CN214471440U - Six-axis force and moment sensor based on optical reflection - Google Patents

Six-axis force and moment sensor based on optical reflection Download PDF

Info

Publication number
CN214471440U
CN214471440U CN202120942334.6U CN202120942334U CN214471440U CN 214471440 U CN214471440 U CN 214471440U CN 202120942334 U CN202120942334 U CN 202120942334U CN 214471440 U CN214471440 U CN 214471440U
Authority
CN
China
Prior art keywords
mirror
mirror surface
sensor
pcb
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202120942334.6U
Other languages
Chinese (zh)
Inventor
白仲皖
鱼晨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hualichuang Science Shenzhen Co ltd
Original Assignee
Hualichuang Science Shenzhen Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hualichuang Science Shenzhen Co ltd filed Critical Hualichuang Science Shenzhen Co ltd
Priority to CN202120942334.6U priority Critical patent/CN214471440U/en
Application granted granted Critical
Publication of CN214471440U publication Critical patent/CN214471440U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The utility model discloses a six-axis force and torque sensor based on optical reflection, which comprises an installation seat and a sensor seat arranged in the installation seat; the top and the bottom of the sensor seat are respectively provided with a PCB, and the surface of each PCB is provided with a plurality of optical sensors; each PCB is also provided with a reflector, and the surface of each reflector is also provided with a reflector adjusting mechanism. The utility model relates to a rationally, compact structure can realize the measurement of the linear power and the moment of 6 degrees of freedom, and it is convenient to measure, simultaneously, still is equipped with mirror surface guiding mechanism, interval between adjustable mirror surface and optical sensor, and then guarantees that eight optical sensor are the same with the distance between the mirror surface that corresponds, and then the error that the uncertainty of compensatable optical sensor, mirror surface and PCB board in process of production brought improves measurement accuracy.

