CN214551276U - Separating mechanism used in electronic grade sulfur hexafluoride rectifying device - Google Patents

Abstract

The utility model belongs to the technical field of sulfur hexafluoride production, specific separating mechanism for among rectifying device of electron level sulfur hexafluoride that says so, including constant temperature post and separating wheel, the inside evaporation chamber of evenly distributed of seting up of separating wheel. The utility model discloses a set up separating wheel and evaporation chamber, utilize the impact of feeding to drive the separating wheel and rotate, and then make the evaporation chamber cut apart the fluid, with sulfur hexafluoride liquid whole separation's small part liquid under the heat-conduction effect that lasts, quick evaporation, because the liquid content of evaporation intracavity is few, and then make the change of temperature comparatively obvious, and then utilize the difference of the boiling point of liquid, the effectual pure sulfur hexafluoride liquid that separates.

Description

Separating mechanism used in electronic grade sulfur hexafluoride rectifying device

Technical Field

The utility model belongs to the technical field of sulfur hexafluoride production, specific separating mechanism who is arranged in electron level sulfur hexafluoride's rectifier unit that says so.

Background

One-level rectifying column cauldron material does not have recovery processing apparatus among the prior art, heavy ends impurity octafluoropropane in the tower cauldron, low sulfur fluoride etc. can only be by the manual work outside its discharge tower, arrange the processing in addition, if the blowdown is untimely, enrich too much heavy ends impurity in the tower cauldron, can't provide qualified material for second grade rectifying column, influence production and influence product quality and the manual heavy ends of arranging, cause the few row of impurity or multirow phenomenon easily, the few row still probably influences product quality, the multirow then can cause the loss of product, economic benefits is reduced.

A rectification device and a rectification process for producing electronic grade sulfur hexafluoride, which are issued by Chinese patent application No.: CN2013106925868, by pressurizing the crude gas of sulfur hexafluoride, then sending it into a precooler, converting it from gas state into liquid state under high pressure and low temperature state, then gasifying, condensing and refluxing in a first-stage rectifying tower and a first condenser to remove high-boiling-point substance, then condensing the sulfur hexafluoride gas into liquid state by gasifying, condensing and refluxing in a second-stage rectifying tower and a second condenser, and collecting, while the low-boiling-point substance keeps gas state escaping from the second condenser, the rectifying device and rectifying process provided by the utility model can effectively remove the high-boiling-point substance and low-boiling-point substance impurity component in the crude gas of sulfur hexafluoride, especially hexafluoroethane and octafluoropropane impurity gas whose boiling point is very close to that of sulfur hexafluoride under high pressure and low temperature state required by the rectifying process, the prepared sulfur hexafluoride completely meets the technical requirements of electronic-grade sulfur hexafluoride, but the impurity enriched at the tower kettle is not removed in the scheme, along with the time, the impurity proportion is gradually increased, so that the impurity content in the output steam is increased, and the purification of the solution is not facilitated.

In view of this, the utility model provides a separating mechanism for among the rectifier unit of electron level sulfur hexafluoride for solve above-mentioned technical problem.

SUMMERY OF THE UTILITY MODEL

In order to compensate prior art's not enough, solve among the prior art one-level rectifying column cauldron material and do not have recovery processing device, heavy component impurity octafluoropropane in the tower cauldron, low sulfur fluoride etc. can only be by the manual work outside its discharge tower, arrange the processing in addition, if the blowdown is untimely, enrich too much heavy component impurity in the tower cauldron, will can't provide qualified material for the second grade rectifying column, influence production and influence product quality and artifical manual discharge heavy component, cause the few row of impurity or multirow phenomenon easily, the few row still probably influences product quality, the multirow then can cause the loss of product, reduce economic benefits's problem, the utility model provides a separating mechanism in the rectifying device for electron level sulfur hexafluoride.

