CN215668193U - Pipeline transmission continuous vacuum coating production line structure - Google Patents

Pipeline transmission continuous vacuum coating production line structure Download PDF

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Publication number
CN215668193U
CN215668193U CN202122054026.2U CN202122054026U CN215668193U CN 215668193 U CN215668193 U CN 215668193U CN 202122054026 U CN202122054026 U CN 202122054026U CN 215668193 U CN215668193 U CN 215668193U
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coating
pipe
processing
pipe body
workpiece
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汪友林
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Iks Pvd Technology Shenyang Co ltd
TRITREE METAL (SHENZHEN) CO Ltd
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Iks Pvd Technology Shenyang Co ltd
TRITREE METAL (SHENZHEN) CO Ltd
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Abstract

The utility model discloses a pipeline transmission continuous vacuum coating production line structure, and particularly relates to the technical field of vacuum coating equipment; the production line structure comprises a workpiece frame and a processing assembly; at least one of the processing components is provided with an internal processing space and is used for processing a processing pipe for coating the workpiece to be processed; and at least one isolation valve for isolating or communicating different spaces; a plurality of processing pipes are arranged according to the preface, and the isolating valve setting is between adjacent processing pipe, and after adjacent processing pipe passed through the isolating valve and connects, its inside machining space intercommunication formed the passageway that holds the conveying of work rest. Compared with the prior art, the production line structure provided by the utility model has the advantages of flexible structure, good consistency, high automation degree, strong controllability and the like, and has the beneficial effects of good expansibility, convenience in operation, high film coating efficiency, high device utilization rate and the like.

Description

Pipeline transmission continuous vacuum coating production line structure
Technical Field
The utility model belongs to the technical field of vacuum coating equipment, and particularly relates to a coating production line structure.
Background
The vacuum coating technology forms a film in a vacuum environment through modes of evaporation, magnetron sputtering, chemical vapor deposition and the like, compared with the traditional wet coating technology, the film and the substrate are wider in material selection, the controllability of the film forming thickness is better, the bonding strength of the formed film and the substrate is better, and no waste liquid is generated in the film forming process, so that the vacuum coating technology gradually replaces the traditional wet coating technology and is widely used in the fields of material surface coating, optical instrument manufacturing, integrated electronic hardware manufacturing and the like.
The existing vacuum coating equipment applying the vacuum coating technology often has a fixed equipment framework, and takes a Chinese patent application document with the application number of 'CN201620836138. X' as an example, a vacuum coating device is provided in the patent application document, wherein the vacuum coating device comprises a vacuum box, a coating box, a temperature control box and an operation screen; the operation screen is installed on coating case front end upper portion, coating case front end lower part is provided with the business turn over door, coating case internal portion is equipped with the magnetic control target, place platform and power supply ware, the top at the coating incasement is installed to the magnetic control target, the power supply ware is total two and all connect in the magnetic control target bottom, the intermediate position of magnetic control target bottom is provided with to the head, it has the spout to place the platform bottom violently put, be fixed with two spacing posts through two gyro wheels in the spout, vacuum chamber and temperature control case all are connected with the coating case through the air duct. As is apparent from the above patent application document, the vacuum coating apparatus provided in the patent application document has a fixed apparatus composition and a fixed connection relationship between different apparatus compositions, and after the apparatus is manufactured, the vacuum coating process is performed on the substrate inserted therein according to a predetermined process method according to the apparatus function set by the apparatus composition.
It should be noted that, when a substrate is coated with a film by a vacuum coating technique, multiple layers of films are often required to be coated in multiple times to achieve a desired coating effect, when the vacuum coating apparatus carried in the above patent application document is adopted, a workpiece is required to be mounted once for each layer of film, the workpiece is taken out after coating is completed, the workpiece is put back to be processed again after the desired processing target is adjusted again, each layer of film is required to be processed independently, and if the situation that different coatings need to be processed by different vacuum equipment is met, the workpiece needs to be transferred to be processed again, so that a large amount of resources and labor force are consumed, the whole processing process is very complicated and time-consuming, and the processing efficiency is very low.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problems, an object of the present invention is to provide a continuous vacuum coating line structure for pipeline transmission, which provides a segmented and continuous coating structure to facilitate the multiple continuous coating of a substrate to be coated.
