CN215493850U - Monitoring device for static test and static test system - Google Patents
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Abstract
The embodiment of the utility model provides a monitoring device for electrostatic testing and an electrostatic testing system, and belongs to the technical field of CDM testing. The monitoring device includes: the device comprises an acquisition module, a test module and a control module, wherein the acquisition module is connected with an electrostatic discharge elastic needle for electrostatic test and used for acquiring the contact pressure of the electrostatic discharge elastic needle and a tested object and generating a corresponding pressure signal in the process of debugging the test position of the electrostatic discharge elastic needle; the control module is connected with the acquisition module and used for receiving the pressure signal, determining the contact state of the electrostatic discharge elastic needle and the tested object according to the pressure signal and generating different control instructions corresponding to different contact states; and the alarm module is connected with the control module and used for responding to different control instructions to carry out alarm prompt. Through the technical scheme, the testing position of the electrostatic discharge elastic needle can be accurately positioned, and the testing efficiency and accuracy are improved.
Description
Technical Field
The utility model relates to the technical field of CDM (Charged Device Model) testing, in particular to a monitoring Device for electrostatic testing and an electrostatic testing system.
Background
In electrostatic testing of integrated circuits, CDM is typically employed for testing. In the CDM test process, need earlier carry out preliminary debugging to static bleeder elasticity needle (pogo pin, the scalable test needle of taking the spring), through the control button who removes CDM test equipment, let static bleeder elasticity needle produce good contact and mark current position of adjusting with certain measured pin of chip under test, then remove static bleeder elasticity needle, begin to exert the high pressure to the metal sheet of chip under test upper and lower side, let the inside even electric field that produces of metal sheet, thereby charge the chip, then static bleeder elasticity needle contacts and produces and discharges with certain pin of chip under test through getting back to the position of setting for once more initially once more, thereby accomplish a CDM test.
At present, in the primary debugging link of the electrostatic discharge elastic needle and the tested pin of the tested chip in the CDM test process, whether the electrostatic discharge elastic needle and the tested pin of the tested chip are accurately contacted or not is mainly judged through a monitoring picture of a video image near the tested chip. Considering that a monitoring camera is easily influenced by the size, the material, the shape and the testing angle of a tested sample, a monitored picture is often not very clear, and whether the monitored picture is just contacted or not can not be accurately judged. Therefore, two effects are caused, the first effect is that the contact is not actually made, the subsequent normal discharge test cannot be carried out, and the contact position needs to be readjusted in the next step; the second consequence is that the contact is too tight, the compression amplitude of the electrostatic discharge elastic needle exceeds the compressible capacity of the spring, so that the elastic needle loses elasticity, and the excessive pressure can press the elastic needle to be broken or deformed, so that the electrostatic discharge elastic needle needs to be replaced again.
SUMMERY OF THE UTILITY MODEL
An embodiment of the present invention provides a monitoring device for electrostatic testing and an electrostatic testing system, which are used to solve the above existing technical problems.
In a first aspect, the present invention provides a monitoring device for electrostatic testing, the monitoring device comprising: the device comprises an acquisition module, a test module and a control module, wherein the acquisition module is connected with an electrostatic discharge elastic needle for electrostatic test and used for acquiring the contact pressure of the electrostatic discharge elastic needle and a tested object and generating a corresponding pressure signal in the process of debugging the test position of the electrostatic discharge elastic needle; the control module is connected with the acquisition module and used for receiving the pressure signal, determining the contact state of the electrostatic discharge elastic needle and the tested object according to the pressure signal and generating different control instructions corresponding to different contact states; and the alarm module is connected with the control module and used for responding to the control instruction and giving an alarm prompt.
Preferably, the acquisition module is any one of a resistance strain gauge pressure sensor, a semiconductor strain gauge pressure sensor, an inductive pressure sensor and a capacitive pressure sensor.
Preferably, the control module comprises: the data processing unit is used for acquiring the pressure signal from the acquisition unit and processing the pressure signal to obtain a corresponding pressure value; and the instruction generating unit is used for comparing the pressure value with a preset threshold value, determining the contact state of the electrostatic discharge elastic needle and the tested object according to the comparison result, and generating a control instruction corresponding to the determined contact state.
Preferably, if the pressure value is less than or equal to the preset threshold value, the instruction generating unit determines that the electrostatic discharge elastic needle and the tested object are in a normal contact state, and generates a first control instruction for displaying the normal contact state; or if the pressure value is larger than the preset threshold value, the instruction generating unit determines that the electrostatic discharge elastic needle and the tested object are in an over-close contact state, and generates a second control instruction for displaying the over-close contact state.
