CN215855777U - Device for high-temperature butt-extrusion welding of quartz glass component - Google Patents
Device for high-temperature butt-extrusion welding of quartz glass component Download PDFInfo
- Publication number
- CN215855777U CN215855777U CN202120844958.4U CN202120844958U CN215855777U CN 215855777 U CN215855777 U CN 215855777U CN 202120844958 U CN202120844958 U CN 202120844958U CN 215855777 U CN215855777 U CN 215855777U
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- Prior art keywords
- burner
- quartz glass
- fixedly mounted
- welding
- rod
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 238000003466 welding Methods 0.000 title claims abstract description 33
- 238000001125 extrusion Methods 0.000 title claims abstract description 14
- 230000001174 ascending effect Effects 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 7
- 229910002804 graphite Inorganic materials 0.000 abstract description 7
- 239000010439 graphite Substances 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000006835 compression Effects 0.000 abstract description 2
- 238000007906 compression Methods 0.000 abstract description 2
- 239000010453 quartz Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010285 flame spraying Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Glass Melting And Manufacturing (AREA)
Abstract
The utility model discloses a device for butt-extrusion welding quartz glass members at high temperature, which relates to the field of welding of quartz glass members and comprises a base station, wherein a sliding device is fixedly arranged on the base station, a clamp is fixedly arranged on the sliding device, the end surface of a rod-shaped quartz glass member is made into a convex structure or a plane structure, pressure is applied to a joint sheet from the vertical direction while heating is carried out by using flame of a burner for compression joint, therefore, a welding rod required by the prior welding of quartz glass components is not needed, the surface deformation of the joint surface can be prevented, the joint surface does not need to be reshaped, a graphite clamp is not needed, a temporary welding process carried out by manual operation can be omitted, a welding part does not need to be modified, a plurality of rod-shaped quartz glass members can be simultaneously welded and jointed on a plate-shaped quartz glass member, the assembly of the rod-shaped silica glass member and the plate-shaped silica glass member can be efficiently completed.
Description
Technical Field
The utility model relates to the field of welding of quartz glass components, in particular to a device for butt-extrusion welding of quartz glass components at high temperature.
Background
In a manufacturing process of a semiconductor device, a jig is made of quartz glass, which is a high-purity material that is stable even at high temperatures and does not cause impurities to be mixed into a semiconductor. In a jig made of quartz glass used for semiconductor manufacturing, a quartz boat or a jig for cleaning quartz glass is assembled by welding a top plate and a bottom plate to a member provided with a groove.
At present, when PN junctions are manufactured in the field of solar cells, a diffusion process is the core of the solar cell technology, the diffusion process carries out high-temperature reaction in a furnace tube and bears a boat used by the cells, and because the boat is required to have the characteristics of high temperature resistance and corrosion resistance, the boat made of quartz becomes the best choice of the diffusion process, and the quartz boat plays a very important role in the field of the diffusion process.
The conventional production process is a method in which the end face of a rod-shaped quartz glass member is brought close to the surface of a plate-shaped quartz glass member, a welding rod made of quartz glass having a diameter of 2 to 6mm is used to fuse and join the periphery of the welding portion by oxyhydrogen flame using a hand-held burner, and the conventional production process is a method in which welded parts are joined to each other by the welding rod to assemble the members. Therefore, if the portion piled up with the welding rod is not melted well, the welding rod is partially defective in welding due to defective heating, and bubbles may be generated, or the joint strength may be insufficient. Therefore, in the case of bonding a quartz boat by using a welding rod suitable for an operation of increasing bonding strength by sufficient ignition, in the conventional method, a groove for mounting a silicon wafer is generally formed by cutting a quartz glass rod-shaped member with a diamond grindstone (in some cases, a quartz boat is assembled first and then a groove is formed), a plurality of (4 in the drawing) groove rods are generally arranged at predetermined positions by using a graphite jig (or other material), similarly, the groove rods are temporarily welded in sequence on a top plate and a bottom plate which are positioned in parallel at a predetermined interval, the quartz boat shape is temporarily assembled (commonly referred to as spot welding in the art), the temporarily welded assembly is taken out from the graphite jig, whether the standard is satisfied or not is checked by using a detection tool such as a three-coordinate system, the temporary welding is performed again when correction is necessary, and after it is confirmed that the dimension tolerance is within a predetermined dimension tolerance, in this conventional method, a plurality of graphite jigs must be prepared in accordance with various specifications and specifications of the quartz boat, and a large amount of time and labor are required for fine adjustment work for disposing a quartz glass member such as a top plate or a grooved bar in the graphite jig in order to achieve a predetermined size, including the problem of abrasion of the graphite jig. Further, even if the fine adjustment of the grooved bars is smoothly performed and the grooved bars themselves have variations in diameter, the finished product has a problem that the finished product is assembled with a dimensional tolerance different from the specification because the distance from the diameter center of the grooved bar to the diameter center of the other grooved bar is different.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems and designs a device for high-temperature butt-extrusion welding of quartz glass components.