The utility model also aims to provide a pipeline transmission continuous vacuum coating production method, which utilizes the pipeline transmission continuous vacuum coating production line structure, has flexible coating process and high automation degree, can complete a multilayer film structure by one-time processing, and greatly improves the production efficiency.
In order to achieve the purpose, the technical scheme of the utility model is as follows:
a pipeline transmission continuous vacuum coating production line structure comprises a workpiece frame and a processing assembly; at least one of the processing components is provided with an internal processing space and is used for processing a processing pipe for coating the workpiece to be processed; and at least one isolation valve for isolating or communicating different spaces; a plurality of processing pipes are arranged according to the preface, and the isolating valve setting is between adjacent processing pipe, and after adjacent processing pipe passed through the isolating valve and connects, its inside machining space intercommunication formed the passageway that holds the conveying of work rest.
Furthermore, the processing pipe comprises a feeding pipe, a coating pipe and a discharging pipe; the feeding pipe is arranged at the upstream position, one end of the feeding pipe is open and connected to the workpiece frame, and the other end of the feeding pipe is open and jointed with one end of the coating pipe; the other end of the coating pipe is in open joint with the other coating pipe or the discharge pipe.
Furthermore, the feeding pipe comprises a feeding pipe body and a heater; the feeding pipe body is provided with an inner accommodating space; the heater sets up in the accommodation space of inlet pipe body inside, is connected with the inlet pipe body.
Further, the coating pipe is including coating pipe body and coating film processing module, and coating pipe body inside has the processing space, and the coating film processing module setting is originally internal at the coating pipe, with this body coupling of coating pipe.
Furthermore, the discharging pipe comprises a discharging pipe body and a radiator, a movable space is arranged inside the discharging pipe body, and the radiator is arranged in the discharging pipe body and connected with the discharging pipe body.
Furthermore, the isolating valve comprises a feeding isolating valve, a middle isolating valve and a discharging isolating valve; the feeding isolation valve is arranged at one end of the feeding pipe body, which is far away from the coating pipe body, and is connected with the feeding pipe body, and when the feeding isolation valve is opened, the inner accommodating space of the feeding pipe body is opened towards the workpiece rack to allow the workpiece rack to be sleeved in; the middle isolation valve is arranged between the feeding pipe body or the coated pipe body and the other coated pipe body or the discharging pipe body, the discharging isolation valve is arranged at one end, deviating from the coated pipe body, of the discharging pipe body and is connected with the discharging pipe body, and when the discharging isolation valve is opened, the inner space of the discharging pipe body is communicated with the external environment to form a channel for accommodating a workpiece frame to be taken out.
The processing assembly further comprises at least one conveying roller, the adjacent conveying rollers are uniformly spaced, and the conveying rollers are arranged on the pipe walls of the feeding pipe body, the coating pipe body and the discharging pipe body along the axis direction parallel to the feeding pipe body, the coating pipe body and the discharging pipe body; when the work rest is conveyed inside the processing assembly, the work rest is engaged with the conveying rollers nearby.
Furthermore, each conveying roller comprises a conveying motor, a synchronous shaft and a conveying wheel; each conveying motor is respectively connected with the feeding pipe body, the coating pipe body or the discharging pipe body corresponding to the arrangement position of the conveying motor, the synchronizing shaft is fixed with the motor output shaft of the conveying motor, and the conveying wheel is connected on the synchronizing shaft in a penetrating mode and is fixedly connected with the synchronizing shaft.
Further, the workpiece frame comprises a frame body and a transmission rod; the frame body is internally provided with a space for accommodating a workpiece to be processed outside, the transmission rod is connected with the frame body, when the workpiece frame is connected with the processing assembly, the frame body is sleeved in the feeding pipe body, the coating pipe body or the discharging pipe body corresponding to the transmission position of the frame body, and the transmission rod is meshed with the transmission rollers nearby.