Description

Six-axis force and moment sensor based on optical reflection
Technical Field
The utility model relates to a sensor technical field especially relates to a six power and torque sensor based on optical reflection.
Background
Multiaxis force and torque sensor wide application is controlled in robot, automation industry and experiment, and multiaxis torque sensor is the device that can measure linear force and moment in the multiple degrees of freedom, can observe 6 degrees of freedom, but current multiaxis torque sensor's structure is general comparatively complicated, and manufacturing cost is higher, and it is inconvenient to use.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a six power and torque sensor based on optical reflection, this sensor reasonable in design, compact structure, can realize the measurement of the linear power and the moment of 6 degrees of freedom, it is convenient to measure, and simultaneously, still be equipped with mirror surface guiding mechanism, interval between adjustable mirror surface and the optical sensor, and then guarantee that eight optical sensor are the same with the distance between the mirror surface that corresponds, and then can compensate optical sensor, the error that uncertainty of mirror surface and PCB board in process of production brought, improve measurement accuracy.
In order to realize the purpose, the following technical scheme is adopted:
a six-axis force and moment sensor based on optical reflection comprises a mounting seat and a sensor seat arranged in the mounting seat; the top and the bottom of the sensor seat are respectively provided with a PCB, and the surface of each PCB is provided with a plurality of optical sensors; each PCB is also provided with a reflecting mirror surface, and the surface of each reflecting mirror surface is also provided with a mirror surface adjusting mechanism; the reflecting mirror surface is arranged on the sensor seat through a mirror surface adjusting mechanism, and the mirror surface adjusting mechanism can be used for adjusting the distance between the reflecting mirror surface and the optical sensor.
Furthermore, the sensor seat comprises a mirror plane, mirror units are arranged at the top and the bottom of the mirror plane, and the two mirror units are arranged in mirror symmetry by taking the mirror plane as a center; the two PCB boards are respectively arranged at the top and the bottom of the mirror plane, and the two reflecting mirror surfaces are respectively and correspondingly arranged on a mirror image unit through a mirror surface adjusting mechanism.
Further, the mirror image unit comprises a plurality of elastic supporting beams arranged on the mirror image plane and integrally connected with the mirror image plane, and a fixing ring arranged on the plurality of elastic supporting beams and integrally connected with the elastic supporting beams; the number of the elastic supporting beams of each mirror image unit is consistent with that of the optical sensors on the PCB, and the reflecting mirror surface is arranged on the fixed ring through the mirror surface adjusting mechanism.
Furthermore, the elastic support beams are arranged on the surface edge of the mirror plane at equal intervals in the circumferential direction of the mirror plane, one end of each elastic support beam is integrally connected with the mirror plane, and the other end of each elastic support beam is bent towards the direction of the fixing ring, extends and is connected with the fixing ring.
Furthermore, a plurality of first notches are formed in the circumferential direction of the surface of the fixing ring at intervals, and a first fixing hole is formed in each first notch; a plurality of extending parts are arranged on the peripheral side of the reflector at intervals, and a second fixing hole is formed in the position, corresponding to the first fixing hole, of each extending part; the mirror adjustment mechanism includes a compressible assembly disposed on the first fixed aperture and an adjustment screw disposed within the second fixed aperture.
Further, the mounting seat comprises a base and a top cover detachably connected with the base; a first containing cavity is formed between the base and the top cover, and the sensor seat is arranged in the first containing cavity.
Adopt above-mentioned scheme, the beneficial effects of the utility model are that:
the sensor has the advantages of reasonable design and compact structure, can realize the measurement of the linear force and the moment of 6 degrees of freedom, is convenient to measure, is also provided with a mirror surface adjusting mechanism, can adjust the distance between the reflecting mirror surface and the optical sensor, further ensures that the distances between the eight optical sensors and the corresponding reflecting mirror surface are the same, further can compensate errors caused by the uncertainty of the optical sensor, the reflecting mirror surface and the PCB in the production process, and improves the measurement precision.
Drawings
FIG. 1 is an exploded view of the present invention;
FIG. 2 is a perspective view of the present invention (with the mounting base and the reflector omitted);
FIG. 3 is a front view of FIG. 2;
fig. 4 is a cross-sectional view of the present invention (with the mounting base omitted);
FIG. 5 is an enlarged partial schematic view of FIG. 4;
fig. 6 is a schematic layout view of the elastic support beam of the present invention;
fig. 7 is a cross-sectional view of the elastic support beam of the present invention;
wherein the figures identify the description:
1-sensor seat; 2-PCB board;
3-an optical sensor; 4-a mirror surface;
5-mirror surface adjusting mechanism; 6, a base;
7-top cover; 11-mirror plane;
12-a resilient support beam; 13-a stationary ring;
14 — a first gap; 15 — a first fixing hole;
16-an extension; 51-a compressible component;
52-adjusting screw.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1 to 7, the present invention provides a six-axis force and torque sensor based on optical reflection, which includes a mounting seat, and a sensor seat 1 installed in the mounting seat; the top and the bottom of the sensor base 1 are provided with a PCB 2, and the surface of each PCB 2 is provided with a plurality of optical sensors 3; each PCB 2 is also provided with a reflector 4, and the surface of each reflector 4 is also provided with a reflector adjusting mechanism 5; the reflecting mirror surface 4 is mounted on the sensor seat 1 through a mirror surface adjusting mechanism 5, and the mirror surface adjusting mechanism 5 can be used for adjusting the distance between the reflecting mirror surface 4 and the optical sensor 3.
The sensor seat 1 comprises a mirror plane 11, mirror units are arranged at the top and the bottom of the mirror plane 11, and the two mirror units are symmetrically arranged by taking the mirror plane 11 as a central mirror image; the two PCB boards 2 are respectively arranged at the top and the bottom of the mirror plane 11, and the two reflecting mirror surfaces 4 are respectively and correspondingly arranged on a mirror unit through a mirror surface adjusting mechanism 5; the mirror image unit comprises a plurality of elastic supporting beams 12 which are arranged on the mirror image plane 11 and are integrally connected with the mirror image plane, and a fixing ring 13 which is arranged on the plurality of elastic supporting beams 12 and is integrally connected with the elastic supporting beams; the number of the elastic support beams 12 of each mirror image unit is the same as the number of the optical sensors 3 on the PCB board 2, and the mirror surface 4 is mounted on the fixing ring 13 via the mirror surface adjusting mechanism 5.
