CN110361569A - A kind of probe assembly and test device - Google Patents
A kind of probe assembly and test device Download PDFInfo
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- CN110361569A CN110361569A CN201910683297.9A CN201910683297A CN110361569A CN 110361569 A CN110361569 A CN 110361569A CN 201910683297 A CN201910683297 A CN 201910683297A CN 110361569 A CN110361569 A CN 110361569A
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- probe
- displacement sensors
- supporting part
- displacement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The embodiment of the invention discloses a kind of probe assembly and test devices.Wherein, which includes: probe supporting part；At least two probes；At least two displacement sensors are set to probe supporting part at least two probes；Displacement sensor output changes corresponding transducing signal with the intrusion of probe indentation test point.The technical solution of the embodiment of the present invention can be convenient the gradient of adjustment probe supporting part, and guarantee that testing weld pad contacts well with probe, reduce contact resistance, and reduce testing weld pad and pricked bad risk by probe.
Description
Technical field
The present invention relates to the field of test technology more particularly to a kind of probe assembly and test devices.
Background technique
It is well known that the quality of display panel directly affects the viewing effect of display picture, while the valence of display panel
Lattice occupy 70% or more of display cost, therefore display panel is the principal element for influencing display quality and cost, accordingly
, display panel would generally repeatedly be tested in display panel manufacturing process, to guarantee the matter of the display panel of manufacture
Amount.
Multiple testing weld pads usually are set at the edge of array substrate, by welding the test probe of test device and test
Disk contact, realizes electrical connection, to input required test signal.If testing weld pad contacts exception with probe, test will affect
As a result, and testing weld pad usually pricked by probe it is bad.
Summary of the invention
The embodiment of the present invention provides a kind of probe assembly and test device, is contacted well with guaranteeing testing weld pad with probe,
Reduce contact resistance, and reduces testing weld pad and pricked bad risk by probe.
In a first aspect, the embodiment of the invention provides a kind of probe assemblies, comprising:
Probe supporting part；
At least two probes；
At least two displacement sensors are set to probe supporting part at least two probes；
Displacement sensor output changes corresponding transducing signal with the intrusion of probe indentation test point.
Further, the first end of displacement sensor is connect with probe supporting part, and displacement sensor is far from probe supporting part
Second end be end of probe, the first end of probe connect with probe supporting part, contact jaw and survey of the probe far from probe supporting part
Pilot contact,
The end of probe of displacement sensor and the contact jaw of probe are concordant, visit alternatively, the natural length of displacement sensor is greater than
The natural length of needle.
Further, at least two probes are arranged in uniline, and at least partly displacement sensor is located at probe region
Two sides.
Further, at least two probes are arranged in multirow, and at least partly displacement sensor is located at probe region
Surrounding.
Further, the quantity of displacement sensor is at least three, and the arragement direction of at least two displacement sensors is parallel
Second direction is parallel in the arragement direction of first direction, at least two displacement sensors.
Further, displacement sensor is located at the two sides and centre of the probe region on first direction.
Further, displacement sensor includes linear variable difference transformer formula linear displacement transducer.
Second aspect, the embodiment of the invention also provides a kind of test devices, comprising: controller and any implementation of the present invention
The probe assembly that example provides,
Wherein, controller is electrically connected at least two probes, and controller is electrically connected at least two displacement sensors, control
Device is used for the transducing signal in all displacement sensors in the first preset threshold range, and output test signal at least two is visited
Needle.
Further, which further includes alarm module, is electrically connected with the controller, and controller is used at least one
When the transducing signal of displacement sensor is more than the first preset threshold range, control alarm module alarm.
Further, which further includes adjustment mechanism, is connect with probe supporting part, adjustment mechanism and controller electricity
Connection, controller are used for when the difference of the transducing signal of at least two displacement sensors is more than the second preset threshold range, root
According to difference, the gradient of adjustment mechanism adjustment probe supporting part is controlled.