The utility model provides a technical scheme that its technical problem adopted is: the utility model relates to a separating mechanism used in a rectifying device of electronic grade sulfur hexafluoride, which comprises a constant temperature column and a separating wheel; the constant temperature column is a cylindrical cavity type structure body; a refrigerant is filled in the constant temperature column; the constant temperature column is fixedly connected to the tower kettles of the first-stage rectifying tower, the second-stage rectifying tower and the third-stage rectifying tower; the temperature of a constant temperature column positioned at the tower kettle of the primary rectifying tower is higher than the boiling point of sulfur hexafluoride; the temperature of constant temperature columns positioned at the tower kettles of the second-stage rectifying tower and the third-stage rectifying tower is lower than the boiling point of sulfur hexafluoride; the separation wheel is rotatably connected to the surfaces of constant temperature columns in the primary rectifying tower and the secondary rectifying tower through bearings; evaporation cavities which are uniformly distributed are formed in the separating wheel; the evaporation cavities are all fan-shaped mechanisms; the evaporation cavity is arranged on the surface of the separation wheel and is provided with openings; the bottom surface of the separating wheel is flush with the lowest surfaces of the first-stage rectifying tower and the second-stage rectifying tower; the feeding pipe on the first-stage rectifying tower and the opening of the conduction pipe on the first condenser in the second-stage rectifying tower are both positioned above the separating wheel; the side wall of the separating wheel is fixedly connected with collecting pipes which are uniformly distributed; the collecting pipes correspond to the evaporation cavities one by one and extend into the evaporation cavities; one ends of the collecting pipes, which are far away from the evaporation cavity, are mutually communicated; the collecting pipe positioned in the first-stage rectifying tower is externally connected with a recovery tower; the collecting pipe in the secondary rectifying tower is in rotary conduction with the liquid outlet pipe; the conduction positions of the collecting pipes in the evaporation cavity are fixedly connected with temperature sensing valves; one side of the temperature sensing valve, which is far away from the opening of the evaporation cavity, is provided with a telescopic groove; the telescopic plate is connected in the telescopic groove in a sliding and sealing manner; the expansion plate is used for sealing an opening of the collecting pipe in the evaporation cavity; sulfur hexafluoride liquid is filled between the telescopic groove and the telescopic plate;

the utility model has the advantages as follows:

the rectification device for the electronic grade sulfur hexafluoride of the utility model utilizes the impact of the feeding to drive the separation wheel to rotate by arranging the separation wheel and the evaporation cavity, so that the evaporation cavity can divide the fluid, a small part of the liquid which is integrally separated from the sulfur hexafluoride liquid can be quickly evaporated under the action of continuous heat conduction, because the content of the liquid in the evaporation cavity is less, the temperature change is more obvious, and the pure sulfur hexafluoride liquid is effectively separated by utilizing the difference of the boiling points of the liquid, in the whole process, the output speed rates of the liquid components in the first-stage rectifying tower and the second-stage rectifying tower are similar, thereby reducing the content change of the liquid components gathered in the first-stage rectifying tower and the second-stage rectifying tower, thereby effectively avoiding the enrichment of single component content, further leading to higher impurity content in the output steam and further leading to poorer rectification and purification effect.

Drawings

The present invention will be further explained with reference to the accompanying drawings.

FIG. 1 is a flow chart of a method of the present invention;

FIG. 2 is a front view of a rectification plant for electronic grade sulphur hexafluoride;

FIG. 3 is a cross-sectional view of a first rectification column;

FIG. 4 is an enlarged view of a portion of FIG. 3 at A;

in the figure: the device comprises a first-stage rectifying tower 1, a second-stage rectifying tower 11, a third-stage rectifying tower 12, a feeding pipe 13, a first condenser 2, a second condenser 21, a three-way pipe 22, a return pipe 23, a conduction pipe 24, a liquid outlet pipe 25, a gas outlet pipe 26, a constant temperature column 3, a separating wheel 4, an evaporation cavity 41, a collecting pipe 42, a temperature sensing valve 5, a telescopic groove 51, a telescopic plate 52, a first sliding groove 6, a sealing plate 61, a limiting plate 62, a regulating valve 7, a flow distribution plate 71, an electromagnet 72 and a flow guide plate 8.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand and understand, the present invention is further described below with reference to the following embodiments.

