CN215757725U - Crucible lifting and rotating mechanism for crystal growth equipment and crystal growth equipment - Google Patents

Abstract

The utility model discloses a crucible lifting and rotating mechanism for crystal growth equipment and the crystal growth equipment, wherein the crystal growth equipment comprises a crucible, the crucible lifting and rotating mechanism is used for driving the crucible to move up and down, the crucible lifting and rotating mechanism comprises a fixed support, a sliding seat assembly and a driving assembly, the sliding seat assembly is suitable for being connected with the crucible, the driving assembly comprises a driver and a lifting mechanism, the driver is installed on the fixed support, the lifting mechanism is matched with the sliding seat assembly, and the driver drives the sliding seat assembly to move up and down through the lifting mechanism so that the sliding seat assembly is suitable for driving the crucible to move up and down. The crucible lifting and rotating mechanism for the crystal growth equipment has a compact structure and is convenient to save occupied space.

Description

Crucible lifting and rotating mechanism for crystal growth equipment and crystal growth equipment

Technical Field

The utility model relates to the technical field of crystal growth, in particular to a crucible lifting and rotating mechanism for crystal growth equipment and the crystal growth equipment.

Background

The main growth technology of the existing monocrystalline silicon is a czochralski method, in the crystal growth process, a certain liquid level distance between a polycrystalline silicon solution of a quartz crucible and a guide cylinder needs to be ensured, so that the crucible needs to be lifted, and in the crystal growth process, the rotation of the crucible needs to be realized to realize the crystal growth. Generally, a crucible shaft is installed on a machine base in an integral driving mode in the prior art, so that the crucible shaft is lifted and rotated, the processing mode is high in difficulty, space is not saved, and the operation is complex.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a crucible lifting and rotating mechanism for crystal growth equipment, which is compact in structure and convenient for saving occupied space.

The utility model also provides crystal growth equipment with the crucible lifting and rotating mechanism.

According to a first aspect of the present invention, there is provided a crucible lifting and rotating mechanism for a crystal growing apparatus including a crucible, the crucible lifting and rotating mechanism being configured to drive the crucible to move up and down, the crucible lifting and rotating mechanism including: the fixed support is suitable for being connected with a furnace bottom plate of the crystal growth equipment; a slide assembly adapted to be connected to the crucible; the driving assembly comprises a driver and a lifting mechanism, the driver is installed on the fixed support, the lifting mechanism is matched with the sliding seat assembly, and the driver drives the sliding seat assembly to move up and down through the lifting mechanism so that the sliding seat assembly is suitable for driving the crucible to move up and down.

According to the crucible lifting and rotating mechanism for the crystal growth equipment, the driver of the driving assembly for driving the crucible to lift is arranged on the fixed support, and the fixed support is suitable for being connected with the furnace bottom plate, so that the driving assembly and the furnace body of the crystal growth equipment can be better integrated, the integrity of the crystal growth equipment is favorably improved, meanwhile, the driving assembly and the furnace body plate are conveniently and compactly arranged, the space is favorably saved, and the cost is favorably reduced.

In some embodiments, the lifting mechanism includes a lead screw connected to the driver for rotation by the driver, the lead screw extending in an up-down direction and being in threaded engagement with the carriage assembly.

In some embodiments, the drive assembly further comprises: the synchronous belt transmission mechanism is arranged between the driver and the lifting mechanism and comprises a driving belt wheel, a driven belt wheel and an annular transmission belt, the driving belt wheel is connected with the driver, the driven belt wheel is connected with the lead screw, and the annular transmission belt is tensioned on the driving belt wheel and the driven belt wheel; optionally, the diameter of the driving pulley is smaller than the diameter of the driven pulley.

In some embodiments, a guide mechanism is provided on the carriage assembly, the guide mechanism comprising: the guide rail is suitable for being fixedly arranged on a fixed support in the crystal growth equipment and extends along the vertical direction; the sliding block is arranged on the sliding seat component and is in sliding fit with the guide rail.

In some embodiments, the carriage assembly comprises: the crucible shaft is suitable for movably penetrating the furnace bottom plate, an installation flange is formed on the crucible shaft, a corrugated pipe is sleeved outside the crucible shaft, and the corrugated pipe is connected between the furnace bottom plate and the installation flange in a sealing manner; optionally, the bellows is a metallic piece.

In some embodiments, the carriage assembly comprises a weighing mechanism for weighing the load weight on the carriage assembly and outputting weighing information; optionally, the crucible lifting and rotating mechanism further comprises a display component, and the display component is connected with the weighing mechanism and used for displaying the weighing information.