The technical scheme of the utility model for realizing the aim is that the device for butt-extrusion welding of the quartz glass component at high temperature comprises a base station, wherein a sliding device is fixedly arranged on the base station, a clamp is fixedly arranged on the sliding device, air cylinders are fixedly arranged on the base station and positioned at two sides of the sliding device respectively, electric rotating discs are fixedly arranged on telescopic ends of the air cylinders respectively, fixing devices are fixedly arranged on rotating ends of the electric rotating discs respectively, a longitudinal electric push rod is fixedly arranged on the upper wall surface of the air cylinder, a transverse electric push rod is fixedly arranged on the telescopic end of the longitudinal electric push rod, a support rod is fixedly arranged on the telescopic end of the transverse electric push rod, a first motor is fixedly arranged on the support rod, a first combustor is fixedly arranged on the driving end of the first motor, and a mechanical arm is fixedly arranged on the base station and positioned behind the sliding device, the mechanical arm is fixedly provided with a second combustor, an ascending electric push rod is fixedly arranged on the base station and between gaps on two sides of the cylinder and the sliding device respectively, a second motor is fixedly arranged on the telescopic end of the ascending electric push rod, and a third combustor is fixedly arranged on the driving end of the second motor.
Preferably, the first combustor, the second combustor and the third combustor are all bifurcated combustors or pipeline combustors.
Preferably, the flame output ends of the first burner, the second burner and the third burner are in an annular structure, a plurality of nozzles with the same structure are arranged on the flame output ends of the first burner, the second burner and the third burner, and the plurality of nozzles are linearly arranged on the annular structure of the flame output ends of the first burner, the second burner and the third burner.
Preferably, the diameter of the output end of the nozzle is 1-3 mm.
Preferably, the first combustor, the second combustor, and the third combustor are provided with flow meters in their transfer lines.
Preferably, the sliding device is an electric sliding rail.
Preferably, the mechanical arm is a 6-axis joint mechanical arm, and the fixing device is a vacuum chuck.
Advantageous effects
In the device for butt fusion welding of silica glass members at high temperature manufactured by the technical proposal of the utility model, the end surface of the rod-shaped silica glass member is made into a convex structure or a plane structure, and pressure is applied to the joint surface from the vertical direction for compression joint while heating by flame of a burner, so that welding rods required by the prior art for welding of silica glass components are not needed, the surface deformation of the joint surface can be prevented, and the joint surface does not need to be reshaped. In addition, in the step of assembling the rod-shaped silica glass member and the plate-shaped silica glass member, it is not necessary to use a graphite jig, and it is possible to omit a temporary welding step by manual work, and it is not necessary to modify the welded portion, and it is possible to weld and join a plurality of rod-shaped silica glass members to the plate-shaped silica glass member at the same time, and it is possible to complete the assembly of the rod-shaped silica glass member and the plate-shaped silica glass member efficiently.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a schematic view of the clamp of the present invention;
FIG. 3 is a schematic view of a showerhead of the present invention;
FIG. 4 is a schematic view showing the butt joint end faces of a plate-shaped silica glass member and a rod-shaped silica glass member according to the present invention;
in the figure, 1, a base station; 2. a sliding device; 3. a clamp; 4. a cylinder; 5. an electric turntable; 6. a fixing device; 7. a longitudinal electric push rod; 8. a transverse electric push rod; 9. a first burner; 10. a mechanical arm; 11. a second combustor; 12. a nozzle; 13. a plate-like quartz glass member; 14. a rod-shaped quartz glass member; 15. and a third burner.