The elastic support beams 12 are arranged on the surface edge of the mirror plane 11 at equal intervals in the circumferential direction, one end of each elastic support beam 12 is integrally connected with the mirror plane 11, the other end of each elastic support beam 12 is bent and extended towards the direction of the fixed ring 13, a plurality of first gaps 14 are further arranged on the circumferential direction of the surface of the elastic support beam connected with the fixed ring 13 at intervals, and a first fixing hole 15 is further formed in each first gap 14; a plurality of extending parts 16 are arranged on the peripheral side of the reflector 4 at intervals, and a second fixing hole is arranged on each extending part 16 corresponding to the first fixing hole 15; the mirror adjustment mechanism 5 includes a compressible assembly 51 disposed on the first fixing hole 15, and an adjustment screw 52 disposed in the second fixing hole; the mounting seat comprises a base 6 and a top cover 7 detachably connected with the base 6; a first containing cavity is formed between the base 6 and the top cover 7, and the sensor seat 1 is arranged in the first containing cavity.
The utility model discloses the theory of operation:
as shown with continued reference to fig. 1 to 7, in the present embodiment, the number of optical sensors 3 on each PCB board 2 and the number of elastic support beams 12 (made of an elastic material, deformed up and down in the Z-axis direction) of each mirror image unit are each set to 4, i.e., 8 optical sensors 3 in total; the main structure (sensor seat 1) of the sensor is a double-layer mirror image structure, and mirror image units positioned at the top and the bottom of a mirror image plane 11 are distributed in a mirror image mode.
Referring to fig. 2, 3 and 6, in the present embodiment, the sensor seat 1 has an upper layer structure and a lower layer structure, and four elastic supporting beams 12 are uniformly and equally spaced on the outer circle of the mirror plane 11, that is, the included angle between two adjacent elastic supporting beams 12 is 90 °; the radian of the arc between the starting point line of the elastic support beam 12 and the finishing point line of the elastic support beam 12 is 45 °, and therefore, the length of the arc between the starting point line of the elastic support beam 12 and the finishing point line of the elastic support beam 12 is determined by the radius of the outer circular structure; referring to fig. 7, which is a cross-sectional view of the structure of the elastic support beam 12, the height of one end of the elastic support beam 12 connected to the mirror plane 11 is greater than half of its width (h > w/2), and the length L of inclination of the elastic support beam 12 is determined by the relation between 45 radians corresponding to the structure of the elastic support beam 12.
Referring to fig. 2, 4 and 5, a PCB 2 is disposed on each of the upper and lower layers, and four optical sensors 3 are disposed on each PCB 2, wherein the number of the optical sensors 3 is the same as the number of the elastic support beams 12 on the upper layer; the upper layer reflector 4 and the lower layer reflector 4 are both mounted on the fixing ring 13 through the adjusting screws 52 and the first fixing holes 15, a compressible component (such as a rubber ring) is placed on the first fixing holes 15, the extending part 16 of the reflector 4 extrudes the compressible component 51 through the adjusting screws 52, and then the distance between the reflector 4 and the optical sensor 3 can be adjusted (the distance between the eight optical sensors 3 and the corresponding reflectors 4 can be ensured to be the same), so that errors caused by uncertainty in the production process of the optical sensor 3, the reflector 4 and the PCB board 2 can be compensated.
The sensor has an upper layer structure and a lower layer structure, each layer structure can be an independent three-axis force and moment sensor for measuring Mx,MyAnd FzThe six-axis force and moment can be measured by combining the upper layer structure and the lower layer structure; wherein, FxUsing two different M's of the upper and lower layersyPerforming a calculation of FyUsing two different M's of the upper and lower layersxPerforming a calculation of MzUsing four optics in the upper and lower layersThe difference between the average values of the sensors 3 is calculated. Specifically, the method comprises the following steps:
Mx(lower layer) ═ KMx(lower layer) × [ γ ]L1 γL2 γL3 γL4]T
My(lower layer) ═ KMy(lower layer) × [ γ ]L1 γL2 γL3 γL4]T
Fz(lower layer) ═ KFz(lower layer) × [ γ ]L1 γL2 γL3 γL4]T
Mx(upper layer) ═ KMx(upper layer) × [ gamma ]L5 γL6 γL7 γL8]T
My(upper layer) ═ KMy(upper layer) × [ gamma ]L5 γL6 γL7 γL8]T
Fz(upper layer) ═ KFz(upper layer) × [ gamma ]L5 γL6 γL7 γL8]T
Wherein, γiThe light intensity value measured by the optical sensor 3 in the upper layer or the lower layer structure; KM (Kernel) matrixx(lower layer), KMy(lower layer), KFz(lower layer), KMx(upper layer), KMy(upper layer) and KFz(upper layer) is a 1 × 4 matrix containing three parameters; the height of the upper sensing unit is set as huThe height of the lower layer sensing unit is set as hlWhen force is applied to the X-axis or the Y-axis of the sensor, different moments M are generated on the upper layer and the lower layer of the sensorxAnd MyWherein, the moments of the lower layer and the upper layer can be respectively expressed by the following formulas:
Mx(lower layer) ═ hl×Fy
My(lower layer) ═ hl×Fx
Mx(upper layer) ═ hu×Fy
My(upper layer) ═ hu×Fx
Moment difference between the upper layer and the lower layer:
ΔMx=Mx(lower layer) -Mx(upper layer) ═ hl-hu)×Fy
ΔMy=My(lower layer) -My(upper layer) ═ hl-hu)×Fy
Thus, FxAnd FyThe calculation formula of (2) is as follows:
Fy=ΔMx/(hl-hu),
Fx=ΔMy/(hl-hu),
in this configuration, the force to which the upper structure is subjected is equal to the force to which the lower structure is subjected, and therefore the force F to which the sensor is subjectedz=(Fz(upper layer) + Fz(lower layer))/2, when the sensor is subjected to a moment M on the Z axiszIn the meantime, since the upper layer elastic member (the elastic supporting beam 12) and the lower layer elastic member adopt the opposite spiral bending designs, the upper layer small sensing unit and the lower layer small sensing unit generate opposite height changes, and a positive torque (in the Z-axis direction) is applied to the sensor, so that the height of the upper layer small sensing unit is increased and the height of the lower layer small sensing unit is decreased, therefore, M is the height of the upper layer small sensing unitzThe magnitude of (A) can be calculated by the difference of the moments received by the upper layer and the lower layer, and the formula is as follows:
Mz=KMz×((γL1L2L3L4)-(γL4L5L6L7))。
the above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (6)