As shown in fig. 1 to 4, the rectification device for electronic grade sulfur hexafluoride of the present invention includes a rectification mechanism and a separation mechanism;

the rectifying mechanism comprises a primary rectifying tower 1, a secondary rectifying tower 11 and a tertiary rectifying tower 12; the primary rectifying tower 1, the secondary rectifying tower 11 and the tertiary rectifying tower 12 are all cylindrical cavity type rectifying towers; the middle part of the first-stage rectifying tower 1 is fixedly connected with a feeding pipe 13; the feeding pipe 13 is externally connected with a mould press and a precooler; the top ends of the primary rectifying tower 1 and the secondary rectifying tower 11 are respectively connected with a first condenser 2 and a second condenser 21 through pipes; one sides of the first condenser 2 and the second condenser 21, which are far away from the first-stage rectifying tower 1 and the second-stage rectifying tower 11, are fixedly connected with a three-way pipe 22; the three-way pipe 22 is fixedly connected with a return pipe 23 and a conduction pipe 24; a return pipe 23 on the first condenser 2 extends to the top of the first-stage rectifying tower 1, and a conduction pipe 24 extends to the middle of the second-stage rectifying tower 11; a return pipe 23 on the second condenser 21 extends to the top of the secondary rectifying tower 11; the tower kettle of the secondary rectifying tower 11 is fixedly connected with a liquid outlet pipe 25; the liquid outlet pipe 25 extends to the tower kettle 12 of the three-stage rectifying tower; the top of the third-stage rectifying tower 12 is fixedly connected with an air outlet pipe 26; the air outlet pipe 26 and the conduction pipe 24 on the second condenser 21 are both externally connected with a catcher;

the separation mechanism comprises a thermostatic column 3 and a separation wheel 4; the constant temperature column 3 is a cylindrical cavity type structure body; a refrigerant is filled in the constant temperature column 3; the constant temperature column 3 is fixedly connected to the tower kettles of the primary rectifying tower 1, the secondary rectifying tower 11 and the third rectifying tower 12; the temperature of a constant temperature column 3 positioned at the tower kettle of the primary rectifying tower 1 is higher than the boiling point of sulfur hexafluoride; the temperature of the constant temperature columns 3 positioned at the bottoms of the second-stage rectifying tower 11 and the third-stage rectifying tower 12 is lower than the boiling point of sulfur hexafluoride; the separation wheel 4 is rotatably connected to the surfaces of the constant temperature columns 3 in the primary rectifying tower 1 and the secondary rectifying tower 11 through bearings; evaporation cavities 41 which are uniformly distributed are formed in the separating wheel 4; the evaporation cavities 41 are all fan-shaped mechanisms; the evaporation cavity 41 is arranged on the surface of the separating wheel 4 and is open; the bottom surface of the separating wheel 4 is flush with the lowest surfaces of the first-stage rectifying tower 1 and the second-stage rectifying tower 11; the feeding pipe 13 on the first-stage rectifying tower 1 and the conduction pipe 24 on the first condenser 2 are positioned at the openings in the second-stage rectifying tower 11 and are positioned above the separating wheel 4; the side wall of the separating wheel 4 is fixedly connected with uniformly distributed collecting pipes 42; the collecting pipes 42 correspond to the evaporation cavities 41 one by one, and the collecting pipes 42 extend into the evaporation cavities 41; one ends of the collecting pipes 42 far away from the evaporation cavity 41 are communicated with each other; the collecting pipe 42 positioned in the first-stage rectifying tower 1 is externally connected with a recovery tower; the collecting pipe 42 positioned in the secondary rectifying tower 11 is in rotary conduction with the liquid outlet pipe 25; the conduction positions of the collecting pipe 42 in the evaporation cavity 41 are fixedly connected with temperature sensing valves 5; one side of the temperature sensing valve 5, which is far away from the opening of the evaporation cavity 41, is provided with a telescopic groove 51; the telescopic plate 52 is connected in the telescopic groove 51 in a sliding and sealing manner; the expansion plate 52 is used for sealing the opening of the collecting pipe 42 in the evaporation cavity 41; sulfur hexafluoride liquid is filled between the telescopic groove 51 and the telescopic plate 52;

in the prior art, a material in a first-stage rectifying tower 1 is not provided with a recovery processing device, heavy component impurities such as octafluoropropane and low-sulfur fluoride in a tower kettle can only be manually discharged out of the tower, in addition, the treatment is arranged, if pollution discharge is not timely, excessive heavy component impurities are enriched in the tower kettle, qualified materials cannot be provided for a second-stage rectifying tower 11, the production is influenced, the product quality is influenced, heavy components are manually discharged, the phenomenon of less impurity discharge or multiple rows is easily caused, the product quality can still be influenced due to less impurity discharge, the product loss can be caused due to multiple rows, and the economic benefit is reduced;

the utility model is characterized in that the rectifying tower is divided into a rectifying mechanism and a separating mechanism, the coarsely purified sulfur hexafluoride liquid is introduced into the primary rectifying tower 1 through the feeding pipe 13 by the molding press and the precooler, the sulfur hexafluoride liquid after being pressurized and cooled falls to the bottom of the primary rectifying tower 1 under the action of gravity, and then impacts the separating wheel 4 at the tower bottom of the primary rectifying tower 1, the separating wheel 4 is impacted by the liquid and rotates around the constant temperature column 3, the sulfur hexafluoride liquid is accumulated at the tower bottom of the primary rectifying tower 1, along with the rotation of the separating wheel 4, the sulfur hexafluoride liquid enters the evaporation cavity 41 through the opening of the evaporation cavity 41 and is limited by the wall of the evaporation cavity 41, the sulfur hexafluoride liquid rotates along with the separating wheel 4, because the separating wheel 4 rotates and is connected to the constant temperature column 3, the constant temperature column 3 conducts heat with the separating wheel 4, and then conducts the temperature to the liquid in the evaporation cavity 41 and the liquid at the tower bottom of the primary rectifying tower 1 by the separating wheel 4, because the temperature of the thermostatic column 3 in the first-stage rectifying tower 1 is higher than the boiling point of the sulfur hexafluoride liquid, the sulfur hexafluoride, the low-boiling-point impurities and part of the high-boiling-point impurities are evaporated and gasified and diffused to the top of the first-stage rectifying tower 1, because more sulfur hexafluoride liquid is accumulated in the kettle of the first-stage rectifying tower 1, the temperature change is relatively insignificant, the liquid content in the evaporation cavity 41 is relatively low, the sulfur hexafluoride and the low-boiling-point impurities in the liquid in the evaporation cavity 41 are completely gasified along with the continuous heat conduction, and then only the high-boiling-point impurities exist in the evaporation cavity 41, because the heat is absorbed in the process of liquid evaporation, when the low-boiling-point impurities and the sulfur hexafluoride in the expansion groove 51 in the temperature sensing valve 5 are completely gasified, the expansion plate 52 moves to the outside of the expansion groove 51, and then the collecting pipe 42 opening sealed by the expansion plate 52 in the initial state is opened, the high boiling point impurities are gradually gathered in the collecting pipe 42 under the action of gravity and discharged to an external recovery tower, meanwhile, the evaporated and gasified gas enters the first condenser 2 through a guide pipe at the top of the first-stage rectifying tower 1 and is liquefied again in the first condenser 2, the liquefied fluid enters the three-way pipe 22 and is divided in the three-way pipe 22, part of the liquid is discharged to the inside of the first-stage rectifying tower 1 again through the return pipe 23 and is contacted with the rising gas flow to exchange heat with the gas flow, so that the high boiling point impurities in the gas flow are effectively liquefied and removed, further, the high boiling point impurities in the gasified gas are effectively removed, the sulfur hexafluoride liquid input into the second-stage rectifying tower 11 drives the separating wheel 4 in the second-stage rectifying tower 11 to rotate under the action of gravity, and because the temperature of the constant temperature column 3 in the second-stage rectifying tower 11 is lower than the boiling point of the sulfur hexafluoride, further gasifying low boiling point impurities and partial sulfur hexafluoride, after the separation wheel 4 rotates for a circle, removing the low boiling point impurities of the sulfur hexafluoride in the evaporation cavity 41 inside the separation wheel 4, further leading the pure sulfur hexafluoride fluid to enter the three-stage rectifying tower 12 through the collecting pipe 42 and the liquid outlet pipe 25 for final rectification, further preparing the high-purity electronic grade sulfur hexafluoride, through arranging the separation wheel 4 and the evaporation cavity 41, utilizing the impact of the feeding to drive the separation wheel 4 to rotate, further leading the evaporation cavity 41 to divide the fluid, rapidly evaporating a small part of liquid integrally separated from the sulfur hexafluoride liquid under the action of continuous heat conduction, and effectively separating out the sulfur hexafluoride liquid due to the small content of the liquid in the evaporation cavity 41, so that the temperature change is obvious, further utilizing the difference of the boiling points of the liquid, and the output speed between the liquid components in the tower kettles of the first-stage rectifying tower 1 and the second-stage rectifying tower 11 is similar, and then the content change of the liquid components gathered in the tower kettles of the first-stage rectifying tower 1 and the second-stage rectifying tower 11 is small, so that the enrichment of the content of single components is effectively avoided, and the impurity content in the output steam is high, and the rectifying and purifying effect is poor.

As an embodiment of the present invention, the return pipe 23 is located inside the first-stage rectification tower 1 and the second-stage rectification tower 11 and is spiral, and the return liquid in the return pipe 23 promotes the rotation of the separation wheel 4;

during operation, the liquid of condensation among first condenser 2 and the second condenser 21 flows back to one-level rectifying column 1 and second grade rectifying column 11 along back flow 23, carry out the heat exchange between the liquid of backward flow and the gas that rises, and then condense the higher material of boiling point, and then effectual steam to the output carries out the purification, the design of spiral back flow 23, make the effectual expansion of the contact range of the liquid of backward flow and steam flow, it is better to make the condensation effect, the liquid that condenses simultaneously in the liquid of back flow 23 outer wall and the liquid in the back flow 23 receive back flow 23 guide, and impact on separating wheel 4 together with the liquid in the inlet pipe 13, and then drive separating wheel 4 and rotate, effectually provide sufficient power for separating wheel 4.

As an embodiment of the present invention, a first chute 6 is disposed on the surface of the separating wheel 4; a sealing plate 61 is connected in the first sliding chute 6 in a sliding manner; the sealing plate 61 is elastically connected with the first sliding chute 6 through a spring; the gravity of the sealing plate 61 is greater than the elastic force of the spring; the evaporation cavity 41 is positioned on the separation wheel 4, and the opening is positioned on the moving path of the sealing plate 61; the bottom surfaces of the first-stage rectifying tower 1 and the second-stage rectifying tower 11 are fixedly connected with limiting plates 62 made of elastic materials and used for stirring the sealing plates 61;

when the device works, by arranging the first chute 6 and the sealing plate 61, along with the rotation of the separation wheel 4, when the sealing plate 61 in the first chute 6 on the separation wheel 4 moves downwards, the opening of the evaporation cavity 41 is blocked under the action of gravity, so that the opening of the evaporation cavity 41 is blocked, along with the rotation of the separation wheel 4, the sealing plate 61 is limited by the limiting plate 62, so that the sealing plate 61 compresses a spring and opens the opening of the evaporation cavity 41, at the moment, the external liquid rushes into the evaporation cavity 41, the original liquid in the evaporation cavity 41 is effectively prevented from rushing out under the action of hydraulic pressure, and sulfur hexafluoride and low-boiling-point impurities in the liquid are removed in the process of continuing circulation, the design of the sealing plate 61 can effectively prevent the liquid in the evaporation cavity 41 from flowing back to the outside after the low-boiling-point impurities are not completely removed in one period, so as to further change the content of the external fluid, meanwhile, with continuous circulation, the purity of the high-boiling-point impurities in the liquid is gradually purified, and the discharge of the high-boiling-point impurities can be effectively promoted.