In some embodiments, the weighing mechanisms are multiple and arranged at intervals along the circumferential direction of the sliding seat assembly, and each weighing mechanism is respectively connected with the display assembly; optionally, the weighing mechanisms are three and evenly spaced along the circumference of the carriage assembly.

In some embodiments, the carriage assembly further comprises: the crucible shaft is suitable for movably penetrating the furnace bottom plate and is suitable for being connected with the crucible, and an installation flange is formed on the crucible shaft; the sliding seat is matched with the lifting mechanism, the sliding seat is sleeved outside the crucible shaft and matched with the lower side of the mounting flange, and the weighing mechanism is arranged between the sliding seat and the mounting flange and fixedly arranged on the sliding seat; the connecting piece, the connecting piece is connected mounting flange with the slide, the connecting piece with mounting flange with one of them fixed connection in the slide, and with mounting flange with another direction sliding fit from top to bottom along in the slide.

In some embodiments, the connecting member is in threaded fit with the sliding seat, a mounting hole is formed in the mounting flange, the connecting member is movably arranged in the mounting hole in a penetrating mode, and the mounting hole and the weighing mechanism are arranged at intervals along the circumferential direction of the crucible shaft.

A crystal growth apparatus according to a second aspect of the present invention includes: a crucible; and the crucible lifting and rotating mechanism is used for the crystal growth equipment according to the first aspect of the utility model, and is connected with the crucible to drive the crucible to move up and down.

According to the crystal growth equipment, by adopting the crucible lifting and rotating mechanism, the lifting and the moving of the crucible are realized, the real-time position tracking of the material liquid level in the crucible is convenient to realize, and the production efficiency is favorably improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a crucible lifting and rotating mechanism according to one embodiment of the present invention;

FIG. 2 is another schematic view of the crucible elevating and rotating mechanism shown in FIG. 1;

FIG. 3 is a partial cross-sectional view of the crucible lifting and rotating mechanism shown in FIG. 2;

fig. 4 is another partial sectional view of the crucible lifting and rotating mechanism shown in fig. 2.

Reference numerals:

a crucible lifting and rotating mechanism 100,

A drive assembly 1,

A driver 11,

A lifting mechanism 12, a lead screw 121,

A synchronous belt transmission mechanism 13, a driving pulley 131, a driven pulley 132, an endless transmission belt 133,

A guide mechanism 14, a guide rail 141,

A slide seat component 2,

A weighing mechanism 21,

A crucible shaft 22, a mounting flange 221, a mounting hole 221a,

A slide 23, a connecting piece 24, a mounting piece 25,

A fixed support 3 and a corrugated pipe 5;

a rotation driving component 6,

A second driver 61,

A poly-v belt transmission mechanism 62, a second driving pulley 621, a second driven pulley 622, and a poly-v belt 623.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the utility model. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Next, a crucible lifting and rotating mechanism 100 for a crystal growing apparatus according to an embodiment of the present invention is described with reference to the drawings.

The crystal growth equipment comprises a crucible, the crucible can be used for containing materials for crystal growth, and a crucible lifting and rotating mechanism 100 is used for driving the crucible to move up and down and rotate. For example, the crystal growth apparatus may be a single crystal furnace, and the crucible may be a quartz crucible, but is not limited thereto.

As shown in fig. 1, crucible lifting and rotating mechanism 100 includes fixed bolster 3, slide subassembly 2 and drive assembly 1, fixed bolster 2 is suitable for linking to each other with the furnace floor of crystal growth equipment, slide subassembly 2 is suitable for linking to each other with the crucible, slide subassembly 2 links to each other with drive assembly 1 in order to be driven by drive assembly 1 and move, drive assembly 1 includes driver 11, driver 11 is installed on fixed bolster 3, then driver 11 can be installed on the furnace floor indirectly through fixed bolster 3, under the prerequisite of guaranteeing drive assembly 1 reliable installation, make drive assembly 1 can form a whole with the furnace body of crystal growth equipment better, be favorable to promoting crystal growth equipment's wholeness, be convenient for realize the compact setting of drive assembly 1 and furnace body board 101 simultaneously, be favorable to saving space, reduce cost.

The driving assembly 1 further comprises a lifting mechanism 12, the lifting mechanism 12 is matched with the sliding seat assembly 2, and the driver 11 drives the sliding seat assembly 2 to move up and down through the lifting mechanism 12, so that the sliding seat assembly 2 is suitable for driving the crucible to move up and down, and the crucible is lifted and lowered.

