CN215340685U - A skidding tray device for even inspection of gluing chromium version - Google Patents
A skidding tray device for even inspection of gluing chromium version Download PDFInfo
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- CN215340685U CN215340685U CN202121798667.2U CN202121798667U CN215340685U CN 215340685 U CN215340685 U CN 215340685U CN 202121798667 U CN202121798667 U CN 202121798667U CN 215340685 U CN215340685 U CN 215340685U
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Abstract
The utility model discloses a roller-skating tray device for inspecting a uniform-glue chromium plate, which comprises an outer ring piece, a mounting piece, a plurality of balls and a sucker, wherein the outer ring piece is sleeved on the periphery of the mounting piece, an annular mounting space is formed between the outer ring piece and the mounting piece, the balls are mounted in the mounting space, the outer ring piece and the mounting piece realize relative rotation through the balls, a fixing hole for inserting an external fixing piece is formed in the mounting piece, and the sucker is fixed on the outer ring piece and used for adsorbing a uniform-glue chromium plate inspection seat. According to the structure, the mounting piece is fixed in the external environment through the fixing piece, then the uniform glue chromium plate inspection seat is fixed on the sucking disc, and the outer ring piece and the mounting piece can be relatively rotated to rotate the uniform glue chromium plate inspection seat fixed on the sucking disc when the uniform glue chromium plate is inspected.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a wheel-sliding tray device for inspecting a uniform glue chrome plate.
Background
With the continuous progress of science and technology in China, semiconductor integrated circuits are applied more and more in the liquid crystal display industry or the touch screen industry, a mask plate is needed in the production and manufacturing process of the semiconductor integrated circuits, and a photoresist mask plate is used as a base plate of the mask plate, so that the photoresist mask plate has an important position in the production of the semiconductor integrated circuits.
As is well known, the cleanliness of the material of the uniform-photoresist chrome plate, which is used as the basic material of the mask plate, directly affects the quality of the product manufactured in the whole process. In order to make the quality of the produced mask plate meet the expectation, the practical production process comprises the following steps: and placing the uniform glue chromium plate or the glass substrate on an inspection seat, temporarily storing the uniform glue chromium plate or the glass substrate, cooling the uniform glue chromium plate or the glass substrate, and then carrying out subsequent operations such as testing or inspection. In the above processes, the uniform glue chromium plate or the glass substrate is required to be kept clean and dustless. The existing uniform-glue chromium plate inspection device has the advantages that the device realizes stable placement of the uniform-glue chromium plate, can keep the uniform-glue chromium plate clean and avoid the uniform-glue chromium plate from being damaged due to collision in the placement process, is heavy and is not easy to perform double-sided inspection of the uniform-glue chromium plate, reduces the working efficiency, and is easy to damage when an inspector overturns the chromium plate or the glass substrate.
Therefore, a roller tray device for inspecting a uniform chrome plate is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides a roller skating tray device for checking the uniform glue chrome plate aiming at the defects of the prior art.
The technical scheme adopted by the utility model for realizing the purpose is as follows:
the utility model provides a skidding tray device for glue chromium version inspection evenly, includes outer ring spare, installed part, a plurality of ball and sucking disc, outer ring spare cover is located week side of installed part, outer ring spare with be formed with annular installation space between the installed part, the ball install in the installation space, outer ring spare with the installed part passes through the ball realizes rotating relatively, set up the fixed orifices that supplies outside mounting to plant the usefulness on the installed part, the sucking disc is fixed in on the outer ring spare in order to be used for adsorbing glue chromium version inspection seat evenly.
In a further improvement, the cross section of the outer ring piece is circular.
In a further improvement, the cross section of the mounting piece is circular.
The improved structure is characterized in that the number of the suckers is even, and the suckers are arranged in a centrosymmetric manner around the circle center of the outer ring piece.
In a further improvement, the number of the fixing holes is even, and the fixing holes are arranged in a central symmetry mode according to the circle center of the mounting piece.
In a further improvement, the circle center of the outer ring piece and the circle center of the mounting piece are located on the same vertical line.
In a further improvement, the cross section of the installation space is circular.
In a further improvement, the number of the balls is even, and the balls are arranged in a central symmetry mode according to the circle center of the installation space.
In a further improvement, the number of the suckers is the same as that of the fixing holes.
In a further improvement, the number of the balls is larger than that of the suckers.
The utility model has the beneficial effects that: the utility model discloses a roller-skating tray device for inspecting a uniform-glue chromium plate, which comprises an outer ring piece, a mounting piece, a plurality of balls and a sucker, wherein the outer ring piece is sleeved on the periphery of the mounting piece, an annular mounting space is formed between the outer ring piece and the mounting piece, the balls are mounted in the mounting space, the outer ring piece and the mounting piece realize relative rotation through the balls, a fixing hole for inserting an external fixing piece is formed in the mounting piece, and the sucker is fixed on the outer ring piece and used for adsorbing a uniform-glue chromium plate inspection seat. Therefore, when the uniform glue chromium plate inspection seat is actually used, the mounting piece can be fixed in an external environment through the fixing piece, then the uniform glue chromium plate inspection seat is fixed on the sucking disc, and the outer ring piece and the mounting piece can be relatively rotated to rotate the uniform glue chromium plate inspection seat fixed on the sucking disc when the uniform glue chromium plate is inspected.
The utility model is further described with reference to the following detailed description and accompanying drawings.
Drawings
FIG. 1 is a schematic perspective view of a roller-sliding tray device for inspecting a homogenized chrome plate according to the present invention.
Detailed Description
The following description is only a preferred embodiment of the present invention, and does not limit the scope of the present invention.
Referring to fig. 1, the roller skating tray device 100 for inspecting a uniform glue chrome plate of the present invention includes an outer ring 10, a mounting member 20, a plurality of balls 30, and a suction cup 40, wherein the outer ring 10 is sleeved on a peripheral side of the mounting member 20, an annular mounting space 100a is formed between the outer ring 10 and the mounting member 20, the balls 30 are mounted in the mounting space 100a, the outer ring 10 and the mounting member 20 realize relative rotation through the balls 30, the mounting member 20 is provided with a fixing hole 20a for inserting an external fixing member, and the suction cup 40 is fixed on the outer ring 10 for adsorbing a uniform glue chrome plate inspection seat. Specifically, the cross section of the outer ring 10 is circular, and the cross section of the mounting member 20 is circular; not only can the production and manufacturing cost of the utility model be saved, but also the stress uniformity during the inspection can be ensured. More specifically, there are even numbers of suction cups 40, the suction cups 40 are arranged in a centrosymmetric manner around the center of the outer ring 10, there are even numbers of fixing holes 20a, and the fixing holes 20a are arranged in a centrosymmetric manner around the center of the mounting member 20; therefore, the uniform stress of the mounting part 20 during mounting is ensured, and the sucking discs 40 which are arranged in central symmetry can uniformly and powerfully adsorb the uniform-glue chromium plate inspection seat, so that the uniform-glue chromium plate inspection seat is effectively prevented from falling off in the inspection process. Preferably, the mounting part 20 is recessed to have a first arc surface on a side facing the outer ring member 10, the outer ring member 10 is recessed to have a second arc surface on a side facing the mounting part 201, and the first arc surface and the second arc surface jointly form the mounting space 100 a.
Referring to fig. 1, the center of the outer ring 10 and the center of the mounting member 20 are located on the same vertical line, so that the situation of offset between the mounting member 20 and the outer ring 10 when the outer ring 10 is rotated can be avoided.
Referring to fig. 1, the cross section of the installation space 100a is circular, there are even number of balls 30, and the balls 30 are arranged in a central symmetry manner around the center of the installation space 100 a; it is thus possible to effectively ensure that the relative rotation between the outer ring member 10 and the mounting member 20 is stable and secure.
It should be noted that the number of the suction cups 40 is the same as the number of the fixing holes 20a, as shown in fig. 1, in the present embodiment, the number of the suction cups 40 and the number of the fixing holes 20a are both 6; of course, in other embodiments, the number of the suction cups 40 or the fixing holes 20a may be set to 4, 8, or more than 8 according to the requirement of a person skilled in the art, and is not limited thereto. Meanwhile, the number of the balls 30 is larger than that of the suckers 40, so that the purpose of the arrangement is to ensure that a certain bearing capacity is ensured between the outer ring member 10 and the mounting member 20, and simultaneously ensure that the outer ring member 10 and the mounting member 20 are stably and relatively rotated. For example, the outer ring 10 and the mounting member 20 are integrally formed, and both are made of stainless steel, and have no burr on the edge, smooth and oil-free, so as to effectively ensure the cleanness of the uniform-glue chrome plate, but not limited thereto.