At least two displacement sensors are set to probe at least two probes and held by the technical solution of the embodiment of the present invention
Load portion；Displacement sensor output changes corresponding transducing signal with the intrusion of probe indentation test point, to facilitate adjustment to visit
The gradient of needle supporting part, and make the intrusion of all probes indentation test points in suitable range, with guarantee contact resistance compared with
It is small, and the pad of test point is not damaged, and is solved the intrusion that can not be pressed into test point to probe in the prior art and is supervised
Control, causes intrusion too small, and contact resistance is larger or even virtual connection, causes test data inaccurate, intrusion is excessive, and pad is easy
Pricked bad problem.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of probe assembly provided in an embodiment of the present invention；
Fig. 2 be a kind of probe provided in an embodiment of the present invention and test point not in contact with when structural schematic diagram；
Fig. 3 is the structural schematic diagram after a kind of probe provided in an embodiment of the present invention and test point contact；
Fig. 4 is the structural schematic diagram after another probe provided in an embodiment of the present invention and test point contact；
Fig. 5 is a kind of circuit knot of linear variable difference transformer formula linear displacement transducer provided in an embodiment of the present invention
Structure schematic diagram；
Fig. 6 to Fig. 8 is that a kind of linear variable difference transformer formula linear displacement transducer provided in an embodiment of the present invention exists
The schematic diagram of the section structure under three kinds of different conditions；
Fig. 9 is the pass of a kind of transducing signal of displacement sensor output provided in an embodiment of the present invention and the displacement of end of probe
System's figure；
Figure 10 is the structural schematic diagram of another probe assembly provided in an embodiment of the present invention；
Figure 11 is the structural schematic diagram of another probe assembly provided in an embodiment of the present invention；
Figure 12 is a kind of structural schematic diagram of test device provided in an embodiment of the present invention；
Figure 13 is the structural schematic diagram of another test device provided in an embodiment of the present invention；
Figure 14 is the structural schematic diagram of another test device provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
The embodiment of the present invention provides a kind of probe assembly.Fig. 1 is a kind of knot of probe assembly provided in an embodiment of the present invention
Structure schematic diagram.Fig. 2 be a kind of probe provided in an embodiment of the present invention and test point not in contact with when structural schematic diagram.Fig. 3 is this
A kind of structural schematic diagram after probe and test point contact that inventive embodiments provide.The probe assembly may be disposed at test device
In, for carrying out lighting test etc. to display panel, array substrate etc..In conjunction with shown in Fig. 1 to Fig. 3, which includes: to visit
Needle supporting part 110, at least two probes 120 and at least two displacement sensors 130.
Wherein, at least two displacement sensors 130 and at least two probes 120 are set to probe supporting part 110；Displacement passes
The output of sensor 130 changes corresponding transducing signal with the intrusion that probe 120 is pressed into test point 210.
Wherein, probe supporting part 110 can be prober frame.The displacement sensor 130 can be linear displacement transducer, can
To detect small displacement, such as can be inductive displacement transducer, Hall displacement transducer etc..Fig. 2 is illustratively drawn
Probe 120 and test point 210 not in contact with when the case where.Fig. 3 illustratively draws probe 120 and connects with test point (not shown)
After touch the case where.Multiple test points on device being tested 200 are contacted with multiple probes 120 one-to-one correspondence, to realize electrical connection,
And then test device can be transmitted to device being tested 200 for signal is tested by probe 120.Test point 210 can be pad.Quilt
Test device 200 can be array substrate or display panel etc..At least two probe 120 can be spaced scattering device and hold in probe
In load portion 110.The extending direction of displacement sensor 130 and the extending direction of probe 120 can be arranged in parallel.Displacement sensor 130
The transducing signal of output is related to the indentation of probe 120 intrusion of test point close to displacement sensor 130.Displacement sensor
130 can be used for detecting the distance between its own and device being tested 200, alternatively, the end of probe of displacement sensor 130 by
Device being tested 200 will be shunk when squeezing, the length phase that the transducing signal that displacement sensor 130 exports is shunk with its end of probe
It closes.
Illustratively, probe 120 be pressed into test point intrusion it is bigger, displacement sensor 130 and device being tested 200 it
Between distance it is smaller, alternatively, the end of probe of displacement sensor 130 by device being tested 200 squeeze shrink length it is bigger.