Therefore, according to the crucible lifting and rotating mechanism 100 for the crystal growth equipment provided by the embodiment of the utility model, the driver 11 of the driving assembly 1 for driving the crucible to lift is arranged on the fixed support 3, and the fixed support 3 is suitable for being connected with the furnace bottom plate, so that the driving assembly 1 can be better integrated with the furnace body of the crystal growth equipment, the integrity of the crystal growth equipment is favorably improved, meanwhile, the driving assembly 1 and the furnace body plate 101 are conveniently and compactly arranged, the space is favorably saved, and the cost is favorably reduced.

In some embodiments, as shown in fig. 1, the lifting mechanism 12 includes a lead screw 121, the lead screw 121 is connected to the driver 11 to be driven by the driver 11 to rotate, the lead screw 121 extends in an up-down direction, and the lead screw 121 and the slide assembly 2 are in threaded fit, so that the lead screw 121 rotates to drive the slide assembly 2 to move along the extending direction of the lead screw 121, so as to achieve up-and-down movement of the slide assembly, and thus drive the crucible to move up and down. Therefore, the driving assembly 1 is simple in structure and convenient to ensure driving stability.

Of course, the structure of the lifting mechanism 12 is not limited to this, and for example, the lifting mechanism 12 may be a rack and pinion mechanism, in which a pinion is connected to the driver 11 to be driven to rotate by the driver 11, and a rack is engaged with the pinion to perform up and down movement of the rack, so that up and down movement of the crucible can be performed as well.

Alternatively, in the example of fig. 1, the drive 11 is a servo motor.

In some embodiments, as shown in fig. 1, the driving assembly 1 further includes a synchronous belt transmission mechanism 13, the synchronous belt transmission mechanism 13 is disposed between the driver 11 and the lifting mechanism 12, and then the synchronous belt transmission mechanism 13 can transmit the power of the driver 11 to the lifting mechanism 12; the synchronous belt drive mechanism 13 includes a driving pulley 131, a driven pulley 132, and an endless belt 133, the driving pulley 131 is connected to the driver 11 to be driven by the driver 11 to rotate, the driven pulley 132 is connected to the lead screw 121, and the endless belt 133 is stretched over the driving pulley 131 and the driven pulley 132, so that the driven pulley 132 can rotate the lead screw 121. Therefore, the annular transmission belt 133, the driving belt wheel 131 and the driven belt wheel 132 do not slide relatively, so that a strict transmission ratio can be ensured, and the crucible can be accurately controlled to move up and down conveniently.

In some embodiments, as shown in fig. 1, the diameter of the driving pulley 131 is smaller than that of the driven pulley 132, and the rotation speed of the driven pulley 132 is smaller than that of the driving pulley 131, so as to realize speed reduction transmission, which is beneficial to ensuring the stability of crucible movement.

In some embodiments, as shown in fig. 1, the slide assembly 2 is provided with a guiding mechanism 14, the guiding mechanism 14 includes a guide rail 141 and a slider, the guide rail 141 is adapted to be fixed on the fixed support 3 in the crystal growth apparatus, and the guide rail 141 extends along the up-down direction, the slider is provided on the slide assembly 2, and the slider is slidably engaged with the guide rail 141, so that the slider can move along the extending direction of the guide rail 141 relative to the guide rail 141 to ensure the stability and smoothness of the up-down movement of the slide assembly 2, thereby achieving the stable and smooth movement of the crucible.

Wherein the driving assembly 1 may be provided on the fixing support 3. For example, in the example of fig. 1, the drive assembly 1 comprises a drive 11, the drive 11 may power the movement of the crucible, and the drive 11 may be fixed to the fixed support 3.

In some embodiments, as shown in fig. 1, the sliding base assembly 2 includes a crucible shaft 22, the crucible is adapted to be fixed on the crucible shaft 22 to be driven by the crucible shaft 22 to move up and down, the crucible shaft 22 is adapted to be movably disposed on a furnace bottom plate, and the furnace bottom plate can play a certain role in guiding the movement of the crucible shaft 22, so as to ensure the crucible shaft 22 to stably move. Wherein, be formed with mounting flange 221 on the crucible shaft 22, mounting flange 221 can form the below at the bottom plate of the stove, crucible shaft 22 overcoat is equipped with bellows 5, bellows 5 sealing connection is between bottom plate of the stove and mounting flange 221, then the axial one end of bellows 5 links to each other with bottom plate of the stove is sealed, the axial other end of bellows 5 links to each other with mounting flange 221 is sealed, make the bottom plate of the stove, can inject comparatively inclosed installation space between bellows 5 and the mounting flange 221, a part of crucible shaft 22 is located the installation space, in the in-process that crucible shaft 22 reciprocates, the distance of bottom plate of the stove and mounting flange 221 in the upper and lower direction changes along with crucible shaft 22 removes, bellows 5 takes place to warp, thereby can realize the sealed all the time in-process that reciprocates crucible shaft 22, can avoid impurity etc. to cause the influence to crucible shaft 22 reciprocates.