Compared with the prior art, the pipeline transmission continuous vacuum coating production line structure provided by the utility model has the following beneficial effects:
the structure is flexible: the vacuum coating production line structure provided by the utility model adopts a multi-section and continuous structural mode, the processing pipes with the expected functions are connected through the isolating valves according to the required film forming sequence and the required film forming layer number to form the production line, once the production line is assembled and formed, the interfaces carry out film forming processing on workpieces in batches, and if the film forming effect, the film forming sequence and the required film forming layer number need to be changed, the specific structure of the isolating valve interface disassembly production line is opened for reassembly, so that the production line structure has good structural motility and is very flexible.
The structural consistency is good: after the isolation valve is connected to form a complete production line, because the sealing of the isolation valve and the interior of the processing pipe have a certain vacuum degree vacuum environment, the whole production line can keep good open joint characteristics, a processing workpiece does not need to be frequently disassembled and replaced for multiple times, the processing position can be completely formed by continuous processing along the whole structure of the production line, and the structure has good integrity after being assembled.
The degree of automation of structure is high, the controllability is strong: after the processing workpiece is sent into the processing assembly, the whole processing assembly is in a closed processing overall environment, the isolation valve and the conveying roller arranged in the processing pipe are respectively controlled through the external controller, the coating process can be conveniently and effectively controlled, the whole coating processing process is guaranteed to be automatically completed according to the expected speed and process, and excessive labor cost is not required to be input.
The pipeline transmission continuous vacuum coating production structure provided by the utility model can carry out coating production according to the following method:
s1: preparing a device: arranging corresponding coating pipes according to the required coating layer number and the coating finished product requirement, and assembling corresponding vacuum coating production lines;
s3: starting processing: closing the feeding isolation valve, the middle isolation valve and the discharging isolation valve, and vacuumizing the coating pipe according to the required vacuum degree to construct a vacuum processing environment;
s2: loading a workpiece: loading a workpiece to be processed into a frame body of a workpiece frame;
s3: coating processing: opening a feeding isolation valve, feeding the workpiece frame filled with the workpieces to be processed into a feeding pipe, closing the feeding isolation valve, starting a processing assembly, controlling the starting and stopping of a corresponding conveying motor, driving the workpiece frame to enter different coating pipes in sequence according to the setting, and performing corresponding coating operation on the workpieces to be processed in sequence in different times;
s4: finishing blanking: and opening the discharging isolation valve, and taking out the workpiece subjected to film coating processing.
Compared with the prior art, the method has the following beneficial effects:
good expansibility, convenient operation, high coating efficiency: different workpieces often require different coating layers, the forming modes of each layer of film are possibly different, the same coating processing module cannot be adopted for processing, and different coating processing modules are different in coating processing of the workpieces, the different film forming processes of the workpieces often require different processing time, and when the pipeline transmission continuous vacuum coating production method provided by the utility model is adopted for coating processing, at S1: the device prepares the stage, and the visual concrete coating film processing demand of operating personnel has the single coating film pipe that corresponds coating film processing function of concatenation according to the order demand of filming, can send into the work piece and begin to process after becoming complete production line in succession, and the work piece of sending into accomplishes each layer of film processing according to the preface according to setting for the procedure, and whole operation process is very convenient and fast, has greatly promoted production efficiency.
The device has high utilization rate: when the vacuum coating technology is adopted to carry out coating processing on workpieces, air in different coating pipes is required to be extracted to construct a vacuum environment with expected vacuum degree, the traditional vacuum coating equipment is used for coating a plurality of batches of workpieces or coating a plurality of films on each batch of workpieces, a processing device is required to be repeatedly opened to destroy the originally constructed vacuum environment, vacuum is extracted again after the workpieces are assembled and disassembled, so the utilization rate of the vacuum environment in the device is very low, but by utilizing the method provided by the utility model, different coating pipes are mutually isolated through an isolation valve, the workpieces completing the specified coating step are transported to the next procedure for continuous processing along with a transport roller, the vacuum degree difference between the adjacent coating pipes is not large or even has no difference, the adjustment is easy to carry out after the isolation valve is closed, the transport process of the transport roller is controlled, and the workpieces of different batches can be controlled to be respectively processed in different coating pipes, finished workpieces are continuously obtained in the discharge pipe, so that the utilization efficiency of the vacuum environment in the device is greatly improved, and the coating processing efficiency of the workpieces is greatly improved.
Drawings
FIG. 1 is a schematic diagram of an assembly structure of a pipeline transmission continuous vacuum coating production line structure according to an embodiment.
FIG. 2 is a schematic diagram of a workpiece holder in a pipe-conveying continuous vacuum coating line structure according to an embodiment.
FIG. 3 is a schematic diagram of a feeding isolation valve, an intermediate isolation valve or a discharging isolation valve in a pipeline transmission continuous vacuum coating production line structure provided in the embodiment.
FIG. 4 is a schematic diagram of a feed tube in a continuous vacuum coating line with pipe transmission according to an embodiment of the present invention.
FIG. 5 is a schematic diagram of a coating tube in a pipeline-conveying continuous vacuum coating line structure according to an embodiment of the present invention.
FIG. 6 is a schematic diagram of a discharging pipe in a pipeline transmission continuous vacuum coating production line structure according to an embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
In order to achieve the purpose, the technical scheme of the utility model is as follows:
please refer to fig. 1-6.
In the present embodiment, a pipeline transmission continuous vacuum coating production line structure is provided, which comprises a workpiece rack 1 and a processing assembly 2; at least one of the processing assemblies 2 is provided with an internal processing space and a processing pipe 21 for coating the workpiece to be processed; and, at least one isolation valve 22 for isolating or communicating different spaces;
the plurality of processing pipes 21 are arranged in sequence, the isolation valve 22 is arranged between the adjacent processing pipes 21, and after the adjacent processing pipes 21 are connected through the isolation valve 22, the internal processing spaces thereof are communicated to form a channel for conveying the workpiece rack 1.
Further, the processing pipe 21 includes a feeding pipe 211, a coating pipe 212, and a discharging pipe 213; a feed tube 211 is provided at an upstream position with one end open access to the workpiece holder 1 and the other end in open engagement with one end of the coating tube 212; the other end of the coating tube 212 is in open contact with another coating tube 212 or an outlet tube 213.
Further, the feeding pipe 211 comprises a feeding pipe body 2111 and a heater 2112; the feed tube body 2111 has an interior receiving space; the heater 2112 is provided in the accommodation space inside the feed tube body 2111, and is connected to the feed tube body 2111.
Further, the coating tube 212 includes a coating tube body 2121 and a coating processing module 2122, the coating tube body 2121 has a processing space therein, and the coating processing module 2122 is disposed in the coating tube body 2121 and connected to the coating tube body 2121.
Further, tapping pipe 213 includes a tapping pipe body 2131 and a radiator 2132, where tapping pipe body 2131 has a movable space therein, and radiator 2132 is provided in tapping pipe body 2131 and connected to tapping pipe body 2131.
Further, the isolation valve 22 comprises a feed isolation valve 221, an intermediate isolation valve 222 and a discharge isolation valve 223; the feeding isolation valve 221 is arranged at one end of the feeding pipe body 2111, which is far away from the coating pipe body 2121, and is connected with the feeding pipe body 2111, and when the feeding isolation valve 221 is opened, the inner accommodating space of the feeding pipe body 2111 is opened towards the workpiece rack 1, so that the workpiece rack 1 is allowed to be sleeved in; the intermediate isolation valve 222 is arranged between the feed pipe body 2111 or the coating pipe body 2121 and the other coating pipe body 2121 or the discharge pipe body 2131, the discharge isolation valve 223 is arranged at one end of the discharge pipe body 2131, which is far away from the coating pipe body 2121, and is connected with the discharge pipe body 2131, and when the discharge isolation valve 223 is opened, the inner space of the discharge pipe body 2131 is communicated with the external environment to form a channel for taking out the workpiece holder 1.