Preferably, the instruction generation unit is further configured to: and when the data processing unit fails to acquire the pressure signal from the acquisition unit, determining that the electrostatic discharge elastic needle and the tested object are in a non-contact state, and generating a third control instruction for displaying that the electrostatic discharge elastic needle and the tested object are in the non-contact state.
Preferably, the alarm module includes: the display equipment is used for carrying out alarm prompt by displaying the contact state of the electrostatic discharge elastic needle and the tested object; and/or a loudspeaker for giving an alarm prompt by emitting different alarm prompt tones.
Preferably, the monitoring device further comprises an amplifying module, which is connected between the collecting module and the control module, and is configured to amplify the pressure signal generated by the collecting module and transmit the amplified pressure signal to the control module.
Through above-mentioned monitoring devices, the contact state of real-time supervision static bleeder elasticity needle and tested object takes the suggestion of reporting an emergency and asking for help or increased vigilance to corresponding contact state, and the test position of accurate location static bleeder elasticity needle guarantees that static bleeder elasticity needle and tested object are effective to be contacted.
In a second aspect, the present invention further provides an electrostatic test system, including the monitoring apparatus for electrostatic test of the first aspect or any one of the first aspects, and a test apparatus using a charged device model, where the test apparatus includes an electrostatic discharge elastic pin connected to the monitoring apparatus.
Preferably, the testing device further comprises an electrostatic field induction bottom plate, an electrostatic induction grounding plate, a high-voltage power supply and a change-over switch, and the electrostatic field induction bottom plate, the electrostatic induction grounding plate, the high-voltage power supply and the change-over switch are used for performing electrostatic testing on the tested object by adopting circuits with different testing modes.
The static test system is provided with the monitoring device, so that the contact state of the static discharge elastic needle and the tested object is monitored, the accuracy and the reliability of the static test are improved, meanwhile, the damage of the static discharge elastic needle is reduced, and the efficiency of the static test is effectively improved.
Additional features and advantages of embodiments of the utility model will be set forth in the detailed description which follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the embodiments of the utility model without limiting the embodiments of the utility model. In the drawings:
FIG. 1 is a schematic block diagram illustrating a monitoring device for static testing in accordance with an exemplary embodiment;
FIG. 2 is a schematic diagram of a resistive strain gage circuit according to an exemplary embodiment;
FIG. 3 is a schematic block diagram illustrating a monitoring device for static testing in accordance with an exemplary embodiment;
FIG. 4 is a schematic block diagram of a control module shown in accordance with an exemplary embodiment;
FIG. 5 is a schematic diagram of an electrostatic testing system according to an exemplary embodiment.
Detailed Description
The following detailed description of embodiments of the utility model refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating embodiments of the utility model, are given by way of illustration and explanation only, not limitation.
FIG. 1 is a schematic block diagram illustrating a monitoring device for static testing in accordance with an exemplary embodiment. As shown in fig. 1, the monitoring device 10 includes an acquisition module 101, connected to an electrostatic discharge elastic needle for electrostatic testing, and configured to acquire contact pressure between the electrostatic discharge elastic needle and a tested object and generate a corresponding pressure signal in a process of debugging a testing position of the electrostatic discharge elastic needle; the control module 102 is connected to the acquisition module 101, and is configured to receive the pressure signal, determine a contact state between the electrostatic discharge elastic needle and the object to be tested according to the pressure signal, and generate different control instructions corresponding to different contact states; and an alarm module 103, connected to the control module 102, for performing an alarm prompt in response to the control instruction.
For example, in the electrostatic discharge testing process, the electrostatic discharge elastic needle is required to be in effective contact with the tested object, so that the static electricity of the tested object can be discharged to the outside through the electrostatic discharge elastic needle in contact with the tested object. In order to accurately determine whether the electrostatic discharge elastic needle is in effective contact with the tested object, the embodiment of the disclosure connects the acquisition module 101 with the electrostatic discharge elastic needle, for example, the acquisition module is connected with a spring of the electrostatic discharge elastic needle, and acquires the stress generated by the deformation of the spring due to the contact between the electrostatic discharge elastic needle and the tested object in real time. According to the mechanics principle, the stress generated by the spring is related to the contact pressure between the electrostatic discharge elastic needle and the tested object. Further, the control unit 102 determines a contact state of the electrostatic discharge elastic needle and the tested object according to the contact pressure acquired by the acquisition module 101, and further sends an alarm prompt for the determined contact state through the alarm module 103. Therefore, the testing position of the electrostatic discharge elastic needle can be accurately debugged through the monitoring device, and the problem that the electrostatic test cannot be carried out or the electrostatic discharge elastic needle is damaged due to improper testing position is avoided.