Detailed Description
The utility model is described in detail with reference to the accompanying drawings, and as shown in fig. 1-4, a device for butt-extrusion welding of quartz glass components at high temperature comprises a base platform 1, a sliding device 2 is fixedly mounted on the base platform 1, a clamp 3 is fixedly mounted on the sliding device 2, air cylinders 4 are respectively and fixedly mounted on the base platform 1 and positioned at two sides of the sliding device, electric turntables 5 are respectively and fixedly mounted on telescopic ends of the air cylinders 4, fixing devices 6 are respectively and fixedly mounted on rotating ends of the electric turntables 5, a longitudinal electric push rod 7 is fixedly mounted on an upper wall surface of each air cylinder 4, a transverse electric push rod 8 is fixedly mounted on a telescopic end of each longitudinal electric push rod 7, a support rod is fixedly mounted on a telescopic end of each transverse electric push rod 8, a first motor is fixedly mounted on each support rod, a first burner 9 is fixedly mounted on a driving end of the first motor, base station 1 is last and be located 2 rear fixed mounting of slider and have arm 10, fixed mounting has second combustor 11 on arm 10, on base station 1 and be located respectively fixed mounting have ascending electric putter between cylinder 4 and the 2 both sides gaps of slider, ascending electric putter is flexible to be served fixed mounting has the second motor, fixed mounting has third combustor 15 on the second motor drive end, first combustor 9, second combustor 11 and third combustor 15 are forked formula combustor or pipeline formula combustor, first combustor 9, second combustor 11 and third combustor 15 flame output end are the annular structure, be equipped with a plurality of nozzles 12 that the structure is the same on first combustor 9, second combustor 11 and the 15 flame output end of third combustor, a plurality of nozzle 12 is linear arrangement and is in first combustor 9, second combustor 11, On the second combustor 11 and the third combustor 15, the diameter of the output end of the nozzle 12 is 1-3mm, flow meters are arranged on the conveying pipelines of the first combustor 9, the second combustor 11 and the third combustor 15, the sliding device 2 is an electric sliding rail, the mechanical arm 10 is a 6-axis joint mechanical arm, and the fixing device 6 is a vacuum chuck.
All the electrical components in the present application are connected with the power supply adapted to the electrical components through the wires, and an appropriate controller should be selected according to actual conditions to meet the control requirements, and specific connection and control sequences should be obtained.
Example (b): as can be seen from fig. 1 to 4 of the specification, in use, the rod-shaped quartz glass member 14 is fixedly mounted on the fixture 3, the plate-shaped quartz glass members 13 are respectively fixedly mounted on the fixing device 6, the plate-shaped quartz glass member 13 is driven by the electric rotary table 5 to rotate to adjust the butt joint position, the air cylinder 4 and the electric slide rail are started, the distance between the plate-shaped quartz glass member 13 and the rod-shaped quartz glass member 14 is adjusted, the transverse electric push rod 8, the longitudinal electric push rod 7, the first motor, the ascending electric push rod and the second motor are started to adjust the flame spraying positions and angles of the first burner 9 and the third burner 15, the first burner 9 and the third burner 15 are started, the sprayed flame sprays flame on the joint surface of the rod-shaped quartz glass member 14, and the electric slide rail and the air cylinder 4 are started at the same time, so that the rod-shaped quartz glass member 14 and the plate-shaped quartz glass member 13 move towards each other to realize pressing and crimping, thereby realizing crimping After the press-bonding, the suction of the plate-like silica glass member 13 by the fixing device 6 is released, the first burner 9 and the third burner 15 are moved and retracted in the vertical direction, respectively, and the seal-bonding of the press-bonded part is performed by the second burner 11 attached to the robot arm 10, and similarly, the above-described steps are repeated to press-bond the other side plate-like silica glass member 13 and the other end of the rod-like silica glass member 14.