Optionally, the corrugated tube 5 is made of metal, so as to ensure that the corrugated tube 5 is reliable in use.

In some embodiments, the slide assembly 2 includes the weighing mechanism 21, the weighing mechanism 21 is used for weighing the bearing weight on the slide assembly 2 and outputting weighing information, the operator can obtain the bearing weight on the slide assembly 2 through the weighing mechanism 21, thereby obtain the weight of the material in the crucible, and then calculate the height of the material in the crucible, for example, the weighing mechanism 21 can weigh the bearing weight on the slide assembly 2 in real time, the operator can obtain the height of the material in the crucible in real time through the display assembly, realize the tracking of the change of the material liquid level real-time position in the crucible, and be favorable for further improving the production efficiency.

Further, crucible lifting and drop rotating mechanism still includes display module, and display module links to each other with weighing mechanism 21 in order to be used for showing the information of weighing, and display module can show the information of weighing in the form of numerical value, and the operation personnel can directly obtain the information of weighing through display module.

Optionally, the display module includes data conversion box, CPU and display screen, the display screen is connected with the CPU electricity, CPU is connected with the data conversion box electricity, the connecting wire and the data conversion box electricity of weighing mechanism 21 are connected in order to transmit the information of weighing to the data conversion box, the data conversion box is with signal transmission to CPU, through PLC data processing, CPU is with signal transmission to the display screen in order to show the concrete numerical value of bearing weight again, the operating personnel can directly obtain the information of weighing through reading the display information on the display screen.

In some embodiments, the weighing mechanisms 21 are multiple, the weighing mechanisms 21 are arranged at intervals along the circumferential direction of the slide seat assembly 2, each weighing mechanism 21 is connected with the display assembly, and the display assembly can display weighing information output by each weighing mechanism 21 so as to realize independent display of the bearing weight weighed by the weighing mechanisms 21, so that the operator can judge the effectiveness of the bearing weights, and the weighing accuracy of the weighing mechanisms 21 can be guaranteed.

Of course, the display assembly may also display the average of the bearing weights weighed by the plurality of weighing mechanisms 21 and the final weighed bearing weight. In the description of the present invention, "a plurality" means two or more.

Optionally, there are three weighing mechanisms 21, and the three weighing mechanisms 21 are uniformly spaced along the circumference of the slide carriage assembly 2, so that the three weighing mechanisms 21 can be respectively located at three vertices of a regular triangle, and a smaller number of weighing mechanisms 21 can be adopted to realize balanced weighing of the load bearing weight. Of course, the weighing means 21 can also be two, four or more than four.

In some embodiments, as shown in fig. 3 and 4, the slide carriage assembly 2 further includes a crucible shaft 22, a slide carriage 23 and a connecting member 24, the crucible shaft 22 is adapted to be movably disposed on the bottom plate of the furnace, the crucible shaft 22 is adapted to be connected to the crucible, a mounting flange 221 is formed on the crucible shaft 22, the slide carriage 23 is sleeved outside the crucible shaft 22, the slide carriage 23 is fitted on the lower side of the mounting flange 221, the weighing mechanism 21 is disposed between the mounting flange 221 and the slide carriage 23, and the weighing mechanism 21 is fixedly disposed on the slide carriage 23 for weighing the load weight on the mounting flange 221 and outputting weighing information, when the weighing mechanism 21 is weighing the load weight on the mounting flange 221, the weighing mechanism 21 abuts against the mounting flange 221, so that the load weight on the mounting flange 221 acts on the weighing mechanism 21. For example, in the example of fig. 1, the weighing mechanism 21 is fixedly mounted on the carriage 23 by means of a mounting 25.

