at one end of the clamping groove close to the unit boat sheet is limited, so that the width of the clamping groove is larger than the thickness of the battery sheet and smaller than 2 times of the thickness of the battery sheet, when a new clamping point is replaced, compared with the existing graphite boat, the distance between the graphite boat unit boat sheet and the clamping point is reduced, the movement distance of each battery sheet is smaller under the action of the air flow blowing force in the furnace tube and high temperature, the battery sheet can be attached to the clamping point by grinding a smaller groove on the new clamping point, the time and times of grinding-in of the clamping point and the battery sheet are reduced, the clamping point printing of the battery sheet is obviously reduced, the generation of B-grade products is further reduced, and the production cost of the battery products is reduced.
Drawings
FIG. 1 is a schematic view of the structure of a graphite boat according to the present invention;
FIG. 2 is a schematic structural diagram of a graphite boat unit boat sheet according to the present invention;
FIG. 3 is a schematic structural diagram of a graphite boat slot of the present invention.
The reference numbers illustrate:
1. a battery piece; 2. the furnace tail end; 3. a furnace mouth end;
10. a unit boat sheet; 11. a first stuck point; 12. a second stuck point; 13. a third stuck point; 14. mounting holes; 15. a first card slot; 151. the bottom end of the first clamping groove;
20. fixing the rod; 30. graphite blocks; 40. a connecting rod.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the prior art, the problem of stuck point burn is generally improved by changing the structure of the stuck point. According to the utility model, the width of the clamping groove at one end of the clamping groove close to the unit boat sheet is limited, so that the width of the clamping groove is larger than the thickness of the battery sheet and smaller than 2 times of the thickness of the battery sheet, after a new clamping point is replaced, compared with the existing graphite boat, the distance between the graphite boat unit boat sheet and the clamping point is reduced, the movement distance of each battery sheet is smaller under the action of the air flow blowing force in the furnace tube and high temperature, the battery sheet can be attached to the clamping point by grinding a smaller groove on the new clamping point, the time and times of grinding-in of the clamping point and the battery sheet are reduced, the clamping point printing of the battery sheet is obviously reduced, the generation of B-grade products is further reduced, and the production cost of the battery product is reduced.
Example one
Referring to fig. 1, a schematic structural diagram of a graphite boat according to an embodiment of the present invention is shown, which only shows portions related to the embodiment of the present invention for convenience of description, and the graphite boat according to the embodiment of the present invention includes: dead lever 20 and a plurality of unit boat piece 10, have the clearance between the adjacent unit boat piece 10, dead lever 20 runs through the periphery of each unit boat piece 10 in order to with a plurality of unit boat piece 10 fixed connection, all be equipped with the stuck point that a plurality of groups are used for fixed battery piece 1 on every unit boat piece 10, unit boat piece 10 forms the draw-in groove that is used for block battery piece 1 with the stuck point that is located above that, the draw-in groove width that the draw-in groove is close to unit boat piece 15 one end is greater than battery piece 1 thickness and is less than 2 times battery piece thickness.
In the embodiment of the utility model, a plurality of mounting holes 14 are formed at intervals at the upper end and the lower end of the unit boat piece 10, and a fixing rod 20 passes through the mounting holes 14 to fixedly connect the plurality of unit boat pieces 10.
Referring to fig. 2 and 3, each unit boat 10 is provided with a plurality of clamping points for fixing the battery pieces 1, and a plurality of battery pieces 1 can be fixed on both sides of each unit boat 10. Each of the chucking points penetrates the unit boat sheet 10 and forms a chucking groove on both sides thereof with the unit boat sheet 10. Each clamping point corresponds to two clamping grooves, each clamping point corresponds to 2 groups of clamping grooves, and 2 battery pieces are fixed on two sides of the unit boat piece 10 through the 2 groups of clamping grooves. It can be understood that the two sides of the unit boat sheet are provided with the clamping points, and a clamping groove is formed between each clamping point and the unit boat sheet 10. The two stuck points located on the unit boat sheets 10 are symmetrically arranged with respect to the unit boat sheets 10.