The technical solutions described above only represent the preferred technical solutions of the present invention, and some possible modifications to some parts of the technical solutions by those skilled in the art all represent the principles of the present invention, and fall within the protection scope of the present invention.
Claims (7)
1. The device for high-temperature butt-extrusion welding of the quartz glass component comprises a base platform (1) and is characterized in that a sliding device (2) is fixedly mounted on the base platform (1), a clamp (3) is fixedly mounted on the sliding device (2), air cylinders (4) are respectively and fixedly mounted on two sides of the sliding device on the base platform (1), electric turntables (5) are respectively and fixedly mounted on telescopic ends of the air cylinders (4), fixing devices (6) are respectively and fixedly mounted on rotating ends of the electric turntables (5), a longitudinal electric push rod (7) is fixedly mounted on an upper wall surface of each air cylinder (4), a transverse electric push rod (8) is fixedly mounted on the telescopic end of each longitudinal electric push rod (7), a support rod is fixedly mounted on the telescopic end of each transverse electric push rod (8), a first motor is fixedly mounted on the support rod, a first combustor (9) is fixedly mounted on a driving end of the first motor, last and be located slider (2) rear fixed mounting of base station (1) has arm (10), fixed mounting has second combustor (11) on arm (10), on base station (1) and be located respectively fixed mounting have ascending electric putter between cylinder (4) and slider (2) both sides gap, ascending electric putter is flexible to be served fixed mounting and is served the second motor, fixed mounting has third combustor (15) on the second motor drive end.
2. A high temperature butt-extrusion welding apparatus for silica glass members as claimed in claim 1, wherein said first burner (9), said second burner (11) and said third burner (15) are branched burners or in-line burners.
3. The device for high-temperature extrusion welding of the quartz glass component according to claim 1, wherein the flame output ends of the first burner (9), the second burner (11) and the third burner (15) are in an annular structure, a plurality of nozzles (12) with the same structure are arranged on the flame output ends of the first burner (9), the second burner (11) and the third burner (15), and the plurality of nozzles (12) are linearly arranged on the annular structure of the flame output ends of the first burner (9), the second burner (11) and the third burner (15).
4. A high temperature butt-extrusion quartz glass unit according to claim 3, wherein the diameter of the outlet end of the nozzle (12) is 1-3 mm.
5. A high temperature butt-extrusion welding quartz glass unit according to claim 1, characterized in that flow meters are provided in the delivery lines of the first burner (9), the second burner (11) and the third burner (15).
6. A high temperature butt-extrusion welding apparatus for quartz glass units according to claim 1, wherein said sliding means (2) is an electric slide rail.
7. A high temperature butt-extrusion welding apparatus for quartz glass members according to claim 1, wherein said robot arm (10) is a 6-axis joint robot arm, and said fixing device (6) is a vacuum chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120844958.4U CN215855777U (en) | 2021-04-23 | 2021-04-23 | Device for high-temperature butt-extrusion welding of quartz glass component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120844958.4U CN215855777U (en) | 2021-04-23 | 2021-04-23 | Device for high-temperature butt-extrusion welding of quartz glass component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215855777U true CN215855777U (en) | 2022-02-18 |
Family
ID=80319238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120844958.4U Expired - Fee Related CN215855777U (en) | 2021-04-23 | 2021-04-23 | Device for high-temperature butt-extrusion welding of quartz glass component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215855777U (en) |
-
2021
- 2021-04-23 CN CN202120844958.4U patent/CN215855777U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220218 |
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| CF01 | Termination of patent right due to non-payment of annual fee |