Further, the processing assembly 2 further comprises at least one conveying roller 23, wherein the conveying rollers 23 are uniformly spaced and arranged on the pipe walls of the feeding pipe body 2111, the coating pipe body 2121 and the discharging pipe body 2131 along the axial direction parallel to the feeding pipe body 2111, the coating pipe body 2121 and the discharging pipe body 2131; the workpiece holders 1 successively engage with the transport rollers 23 adjacent thereto when the workpiece holders 1 are transported within the processing assembly 2.
Further, each of the conveying rollers 23 includes a conveying motor 231, a synchronizing shaft 232, and a conveying wheel 233; each conveying motor 231 is respectively connected with the feeding pipe body 2111, the coating pipe body 2121 or the discharging pipe body 2131 corresponding to the arrangement position of the conveying motor 231, the synchronous shaft 232 is fixed with the motor output shaft of the conveying motor 231, and the conveying wheel 233 is connected on the synchronous shaft 232 in a penetrating manner and is fixedly connected with the synchronous shaft 232.
Further, the workpiece holder 1 comprises a holder body 11 and a transmission rod 12; the frame body 11 is internally provided with a space for accommodating an external workpiece to be processed, the transmission rod 12 is connected with the frame body 11, when the workpiece frame 1 is connected with the processing assembly 2, the frame body 11 is respectively sleeved into the feeding pipe body 2111, the coating pipe body 2121 or the discharging pipe body 2131 corresponding to the transmission position of the frame body 11, and the transmission rod 12 is sequentially meshed with the transmission rollers 23 nearby.
The utility model also provides a pipeline transmission continuous vacuum coating production method, which is based on the pipeline transmission continuous vacuum coating production line structure and comprises the following steps:
s1: preparing a device: arranging corresponding coating pipes 212 according to the required coating layer number and the coating finished product requirement, and assembling corresponding vacuum coating production lines;
s3: starting processing: closing the feeding isolation valve 221, the intermediate isolation valve 222 and the discharging isolation valve 223, and vacuumizing each coating pipe 212 according to the required vacuum degree to construct a vacuum processing environment;
s2: loading a workpiece: a workpiece to be processed is loaded into the frame body 11 of the workpiece frame 1;
s3: coating processing: opening a feeding isolation valve 221, feeding the workpiece frame 1 filled with the workpieces to be processed into a feeding pipe 211, closing the feeding isolation valve 221, starting a processing assembly 2, controlling the corresponding conveying motor 231 to start and stop, driving the workpiece frame 1 to enter different coating pipes 212 in sequence according to the setting, and sequentially performing corresponding coating operation on the workpieces to be processed in sequence;
s4: finishing blanking: and opening the discharging isolating valve 223 to take out the workpiece after the coating processing.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A pipeline transmission continuous vacuum coating production line structure is characterized by comprising a workpiece frame and a processing assembly;
at least one of the processing components is provided with an internal processing space and is used for processing a processing pipe for coating the workpiece to be processed; and at least one isolation valve for isolating or communicating different spaces;
the plurality of processing pipes are arranged in sequence, the isolation valves are arranged between the adjacent processing pipes and are respectively connected with the adjacent processing pipes, and after the adjacent processing pipes are connected through the isolation valves, the internal processing spaces of the adjacent processing pipes are communicated to form a channel for accommodating the workpiece frame for conveying.
2. The inline continuous vacuum coating line structure of claim 1, wherein the process tube comprises a feed tube, a coating tube and a discharge tube; the feeding pipe is arranged at an upstream position, one end of the feeding pipe is open and connected to the workpiece frame, and the other end of the feeding pipe is in open joint with one end of the coating pipe; the other end of the film coating pipe is in open joint with the other film coating pipe or the discharge pipe.