Further, each set of clamping points comprises a first clamping point 11 located at the upper part of the first side of the battery piece 1 and used for clamping the first side of the battery piece 1, a second clamping point 12 located below the second side of the battery piece 1 and used for clamping the second side of the battery piece 1, and a third clamping point 13 located at the bottom end of the battery piece 1 and close to the second side of the battery piece 1. Wherein, the first side and the second side are the relative both sides of battery piece. And the first clamping point 11 is positioned close to the furnace mouth end 3 of the graphite boat, and the second clamping point 12 and the third clamping point 13 are positioned far away from the tail end 2 of the graphite boat furnace.
In this embodiment, the graphite boat includes furnace mouth end 3 and furnace tail end 2, and when the coating process was operated, the graphite boat was located the boiler tube of PECVD equipment, and furnace mouth end 3 was located the mouth of pipe of boiler tube, and in process gas passed into the pipe from the furnace mouth, furnace tail end 2 was located the tube tail of boiler tube, and process waste gas took away from the furnace tail, and the electrode in the boiler tube inserted the electrode hole of graphite boat furnace tail end.
Specifically, each unit boat piece 10 is provided with a plurality of groups of clamping points, and 2 battery pieces 1 are fixed on two sides of the unit boat piece 10 through 1 group of clamping points. For example: the unit boat piece 10 is provided with a first clamping point 11, a second clamping point 12 and a third clamping point 13, and the three clamping points penetrate through the unit boat piece 10. The first clamping points 11 form two first clamping grooves 15 on two sides of the unit boat sheet 1, the second clamping points 12 form two second clamping grooves on two sides of the unit boat sheet 10, and the third clamping points 15 form two third clamping grooves on two sides of the unit boat sheet 10.
In this embodiment, the battery piece 1 is fixed to one side of the unit boat piece 10 by the first, second, and third card slots located at one side of the unit boat piece 10, and the battery piece 1 is fixed to the other side of the unit boat piece 10 by the first, second, and third card slots located at the other side of the unit boat piece 10.
Further, the opening angle of the clamping groove is 30-60 degrees.
In this embodiment, the top opening of the first card slot 15 is larger than the bottom opening, and the end of the first card slot 15 close to the unit boat sheet 10 is the bottom, that is, the bottom 151 of the first card slot. The end far away from the unit boat piece 10 is the top end. The width of the first slot bottom 151 is greater than the thickness of the battery piece 1 and less than 2 times the thickness of the battery piece 1. The opening angle of the first clamping groove 15 is 60 degrees, so that the battery piece 1 can be conveniently placed in the clamping point. It is understood that in other embodiments, the opening angle of the first card slot 15 may be other angles, such as 45 degrees, 30 degrees, etc.
The opening of the first clamping groove 15 faces the furnace tail end 2, the opening of the second clamping groove faces the top end of the graphite boat, and the opening of the third clamping groove faces the furnace mouth end 3. The openings of the first clamping groove 15 and the third clamping groove are oppositely arranged, the opening of the second clamping groove faces the top end of the graphite boat, and the battery piece 1 is fixed on the unit boat piece 10 through the first clamping groove 15, the second clamping groove and the third clamping groove.
It can be understood that, in other embodiments, the opening direction of the clamping groove is set according to the placing mode of the battery piece 1 and the position of the clamping point, so as to facilitate the insertion and removal of the piece.
In addition, the second clamping groove and the third clamping groove have the same structure as the first clamping groove 15, the opening angles of the second clamping groove and the third clamping groove are both 60 degrees, and the widths of the clamping grooves at the ends of the second clamping groove and the third clamping groove, which are close to the unit boat piece 10, are both larger than the thickness of the battery piece 1 and smaller than 2 times the thickness of the battery piece 1.
Furthermore, the width of the slot at the end of the slot close to the unit boat 10 is 0.2cm-0.29 cm.
In one embodiment, each cell 1 is fixed on the unit boat sheet 10 by three slots formed by a set of three clamping points. Taking the first clamping groove 15 formed by the first clamping point 11 as an example, the thickness of the battery piece 1 is 0.16cm, the width of the clamping groove at the bottom 151 of the first clamping groove is 0.29cm, and the movable range of the battery piece 1 at the bottom of the first clamping groove is 0-0.13cm during the coating process, so that the movable range of the battery piece 1 is reduced compared with that of the conventional graphite boat. Therefore, when coating is carried out, under the action of airflow blowing force and high temperature in the furnace tube, the battery piece 1 can be attached to the clamping point only by grinding a smaller groove on the new clamping point, the time and the times of grinding-in of the clamping point and the battery piece are shortened, and the generation of B-grade products is reduced.
In another embodiment, the width of the slot at the bottom 151 of the first slot is 0.23cm, the thickness of the battery piece 1 is 0.16cm, and the range in which the battery piece 1 can move on the bottom 151 of the first slot is 0-0.07cm during the coating process, so that the moving range of the battery piece 1 is greatly reduced compared with the existing graphite boat. Therefore, under the action of airflow blowing force and high temperature in the furnace tube, the battery piece 1 can be attached to the clamping point by grinding a smaller groove on the new clamping point, so that the time and times for grinding the clamping point and the battery piece are shortened, and the generation of B-grade products is reduced. Meanwhile, higher requirements are provided for the precision of the manipulator when the silicon wafer inserting device is used for inserting the silicon wafer, and the silicon wafer is prevented from being scratched.
It is understood that, in other embodiments, the width of the slot near one end of the unit boat 10 may also be 0.28cm, 0.25cm, etc., and this embodiment is not limited in particular. In the adjusting range of the width of the clamping groove, the smaller the width is, the higher the precision requirement on the mechanical arm is, and the more obvious the improvement on the clamping point burn is.
Further, a plurality of grooves are formed on the outer circumference of the fixing rod 20 at intervals for engaging the unit boat pieces 10 and ensuring the distance between the plurality of unit boat pieces 10.
In this embodiment, a row of mounting holes 14 is formed at the top and bottom ends of each unit boat piece 10, the fixing rods 20 pass through the mounting holes 14 to connect the plurality of unit boat pieces 10, and a plurality of engaging grooves are formed on the outer circles of the fixing rods 20 to engage the plurality of unit boat pieces 10, so that the unit boat pieces 10 are fixedly connected to the fixing rods 20 and the space between the plurality of unit boat pieces 10 is maintained.
In other embodiments, the space between the two unit boat sheets 10 may also be ensured by the pitch blocks provided on the fixing bars 20. Wherein the inner diameter of the spacer is adapted to the outer diameter of the fixation rod 20.
It is understood that in other embodiments, the distance between the two boat sheets 10 can be fixed in various ways, and the embodiment is not limited in particular.
The graphite boat of this embodiment, be close to the draw-in groove width of unit boat piece one end through the restriction draw-in groove, make it be greater than battery piece thickness and be less than 2 times battery piece thickness, after the stuck point of renewal, for current graphite boat, graphite boat unit boat piece diminishes with the distance of stuck point, every battery piece movement distance is just littleer under the air current blowing force of battery piece in the boiler tube and the high temperature effect, the battery piece grinds out littleer recess just can be laminated battery piece and stuck point on new stuck point, the time and the number of times of stuck point and battery piece break-in have been reduced, the card point seal of battery piece that has reduced that is showing, the production of B level article has further been reduced, battery article manufacturing cost has been reduced.
Further, the ends of the graphite boat separate the unit boat sheets 10 by a plurality of graphite blocks 30, and penetrate the graphite blocks 30 and the unit boat sheets 10 by connecting rods 40 to connect and fix the graphite blocks 10 and the unit boat sheets 10.
In the embodiment of the present invention, the graphite block 30 is a hollow graphite block. The graphite boat end of the embodiment adopts the hollow graphite block, so that the shielding of the graphite block on the process gas can be reduced, the influence on the film coating of the battery piece is avoided, and the yield of the battery piece is reduced.
Further, the first clamping point 11, the second clamping point 12 and the third clamping point 13 are distributed in a triangular shape to stably fix the battery piece 1.