The connecting member 24 is connected with the mounting flange 221 and the sliding base 23, the connecting member 24 is fixedly connected with one of the mounting flange 221 and the sliding base 23, and the connecting member 24 is in sliding fit with the other one of the mounting flange 221 and the sliding base 23 along the up-down direction, so that the weighing mechanism 21 can accurately weigh the bearing weight of the mounting flange 221, and poor weighing accuracy caused by mounting acting force between the mounting flange 221 and the sliding base 23 is avoided. For example, the connecting member 24 is fixedly connected to the mounting flange 221, and the connecting member 24 is slidably fitted to the sliding base 23 in the up-down direction, or the connecting member 24 is fixedly connected to the sliding base 23, and the connecting member 24 is slidably fitted to the mounting flange 221 in the up-down direction (as shown in fig. 3 and 4).

For example, in the example of fig. 3 and 4, the connecting member 24 is in threaded fit with the sliding base 23 to achieve fixed connection between the connecting member 24 and the sliding base 23, the mounting hole 221a is formed on the mounting flange 221, and the connecting member 24 is movably disposed through the mounting hole 221a to achieve sliding fit between the connecting member 24 and the mounting flange 221, so that the weighing mechanism 21 allows a certain range of movement of the mounting flange 221 in the up-down direction relative to the sliding base 23 during use, so that the weighing mechanism 21 has a certain weighing range.

Wherein, the mounting holes 221a and the weighing mechanism 21 are arranged at intervals along the circumferential direction of the crucible shaft 22 to avoid the interference of the connecting piece 24 and the weighing mechanism 21.

As shown in fig. 1, the crucible lifting mechanism 100 further includes a rotation driving assembly 6, the crucible shaft 22 includes a body portion and a rotation portion, the rotation portion can be rotatably fitted in the body portion, the adjusting assembly 3 is connected with the body portion and the weighing assembly 2, and the rotation driving assembly 6 is used for driving the rotation portion to rotate around the central axis of the crucible shaft 22, so that when the crucible lifting mechanism 100 is applied to a crystal growth apparatus, the crucible body is soaked by a heating device of the crystal growth apparatus.

For example, in the example of fig. 1, the rotary driving assembly 6 includes a second driver 61 and a v-belt transmission mechanism 62, the second driver 61 is directly or indirectly mounted on the slide carriage assembly 2, the v-belt transmission mechanism 62 includes a second driving pulley 621, a second driven pulley 622 and a v-belt 623, the second driving pulley 621 is connected to the second driver 61 to be driven by the second driver 61 to rotate, the second driven pulley 622 is connected to the crucible shaft 22101, and the v-belt 623 is tensioned on the second driving pulley 621 and the second driven pulley 622, so that the second driven pulley 622 can drive the crucible shaft 22101 to rotate. Therefore, the rotary driving assembly 6 runs stably and has a compact structure.

Wherein, the diameter of the second driving pulley 621 is smaller than the diameter of the second driven pulley 622, and then the rotating speed of the second driven pulley 622 is smaller than the rotating speed of the second driving pulley 621, so as to realize speed reduction transmission, which is beneficial to ensuring the stability of the crucible rotation.

The crystal growth apparatus according to the embodiment of the second aspect of the present invention includes a crucible and a crucible lifting and rotating mechanism 100, the crucible lifting and rotating mechanism 100 is the crucible lifting and rotating mechanism 100 for the crystal growth apparatus according to the above first aspect of the present invention, and the crucible lifting and rotating mechanism 100 is connected to the crucible to drive the crucible to move up and down and rotate.

According to the crystal growth equipment, by adopting the crucible lifting and rotating mechanism 100, the lifting and the moving of the crucible are realized, the real-time position tracking of the material liquid level in the crucible is convenient to realize, and the production efficiency is favorably improved.

Other configurations and operations of crystal growth apparatus according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present invention, it is to be understood that the terms "central", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the utility model have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A crucible lifting and rotating mechanism (100) for a crystal growing apparatus, the crystal growing apparatus comprising a crucible, the crucible lifting and rotating mechanism (100) being configured to drive the crucible to move up and down and rotate, the crucible lifting and rotating mechanism (100) comprising:

a fixed support (3) adapted to be connected to a furnace floor of the crystal growing apparatus;

a slide assembly (2), said slide assembly (2) being adapted to be connected to said crucible;

a drive assembly (1); drive assembly (1) includes driver (11) and elevating system (12), driver (11) are installed on fixed bolster (3), elevating system (12) with slide subassembly (2) cooperation, driver (11) pass through elevating system (12) drive slide subassembly (2) reciprocate, so that slide subassembly (2) are suitable for the drive the crucible reciprocates.

2. The crucible lifting and rotating mechanism (100) for a crystal growth apparatus according to claim 1, wherein the lifting mechanism (12) comprises a lead screw (121), the lead screw (121) is connected to the driver (11) to be driven to rotate by the driver (11), and the lead screw (121) extends in an up-and-down direction and is in threaded engagement with the slider assembly (2).

3. The crucible lifting and rotating mechanism (100) for a crystal growth apparatus according to claim 2, wherein the driving assembly (1) further comprises:

the synchronous belt transmission mechanism (13) is arranged between the driver (11) and the lifting mechanism (12) and comprises a driving belt wheel (131), a driven belt wheel (132) and an annular transmission belt (133), the driving belt wheel (131) is connected with the driver (11), the driven belt wheel (132) is connected with the lead screw (121), and the annular transmission belt (133) is tensioned on the driving belt wheel (131) and the driven belt wheel (132);

optionally, the diameter of the driving pulley (131) is smaller than the diameter of the driven pulley (132).

4. Crucible lifting and rotating mechanism (100) for crystal growth apparatuses according to claim 1, characterized in that a guiding mechanism (14) is provided on the slide assembly (2), the guiding mechanism (14) comprising:

the guide rail (141), the said guide rail (141) is suitable for fixing on the fixed support (3) in the said crystal growing apparatus and extending along the up-and-down direction;

the sliding block is arranged on the sliding seat component (2) and is in sliding fit with the guide rail (141).

5. The crucible lifting and rotating mechanism (100) for a crystal growth apparatus according to claim 1, wherein the carriage assembly (2) comprises:

the crucible shaft (22), the crucible shaft (22) is suitable for movably penetrating through the furnace bottom plate, a mounting flange (221) is formed on the crucible shaft (22), a corrugated pipe (5) is sleeved outside the crucible shaft (22), and the corrugated pipe (5) is connected between the furnace bottom plate and the mounting flange (221) in a sealing mode;

optionally, the corrugated tube (5) is a metal piece.

6. The crucible lifting and rotating mechanism (100) for a crystal growth apparatus according to claim 1, wherein the carriage assembly (2) comprises a weighing mechanism (21), the weighing mechanism (21) being configured to weigh the load weight on the carriage assembly (2) and output weighing information;

optionally, the crucible lifting and rotating mechanism (100) further comprises a display component connected with the weighing mechanism (21) for displaying the weighing information.

7. The crucible lifting and rotating mechanism (100) for crystal growth equipment according to claim 6, wherein the weighing mechanisms (21) are plural and arranged at intervals along the circumference of the slide assembly (2), each weighing mechanism (21) being connected to the display assembly;

optionally, the weighing mechanisms (21) are three and are evenly spaced along the circumference of the carriage assembly (2).

8. The crucible lifting and rotating mechanism (100) for a crystal growth apparatus according to any one of claims 1 to 7, wherein the carriage assembly (2) further comprises:

the crucible shaft (22), the crucible shaft (22) is suitable for movably penetrating the furnace bottom plate and is suitable for being connected with the crucible, and a mounting flange (221) is formed on the crucible shaft (22);

the sliding seat (23) is matched with the lifting mechanism (12), the sliding seat (23) is sleeved outside the crucible shaft (22) and matched with the lower side of the mounting flange (221), and the weighing mechanism (21) of the crucible lifting and rotating mechanism (100) is arranged between the sliding seat (23) and the mounting flange (221) and is fixedly arranged on the sliding seat (23);

connecting piece (24), connecting piece (24) are connected mounting flange (221) with slide (23), connecting piece (24) with mounting flange (221) with one of them fixed connection in slide (23), and with mounting flange (221) with another in slide (23) is along upper and lower direction sliding fit.

9. The crucible lifting and rotating mechanism (100) for the crystal growth equipment according to claim 8, wherein the connecting piece (24) is in threaded fit with the sliding base (23), a mounting hole (221a) is formed in the mounting flange (221), the connecting piece (24) is movably arranged through the mounting hole (221a), and the mounting hole (221a) and the weighing mechanism (21) are arranged at intervals along the circumferential direction of the crucible shaft (22).

10. A crystal growth apparatus, comprising:

a crucible;

a crucible lifting and rotating mechanism (100), the crucible lifting and rotating mechanism (100) being the crucible lifting and rotating mechanism (100) for a crystal growing apparatus according to any one of claims 1 to 9, the crucible lifting and rotating mechanism (100) being connected to the crucible to drive the crucible to move up and down.

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