The utility model has the beneficial effects that: the utility model discloses a roller-skating tray device 100 for glue-leveling chrome plate inspection, which comprises an outer ring piece 10, a mounting piece 20, a plurality of balls 30 and a sucker 40, wherein the outer ring piece 10 is sleeved on the periphery of the mounting piece 20, an annular mounting space 100a is formed between the outer ring piece 10 and the mounting piece 20, the balls 30 are mounted in the mounting space 100a, the outer ring piece 10 and the mounting piece 20 realize relative rotation through the balls 30, a fixing hole 20a for inserting an external fixing piece is formed in the mounting piece 20, and the sucker 40 is fixed on the outer ring piece 10 and used for adsorbing a glue-leveling chrome plate inspection seat. Therefore, when the uniform glue chromium plate inspection seat is actually used, the mounting piece 20 can be fixed in an external environment through the fixing piece, then the uniform glue chromium plate inspection seat is fixed on the sucking disc 40, and the outer ring piece 10 and the mounting piece 20 can be relatively rotated to rotate the uniform glue chromium plate inspection seat fixed on the sucking disc 40 when the uniform glue chromium plate is inspected.
The present invention is not limited to the above embodiments, and other roller-sliding tray devices for inspecting a coated chrome plate, which are obtained by using the same or similar structure or device as the above embodiments of the present invention, are within the protection scope of the present invention.
Claims (10)
1. The utility model provides a smooth tray device of wheel for even gluey chrome plate inspection which characterized in that: the fixture comprises an outer ring piece, a mounting piece, a plurality of balls and a sucker, wherein the outer ring piece is sleeved on the periphery of the mounting piece, an annular mounting space is formed between the outer ring piece and the mounting piece, the balls are mounted in the mounting space, the outer ring piece and the mounting piece rotate relative to each other through the balls, a fixing hole for inserting an external fixing piece is formed in the mounting piece, and the sucker is fixed on the outer ring piece and used for adsorbing a uniform-glue chromium plate inspection seat.
2. The skidding pallet means for the inspection of well-distributed chrome plates of claim 1 wherein: the cross section of the outer ring piece is circular.
3. The skidding pallet means for the inspection of well-distributed chrome plates of claim 2 wherein: the cross section of the mounting piece is circular.
4. The skidding pallet means for the inspection of well-distributed chrome plates of claim 2 wherein: the number of the suckers is even, and the suckers are arranged in a centrosymmetric manner with the circle center of the outer ring piece.
5. The skidding pallet means for the inspection of well-distributed chrome plates of claim 3 wherein: the number of the fixing holes is even, and the fixing holes are arranged in a centrosymmetric mode with the circle center of the mounting piece.
6. The skidding pallet means for the inspection of well-distributed chrome plates of claim 3 wherein: the circle center of the outer ring piece and the circle center of the mounting piece are located on the same vertical line.
7. The skidding pallet means for the inspection of well-distributed chrome plates of claim 1 wherein: the cross section of the installation space is in a circular ring shape.
8. The skidding pallet means for the inspection of well-distributed chrome plates of claim 7 wherein: the number of the balls is even, and the balls are arranged in a manner of centrosymmetry with the circle center of the installation space.
9. The skidding pallet means of claim 5 for evened chrome plate inspection characterized in that: the number of the suckers is the same as that of the fixing holes.
10. The skidding pallet means for the inspection of well-distributed chrome plates of claim 9 wherein: the number of the balls is larger than that of the suckers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202121798667.2U CN215340685U (en) | 2021-08-03 | 2021-08-03 | A skidding tray device for even inspection of gluing chromium version |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202121798667.2U CN215340685U (en) | 2021-08-03 | 2021-08-03 | A skidding tray device for even inspection of gluing chromium version |
Publications (1)
Publication Number | Publication Date |
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CN215340685U true CN215340685U (en) | 2021-12-28 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202121798667.2U Active CN215340685U (en) | 2021-08-03 | 2021-08-03 | A skidding tray device for even inspection of gluing chromium version |
Country Status (1)
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CN (1) | CN215340685U (en) |
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2021
- 2021-08-03 CN CN202121798667.2U patent/CN215340685U/en active Active
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