1. The six-axis force and moment sensor based on optical reflection is characterized by comprising a mounting seat and a sensor seat arranged in the mounting seat; the top and the bottom of the sensor seat are respectively provided with a PCB, and the surface of each PCB is provided with a plurality of optical sensors; each PCB is also provided with a reflecting mirror surface, and the surface of each reflecting mirror surface is also provided with a mirror surface adjusting mechanism; the reflecting mirror surface is arranged on the sensor seat through a mirror surface adjusting mechanism, and the mirror surface adjusting mechanism can be used for adjusting the distance between the reflecting mirror surface and the optical sensor.
2. The six-axis force and moment sensor based on optical reflection according to claim 1, wherein the sensor seat comprises a mirror plane, a mirror unit is arranged on the top and the bottom of the mirror plane, and the two mirror units are arranged symmetrically with the mirror plane as the center; the two PCB boards are respectively arranged at the top and the bottom of the mirror plane, and the two reflecting mirror surfaces are respectively and correspondingly arranged on a mirror image unit through a mirror surface adjusting mechanism.
3. The six-axis force and moment sensor based on optical reflection according to claim 2, wherein the mirror unit comprises a plurality of elastic support beams arranged on a mirror plane and integrally connected thereto, and a retainer ring arranged on the plurality of elastic support beams and integrally connected thereto; the number of the elastic supporting beams of each mirror image unit is consistent with that of the optical sensors on the PCB, and the reflecting mirror surface is arranged on the fixed ring through the mirror surface adjusting mechanism.
4. The six-axis force and moment sensor based on optical reflection according to claim 3, wherein the plurality of elastic supporting beams are arranged at equal intervals on the surface edge of the mirror plane in the circumferential direction, one end of each elastic supporting beam is integrally connected with the mirror plane, and the other end of each elastic supporting beam is arranged in a bending way towards the direction of the fixing ring and extends and is connected with the fixing ring.
5. The six-axis force and moment sensor based on optical reflection according to claim 4, wherein a plurality of first notches are further formed in the circumferential direction of the surface of the fixing ring at intervals, and a first fixing hole is further formed in each first notch; a plurality of extending parts are arranged on the peripheral side of the reflector at intervals, and a second fixing hole is formed in the position, corresponding to the first fixing hole, of each extending part; the mirror adjustment mechanism includes a compressible assembly disposed on the first fixed aperture and an adjustment screw disposed within the second fixed aperture.
6. The six-axis optical reflection-based force and moment sensor according to claim 1, wherein the mount comprises a base and a cap removably coupled to the base; a first containing cavity is formed between the base and the top cover, and the sensor seat is arranged in the first containing cavity.
CN202120942334.6U 2021-04-30 2021-04-30 Six-axis force and moment sensor based on optical reflection Active CN214471440U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120942334.6U CN214471440U (en) 2021-04-30 2021-04-30 Six-axis force and moment sensor based on optical reflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120942334.6U CN214471440U (en) 2021-04-30 2021-04-30 Six-axis force and moment sensor based on optical reflection