In a preferred embodiment, the acquisition module is any one of a resistance strain gauge pressure sensor, a semiconductor strain gauge pressure sensor, an inductive pressure sensor and a capacitive pressure sensor.
Specifically, the collection module of the embodiment of the present disclosure as mentioned in the above example is formed by connecting the elastic parts of the electrostatic discharge elastic needles, and collecting the stress generated by the deformation of the elastic parts. Therefore, the acquisition module of the embodiment of the present disclosure preferably employs a strain gauge pressure sensor, which includes a sensing component capable of converting strain variation on a mechanical component of the sensing component into corresponding component parameter variation, and then acquiring a pressure signal. The following is an example of a resistive strain gauge pressure sensor. The sensing component of the resistance strain gauge pressure sensor is a resistance strain gauge and is an element for measuring strain. The resistance strain gauge is connected with the spring part of the electrostatic discharge elastic needle. When the electrostatic discharge elastic needle contacts with an object to be tested, the spring deforms to generate stress, and then the mechanical component of the resistance strain gauge deforms, so that the resistance value of the resistance strain gauge changes correspondingly. Further, according to the corresponding relation between the resistance value change and the pressure signal, a corresponding pressure signal is generated. The resistance strain gauge in the embodiment of the disclosure is preferably made by winding nickel-chromium wires or constantan wires with the diameter of 0.02-0.05mm into a grid shape, and clamping the grid shape in two layers of insulating sheets, and silver-plated copper wires are connected with the strain gauge wire grid to be used as a lead of the resistance strain gauge. The circuit structure of the resistance strain gauge may take various forms. Fig. 2 is a schematic diagram of a resistance strain gage circuit according to an exemplary embodiment, and as shown in fig. 2, the resistance strain gage adopts a bridge circuit structure, wherein one end of the bridge circuit structure leads from point 1 in fig. 2, and is connected in series with a resistor R2, and the corresponding output is an INN port, wherein the resistance of the resistor R2 is preferably 200 Ω. The other end leads out another lead through a point 3 in fig. 2, and is connected with a resistor R3 in series, and the corresponding output is an INP port, wherein the resistance of the resistor R3 is preferably 200 Ω. A filter capacitor is connected in parallel between 5 points and 6 points of the output port, and the capacitance value of the filter capacitor is preferably 0.1 UF. The INN and INP ports in fig. 2 can detect the voltage value change generated based on the resistance value change, so that the pressure sensor obtains the voltage value change and generates a corresponding pressure signal.
In connection with the above example, since the strain gauge pressure sensor is adopted in the embodiment of the present disclosure to collect the contact pressure between the electrostatic discharge elastic needle and the tested object, the deformation of the sensing element is limited, and the generated pressure signal is weak. FIG. 3 is a schematic block diagram illustrating a monitoring device for static testing in accordance with an exemplary embodiment. As shown in fig. 3, the monitoring device 10 according to the embodiment of the disclosure may further include an amplifying module 104, where the amplifying module 104 is connected between the collecting module 101 and the control module 102, and is configured to amplify the pressure signal transmitted by the collecting module 101 and transmit the amplified pressure signal to the control module 102. The amplifying module 104 preferably adopts an amplifier, an input end of the amplifier is connected with an output end of the pressure sensor for receiving the pressure signal of the pressure sensor, and an output end of the amplifier is connected with an input end of the control module for transmitting the amplified pressure signal to the control module for processing. Through the amplification processing of the amplification module, the pressure signal acquired by the acquisition module can be enhanced, so that the control module can acquire a more accurate pressure value and avoid the interference of other signals.
In a preferred embodiment, FIG. 4 is a schematic block diagram of a control module shown in accordance with an exemplary embodiment. As shown in fig. 4, the control module 102 includes a data processing unit 1021, configured to process the pressure signal from the acquisition unit and perform signal processing on the pressure signal to obtain a corresponding pressure value; the instruction generating unit 1022 is configured to compare the pressure value with a preset threshold, determine a contact state of the electrostatic discharge elastic needle and the object to be tested according to the comparison result, and generate a control instruction corresponding to the determined contact state.
For example, on one hand, since the pressure signal acquired by the acquisition unit is an analog signal, the data processing unit may preferably perform analog-to-digital conversion on the pressure signal by using an AD conversion chip to obtain a corresponding digital signal, i.e., a pressure value generated by the electrostatic discharge elastic needle contacting the tested object. On the other hand, the data processing unit may also adopt a processing mode of adopting a sliding average value for the acquired pressure values, for example, the data processing unit adopts a sliding average value calculation for a plurality of pressure values acquired within a set time period, and transmits the calculated pressure values to the instruction generating unit so as to prevent the instruction generating unit from generating an erroneous control instruction due to an abnormality of the acquired pressure values at a certain time.
Further, the instruction generating unit determines the contact state of the electrostatic discharge elastic needle and the tested object according to the comparison result, and generates a control instruction corresponding to the determined contact state. The method specifically comprises the following steps: if the pressure value is smaller than or equal to the preset threshold value, the instruction generating unit determines that the electrostatic discharge elastic needle and the tested object are in a normal contact state, and generates a first control instruction for displaying the normal contact state; or if the pressure value is larger than the preset threshold value, the instruction generating unit determines that the electrostatic discharge elastic needle and the tested object are in an over-close contact state, and generates a second control instruction for displaying the over-close contact state. The preset threshold value can be preset in the command generating unit according to the stress characteristic of the electrostatic discharge elastic needle in practical application or test requirements. When the pressure value is less than or equal to the preset threshold value, it can be understood that the testing position where the electrostatic discharge elastic needle is located under the pressure condition is the correct position where the electrostatic test can be performed, and when the testing position is located, the electrostatic discharge elastic needle cannot be damaged due to the contact pressure with the tested object. When the pressure value is greater than the preset threshold, it can be understood that if the electrostatic discharge elastic needle is in the test position of the pressure condition, the risk of damage due to large contact pressure may occur. Therefore, it can be seen from the above embodiments that the instruction generating unit confirms the contact state of the electrostatic discharge elastic needle with the tested object through comparison of the pressure values, and generates a control instruction of the contact state, thereby accurately positioning the test position of the electrostatic discharge elastic needle for electrostatic test.
In another preferred embodiment, the instruction generating unit is further configured to generate a third control instruction indicating that the electrostatic discharge elastic needle and the object to be tested are in the non-contact state if the data processing unit fails to acquire the pressure signal from the acquisition unit and it is determined that the electrostatic discharge elastic needle and the object to be tested are in the non-contact state. When the data processing unit fails to acquire the pressure signal from the acquisition unit, it indicates that the acquisition unit does not acquire the contact pressure of the electrostatic discharge elastic needle and the tested object, and thus it is determined that the electrostatic discharge elastic needle is not in contact with the tested object. When the electrostatic discharge elastic needle is located at the testing position, although the electrostatic discharge elastic needle is not damaged, the electrostatic discharge elastic needle cannot be effectively contacted with the tested object, but the electrostatic test on the tested object cannot be carried out at the testing position. Therefore, the instruction generating unit generates a control instruction for displaying that the electrostatic discharge elastic needle and the tested object are in a non-contact state, so that the alarm module sends out a corresponding alarm prompt.
It can be seen that the instruction generating unit of the present disclosure may generate different control instructions according to different comparison results, and the different control instructions correspond to different contact states respectively. Therefore, the alarm module adopts different alarm prompts for different contact states according to different control instructions.
In a preferred embodiment, the alarm module comprises a display device for performing alarm prompt by displaying the contact state of the electrostatic discharge elastic needle and the tested object; and/or a loudspeaker for giving an alarm prompt by emitting different alarm prompt tones. For example, the display device preferably adopts a liquid crystal display screen, and when the warning module receives a second control instruction for displaying an over-touch state, a text prompt of 'over-touch' is displayed on the liquid crystal display screen to prompt a tester to adjust the testing position of the electrostatic discharge elastic needle in time so as to prevent the electrostatic discharge elastic needle from being damaged. Meanwhile, the alarm prompt can be performed by sending alarm prompt sound with certain frequency through the loudspeaker. If the alarm module receives a third control instruction for displaying a non-contact state, a text prompt of 'non-contact' is displayed on the liquid crystal display screen, and meanwhile, the loudspeaker sends out an alarm prompt tone with another frequency to prompt a tester that the electrostatic discharge elastic needle is not in contact with the tested object, so that the tester can determine that the electrostatic discharge elastic needle cannot be used for electrostatic testing under the test position. In the embodiment of the disclosure, different forms of warning prompt tones can be set for different contact states. Through the warning prompt of the warning module, a tester can adjust the testing position of the static electricity leakage elastic needle in time so as to accurately position the testing position and avoid the damage of the static electricity leakage elastic needle.