Before test, probe assembly need to be mounted on device being tested, correspond probe 120 with test point 210 and connect
Touching, and presses probe assembly, so that probe 120 deforms and generate pressure because being bent or shrinking etc., so that the indentation test of probe 120
The intrusion of point is met the requirements, and is kept probe 120 and test point contact good, is kept contact resistance smaller, to facilitate load test to believe
Number.During probe assembly is mounted on device being tested, as shown in figure 3, working as the non-run-off the straight of probe supporting part 110
When, the transducing signal of all displacement sensors 130 is equal.Fig. 4 is another probe provided in an embodiment of the present invention and test point
Structural schematic diagram after (not shown) contact.As shown in figure 4, when probe 110 run-off the straight of supporting part, a part of probe
120 and test point contact, another part probe 120 and test point are not in contact with a part of displacement sensor 130 and device being tested
200 contacts, another part displacement sensor 130 and device being tested 200 are not in contact with the sensing letter of all displacement sensors 130
It number differs, probe supporting part 110 can be adjusted, so that probe supporting part according to the difference of the transducing signal of displacement sensor 130
110 are parallel to the contact surface of probe and device being tested.The difference of the transducing signal of displacement sensor 130 is bigger, illustrates probe
The gradient of supporting part 110 is bigger；The difference of the transducing signal of displacement sensor 130 is smaller, illustrates inclining for probe supporting part 110
Gradient is smaller.According to the size of 130 transducing signal of displacement sensor and position, it may be determined that the inclination side of probe supporting part 110
To and inclined degree.
The intrusion that probe 120 is pressed into test point is bigger, then probe 120 and the contact resistance of test point are smaller, but visits
Pressure between needle 120 and test point is bigger, test point is easier pricked by probe 120 it is bad.According to the sensing of displacement sensor 130
Signal, it is known that probe 120 is pressed into the intrusion of test point, and then by adjusting adjustment modes such as mechanism, manual operations, makes probe
The intrusion of 120 indentation test points is in optimized scope, and to guarantee that contact resistance is smaller, and the pad of test point is not damaged, and is kept away
It is too small to exempt from intrusion, contact resistance is larger or even virtual connection, causes test inaccuracy, and intrusion is excessive, and pad is easily pricked bad.If
The intrusion for monitoring that probe 120 is pressed into test point is more than optimized scope, then illustrates that the intrusion of probe indentation test point is excessive,
Pad, which has, is pricked bad risk, can be by sound-light alarm etc., to prompt tester.
At least two displacement sensors and at least two probes are set to probe supporting part by the technical solution of the present embodiment；
Displacement sensor exports the transducing signal of the intrusion of corresponding probe indentation test point, to facilitate the inclination of adjustment probe supporting part
Degree, and make the intrusion of all probe indentation test points in suitable range, to guarantee that contact resistance is smaller, and the weldering of test point
Disk is not damaged, and is solved the intrusion that can not be pressed into test point to probe in the prior art and is monitored, leads to intrusion mistake
Small, contact resistance is larger or even virtual connection, causes test data inaccurate, and intrusion is excessive, and pad is easily pricked bad problem.
Optionally, displacement sensor 130 includes linear variable difference transformer formula (Linear Variable
Differential Transformer, LVDT) linear displacement transducer.
Wherein, Fig. 5 is a kind of linear variable difference transformer formula linear displacement transducer provided in an embodiment of the present invention
Electrical block diagram.Fig. 6 to Fig. 8 is that a kind of linear variable difference transformer formula straight-line displacement provided in an embodiment of the present invention passes
The schematic diagram of the section structure of the sensor under three kinds of different conditions.LVDT linear variable difference transformer formula linear displacement transducer can
It include: primary coil 131, the first secondary coil 132, second subprime coil 133, removable dynamic iron core 134, elastomeric element 135, outer
Shell 136, axis 137 and skeleton 138 etc..As shown in Figure 6 to 8, primary coil 131, the first secondary coil 132 and second subprime line
Circle 133 is set on skeleton 138, and primary coil 131 is removable between the first secondary coil 132 and second subprime coil 133
Dynamic iron core 134 is set on axis 137, and axis 137 passes through skeleton 138, and one end of axis 137 is connect with elastomeric element 135, primary coil
131, the first secondary coil 132, second subprime coil 133, removable dynamic iron core 134, elastomeric element 135 and skeleton 138 are located at outer
In shell 136, aperture is provided on shell 136, the other end of axis 137 passes through aperture and extends to outside shell 136.First secondary coil
132 are connected in series with second subprime coil 133, and the first secondary coil 132 is electrically connected with the Same Name of Ends of second subprime coil 133.