3. The pipe conveying continuous vacuum coating production line structure as claimed in claim 2, wherein the feed pipe comprises a feed pipe body and a heater; the feed tube body has an interior receiving space; the heater is arranged in the accommodating space inside the feeding pipe body and is connected with the feeding pipe body.
4. The line conveying continuous vacuum coating production line structure of claim 3, wherein the coating pipe comprises a coating pipe body and a coating processing module, the coating pipe body is internally provided with a processing space, and the coating processing module is arranged in the coating pipe body and connected with the coating pipe body.
5. The inline continuous vacuum coating line structure according to claim 4, wherein the tapping pipe comprises a tapping pipe body and a heat sink, the tapping pipe body has a movable space therein, and the heat sink is disposed in the tapping pipe body and connected to the tapping pipe body.
6. The pipe conveying continuous vacuum coating production line structure of claim 5, wherein the isolation valves comprise a feeding isolation valve, an intermediate isolation valve and a discharging isolation valve; the feeding isolation valve is arranged at one end, away from the coating tube body, of the feeding tube body and is connected with the feeding tube body, and when the feeding isolation valve is opened, the inner accommodating space of the feeding tube body is opened towards the workpiece rack to allow the workpiece rack to be sleeved in; the middle isolation valve is arranged between the feeding pipe body or the coated pipe body and the other coated pipe body or the discharging pipe body, the discharging isolation valve is arranged at one end, deviating from the coated pipe body, of the discharging pipe body and connected with the discharging pipe body, and when the discharging isolation valve is opened, the inner space of the discharging pipe body is communicated with the external environment to form a channel for accommodating the workpiece frame to be taken out.
7. The inline continuous vacuum coating line structure of claim 6, wherein the processing assembly further comprises at least one transfer roller, evenly spaced adjacent to the transfer roller, disposed on the walls of the feed tube body, the coated tube body, and the discharge tube body in a direction parallel to the axis of the feed tube body, the coated tube body, and the discharge tube body; when the workpiece frame is conveyed in the processing assembly, the workpiece frame is meshed with the conveying rollers nearby the workpiece frame in sequence.
8. The pipe conveying continuous vacuum coating production line structure as claimed in claim 7, wherein each of the conveying rollers comprises a conveying motor, a synchronizing shaft and a conveying wheel; each conveying motor is respectively connected with the feeding pipe body, the coating pipe body or the discharging pipe body corresponding to the arrangement position of the conveying motor, the synchronizing shaft is fixed with a motor output shaft of the conveying motor, and the conveying wheel is connected on the synchronizing shaft in a penetrating mode and fixedly connected with the synchronizing shaft.
9. The pipe conveying continuous vacuum coating production line structure of claim 8, wherein the workpiece shelf comprises a shelf body and a transmission rod; the frame body is internally provided with a space for accommodating a workpiece to be processed outside, the transmission rod is connected with the frame body, when the workpiece frame is connected with the processing assembly, the frame body is respectively sleeved into the feeding pipe body, the coating pipe body or the discharging pipe body corresponding to the transmission position of the frame body, and the transmission rod is sequentially meshed with the transmission rollers nearby the transmission rod.
CN202122054026.2U 2021-08-27 2021-08-27 Pipeline transmission continuous vacuum coating production line structure Active CN215668193U (en)

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Application Number Priority Date Filing Date Title
CN202122054026.2U CN215668193U (en) 2021-08-27 2021-08-27 Pipeline transmission continuous vacuum coating production line structure

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Application Number Priority Date Filing Date Title
CN202122054026.2U CN215668193U (en) 2021-08-27 2021-08-27 Pipeline transmission continuous vacuum coating production line structure

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Publication Number Publication Date
CN215668193U true CN215668193U (en) 2022-01-28

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113637951A (en) * 2021-08-27 2021-11-12 森科五金(深圳)有限公司 Pipeline transmission continuous vacuum coating production line structure and production method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113637951A (en) * 2021-08-27 2021-11-12 森科五金(深圳)有限公司 Pipeline transmission continuous vacuum coating production line structure and production method thereof

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