CN217955826U

CN217955826U - Feeding device and battery processing system

Info

Publication number: CN217955826U
Application number: CN202222215324.XU
Authority: CN
Inventors: 李志�; 宁艳华; 王俊朝; 李亚文; 宁志升; 李业涛; 张五平; 唐圭; 唐太家; 梁剑铭; 李金萍; 高云峰
Original assignee: Shenzhen Han's Photovoltaic Equipment Co ltd; Han s Laser Technology Industry Group Co Ltd
Current assignee: Shenzhen Han's Photovoltaic Equipment Co ltd; Han s Laser Technology Industry Group Co Ltd
Priority date: 2022-08-22
Filing date: 2022-08-22
Publication date: 2022-12-02
Anticipated expiration: 2032-08-22

Abstract

The utility model relates to a solar cell makes technical field, particularly, relates to a feedway and battery system of processing. The feeding device comprises a cavity structure, a preheating module and a first driving assembly, wherein a feeding hole and a discharging hole are formed in the cavity structure; the number of the preheating modules is several; the first driving assembly is installed on the cavity structure, the preheating module comprises a moving assembly, and the first driving assembly is suitable for driving the moving assembly to move so that the product moves from the feeding hole to the discharging hole. The utility model discloses a plurality of products are put into simultaneously to the last feed inlet of cavity structures to drive the product by removing the subassembly and remove to preheating module department and carry out the preliminary treatment, make a plurality of products satisfy the demand of follow-up technology processing, after the product preliminary treatment is accomplished, remove the subassembly and can shift out the product after the preliminary treatment is accomplished by the structural discharge gate of cavity, the processing of the follow-up technology process of being convenient for, thereby improved the efficiency that the product carried out before the technology processing effectively.

Description

Feeding device and battery processing system

Technical Field

The utility model relates to a solar cell makes technical field, particularly, relates to a feedway and battery system of processing.

Background

The existing process for manufacturing the heterojunction solar cell has higher requirements on the temperature of a silicon wafer, and the temperature is required to be ensured to be more than 200 ℃ when the heterojunction solar cell is subjected to a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, so that a product on a tray is heated to the required process temperature before being sent into a process cavity for coating.

However, in the prior art, there are generally two implementation methods, the first one is to preheat only one tray at a time, after the tray is preheated, the tray which is not preheated is fed from one end of the apparatus, and the tray which is preheated is taken out from the other end of the apparatus. According to the method, the heating of the subsequent tray can be carried out only after the preheating of the preorder tray is finished, and the production and processing efficiency cannot be guaranteed.

Secondly, although a plurality of trays can be preheated simultaneously, the trays are provided with only one opening, namely the trays need to be sequentially fed or discharged through the opening, and feeding and discharging cannot be carried out simultaneously. And when a plurality of trays are loaded, because the opening position is fixed, the position of the preheating unit in the tray needs to be moved once when the tray is placed, the number of steps is large, and the processing efficiency cannot be guaranteed.

SUMMERY OF THE UTILITY MODEL

The utility model provides a problem be to carry out preceding process machining efficiency low excessively before technology processing to the product.

On one hand, in order to solve the above problems, an embodiment of the present invention provides a feeding device, which includes a cavity structure, a preheating module and a first driving assembly, wherein the cavity structure is provided with a feeding port and a discharging port; the preheating modules are arranged in sequence along a first direction, are movably arranged in the cavity structure and are suitable for moving along the first direction; the preheating module comprises a moving assembly, the first driving assembly is installed on the cavity structure and is suitable for being in driving connection with the moving assembly, and the first driving assembly is suitable for driving the moving assembly to move so that products can move from the feeding hole to the discharging hole.

Optionally, the moving assembly comprises a rotating part, the product is suitable for being placed on the rotating part, the first driving assembly is suitable for being in driving connection with the rotating part, and the first driving assembly is suitable for driving the rotating part to rotate so that the product moves from the feeding hole to the discharging hole.

Optionally, the rotating part comprises a rotating shaft and a connecting piece, the connecting piece is located at the end of the rotating shaft, the driving end of the first driving assembly is symmetrically provided with two first limiting structures, and when the connecting piece is located between the two first limiting structures, the connecting piece is attached to the surfaces of the first limiting structures.

Optionally, the preheating module further comprises a heating assembly located above the moving assembly, the heating assembly being for heating of the product.

Optionally, the preheating module further comprises a first partition and a second partition, and the heating assembly and the moving assembly are located between the first partition and the second partition.

Optionally, the feeding device further comprises a bearing member, the bearing member is movably mounted in the cavity structure, the preheating module is mounted on the bearing member, and the bearing member is adapted to move along the first direction.

Optionally, the feeding device further includes a second driving assembly, the second driving assembly is mounted on the cavity structure, the second driving assembly is in driving connection with the bearing member, and the second driving assembly is adapted to drive the bearing member to move along the first direction.

Optionally, the bearing part comprises a top plate, a bottom plate and two side plates, the top plate and the bottom plate are located between the two side plates, the top plate, the bottom plate and the two side plates surround to form a full-surrounding structure, a groove structure is formed in the inner wall of each side plate, mounting plates are arranged at two opposite ends of the preheating module, and the mounting plates are partially located in the groove structures.

Optionally, the cavity structure is provided with an opening, and the opening is suitable for being communicated with an external vacuum generator through a pipeline.

On the other hand, the embodiment of the utility model provides a still provide a battery processing system, include the feedway as above.

Compared with the prior art, the embodiment of the utility model provides a feedway has beneficial effect is:

a plurality of products are placed into the feeding hole in the cavity structure at the same time, the moving assembly drives the products to move to the preheating module for pretreatment, the products meet the requirements of subsequent process machining, after the products are pretreated, the products after the pretreatment can be moved out of the discharging hole in the cavity structure through the moving assembly, the subsequent process procedures can be conveniently machined, and therefore the efficiency of the products before the process machining is effectively improved.

Drawings

Fig. 1 is a schematic structural view of an embodiment of a feeding device of the present invention;

fig. 2 is a schematic cross-sectional structure diagram of an embodiment of the feeding device of the present invention;

fig. 3 is a schematic structural diagram of an embodiment of the preheating module of the present invention;

FIG. 4 is a schematic cross-sectional view of another embodiment of the feeding device of the present invention;

FIG. 5 is a schematic structural view of an embodiment of the magnetic fluid of the present invention;

FIG. 6 is a schematic cross-sectional structure view of an embodiment of the magnetic fluid and connection fitting of the present invention;

fig. 7 is a schematic structural diagram of an embodiment of the carrier of the present invention;

fig. 8 is a partial enlarged view of a portion a in fig. 7.

Description of reference numerals:

1-a cavity structure; 11-a feed inlet; 12-a discharge hole; 13-opening; 2-preheating module; 21-a moving assembly; 211-a rotating member; 2111-rotating shaft; 2112-connecting member; 212-roller configuration; 22-a heating assembly; 221-heating tube; 222-heating wires; 23-a first separator; 24-a second separator; 25-a mounting plate; 3-a first drive assembly; 31-a first limit structure; 32-a magnetic fluid; 4-a carrier; 41-top plate; 42-a base plate; 43-side plate; 431-groove structure; 5-a second drive assembly; 6-sealing the door.

Detailed Description

The terms "mounted," "connected," and "coupled" are to be construed broadly and may include, for example, a fixed connection, a removable connection, or a rotatable connection; may be a mechanical connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

The present invention provides a coordinate system XYZ in the drawings of the embodiments, wherein the forward direction of the X axis represents the right direction, the backward direction of the X axis represents the left direction, the forward direction of the Z axis represents the top, the backward direction of the Z axis represents the bottom, the forward direction of the Y axis represents the front, the backward direction of the Y axis represents the back, and the directions or positional relationships indicated by the terms "up", "down", "front", "back", "left" and "right" etc. are based on the directions or positional relationships shown in the drawings, and are only for convenience of description, rather than indicating or implying that the device to be referred must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation of the present invention.

The terms "first", "second" and "third", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," and "third" may explicitly or implicitly include at least one of the feature.

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below.

As shown in fig. 1 and 2, an embodiment of the present invention provides a feeding device. The feeding device comprises a cavity structure 1, a preheating module 2 and a first driving assembly 3, wherein a feeding hole 11 and a discharging hole 12 are formed in the cavity structure 1; the number of the preheating modules 2 is a plurality, the number of the feed inlets 11 can be the same as that of the preheating modules 2, the preheating modules 2 are sequentially arranged along a first direction, the preheating modules 2 are movably installed in the cavity structure 1, and the preheating modules 2 are suitable for moving along the first direction; the first driving assembly 3 is installed on the cavity structure 1, the preheating module 2 comprises a moving assembly 21, the first driving assembly 3 is suitable for being in driving connection with the moving assembly 21, and the first driving assembly 3 is suitable for driving the moving assembly 21 to move so that the product moves from the feeding hole 11 to the discharging hole 12.