Publications (1)

Publication Number Publication Date
CN214471440U true CN214471440U (en) 2021-10-22

Family

ID=78180866

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120942334.6U Active CN214471440U (en) 2021-04-30 2021-04-30 Six-axis force and moment sensor based on optical reflection

Country Status (1)

Country Link
CN (1) CN214471440U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115342953A (en) * 2022-06-30 2022-11-15 中国科学院自动化研究所 Tension sensor of flexible controllable instrument stay wire

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115342953A (en) * 2022-06-30 2022-11-15 中国科学院自动化研究所 Tension sensor of flexible controllable instrument stay wire

Similar Documents

Publication Publication Date Title
US9810529B2 (en) Measuring probe for measuring a three-dimensional shape of an object to be measured
JP4659841B2 (en) Sensor unit
US9618312B2 (en) Measuring probe
CN214471440U (en) Six-axis force and moment sensor based on optical reflection
JP6896585B2 (en) Force sensor and device
JP2010520075A (en) Locating
EP1725910A2 (en) Device consisting of at least one optical element
WO2018184256A1 (en) Single point laser vibration measurer based multi-directional wide-angle and continuous-scan vibration measurement auxiliary instrument
CN110542495A (en) displacement detection type force sensor
CN106291865B (en) Fast mirror based on new flexible hinge
CN106569371A (en) Translational driving apparatus and electronic apparatus using this
US20190310142A1 (en) Capacitive sensor
CN108645392B (en) Camera installation posture calibration method and device
US5383368A (en) Deflection sensor for robot links
CN110243306B (en) Plane surface shape sub-aperture splicing interferometry device and method based on robot
CN218211186U (en) Calibration ball plate for scanner and precision detection device
CN217504791U (en) Marking instrument used on vertical surface and fine adjustment mechanism of laser marking module
JP5388105B2 (en) Tilt detector and laser marking device
CN115902911A (en) Laser tracking pose measurement target device and method and hidden point measurement device
CN209991947U (en) Plane surface shape subaperture splicing interference measuring device based on robot
CN114578504A (en) Reaction force-free quick reflecting mirror based on flexible support
US6938352B2 (en) High-precision cog system measuring instrument
CN116539283B (en) Double-reflecting-surface composite mirror optical axis deviation detection system and detection method
CN214471466U (en) Six-axis force and torque sensor with gravity compensation
KR20210034018A (en) Exposure machine

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant