CN214848501U - Semiconductor chip template direction detection device - Google Patents
Semiconductor chip template direction detection device Download PDFInfo
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- CN214848501U CN214848501U CN202121349189.7U CN202121349189U CN214848501U CN 214848501 U CN214848501 U CN 214848501U CN 202121349189 U CN202121349189 U CN 202121349189U CN 214848501 U CN214848501 U CN 214848501U
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Abstract
The utility model discloses a semiconductor chip template direction detection device, including two L type frames, door-shaped frame, block the structure. The two L-shaped frames are symmetrically arranged and used for placing a semiconductor chip template, the semiconductor chip template is in sliding fit with the L-shaped frames, and one corner of the semiconductor chip template is provided with a limiting groove; the portal frame comprises a horizontal rod and two vertical rods, the vertical rods are arranged on the outer wall of the L-shaped frame, a lifting mechanism is hung on the horizontal rod, a detection rod is arranged at the bottom of the lifting mechanism, the arrangement direction of the detection rod is perpendicular to that of the L-shaped frame, a limiting block is arranged at the bottom of one end of the detection rod and used for matching with the limiting groove; the blocking structure is located at one end of each of the two L-shaped frames and comprises a turbine, a worm, a rotating motor and a stop plate which coaxially rotates with the turbine, the worm is arranged at the top of the rotating motor, and the stop plate is used for stopping the semiconductor chip template. The semiconductor chip template is ensured to move to a preset position through various limiting or detecting structures, and the rejection rate of products is reduced.
Description
Technical Field
The utility model discloses chip preparation technical field especially relates to a semiconductor chip template direction detection device.
Background
The bulk transfer of semiconductor chips is a difficult point in the chip manufacturing process, and the semiconductor chips are firstly arrayed on an original substrate, then the original substrate of the semiconductor chips is attached to a target substrate, and then the original substrate is peeled off, so that the semiconductor chips are transferred to the target substrate. The prior art often utilizes push mechanism to remove the base plate of semiconductor chip to the place that needs, has the displacement not very accurate problem, because semiconductor chip is very tiny, even just slight mistake takes place for the counterpoint process, the yields of influence product that also can be very big, so need ensure that semiconductor chip's base plate removes to predetermineeing the position, is convenient for carry out next step operation.
SUMMERY OF THE UTILITY MODEL
For solving prior art not enough, the utility model provides a semiconductor chip template direction detection device ensures through multiple spacing or detection structure that the semiconductor chip template moves to predetermineeing the position, reduces the rejection rate of product.
In order to realize the purpose of the utility model, the following scheme is proposed:
a semiconductor chip template direction detection device comprises two L-shaped frames, a door-shaped frame and a blocking structure.
The two L-shaped frames are symmetrically arranged and used for placing a semiconductor chip template, the semiconductor chip template is in sliding fit with the L-shaped frames, and one corner of the semiconductor chip template is provided with a limiting groove;
the portal frame comprises a horizontal rod and two vertical rods, the vertical rods are arranged on the outer wall of the L-shaped frame, a lifting mechanism is hung on the horizontal rod, a detection rod is arranged at the bottom of the lifting mechanism, the arrangement direction of the detection rod is perpendicular to that of the L-shaped frame, a limiting block is arranged at the bottom of one end of the detection rod and used for matching with the limiting groove;
the blocking structure is located one end of each of the two L-shaped frames and comprises a turbine, a worm, a rotating motor and a stop plate which coaxially rotates with the turbine, the worm is arranged at the top of the rotating motor, and the stop plate is used for stopping the semiconductor chip template through the matching of the turbine and the worm.
Furthermore, one of the vertical rods is provided with a vertical bar-shaped through groove, one end of the detection rod is provided with an induction rod, the other end of the induction rod is arranged in the vertical bar-shaped through groove, and the induction rod and the vertical bar-shaped through groove are in up-and-down sliding fit.
Furthermore, a through hole is formed in the same vertical rod as the vertical strip-shaped through groove, one end of the horizontal rod extends through the through hole, and the horizontal rod is in sliding fit with the through hole left and right.
Furthermore, a telescopic mechanism and a plurality of guide rods are arranged on the outer side of the L-shaped frame on one side of the induction rod, and the guide rods are used for guiding the L-shaped frame to move horizontally.
Furthermore, the vertical distance between the induction rod and the detection rod is equal to the thickness of the limiting block and also equal to the vertical distance between the top of the semiconductor chip template and the top of the L-shaped frame.
Furthermore, the length of the detection rod is the same as the width of the semiconductor chip template.
Furthermore, the turbine is arranged on one of the L-shaped frames, one end of the stop baffle rotates coaxially with the turbine, the other end of the stop baffle is arranged to be a free end, one end of the other L-shaped frame is provided with a clamping groove, and the free end is arranged in the clamping groove.
Furthermore, a contact is arranged at the top of the L-shaped frame and is positioned right below the induction rod.
The beneficial effects of the utility model reside in that:
1. the precision of the displacement of the semiconductor chip template is improved by adopting various modes, for example, a limiting block needs to fall to a limiting groove; the stopping plate is used for stopping the semiconductor chip template; the induction rod needs to touch the contact; the length of the detection rod is the same as the width of the semiconductor chip template; the induction rod is in up-and-down sliding fit with the vertical strip-shaped through groove; whether the semiconductor chip template reaches the preset position or not can be detected through the structures.
Drawings
FIG. 1 is an overall structural view of embodiment 1;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a vertical pole structural view of embodiment 2;
fig. 4 is a structural view of a barrier structure of embodiment 2;
fig. 5 is a structural view of the telescopic mechanism of embodiment 2.
Detailed Description
Example 1
As shown in fig. 1, the present embodiment provides a semiconductor chip template direction detection apparatus, which includes two L-shaped frames 5, a gate-shaped frame 7, and a blocking structure 6.
Specifically, two L type frame 5 symmetry settings for place the semiconductor chip template, semiconductor chip template and L type frame 5 sliding fit, semiconductor chip template one corner is equipped with spacing groove 41.
Specifically, door-shaped frame 7 includes horizon bar 1 and two vertical poles 2, and 5 outer walls on L type frame are located to vertical pole 2, and the horizon bar 1 has hung elevating system 71, and elevating system 71's power supply can be the cylinder, and elevating system 71 bottom is equipped with detection pole 72, and detection pole 72 sets up the direction the same with horizon bar 1, and detection pole 72 one end bottom is equipped with stopper 74, and stopper 74 is used for matcing spacing groove 41.
Specifically, as shown in fig. 2, the blocking structure 6 is located at one end of the two L-shaped frames 5, the blocking structure 6 includes a worm wheel 61, a worm 62, a rotating motor 63, and a stop plate 64 that rotates coaxially with the worm wheel 61, the worm 62 is located at the top of the rotating motor 63, and the stop plate 64 is switched between a horizontal state and a vertical state through the cooperation of the worm wheel 61 and the worm 62, so as to stop the semiconductor chip template.
Through the mode, when the first semiconductor chip template moves to the stopping plate 64 and stops, the lifting mechanism 71 enables the detection rod 72 to descend, if the limiting block 74 is completely matched with the limiting groove 41, the displacement of the semiconductor chip template meets the requirement, in addition, the length of the detection rod 72 is the same as the width of the semiconductor chip template, namely, two ends of the detection rod 72 are in up-and-down sliding fit with the inner wall of the L-shaped frame 5, the L-shaped frame 5 plays a limiting role, and the stability of the detection rod 72 in descending is improved.
Example 2
As shown in fig. 3, 4 and 5, the present embodiment provides another semiconductor chip template direction detecting apparatus, which has substantially the same structure as that of embodiment 1, and the same parts are not repeated herein, except that:
specifically, one of the vertical rods 2 is provided with a vertical bar-shaped through groove 21 and a through hole 22, one end of the detection rod 72 is provided with an induction rod 75, the other end of the induction rod 75 is arranged in the vertical bar-shaped through groove 21, the induction rod 75 and the vertical bar-shaped through groove 21 can be in up-and-down sliding fit or in left-and-right sliding fit, one end of the horizontal rod 1 is extended to penetrate through the through hole 22, and the horizontal rod 1 and the through hole 22 are in left-and-right sliding fit.
Specifically, the outside of the L-shaped frame 5 on one side of the sensing rod 75 is provided with the telescopic mechanism 51 and another guide rod 52, the guide rod 52 is used for guiding the L-shaped frame 5 to move horizontally, when the distance between the two L-shaped frames 5 is changed, the sensing rod 75 is in sliding fit with the vertical bar-shaped through groove 14, the horizontal rod 12 is in sliding fit with the through hole 15, semiconductor chip templates with more specifications can be matched, and the applicability is strong.
More specifically, the contact 54 is arranged at the top of the L-shaped frame 5, the contact 54 is located right below the sensing rod 75, the vertical distance between the sensing rod 75 and the detecting rod 72 is equal to the thickness of the limiting block 74 and also equal to the vertical distance between the top of the semiconductor chip template and the top of the L-shaped frame 5, and only when the limiting block 74 is matched with the limiting groove 41 and the sensing rod 75 just touches the contact 54, the position of the semiconductor chip template is accurate.
More specifically, in order to improve the matching degree of the worm wheel 61, the worm 62 and the stop plate 64, the worm wheel 61 is disposed on one L-shaped frame 5, one end of the stop plate 64 rotates coaxially with the worm wheel 61, the other end is set as a free end 641, one end of the other L-shaped frame 5 is provided with a slot 53, the free end 641 is disposed in the slot 53, and when the stop plate 64 is clamped in the slot 53, the rotation of the rotating motor 63 is stopped.
When the semiconductor chip template is used in the embodiment, the distance between the two L-shaped frames 5 is adjusted by the telescopic mechanism 51, and the semiconductor chip template is placed on the L-shaped frames 5; when the semiconductor chip template moves to the stop plate 64, stopping; the lifting device 71 lowers the detection rod 72; after several seconds, the detection rod 72 rises, the rotating motor 63 rotates, and the stop plate 64 rotates from the horizontal state to the vertical upward state to expose the semiconductor chip template; next, the semiconductor chip template is transferred to a preset position according to whether the limit block 74 is matched with the limit groove 41 or not and whether the sensing rod 75 touches the contact 54 or not.
The above embodiments are only used for illustrating the technical ideas and features of the present invention, and do not represent the only or limiting of the present invention. It should be understood by those skilled in the art that various changes and equivalent substitutions made herein may be made without departing from the scope of the invention as defined by the appended claims.
Claims (8)
1. The semiconductor chip template direction detection device is characterized by comprising two L-shaped frames (5), a door-shaped frame (7) and a blocking structure (6);
the two L-shaped frames (5) are symmetrically arranged and used for placing the semiconductor chip template, the semiconductor chip template is in sliding fit with the L-shaped frames (5), and one corner of the semiconductor chip template is provided with a limiting groove (41);
the portal frame (7) comprises a horizontal rod (1) and two vertical rods (2), the vertical rods (2) are arranged on the outer wall of the L-shaped frame (5), a lifting mechanism (71) is hung on the horizontal rod (1), a detection rod (72) is arranged at the bottom of the lifting mechanism (71), the arrangement direction of the detection rod (72) is perpendicular to the L-shaped frame (5), a limiting block (74) is arranged at the bottom of one end of the detection rod (72), and the limiting block (74) is used for being matched with the limiting groove (41);
blocking structure (6) are located two L type frame (5) one end, blocking structure (6) including turbine (61), worm (62), rotating electrical machines (63) and with turbine (61) coaxial pivoted keep off board (64), worm (62) are located the top of rotating electrical machines (63), through turbine (61) with the cooperation of worm (62), keep off board (64) and be used for keeping off stopping semiconductor chip template.
2. The semiconductor chip template direction detection device according to claim 1, wherein one of the vertical rods (2) is provided with a vertical strip-shaped through groove (21), one end of the detection rod (72) is provided with an induction rod (75), the other end of the induction rod (75) is arranged in the vertical strip-shaped through groove (21), and the induction rod (75) is in up-and-down sliding fit with the vertical strip-shaped through groove (21).
3. The semiconductor chip template direction detection device according to claim 2, wherein a through hole (22) is formed in the same vertical rod (2) as the vertical bar-shaped through groove (21), one end of the horizontal rod (1) extends through the through hole (22), and the horizontal rod (1) is in sliding fit with the through hole (22) from side to side.
4. The semiconductor chip template direction detection device according to claim 3, wherein a telescoping mechanism (51) and a plurality of guide rods (52) are arranged on the outer side of the L-shaped frame (5) on one side of the sensing rod (75), and the guide rods (52) are used for guiding the L-shaped frame (5) to move horizontally.
5. The semiconductor chip template orientation detection device according to any one of claims 2 to 4, wherein a vertical distance between the sensing rod (75) and the detection rod (72) is equal to a thickness of the stopper (74) and a vertical distance between the top of the semiconductor chip template and the top of the L-shaped frame (5).
6. The semiconductor chip template direction detecting device according to any one of claims 2 to 4, wherein the length of the detecting rod (72) is the same as the width of the semiconductor chip template.
7. The semiconductor chip template orientation detection device of claim 6, wherein the worm gear (61) is disposed on one of the L-shaped frames (5), one end of the stop plate (64) rotates coaxially with the worm gear (61), the other end is a free end (641), one end of the other L-shaped frame (5) is disposed with a slot (53), and the free end (641) is disposed in the slot (53).
8. The semiconductor chip template orientation detection device of claim 7, wherein a contact (54) is arranged on the top of the L-shaped frame (5), and the contact (54) is located right below the induction rod (75).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121349189.7U CN214848501U (en) | 2021-06-17 | 2021-06-17 | Semiconductor chip template direction detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121349189.7U CN214848501U (en) | 2021-06-17 | 2021-06-17 | Semiconductor chip template direction detection device |
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| Publication Number | Publication Date |
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| CN214848501U true CN214848501U (en) | 2021-11-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121349189.7U Active CN214848501U (en) | 2021-06-17 | 2021-06-17 | Semiconductor chip template direction detection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117092492A (en) * | 2023-10-18 | 2023-11-21 | 深圳市芯盛智能信息有限公司 | Component plugging assembly for Beidou navigation chip |
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2021
- 2021-06-17 CN CN202121349189.7U patent/CN214848501U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117092492A (en) * | 2023-10-18 | 2023-11-21 | 深圳市芯盛智能信息有限公司 | Component plugging assembly for Beidou navigation chip |
| CN117092492B (en) * | 2023-10-18 | 2024-01-09 | 深圳市芯盛智能信息有限公司 | Component plugging assembly for Beidou navigation chip |
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