Fig. 9 is a kind of transducing signal of displacement sensor output provided in an embodiment of the present invention and the displacement of removable dynamic iron core
Relational graph.Wherein, abscissa W indicates displacement of the removable dynamic iron core relative to primary coil, and ordinate indicates transducing signal, ginseng
Fig. 5 is examined, can be the difference of the output voltage of the first secondary coil 132 and second subprime coil 133, i.e. the first secondary coil 132
The voltage between both ends N3 and N4 being connected in series with second subprime coil 133.One is supplied in primary coil 131 both ends N1 and N2
When determining the alternating voltage of frequency, removable dynamic iron core 134 mobile Distribution of Magnetic Field for changing space in coil, to change just
Mutual induction amount between grade coil and two secondary coils generates induced electromotive force between two secondary coils, with removable iron
The difference of 134 position of core, mutual induction amount is also different, and the induced electromotive force that secondary coil generates is also different, in this way, removable dynamic iron core
134 displacement becomes voltage signal output.When removable dynamic iron core 134 be located at it is intermediate when, due to transformer action, each secondary
The equal voltage of a coil-induced amplitude, however secondary coil be by differential concatenation coiling, two voltage-phases on the contrary, because
This output voltage generated is theoretically 0V, the position when correct position of zero should be two secondary coil output minimums
It sets.When removable dynamic iron core 134 is moved to the side of zero-bit, voltage on two secondary coils, an increase, another subtracts
Few, i.e., the voltage apart from the closer secondary coil of removable dynamic iron core 134 increases, apart from the farther away secondary wire of removable dynamic iron core 134
The voltage of circle is reduced, and amplitude increases with a distance from zero-bit with removable dynamic iron core 134, and (positive or negative) expression of polarity is removable
The direction that iron core 134 is advanced.When removable dynamic iron core 134 is mobile to both sides from centre, such as moved along the direction Z ', the first secondary wire
The movement of the difference and removable dynamic iron core 134 of the output voltage of circle 132 and second subprime coil 133 is linear.When removable
When iron core 134 is from centre to close to the movement of the direction of the first secondary coil 132, the voltage of the first secondary coil 132 induction is greater than
The difference of the output voltage of the voltage that second subprime coil 133 incudes, the first secondary coil 132 and second subprime coil 133 is greater than
Zero；When removable dynamic iron core 134 is from centre to close to the movement of the direction of second subprime coil 133, second subprime coil 133 incudes
Voltage be greater than the first secondary coil 132 induction voltage, the first secondary coil 132 and second subprime coil 133 output electricity
The difference of pressure is less than zero.In conjunction with shown in Fig. 3, Fig. 6 to Fig. 8, when probe assembly is placed on device being tested, LVDT straight line position
One end that the axis 137 of displacement sensor is located at 136 outside of shell is contacted with device being tested, with the pressure for pressing probe assembly
Increase, the length of spring members 135 is gradually reduced, and the displacement of removable dynamic iron core 134 gradually moves up, and specific change procedure is by scheming
6 to Fig. 7, then to Fig. 8, the voltage difference that the voltage that the voltage of the first secondary coil 132 subtracts second subprime coil 133 obtains will be by
Cumulative big, the voltage difference that the voltage that the voltage of second subprime coil 133 subtracts the first secondary coil 132 obtains will be gradually reduced,
Wherein, the voltage difference that can be obtained the voltage that the voltage of the first secondary coil 132 subtracts second subprime coil 133 is straight as LVDT
The transducing signal of linear movement pick-up output, alternatively, the voltage of second subprime coil 133 is subtracted the first secondary coil 132
The transducing signal that the voltage difference that voltage obtains is exported as LVDT linear displacement transducer.The embodiment of the present invention is with the first secondary wire
What the voltage difference that the voltage that the voltage of circle 132 subtracts second subprime coil 133 obtains was exported as LVDT linear displacement transducer
It is illustrated for transducing signal.