Further, in the present embodiment, the fixing rod 20 and the connecting rod 40 are both ceramic insulating rods.
The use method of the graphite boat comprises the following steps:
s1, placing the solar cell slices 1 at corresponding positions of the unit boat slices 10, wherein each solar cell slice is fixed on the unit boat slice 10 through a clamping point, and the width of a clamping groove at one end of the clamping groove close to the unit boat slice 10 is larger than the thickness of the cell slice 1 and is smaller than 2 times of the thickness of the cell slice 1;
s2, placing the graphite boat into a furnace tube of PECVD equipment for film coating;
and S3, when the solar cell is coated, introducing process gas and turning on a radio frequency power supply, and uniformly depositing a passivation film on the solar cell.
According to the graphite boat, the width of the clamping groove at one end of the clamping groove close to the unit boat sheet 10 is limited, so that the width of the clamping groove is larger than the thickness of the battery sheet and smaller than 2 times of the thickness of the battery sheet, when a new clamping point is replaced, compared with the existing graphite boat, the distance between the unit boat sheet of the graphite boat and the clamping point is reduced, the moving distance of each battery sheet is reduced under the action of air flow blowing force in a furnace tube and high temperature, the battery sheet can be attached to the clamping point by grinding a smaller groove on the new clamping point, the time and times for grinding the clamping point and the battery sheet are reduced, the clamping point printing of the battery sheet is remarkably reduced, the generation of B-grade products is further reduced, and the production cost of the battery products is reduced.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A graphite boat, comprising:
the fixing rod penetrates through the periphery of each unit boat sheet to fixedly connect the unit boat sheets, each unit boat sheet is provided with a plurality of groups of clamping points for fixing a battery sheet, and the unit boat sheets and the clamping points on the unit boat sheets form clamping grooves for clamping the battery sheets;
the width of the clamping groove at one end of the clamping groove close to the unit boat sheet is larger than the thickness of the battery sheet and smaller than 2 times of the thickness of the battery sheet.
2. The graphite boat of claim 1,
each group of clamping points comprises a first clamping point, a third clamping point and a plurality of clamping points, wherein the first clamping point is located on the upper portion of the first side of each battery piece and used for clamping the first side, the third clamping point is located below the second side of each battery piece and used for clamping the second side, the third clamping point is located at the bottom end of each battery piece and close to the second side, and the first side and the second side are two sides of each battery piece which are arranged oppositely.
3. The graphite boat of claim 2,
the first clamping point, the second clamping point and the third clamping point are distributed in a triangular shape to stably fix the battery piece.
4. The graphite boat of claim 1,
the opening angle of the clamping groove is 30-60 degrees.
5. The graphite boat of claim 1,
and a plurality of mounting holes for inserting the fixing rods are formed at the top end and the bottom end of the unit boat sheet at intervals.
6. The graphite boat of claim 1,
and a plurality of clamping grooves for positioning the unit boat sheets are uniformly arranged on the outer circle of the fixed rod at intervals.
7. The graphite boat of claim 1,
and distance dividing sleeves are arranged between the unit boat sheets on the excircle of the fixed rod to keep the distance between the unit boat sheets.
8. The graphite boat of claim 7,
the inner diameter of the distance division sleeve is matched with the outer diameter of the fixing rod.
9. The graphite boat of claim 1,
the end part of the graphite boat is provided with a plurality of graphite blocks to separate the unit boat sheets, and the graphite blocks and the unit boat sheets penetrate through the graphite blocks through connecting rods to be fixedly connected with each other.
10. The graphite boat of claim 1,
the width of the clamping groove ranges from 0.2cm to 0.29 cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122281243.5U CN215869314U (en) | 2021-09-18 | 2021-09-18 | Graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122281243.5U CN215869314U (en) | 2021-09-18 | 2021-09-18 | Graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215869314U true CN215869314U (en) | 2022-02-18 |
Family
ID=80255215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122281243.5U Active CN215869314U (en) | 2021-09-18 | 2021-09-18 | Graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215869314U (en) |
-
2021
- 2021-09-18 CN CN202122281243.5U patent/CN215869314U/en active Active
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