The product can be a silicon chip, and it is placed on the tray, and the tray can be put into cavity structure 1 by feed inlet 11 on cavity structure 1 inside to preheat the product on the tray by preheating module 2, make the product on the tray can reach the required temperature of technology processing. The number of the preheating modules 2 may be 1, 2, 3, 4, 5 or more, etc., and is not particularly limited herein; the utility model discloses an in the embodiment, the quantity of preheating module 2 is 5, and the quantity of feed inlet 11 also is 5 on the same reason, also it can preheat the product on 5 trays simultaneously.

The quantity of discharge gate 12 can be 1, 2, 3, 4, 5 etc. in an embodiment of the utility model, the quantity of discharge gate 12 is 1, and feed inlet 11 and discharge gate 12 are located cavity structure 1's relative both ends respectively. If the number of the process chambers is plural, the number of the discharge ports 12 may be increased with the number of the process chambers. The product can move along the X-axis direction, enters the cavity structure 1 from the feeding hole 11 along the X-axis positive direction, continues to move along the X-axis positive direction after preheating is finished, and moves out from the discharging hole 12.

After 5 trays enter from 5 feed inlets 11 on the cavity structure 1, since the number of the preheating modules 2 is 5, 5 trays of 5 moving

assemblies

21,5 are respectively placed on 1 moving assembly 21. The first direction may be a Z-axis direction in the drawing, and the preheating module 2 may move in the Z-axis direction. Because preheat module 2 and arrange in proper order along Z axle direction, consequently the tray that needs the ejection of compact probably is not in discharge gate 12 department, consequently preheats the back at the tray, preheats module 2 and can move along Z axle direction for the tray that needs the ejection of compact moves to discharge gate 12 department, and the tray just can be followed X axle positive direction and removed the ejection of compact this moment.

The first driving assembly 3 may include a plurality of magnetic fluids 32, and the magnetic fluids 32 penetrate the chamber structure 1 and are hermetically connected with the chamber structure 1. A part of the magnetic fluid 32 is exposed outside the cavity structure 1, and the part exposed outside the cavity is connected with a power input mechanism (not shown) for transmitting power into the cavity structure 1. The magnetic fluid 32 does not cause the cavity structure 1 to break vacuum due to its own structural characteristics. The power input mechanism can be directly connected to the motor (not shown) one by one, or all the magnetic fluids 32 can be connected in parallel through a synchronous belt or a gear and rack component (not shown), and then power is provided by a power source.

A plurality of products are placed into the cavity structure 1 through the feeding hole 11, the moving assembly 21 drives the products to move to the preheating module 2 for pretreatment, the products meet the requirements of subsequent process machining, after the products are pretreated, the moving assembly 21 can move the products after the pretreatment out of the discharging hole 12 in the cavity structure 1, the subsequent process procedures can be conveniently machined, and therefore the efficiency of the products before the process machining is effectively improved.

As shown in fig. 2 and 3, the moving assembly 21 includes a rotating member 211, the product is suitable for being placed on the rotating member 211, the first driving assembly 3 is suitable for being in driving connection with the rotating member 211, and the first driving assembly 3 is suitable for driving the rotating member 211 to rotate so as to move the product from the feeding hole 11 to the discharging hole 12.

The number of the rotating members 211 may be several, and the rotating members 211 may be provided with roller structures 212, the tray is placed on the roller structures 212, and when the first driving assembly 3 drives the rotating members 211 to rotate, the tray located on the roller structures 212 may move. This allows the tray to be moved from the inlet opening 11 in the direction of the outlet opening 12.

As shown in fig. 3 to 6, in an embodiment, the rotating component 211 includes a rotating shaft 2111 and a connecting component 2112, the connecting component 2112 is located at an end of the rotating shaft 2111, two first limiting structures 31 are symmetrically arranged at the driving end of the first driving assembly 3, and when the connecting component 2112 is located between the two first limiting structures 31, the connecting component 2112 abuts against surfaces of the first limiting structures 31. At this time, when the driving end of the first driving assembly 3 rotates, the first driving assembly 3 can drive the rotating shaft 2111 to rotate through the connecting piece 2112, so as to realize the movement of the pushing disc and the feeding and discharging of the tray.