As an implementation manner of the present invention, a regulating valve 7 is fixedly connected to one side of the three-way pipe 22 located below the first condenser 2, which is far away from the first condenser 2; a splitter plate 71 is hinged inside the three-way pipe 22; one end of the flow distribution plate 71, which is far away from the hinged point, is elastically connected with the three-way pipe 22 through a spring; the end, far away from the hinge point, of the flow distribution plate 71 is made of a magnetic material; an electromagnet 72 is arranged in the regulating valve 7; the temperature sensor is electrically connected with the regulating valve 7; the bottom of the primary rectifying tower 1 is provided with a temperature sensor for testing the bottom temperature of the primary rectifying tower 1, when the temperature of the temperature sensor rises, the current in the regulating valve 7 increases, the magnetic force of the electromagnet 72 is enhanced, and the magnetic attraction of the flow distribution plate 71 increases; when the device works, by arranging the regulating valve 7 and the temperature sensor, because the temperature of the liquid is greatly related to the content of each component in the liquid, after the content of high-boiling-point impurities in the liquid rises, the temperature in the tower kettle of the primary rectifying tower 1 can be continuously raised and then fed back to the temperature sensor, the temperature sensor outputs an electric signal to the regulating valve 7, so that the current in the regulating valve 7 is increased, the electromagnet 72 is further enhanced in magnetism, the flow distribution plate 71 attracted by magnetism rotates downwards, so that the flow proportion of the liquid in the three-way pipe 22 to the return pipe 23 is increased, the steam output is increased due to the temperature rise, the content of the high-boiling-point impurities is increased, on one hand, the increase of the return liquid in the return pipe 23 can effectively reduce the temperature, the liquid components in the tower kettle are balanced, meanwhile, the condensation effect of the increased return liquid on the steam is enhanced, and the impurity removing effect on the steam is further enhanced, thereby reducing the impurity content of the output steam and finally outputting purer sulfur hexafluoride liquid.

As an embodiment of the present invention, the inner wall of the evaporation chamber 41 is fixedly connected with a thermal insulation coating; a guide plate 8 is fixedly connected in the evaporation cavity 41; the guide plate 8 is made of a good heat conduction material; the guide plate 8 penetrates through the evaporation cavity 41 and is connected with the thermostatic column 3 in a sliding manner;

the during operation, through setting up guide plate 8, utilize in guide plate 8 conducts the evaporation chamber 41 with the temperature in the constant temperature post 3, and then evaporate the liquid in the evaporation chamber 41, and utilize thermal barrier coating to reduce the temperature influence between the adjacent evaporation chamber 41, and then effectual messenger evaporates mutual independence operation between the chamber 41, and then is convenient for arrange outward the high boiling point impurity in the evaporation chamber 41.

As an embodiment of the present invention, the baffle 8 is designed in plural, and the baffle 8 and the side wall of the evaporation cavity 41 form a circulation channel in the evaporation cavity 41 for increasing the heat conduction area; the opening of the evaporation cavity 41 and the temperature sensing valve 5 are respectively positioned at the first two ends of the circulation channel;

the during operation forms circulation channel through utilizing guide plate 8 to arrange evaporation chamber 41 opening and temperature-sensing valve 5 in both ends, and the position is close between the first both ends, on the one hand can be effectual when the 41 opening feed liquors of evaporation chamber, cool down temperature-sensing valve 5, can also effectually make the flow length increase of liquid in evaporation chamber 41 simultaneously, and then make the heat conduction area increase between guide plate 8 and the liquid, and then the reinforcing carries out the efficiency of heat conduction in to the liquid.

A control method for a rectification device of electronic grade sulfur hexafluoride comprises the following steps:

s1: pressurizing and cooling the coarse purified sulfur hexafluoride gas by a mould press and a precooler, controlling the pressure to be 0.35-0.45 MPa and the temperature to be-80-75 ℃, and condensing the pressurized and cooled sulfur hexafluoride gas into liquid;

s2: introducing sulfur hexafluoride liquid into the primary rectifying tower 1 through a feed pipe 13, controlling the temperature of a constant temperature column 3 in the primary rectifying tower 1 to be maintained at-60 to-55 ℃, and carrying out primary rectification to remove high-boiling-point impurities;

s3: introducing the sulfur hexafluoride liquid subjected to primary rectification into the secondary rectification tower 11, controlling the temperature of the constant temperature column 3 in the secondary rectification tower 11 to be maintained at-70 ℃ to-65 ℃, and performing secondary rectification to remove low-boiling-point impurities;

s4: and introducing the sulfur hexafluoride liquid without the low-boiling point impurities and the high-boiling point impurities into the three-stage rectifying tower 12, controlling the temperature of the constant temperature column 3 in the three-stage rectifying tower 12 to be maintained at-70 ℃ to-65 ℃, and standing and rectifying for 15-20min to obtain the electronic grade sulfur hexafluoride.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (3)