As can be seen from the above examples, in the embodiments of the present disclosure, the contact pressure between the electrostatic discharge elastic needle and the tested object is obtained, and the contact state between the electrostatic discharge elastic needle and the tested object is determined and a corresponding control instruction is generated, so as to locate the test position of the electrostatic discharge elastic needle. Compared with the existing mode of adopting a monitoring camera, the contact state of the electrostatic discharge elastic needle and the tested object can be more accurately determined, the influence of the specification, the test angle and the test environment of the tested object is avoided, and the problems that the electrostatic discharge elastic needle cannot be normally tested due to non-contact and the electrostatic discharge elastic needle is damaged due to too-dense contact are effectively solved.
Accordingly, FIG. 5 is a schematic diagram of an electrostatic testing system according to an exemplary illustration. As shown in fig. 5, the static electricity test system includes a monitoring apparatus 10 for static electricity test and a test apparatus 20 using a charged device model. The testing device 20 comprises an electrostatic discharge elastomeric pin connected to the monitoring device 10, i.e. to a pressure sensor comprised by the monitoring device 10 in fig. 5. The monitoring device 10 includes a pressure sensor, an amplifier, a microprocessor and a liquid crystal display, and debugs and positions the testing position of the electrostatic discharge elastic needle by monitoring the contact pressure of the electrostatic discharge elastic needle and the tested object, so that the testing device 20 can perform effective electrostatic testing on the tested object. For debugging of the test site, reference is made to the above embodiments, and redundant description is not repeated herein.
As shown in fig. 5, the testing device 20 of the present disclosure further includes an electrostatic field induction base plate, an electrostatic induction ground plate, and a high voltage power supply. The electrostatic field induction bottom plate is attached with an insulating layer for placing a tested object (a tested chip in fig. 5), and the tested object is placed on the insulating layer, so that electrostatic charges on the surface of the tested object can be prevented from being discharged to the electrostatic field induction bottom plate. The electrostatic induction grounding plate is arranged above the electrostatic field induction plate and is connected with the high-voltage power supply. The static induction grounding plate and the static field induction bottom plate can generate a high-voltage electric field so as to generate static electricity on the surface of the tested object. For example, when the switch K1 in fig. 5 is connected to the left connection point, the electrostatic induction ground plate forms a charge mode circuit with the high voltage power supply, the charge resistor, and the electrostatic field induction chassis. At this time, the high voltage power supply generates a high voltage of, for example, 500V, so that a high voltage electric field of 500V is generated between the electrostatic induction grounding plate and the electrostatic field induction bottom plate, and thus the tested object generates electrostatic charges on the surface thereof under the high voltage electric field, and the tested object is charged.
When the switch K1 is connected to the right connection point, the electrostatic induction grounding plate is disconnected from the high voltage power supply, and the testing device forms a discharge circuit. The electrostatic discharge elastic needle is contacted with the tested object (the tested chip in fig. 5) through the control of the elastic needle motion control module. When the electrostatic discharge elastic needle moves to the debugged test position, the electrostatic charge on the surface of the object to be tested is discharged through the electrostatic discharge elastic needle, wherein a part of the electrostatic charge is discharged to the ground through the grounding resistor in fig. 5. And another part of the static charge is discharged to the oscilloscope through the coaxial cable in fig. 5, in which the resistance value of the ground resistor is preferably 1 Ω and the resistance value of the coaxial cable is preferably 50 Ω.
The static test system of the embodiment of the disclosure, through the configuration and the monitoring device that testing arrangement is connected, before carrying out the static test to the testee, the accurate debugging is used for the position of the static elasticity needle that leaks of static test, improves the reliability to the testee static test, guarantees the effective execution of static test, avoids because the static elasticity needle that leaks that the test position improper caused damages the problem in the static test process.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element.
