CN214991800U - Mask plate - Google Patents

Abstract

The utility model discloses a mask plate, wherein a plurality of evaporation through holes are arranged on the mask plate, and a plurality of evaporation through hole arrays are arranged on the mask plate; the adjacent sub-pixels with the same color share one evaporation through hole, and the shape of each evaporation through hole is matched with the shape formed by the sub-pixels with the same color; the evaporation through holes are used for allowing evaporation materials to pass through and be deposited on the sub-pixels, and are formed in the sub-pixels with the same color. Different from the prior art, the technical scheme is characterized in that the positions of the sub-pixels are exchanged, the sub-pixels with the same color can be combined under the condition of unchanged quantity, the evaporation holes in the mask plate (FMM) can be enlarged, the net opening difficulty is reduced, and the R/G/B mutual backup in the evaporation process can be realized through the universal effect of the mask plate (FMM).

Description

Mask plate

Technical Field

The utility model relates to a mask plate field especially relates to a mask plate.

Background

The OLED display panel has advantages of thin thickness, low power consumption, flexibility, flexible display, etc., and has become a development trend of the next-generation panel display in recent years.

In the existing OLED panel, an evaporation source is utilized to heat and evaporate organic materials in a vacuum environment, the organic materials penetrate through an opening position on a metal mask plate (FMM) to define a position where a thin film is formed on glass, the film forming position needs to be a specified light emitting position on a substrate, and current of the substrate can be effectively transmitted to an OLED device to emit light, so that the accuracy of the opening position of the metal mask plate is very important.

PPI (pixels per inch) indicates the number of pixels (pixels) per inch diagonal, and when the number of pixels is larger, the PPI is higher, and the resolution and definition of the screen are better, which is also referred to as a 2K, 4K screen, and the like. In the manufacturing process of high PPI screens, the precision of the metal mask (FMM) is very critical, and under the same screen size, the higher the PPI, the larger the number of pixels means the smaller the area of each pixel, the smaller the size of the corresponding metal mask (FMM) opening needs to be made, and the alignment difficulty increases. In the mesh stretching technology, when the size of the openings of the metal mask strips (sheet) is small and the number of the openings is large, the phenomena of hole deformation, insufficient precision, wrinkles (wrapkle) on two sides and the like are easily generated under the action of tension on two sides.

The pixel arrangement design can effectively solve the problems, improve the PPI of the screen, reduce the screen stretching difficulty of a metal mask plate (FMM), ensure the screen stretching precision and reduce the screen stretching difficulty and requirements.

SUMMERY OF THE UTILITY MODEL

Therefore, it is necessary to provide a mask plate, which improves the screen stretching precision and prevents the evaporation through holes from deforming.

In order to achieve the purpose, the application provides a mask plate, wherein a plurality of evaporation through holes are formed in the mask plate, and a plurality of evaporation through holes are arrayed on the mask plate; the adjacent sub-pixels with the same color share one evaporation through hole, and the shape of each evaporation through hole is matched with the shape formed by the sub-pixels with the same color; the evaporation through holes are used for allowing evaporation materials to pass through and be deposited on the sub-pixels, and are formed in the sub-pixels with the same color.

Further, the sub-pixels are equilateral triangles; when a plurality of sub-pixels with the same color are spliced to form a diamond shape, the evaporation through holes are diamond-shaped through holes.

Further, the sub-pixels are equilateral triangles; when a plurality of sub-pixels with the same color are spliced to form an isosceles trapezoid, the evaporation through holes are isosceles trapezoid through holes.

Further, the sub-pixels are equilateral triangles; when a plurality of bar sub-pixels with the same color are spliced to form a hexagon, the evaporation through holes are hexagonal through holes.

Furthermore, a plurality of sub-pixels with the same color are spliced to form a circle, and the evaporation through holes are circular through holes.

Further, three of the sub-pixels constitute a pixel unit, and the three sub-pixels are R, G, B respectively.

Different from the prior art, the technical scheme is characterized in that the positions of the sub-pixels are exchanged, the same single sub-pixel can be rotated to the position in the same direction under the condition of unchanged quantity, the evaporation holes in the mask plate (FMM) can be enlarged, the net opening difficulty is reduced, and the R/G/B mutual backup use in the evaporation process can be realized through the universal effect of the mask plate (FMM).

Drawings

FIG. 1 is a view showing the construction of the pixel;

FIG. 2 is a view of the arrangement of sub-pixels;

FIG. 3 is a structure diagram of the vapor deposition through hole in a diamond shape;

FIG. 4 is a block diagram of the arrangement of the sub-pixels in a hexagonal shape;

FIG. 5 is a diagram of the pixel structure when the pixel is hexagonal;

FIG. 6 is a structural diagram of the evaporation through hole in a hexagonal shape;

fig. 7 is a structural view of the vapor deposition through-hole when combined.

Description of reference numerals:

1. a mask plate; 2. a pixel;

11. evaporating a through hole; 21. a sub-pixel.

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1 to 7, the present application discloses a mask plate, wherein a plurality of evaporation through holes 11 are formed in the mask plate 1, and the plurality of evaporation through holes 11 are arranged in an array on the mask plate 1; the adjacent sub-pixels 21 with the same color share one evaporation through hole 11, and the shared sub-pixels are communicated in the corresponding through hole area on the mask plate. Each of the plurality of sub-pixels with the same color belongs to a different pixel unit, and each pixel unit can drive the sub-pixels in the pixel unit to form light with different colors, such as including red, green and blue sub-pixels. The shape of each evaporation through hole 11 is matched with the shape formed by a plurality of same-color sub-pixels 21; the evaporation through holes 11 are used for allowing evaporation materials to pass through and be deposited on the light-emitting positions of the substrate, and are formed in a plurality of sub-pixels 21 with the same color. Because each sub-pixel has a light-emitting position, if an evaporation material is required to be deposited on the light-emitting positions of the sub-pixels through one evaporation through hole, and the direction of each sub-pixel is required to be adjusted, the light-emitting positions of the sub-pixels with the same color are gathered together. In order to adjust the direction of each sub-pixel, the shape of the sub-pixel needs to be adjusted, for example: can be adjusted to an isosceles or equilateral triangle, and the light-emitting position can be arranged at the end of the triangle, and the light-emitting position is the core of each sub-pixel, so that the shape of the sub-pixel is the shape of the light-emitting position.

It should be noted that the mask plate 1 is a metal mask plate; it should be noted that, when performing vapor deposition, the vapor deposition material simultaneously evaporates a plurality of sub-pixels 21 with the same color through one vapor deposition through hole 11, so the shape of the vapor deposition through hole 11 is limited by the pattern formed by the sub-pixels 21; it should be noted that the adjacent sub-pixels 21 are independent from each other, and the evaporation material is simultaneously evaporated on the plurality of sub-pixels 21 within the range of the evaporation through-hole 11 through the evaporation through-hole 11. It should be noted that the evaporation material is attached to the sub-pixel 21 through the evaporation through hole 11.

Referring to fig. 3 to 7, the sub-pixels 21 are equilateral triangles; when a plurality of sub-pixels 21 with the same color are spliced to form a rhombus, the evaporation through holes 11 are rhombus through holes; or when a plurality of sub-pixels 21 with the same color are spliced to form an isosceles trapezoid, the evaporation through hole 11 is an isosceles trapezoid through hole; or when a plurality of bar sub-pixels 21 with the same color are spliced to form a hexagon, the evaporation through hole 11 is a hexagonal through hole. Of course, in some embodiments, a plurality of sub-pixels 21 of the same color are spliced to form a circular shape, and the evaporation through hole 11 is a circular through hole. It should be further noted that the evaporation through holes in fig. 3 correspond to the R sub-pixels in fig. 2, that is, when performing the evaporation operation, the mask 1 in fig. 3 is located on the substrate with the sub-pixels, and the evaporation through holes of the mask in fig. 3 are opposite to the R sub-pixels on the substrate. Figure 3 left side is the mask plate of standard, and the evaporation plating through-hole that every subpixel corresponds is mutually independent promptly, and figure 3 right side is in this application the evaporation plating through-hole merges into one with the evaporation plating through-hole that the coating by vaporization colour is the same, and figure 3 is two unifications the evaporation plating through-hole.

It should be noted that, due to the increase of the number of the pixels 2 and the reduction of the area of the pixels 2, the mask 1(FMM) also needs to reduce the opening size, but the reduction of the opening size may cause the problems of hole deformation and insufficient precision for the subsequent screening. Therefore, when the holes and the precision of the metal mask are poor, the subsequent evaporation process including evaporation color mixing, evaporation offset and the like can be affected. The left side of fig. 1 shows a standard sub-pixel arrangement, and the pixel 2 is composed of three sub-pixels 21 of R/G/B, and the sub-pixels 21 are rectangular in shape of 1:1: 1. The disadvantages of the standard subpixel 21 arrangement: the evaporation through holes 11 can not be enlarged by adjusting the positions, and the screen-opening difficulty can not be reduced.

To reduce the difficulty of screening, the three sub-pixels 21 can be changed into three equilateral triangles with the size of 1:1: 1. Referring to fig. 2 to 3, the equilateral triangles are arranged, the three sub-pixels 21 are arranged in an isosceles trapezoid by shifting R/G/B, and the three sub-pixels 21 arranged in an isosceles trapezoid are inverted to form a hexagon for the two pixels 2. At this time, two sub-pixels 21 with the same color form a sub-pixel 21 which can be seen as a layer, i.e. a pixel group; at this time, the evaporation through holes 11 are rhombic. Of course, in some embodiments, referring to fig. 4 to 5, the positions of the sub-pixels 21 in one hexagon may be adjusted so that the sub-pixels 21 of the same color in one hexagon are arranged together, when a plurality of hexagons are arranged, a larger pixel group may be formed, the arrangement order of the sub-pixels 21 in each adjacent hexagon is different, but they maintain a repeated design rule in the whole arrangement; the evaporation through holes 11 are hexagonal.

Specifically, the sequence of the sub-pixels 21 is: and sequencing R-R-G-G-B-B or R-R-B-B-G-G in a clockwise/counterclockwise direction, scattering and rearranging the 6 sub-pixels 21 in pixel groups respectively, and facilitating the combination between subsequent pixel groups.

The sub-pixels 21 with the same color in each hexagon are adjusted together, due to the characteristic of regular hexagons, the three hexagons can be combined with each other, each hexagon comprises two sub-pixels 21 with the same color, namely, one pixel group can be seen by six sub-pixels 21, at the moment, the six sub-pixels 21 share one evaporation through hole 11, the evaporation through holes 11 in the mask plate 1 can be further enlarged, the accuracy difficulty of screening is reduced, and the screening yield is improved. The R/G/B metal mask plate 1 can be the same, R/G/B sharing is achieved, the mask plate 1 is formed by splicing a plurality of mask strips, the die sinking cost of the mask strips can be reduced in the aspect of net opening, the corresponding mask strips are only required to be inverted or rightly placed, and the R/G/B mask strips can be used universally in the net opening process; when the R/B/G is short of the corresponding mask plate 1 during vapor deposition, other colors can be used for substitution, and the quantity and pressure of the metal mask plates 1 are reduced.

After the triangular pixel 2 structure is adopted, the two sub-pixels 21 can form a pixel group, and the two sub-pixels 21 can share one evaporation through hole 11. Further, by adjusting the order of the sub-pixels 21 within a hexagon, a larger pixel group can be formed between the hexagons. When a plurality of pixels are combined, more sub-pixels 21 can be contacted, so that the concept of the same pixel and the same position is realized; specifically, the sub-pixels 21 in a hexagon are arranged in a clockwise direction R-G-B (not limited to the direction and the sequence), the transformed pixel cluster is shown in fig. 5, the pixels still maintain the state of two pixels RGB, and the relative position between each group RGB still maintains the same state, please refer to fig. 6.

Under the condition that the number of pixels is kept unchanged, the arrangement of the internal sub-pixels 21 is reordered and designed, the area of the vapor plating through holes 11 on the mask plate 1 is enlarged, and the mesh opening difficulty is reduced; in a diamond-shaped via, the via area will be enlarged twice, and in a hexagonal via, the via area will be enlarged six times.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims (6)

1. A mask plate is characterized in that a plurality of evaporation through holes are formed in the mask plate, and the evaporation through holes are arrayed on the mask plate; the adjacent sub-pixels with the same color share one evaporation through hole, and the shape of each evaporation through hole is matched with the shape formed by the sub-pixels with the same color; the evaporation through holes are used for allowing evaporation materials to pass through and be deposited on the light-emitting positions of the substrate, and are formed in the sub-pixels with the same color.

2. A mask according to claim 1, wherein the sub-pixels are equilateral triangles; when a plurality of sub-pixels with the same color are spliced to form a diamond shape, the evaporation through holes are diamond-shaped through holes.

3. A mask according to claim 1, wherein the sub-pixels are equilateral triangles; when a plurality of sub-pixels with the same color are spliced to form an isosceles trapezoid, the evaporation through holes are isosceles trapezoid through holes.

4. A mask according to claim 1, wherein the sub-pixels are equilateral triangles; when a plurality of bar sub-pixels with the same color are spliced to form a hexagon, the evaporation through holes are hexagonal through holes.

5. A mask according to claim 1, wherein a plurality of sub-pixels of the same color are spliced to form a circular shape, and the evaporation through holes are circular through holes.

6. A mask according to claim 1, wherein three of the sub-pixels constitute a pixel unit, and each of the three sub-pixels is R, G, B.

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