Illustratively, in conjunction with shown in Fig. 3 to Fig. 6, when probe 120 and test point not in contact with when, the position of removable dynamic iron core 134
It moves minimum；When probe 120 and test point contact, when probe 120 is gradually depressed, removable dynamic iron core 134 and device being tested 200
Contact, as the intrusion of probe 120 increases, removable dynamic iron core 134 is moved up along Z-direction, then transducing signal is gradually increased, therefore can
The intrusion of probe 120 is monitored by the transducing signal that displacement sensor 130 exports.
In conjunction with shown in Fig. 3 and Fig. 4, when probe 110 non-run-off the straight of supporting part, the removable iron of displacement sensor 130
Core is equal along the displacement of Z-direction, and the transducing signal of displacement sensor 130 is equal, wherein Z-direction is perpendicular to device being tested 200
With the contact surface of probe 120.When probe 110 run-off the straight of supporting part, a part of probe 120 and test point contact, another portion
Divide probe 120 and test point not in contact with the displacement of the removable dynamic iron core of a part of displacement sensor 130 is minimum value, another portion
The displacement of the removable dynamic iron core of quartile displacement sensor 130 is not minimum value, therefore the transducing signal of displacement sensor 130 differs, can
According to the difference of the transducing signal of displacement sensor 130, probe supporting part 110 is adjusted, so that probe supporting part 110 is parallel to spy
The contact surface of needle and device being tested.
Optionally, on the basis of the above embodiments, with continued reference to Fig. 2, first end and the probe of displacement sensor 130 are held
Load portion 110 connect, displacement sensor 130 far from probe supporting part 110 second end be end of probe, the first end of probe 120 with
Probe supporting part 110 connects, and contact jaw of the probe 120 far from probe supporting part 110 is contacted with test point 210, displacement sensor
130 natural length is equal to the natural length of probe 120, and the end of probe of displacement sensor 130 is held level with both hands with the contact of probe 120
Together.
Wherein, one end that the axis 137 of displacement sensor 130 is located at 136 outside of shell is equivalent to end of probe.End of probe with can
Moving iron core changes relative to the displacement synchronous of primary coil.The natural length of displacement sensor 130 be probe assembly not with quilt
The length of displacement sensor 130 when test device contacts, at this point, the end of probe of displacement sensor 130 is not affected by extraneous extruding, bullet
Spring component 135 is uncompressed, and removable dynamic iron core 134 does not move up.The natural length of probe 120 be probe assembly not with device being tested
The length of probe 120 when contact, the length of probe 120 when intrusion is 0.The end of probe of displacement sensor 130 and probe 120
When contact jaw is concordant, the range of the intrusion of detectable probe 120 is equal to the range ability of displacement sensor 130.Optimal pressure
The range for entering amount is less than or equal to the range ability of displacement sensor 130.Straight line L1 in Fig. 2 is parallel to probe supporting part 110,
The end of probe of displacement sensor 130 and the contact jaw of probe 120 are located on straight line L1.
Optionally, the natural length of displacement sensor 130 is greater than the natural length of probe 120, the spy of displacement sensor 130
Contact jaw of the end compared to probe 120 is surveyed far from probe supporting part 110.When probe 120 and test point not in contact with when, move iron
Core 134 is first contacted with device being tested, as probe 120 reduces at a distance from test point until contacting, the intrusion of probe 120
Increase, removable dynamic iron core 134 persistently moves up, and the range of the intrusion of detectable probe 120 is less than the amount of displacement sensor 130
Journey range.The range ability of displacement sensor 130 is related to the maximum distance that removable dynamic iron core moves up.Wherein, displacement sensor
The difference in height of the contact jaw of 130 end of probe and probe 120, with best intrusion and, must be less than the amount of displacement sensor 130
Journey range.Optionally, the end of probe of all displacement sensors 130 is concordant, and the contact jaw of all probes 120 is concordant.When probe 120
With test point not in contact with when, removable dynamic iron core 134 is first contacted with device being tested, at this time can be according to the biography of displacement sensor 130
Feel the difference of signal, adjust the gradient of probe supporting part 110, avoid adjusting again when the intrusion of probe is excessive, is easy to prick bad
Pad.
Optionally, the natural length of displacement sensor 130 is less than the natural length of probe 120, the spy of displacement sensor 130
Contact jaw of the end compared to probe 120 is surveyed close to probe supporting part 110.When probe 120 and test point contact, removable dynamic iron core
134 do not contact with device being tested, and as the intrusion of probe 120 increases, removable dynamic iron core 134 is at a distance from device being tested
Reduce, until contacting and moving up, there are intrusion check frequencies.When blind area is less than the optimized scope of intrusion, can be set
The end of probe of displacement sensor 130 compared to probe 120 contact jaw close to probe supporting part 110.
Optionally, on the basis of the above embodiments, with continued reference to Fig. 1 and Fig. 2, at least two probes 120 are arranged in uniline
Cloth, at least partly displacement sensor 130 are located at the two sides of 120 region of probe.
Wherein, line direction can be parallel to X-direction.Fig. 1 illustratively draws two displacement sensors 130 and is located at probe 120
Two sides outside region.The distance between two displacement sensors 130 are bigger, and the gradient of probe supporting part 110 is got over
Sensitivity, such as: when the gradient of probe supporting part 110 is smaller, the difference of the transducing signal of two displacement sensors 130 is larger.It is excellent
Bit selecting displacement sensor 130 is located at the two sides and centre of the row probe region.
The embodiment of the present invention provides another probe assembly.Figure 10 is another probe assembly provided in an embodiment of the present invention
Structural schematic diagram.On the basis of the above embodiments, at least two probes 120 are arranged in multirow, at least partly displacement sensing
Device 130 is located at the surrounding of probe region.
Wherein, displacement sensor 130 is located at the peripheral region of probe region.The quantity of displacement sensor 130 can be with
It is four, is located at four angles of the peripheral region of probe region.All displacement sensors 130 cannot be along same straight line
Arrangement.When probe 110 run-off the straight of supporting part, the intrusion that a part of probe 120 is pressed into test point is larger, and another part is visited
The intrusion that needle 120 is pressed into test point is smaller, and the displacement of the end of probe of a part of displacement sensor 130 and another part displacement pass
The displacement of the end of probe of sensor 130 is unequal, therefore the transducing signal of displacement sensor 130 differs, can be according to displacement sensor 130
Transducing signal difference, probe supporting part 110 is adjusted, so that probe supporting part 110 is parallel to probe and device being tested
Contact surface.The difference of the transducing signal of displacement sensor 130 is bigger, illustrates that the gradient of probe supporting part 110 is bigger；Displacement passes
The difference of the transducing signal of sensor 130 is smaller, illustrates that the gradient of probe supporting part 110 is smaller.It is passed according to displacement sensor 130
Feel size and the position of signal, it may be determined that the inclined direction and inclined degree of probe supporting part 110.
Optionally, on the basis of the above embodiments, the quantity of displacement sensor 130 be at least three, at least two
The arragement direction of displacement sensor 130 is parallel to first direction, and the arragement direction of at least two displacement sensors 130 is parallel to second
Direction.
Wherein, first direction and second direction are not parallel, and preferably first direction can perpendicular to second direction, first direction
For X-direction, second direction can be Y-direction.Wherein, straight line L2 is parallel to X-direction, and straight line L3 is parallel to Y-direction, and Figure 10 is exemplary
Two displacement sensors 130 that draw be located on straight line L2, two displacement sensors 130 are located on straight line L3.When probe carries
Portion 110 in the X direction non-run-off the straight when, along be parallel to X-direction arrangement displacement sensor 130 end of probe along Z-direction
Be displaced it is equal, along be parallel to X-direction arrangement displacement sensor 130 transducing signal it is equal.When probe supporting part 110 is in the side X
When upward run-off the straight, the displacement along the end of probe for the displacement sensor 130 for being parallel to X-direction arrangement is unequal, and edge is parallel to X
The transducing signal of the displacement sensor 130 of direction arrangement is unequal.When probe 110 non-run-off the straight in the Y direction of supporting part,
End of probe along the displacement sensor 130 for being parallel to Y-direction arrangement is equal along the displacement of Z-direction, and edge is parallel to Y-direction arrangement
The transducing signal of displacement sensor 130 is equal.When probe 110 run-off the straight in the Y direction of supporting part, edge is parallel to Y-direction
The displacement of the end of probe of the displacement sensor 130 of arrangement is unequal, along the biography for the displacement sensor 130 for being parallel to Y-direction arrangement
It is unequal to feel signal.Probe can be adjusted according to the difference of the transducing signal along the displacement sensor 130 for being parallel to X-direction arrangement
The gradient of supporting part 110 in the X direction；According to the difference of the transducing signal along the displacement sensor 130 for being parallel to Y-direction arrangement
Value, the gradient of adjustment probe supporting part 110 in the Y direction.When the biography along the displacement sensor 130 for being parallel to Y-direction arrangement
Feel the difference of signal, and the difference of the transducing signal along the displacement sensor 130 for being parallel to Y-direction arrangement is preset second
When threshold range, illustrate that probe supporting part 110 does not tilt.
Optionally, on the basis of the above embodiments, Figure 11 is another probe assembly provided in an embodiment of the present invention
Structural schematic diagram, displacement sensor 130 are located at the two sides and centre of the probe region on first direction.
Wherein, first direction is X-direction, and displacement sensor 130 is located at two of the probe region on first direction
Side and centre.Preferred displacement sensor 130 is located at the two sides and centre of the probe region of every row.It can also be displacement sensing
Device 130 is located among two sides and every 2 row or every 3 row in X direction of probe region.The quantity of displacement sensor 130 is got over
More, redundancy improves, and avoids 130 malfunction and failure of partial dislocation sensor, leads to detection inaccuracy.The number of displacement sensor 130
Amount is more, more disperses, more facilitates obliquity, the tilt angle etc. of determining probe supporting part, wherein the maximum position of transducing signal
The degree of the direction run-off the straight of displacement sensor 130 and the smallest 130 place straight line of displacement sensor of transducing signal is maximum, in turn
The gradient of the direction can first be adjusted.
The embodiment of the present invention provides a kind of test device.Figure 12 is a kind of knot of test device provided in an embodiment of the present invention
Structure schematic diagram.The test device includes: controller 20 and the probe assembly that any embodiment of that present invention provides.
Wherein, controller 20 is electrically connected at least two probes 120, controller 20 and at least two displacement sensors 130
Electrical connection, controller 20 are used for the transducing signal in all displacement sensors 130 in the first preset threshold range, output test
Signal is at least two probes 120.
Wherein, controller 20 can realize that the embodiment of the present invention is not construed as limiting this by the mode of software and/or hardware.It can
Choosing, controller 20 may include processor, MCU (Microcontroller Unit, micro-control unit) or FPGA (Field-
Programmable Gate Array, field programmable gate array) etc., program needed for test can be performed, with output test letter
Number and complete to test.Testing signal may include scanning signal, data-signal, LED control signal, electric power signal, clock signal
Deng.First preset threshold range is the range of the corresponding transducing signal of optimal intrusion range.If all displacement sensors 130
Transducing signal then illustrates that the intrusion of probe indentation test point is optimized scope, it is ensured that connect in the first preset threshold range
Electric shock resistance is smaller, and the pad of test point is not damaged.The test device is transmitted to display panel for signal is tested by probe
Scan line, data line, light emitting control line, power line etc..The test device can be used for tested to display panel, array substrate etc.
Trial assembly, which is set, carries out lighting test etc..Test device provided in an embodiment of the present invention includes the probe assembly in above-described embodiment, because
This test device provided in an embodiment of the present invention also has beneficial effect described in above-described embodiment, and details are not described herein again.
Optionally, on the basis of the above embodiments, Figure 13 is another test device provided in an embodiment of the present invention
Structural schematic diagram, the test device further include alarm module 30, are electrically connected with controller 20, and controller 20 is used at least one
When the transducing signal of displacement sensor 130 is more than the first preset threshold range, control alarm module 30 is alarmed.
Wherein, it is more than the first preset threshold range there are the transducing signal of at least one displacement sensor 130, illustrates exist
The intrusion that at least one probe is pressed into test point is excessive, and pad, which has, is pricked bad risk, can be by sound-light alarm etc., with prompt
Tester.Alarm module 30 may include following at least one: light emitting diode and buzzer etc..
Optionally, on the basis of the above embodiments, Figure 14 is another test device provided in an embodiment of the present invention
Structural schematic diagram, the test device further include adjustment mechanism 40, are connect with probe supporting part 110, adjustment mechanism 40 and controller
20 electrical connections, controller 20 are used in the difference of the transducing signal of at least two displacement sensors 130 be more than the second preset threshold
When range, according to difference, the gradient that adjustment mechanism 40 adjusts probe supporting part 110 is controlled.
Wherein, it if the difference of the transducing signal of at least two displacement sensors 130 is more than the second preset threshold range, says
The displacement of the displacement of the end of probe of bright a part of displacement sensor 130 and the end of probe of another part displacement sensor 130 not phase
Deng the intrusion that a part of probe 120 is pressed into test point 210 is larger, and another part probe 120 is pressed into the indentation of test point 210
Amount is smaller, therefore 110 run-off the straight of probe supporting part, and the gradient of probe assembly is adjusted by adjusting mechanism 40.If at least two
The difference of the transducing signal of displacement sensor 130 then illustrates the end of probe of displacement sensor 130 in the second preset threshold range
It is displaced equal, the intrusion that probe 120 is pressed into test point 210 is equal, therefore the non-run-off the straight of probe supporting part 110, without adjustment
The gradient of probe assembly.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of probe assembly characterized by comprising
Probe supporting part；
At least two probes；
At least two displacement sensors are set to the probe supporting part at least two probe；
The output of institute's displacement sensors changes corresponding transducing signal with the intrusion of probe indentation test point.
2. probe assembly according to claim 1, which is characterized in that the first end of institute's displacement sensors and the probe
Supporting part connection, second end of institute's displacement sensors far from the probe supporting part is end of probe, the first end of the probe
It is connect with the probe supporting part, contact jaw of the probe far from the probe supporting part and the test point contact,
The end of probe of institute's displacement sensors is concordant with the contact jaw of the probe, alternatively, institute's displacement sensors is natural long
Degree is greater than the natural length of the probe.
3. probe assembly according to claim 1, which is characterized in that at least two probe is arranged in uniline, at least
Part institute's displacement sensors are located at the two sides of the probe region.
4. probe assembly according to claim 1, which is characterized in that at least two probe is arranged in multirow, at least
Part institute's displacement sensors are located at the surrounding of the probe region.
5. probe assembly according to claim 4, which is characterized in that the quantity of institute's displacement sensors is at least three,
The arragement direction of at least two displacement sensors is parallel to first direction, the arrangement side of at least two displacement sensors
To being parallel to second direction.
6. probe assembly according to claim 5, which is characterized in that institute's displacement sensors are located at along the first direction
On the probe region two sides and centre.
7. probe assembly according to claim 1, which is characterized in that institute's displacement sensors include that linear variable differential becomes
Depressor formula linear displacement transducer.
8. a kind of test device characterized by comprising controller and probe assembly as claimed in claim 1,
Wherein, the controller is electrically connected at least two probe, the controller and at least two displacement sensing
Device electrical connection, the controller is used for the transducing signal in all institute's displacement sensors in the first preset threshold range, defeated
Signal is tested out at least two probe.
9. test device according to claim 8, which is characterized in that further include alarm module, be electrically connected with the controller
It connects, the controller is used in the transducing signal of at least one institute's displacement sensors be more than first preset threshold range
When, control the alarm module alarm.
10. test device according to claim 8, which is characterized in that further include adjustment mechanism, with the probe supporting part
Connection, the adjustment mechanism is electrically connected with the controller, and the controller is at least two displacement sensors
When the difference of transducing signal is more than the second preset threshold range, according to the difference, controls the adjustment mechanism and adjust the spy
The gradient of needle supporting part.
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| CN201910683297.9A CN110361569A (en) | 2019-07-26 | 2019-07-26 | A kind of probe assembly and test device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910683297.9A CN110361569A (en) | 2019-07-26 | 2019-07-26 | A kind of probe assembly and test device |
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| CN110361569A true CN110361569A (en) | 2019-10-22 |
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| CN201910683297.9A Pending CN110361569A (en) | 2019-07-26 | 2019-07-26 | A kind of probe assembly and test device |
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| CN113977121A (en) * | 2020-07-27 | 2022-01-28 | 细美事有限公司 | Device and method for adjusting welding flatness in semiconductor element welding equipment |
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Application publication date: 20191022 |