1. A separating mechanism for a rectifying device of electronic grade sulfur hexafluoride is characterized in that:

the separation mechanism comprises a thermostatic column (3) and a separation wheel (4); the constant temperature column (3) is a cylindrical cavity type structure body; a refrigerant is filled in the constant temperature column (3); the constant temperature column (3) is fixedly connected to the tower kettles of the primary rectifying tower (1), the secondary rectifying tower (11) and the tertiary rectifying tower (12); the temperature of a constant temperature column (3) positioned at the tower kettle of the primary rectifying tower (1) is higher than the boiling point of sulfur hexafluoride; the temperature of the constant temperature columns (3) positioned at the tower kettles of the second-stage rectifying tower (11) and the third-stage rectifying tower (12) is lower than the boiling point of sulfur hexafluoride; the separation wheel (4) is rotatably connected to the surfaces of the constant temperature columns (3) in the primary rectifying tower (1) and the secondary rectifying tower (11) through bearings; evaporation cavities (41) which are uniformly distributed are formed in the separating wheel (4); the evaporation cavities (41) are all fan-shaped mechanisms; the evaporation cavity (41) is arranged on the surface of the separation wheel (4) and is provided with openings; the bottom surface of the separating wheel (4) is flush with the lowest surfaces of the tower kettles of the primary rectifying tower (1) and the secondary rectifying tower (11); the feeding pipe (13) on the first-stage rectifying tower (1) and the conduction pipe (24) on the first condenser (2) are positioned above the separating wheel (4) at the openings in the second-stage rectifying tower (11); the side wall of the separating wheel (4) is fixedly connected with collecting pipes (42) which are uniformly distributed; the collecting pipes (42) correspond to the evaporation cavities (41) one by one, and the collecting pipes (42) extend into the evaporation cavities (41); one ends of the collecting pipes (42) far away from the evaporation cavity (41) are mutually communicated; a collecting pipe (42) positioned in the first-stage rectifying tower (1) is externally connected with a recovery tower; a collecting pipe (42) positioned in the secondary rectifying tower (11) is in rotary conduction with the liquid outlet pipe (25); the conduction positions of the collecting pipe (42) in the evaporation cavity (41) are fixedly connected with temperature sensing valves (5); one side of the temperature sensing valve (5) far away from the opening of the evaporation cavity (41) is provided with a telescopic groove (51); the telescopic plate (52) is connected in the telescopic groove (51) in a sliding and sealing manner; the expansion plate (52) is used for sealing an opening of the collecting pipe (42) in the evaporation cavity (41); and sulfur hexafluoride liquid is filled between the telescopic groove (51) and the telescopic plate (52).

2. The separation mechanism for use in a rectification apparatus for electronic grade sulphur hexafluoride of claim 1, wherein: a first sliding groove (6) is formed in the surface of the separating wheel (4); a sealing plate (61) is connected in the first sliding groove (6) in a sliding manner; the sealing plate (61) is elastically connected with the first sliding groove (6) through a spring; the gravity of the sealing plate (61) is greater than the elastic force of the spring; the evaporation cavity (41) is positioned on the separation wheel (4), and the opening of the evaporation cavity is positioned on the moving path of the sealing plate (61); and the bottom surfaces of the first-stage rectifying tower (1) and the second-stage rectifying tower (11) are fixedly connected with limiting plates (62) made of elastic materials and used for stirring the sealing plates (61).

3. The separation mechanism for use in a rectification apparatus for electronic grade sulphur hexafluoride of claim 1, wherein: the inner wall of the evaporation cavity (41) is fixedly connected with a heat insulation coating; a guide plate (8) is fixedly connected in the evaporation cavity (41); the guide plate (8) is made of a good heat conduction material; the guide plate (8) penetrates through the evaporation cavity (41) and is in sliding connection with the constant temperature column (3).

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