Secondly, when the tray far from the discharge hole 12 needs to be discharged, the driving end of the first driving assembly 3 can drive the connecting piece 2112 to rotate, so that the two first limiting structures 31 are arranged along the X-axis direction. At this time, the preheating module 2 can normally move along the Z-axis direction until the tray to be discharged moves to the discharge port 12, and the connection part 2112 is located between the two first limiting structures 31. The first driving assembly 3 can continue to drive the rotating shaft 2111 to rotate, so that the tray to be discharged is moved out of the discharge hole 12.

In another embodiment, the end of the connection part 2112 away from the rotation shaft 2111 may be provided with two second limit structures (not shown), and when the driving end of the first driving component 3 is located between the two second limit structures, the driving end of the first driving component 3 is abutted with the surface of the second limit structure. At this time, when the driving end of the first driving assembly 3 rotates, the first driving assembly 3 can drive the rotating shaft 2111 to rotate through the connecting piece 2112, so as to realize the movement of the pushing disc and the feeding and discharging of the tray.

Secondly, when the tray far away from the discharge hole 12 needs to be discharged, the driving end of the first driving assembly 3 can drive the connecting piece 2112 to rotate, so that the two second limiting structures are arranged along the Y-axis direction. At this moment, the preheating module 2 can normally move along the Z-axis direction until the tray needing discharging moves to the discharging port 12, and the driving end of the first driving assembly 3 is located between the two second limiting structures. The first driving component 3 mechanism can continue to drive the rotating shaft 2111 to rotate, so that the tray needing to be discharged is moved out of the discharge hole 12

As shown in fig. 3, the preheating module 2 further comprises a heating assembly 22, the heating assembly 22 is located above the moving assembly 21, and the heating assembly 22 is used for heating the product. The heating unit 22 may be composed of a heating tube 221 and a heating wire 222, whereby the product may be heated so that the product may reach a temperature required for the process.

As shown in fig. 3 and 7, the preheating module 2 further includes a first partition 23 and a second partition 24, and the heating assembly 22 and the moving assembly 21 are located between the first partition 23 and the second partition 24.

The first partition 23 and the second partition 24 can be used to block heat, so that the heat generated by the heating assembly 22 is kept between the first partition 23 and the second partition 24, and the heat is largely prevented from being dissipated to other preheating modules 2. By arranging the first partition plate 23 and the second partition plate 24, thermal interference between different preheating modules 2 can be effectively avoided, and temperature regulation and control of each preheating module 2 are facilitated.

As shown in fig. 2, the feeding device further comprises a carrier 4, the carrier 4 is movably mounted in the cavity structure 1, the preheating module 2 is mounted on the carrier 4, and the carrier 4 is adapted to move along the first direction. A plurality of preheating module 2 can all be installed on bearing piece 4, and every interval of preheating between the module 2 can equal, when bearing piece 4 moves along the Z axle direction, bear piece 4 and can drive a plurality of preheating module 2 and remove simultaneously.

As shown in fig. 2, the feeding device further comprises a second driving assembly 5, the second driving assembly 5 is mounted on the cavity structure 1, the second driving assembly 5 is in driving connection with the carrier 4, and the second driving assembly 5 is adapted to drive the carrier 4 to move along the first direction. The second driving assembly 5 may include a driving mechanism and a lifting rod, the driving mechanism is in driving connection with the lifting rod, the lifting rod is in driving connection with the bearing member 4, and the driving mechanism may drive the lifting rod to extend or retract, so as to drive the bearing member 4 to move along the Z-axis direction.

As shown in fig. 7 and 8, the carrier 4 includes a top plate 41, a bottom plate 42 and two side plates 43, the top plate 41 and the bottom plate 42 are located between the two side plates 43, the top plate 41, the bottom plate 42 and the two side plates 43 surround to form a full-surrounding structure, a groove structure 431 is formed on an inner wall of each side plate 43, mounting plates 25 are disposed at opposite ends of the preheating module 2, and the mounting plates 25 are partially located in the groove structures 431.