The above are merely examples of the present application and are not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (9)
1. A monitoring device for electrostatic testing, the monitoring device comprising:
the device comprises an acquisition module, a test module and a control module, wherein the acquisition module is connected with an electrostatic discharge elastic needle for electrostatic test and used for acquiring the contact pressure of the electrostatic discharge elastic needle and a tested object and generating a corresponding pressure signal in the process of debugging the test position of the electrostatic discharge elastic needle;
the control module is connected with the acquisition module and used for receiving the pressure signal, determining the contact state of the electrostatic discharge elastic needle and the tested object according to the pressure signal and generating different control instructions corresponding to different contact states; and
and the warning module is connected with the control module and used for responding to the control instruction and giving a warning prompt.
2. The monitoring device of claim 1, wherein the collection module is any one of a resistive strain gauge pressure sensor, a semiconductor strain gauge pressure sensor, an inductive pressure sensor, and a capacitive pressure sensor.
3. The monitoring device of claim 1, wherein the control module comprises:
the data processing unit is used for acquiring the pressure signal from the acquisition module and processing the pressure signal to obtain a corresponding pressure value;
and the instruction generating unit is used for comparing the pressure value with a preset threshold value, determining the contact state of the electrostatic discharge elastic needle and the tested object according to the comparison result, and generating a control instruction corresponding to the determined contact state.
4. The monitoring device according to claim 3, wherein if the pressure value is less than or equal to the preset threshold value, the command generating unit determines that the electrostatic discharge elastic needle is in a normal contact state with the tested object, and generates a first control command indicating the normal contact state; or
If the pressure value is larger than the preset threshold value, the instruction generating unit determines that the electrostatic discharge elastic needle and the tested object are in an over-close contact state, and generates a second control instruction for displaying the over-close contact state.
5. The monitoring device of claim 3, wherein the instruction generation unit is further configured to:
when the data processing unit fails to acquire the pressure signal from the acquisition module, and the static leakage elastic needle and the tested object are determined to be in a non-contact state, a third control instruction for displaying that the static leakage elastic needle and the tested object are in the non-contact state is generated.
6. The monitoring device of claim 1, wherein the alert module comprises:
the display equipment is used for carrying out alarm prompt by displaying the contact state of the electrostatic discharge elastic needle and the tested object; and/or
And the loudspeaker is used for giving out different alarm prompt tones to carry out alarm prompt.
7. The monitoring device of claim 1, further comprising an amplifying module connected between the collecting module and the control module for amplifying the pressure signal transmitted by the collecting module and transmitting the amplified pressure signal to the control module.
8. An electrostatic test system comprising the monitoring apparatus for electrostatic test according to claims 1 to 7 and a test apparatus using a charged device model, wherein the test apparatus comprises an electrostatic discharge elastic pin connected to the monitoring apparatus.
9. The electrostatic testing system of claim 8, wherein the testing apparatus further comprises an electrostatic field induction base plate, an electrostatic induction grounding plate, and a high voltage power supply;
the surface of the electrostatic field induction bottom plate is attached with an insulating layer for placing a tested object;
the electrostatic induction grounding plate is arranged above the electrostatic field induction bottom plate and is connected with the high-voltage power supply;
the static induction grounding plate and the static field induction bottom plate can generate a high-voltage electric field so as to generate static electricity on the surface of the tested object.
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| CN202120545645.9U CN215493850U (en) | 2021-03-16 | 2021-03-16 | Monitoring device for static test and static test system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115267266A (en) * | 2022-07-12 | 2022-11-01 | 上海晶岳电子有限公司 | Electrostatic gun and method for measuring contact angle and force of electrostatic gun |
| CN115792416A (en) * | 2022-11-04 | 2023-03-14 | 深圳市华众自动化工程有限公司 | Electrostatic detection and elimination device and method |
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2021
- 2021-03-16 CN CN202120545645.9U patent/CN215493850U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115267266A (en) * | 2022-07-12 | 2022-11-01 | 上海晶岳电子有限公司 | Electrostatic gun and method for measuring contact angle and force of electrostatic gun |
| CN115267266B (en) * | 2022-07-12 | 2023-09-26 | 上海晶岳电子有限公司 | Electrostatic gun and method for measuring contact angle and force of electrostatic gun |
| CN115792416A (en) * | 2022-11-04 | 2023-03-14 | 深圳市华众自动化工程有限公司 | Electrostatic detection and elimination device and method |
| CN115792416B (en) * | 2022-11-04 | 2023-06-13 | 深圳市华众自动化工程有限公司 | Device and method for detecting and eliminating static electricity |
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