Groove structure 431 can be used for preheating module 2's fixed, also is convenient for preheat module 2's installation through setting up groove structure 431, and easy access reduces and maintains the degree of difficulty. When the preheating module 2 is installed, the installation plates 25 at the opposite ends of the preheating module 2 are aligned with the groove structures 431 at both sides of the preheating module 2, and the preheating module 2 is pushed in along the length direction of the groove structures 431. At this time, the preheating module 2 is located in a space surrounded by the top plate 41, the bottom plate 42 and the two side plates 43, the groove structure 431 supports the bottom of the preheating module 2, and when maintenance is needed, the preheating module 2 only needs to be pulled out for maintenance.

As shown in fig. 2, the cavity structure 1 is opened with an opening 13, and the opening 13 is suitable for communicating with an external vacuum generator through a pipeline.

The corresponding number of sealing doors 6 can be respectively installed at the feed inlet 11 and the discharge outlet 12 of the cavity structure 1, and the sealing doors 6 can be opened only when feeding and discharging are performed. The vacuum generator can pump the whole cavity structure 1 to the required vacuum degree at one time, then heat the products on the tray to the required process temperature, and then send the products into the process cavity in sequence for coating. Therefore, the structure of the vacuum system is simplified, the maintenance difficulty and the equipment cost are reduced, and the efficiency of the process preparation front end is improved.

The overall process flow of PECVD (plasma enhanced chemical vapor deposition) is as follows: the sealing door 6 at the feed inlet 11 of the cavity structure 1 is opened, a tray with a product is placed into the cavity structure 1 through the feed inlet 11, and the sealing door 6 at the feed inlet 11 is closed. Outside vacuum generator is with the inside evacuation of cavity structures 1 this moment for become the vacuum environment in the cavity structures 1, preheat the product on module 2 and heat the tray this moment, thereby avoid the product on the tray to react with the air. After the product on the tray is heated, the sealing door 6 at the discharge port 12 is opened, the tray can be taken out from the discharge port 12 and enters the process cavity, and the product is coated in the process cavity.

Another embodiment of the present invention provides a battery processing system, which includes the above feeding device. The beneficial effects of the battery processing system are the same as those of the feeding device, and are not described again.

Although the present application has been disclosed above, the scope of protection of the present application is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and such changes and modifications will fall within the scope of the present invention.

Claims

1. A feeder device, comprising:

the cavity structure is provided with a feeding hole and a discharging hole;

the preheating modules are arranged in sequence along a first direction, are movably mounted in the cavity structure and are suitable for moving along the first direction;

the preheating module comprises a moving assembly, the first driving assembly is suitable for being in driving connection with the moving assembly, and the first driving assembly is suitable for driving the moving assembly to move so that a product moves from the feeding hole to the discharging hole.

2. The feeder of claim 1, wherein the moving assembly includes a rotatable member, the product being adapted to be placed on the rotatable member, the first drive assembly being adapted to be drivingly connected to the rotatable member, the first drive assembly being adapted to drive the rotatable member to move the product from the inlet to the outlet.

3. The feeding device as claimed in claim 2, wherein the rotating member comprises a rotating shaft and a connecting member, the connecting member is located at an end of the rotating shaft, the driving end of the first driving assembly is symmetrically provided with two first limiting structures, and when the connecting member is located between the two first limiting structures, the connecting member is attached to surfaces of the first limiting structures.

4. The feed device of claim 1 wherein the preheating module further comprises a heating assembly positioned above the moving assembly, the heating assembly being for heating the product.

5. The feed device of claim 4 wherein the preheat module further includes a first partition and a second partition, the heating assembly and the moving assembly being positioned between the first partition and the second partition.

6. The feeder device of claim 1, further comprising a carrier movably mounted within the chamber structure, the pre-heat module being mounted on the carrier, the carrier being adapted to move in the first direction.

7. The feeder of claim 6, further comprising a second drive assembly mounted to the chamber structure, the second drive assembly being in driving communication with the carrier, the second drive assembly being adapted to drive the carrier in the first direction.

8. The feeding device as claimed in claim 6, wherein the bearing member comprises a top plate, a bottom plate and two side plates, the top plate and the bottom plate are located between the two side plates, the top plate, the bottom plate and the two side plates surround to form a fully-enclosed structure, the inner walls of the side plates are provided with groove structures, the opposite ends of the preheating module are provided with mounting plates, and the mounting plates are partially located in the groove structures.

9. The feeder device according to claim 1, characterized in that said chamber structure is provided with an opening adapted to be connected to an external vacuum generator by means of a pipe.

10. A battery processing system comprising a supply device as claimed in any one of claims 1 to 9.