CN116539283B - Double-reflecting-surface composite mirror optical axis deviation detection system and detection method - Google Patents
Double-reflecting-surface composite mirror optical axis deviation detection system and detection method Download PDFInfo
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- CN116539283B CN116539283B CN202310820316.4A CN202310820316A CN116539283B CN 116539283 B CN116539283 B CN 116539283B CN 202310820316 A CN202310820316 A CN 202310820316A CN 116539283 B CN116539283 B CN 116539283B
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- 150000001875 compounds Chemical class 0.000 claims abstract description 19
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention provides a double-reflecting-surface composite mirror optical axis deviation detection system and a double-reflecting-surface composite mirror optical axis deviation detection method, and belongs to the field of optical processing and detection. The problem of high accuracy double reflection face compound mirror optical axis deviation detects difficultly is solved. The detection system comprises optical axis detection mechanisms and a theodolite, wherein the number of the optical axis detection mechanisms is two, the two optical axis detection mechanisms are respectively arranged in front of two reflecting surfaces of the double-reflecting-surface compound mirror, the optical axis detection mechanisms comprise a CGH detection plate, an interferometer and an adjusting table, the CGH detection plate is arranged in front of emergent light of the interferometer, the CGH detection plate and the interferometer are both arranged on the adjusting table, and the theodolite is arranged in the middle of the two CGH detection plates. The optical axis deviation detection device is mainly used for optical axis deviation detection of the double-reflecting-surface composite mirror.
Description
Technical Field
The invention belongs to the field of optical processing and detection, and particularly relates to a system and a method for detecting optical axis deviation of a double-reflecting-surface compound mirror.
Background
Along with the rapid development of aerospace technology, the demands of people for high-resolution images are more and more urgent, the requirements of an optical system are more compact when the high-resolution imaging is met, and the system adjustment difficulty is reduced so as to adapt to the batch production demands of loads. The integrated processing design of the two reflecting surfaces of the two reflecting surface integrated reflecting mirror assembly reduces the processing and adjusting difficulty, has high reference coincidence degree, and simultaneously effectively compresses the axial length of the optical system, so that the structure is compact.
In the milling, grinding and polishing process of the optical element mirror surface, the optical axis of the optical mirror surface is easy to deviate due to the relative position error of the mirror body and a processing machine tool, and coma is generated on the shape of the reflecting mirror surface. If the optical axis deviation is larger in the optical processing process, the assembly and adjustment process is complex when the optical system is assembled in an integrated way, longer adjustment time is required to be consumed, and even the phenomenon that the assembly and adjustment fail due to the larger optical axis deviation can occur.
In the prior art, most of optical axis deviation detection is carried out on a single reflector, so that a processing detection reference is easy to establish, and the optical axis detection is relatively easy. The invention patent of application publication number CN114739323A, named as a system for testing the deviation between the optical axis of an optical element and the mechanical axis, a testing method and a deviation correcting method, provides a method for measuring the deviation between the optical axis of the optical element and the mechanical axis, but the method is only suitable for detecting the deviation between the optical axis of a single-sided reflector and a mechanical reference, and the calibration reference is converted for multiple times, so that error accumulation exists.
The integrated processing design of the double reflecting surfaces reduces the difficulty of assembly and adjustment, the optical system structure is more compact, and the space utilization rate is high. However, in the optical processing process, the optical axis of the double-reflecting-surface integrated reflecting mirror is changed, so that the double-reflecting-surface integrated reflecting mirror is more sensitive to the optical axis deviation, and a rapid and high-precision double-reflecting-surface composite mirror optical axis deviation detection method is urgently established in order to ensure that the optical axis deviation meets the use requirement.
Disclosure of Invention
In view of the above, the present invention is directed to a dual-reflection-surface composite mirror optical axis deviation detection system and a detection method thereof, so as to solve the problem of difficult detection of optical axis deviation of a high-precision dual-reflection-surface composite mirror.
In order to achieve the above purpose, the present invention adopts the following technical scheme: the utility model provides a dual-reflection-surface compound mirror optical axis deviation detecting system, it includes optical axis detection mechanism and theodolite, optical axis detection mechanism quantity is two sets of, and two sets of optical axis detection mechanism set up respectively in the place ahead of two reflection surfaces of dual-reflection-surface compound mirror, optical axis detection mechanism includes CGH pick-up plate, interferometer and adjustment platform, the CGH pick-up plate sets up in interferometer outgoing light the place ahead, CGH pick-up plate and interferometer all set up on the adjustment platform, the theodolite sets up in the middle of two CGH pick-up plates.
Still further, the CGH sensing plate is mounted on a CGH sensing plate adjustment stand, which is provided on the adjustment table.
Further, the adjustment table is a six-degree-of-freedom adjustment table.
Furthermore, the double-reflecting-surface composite mirror is arranged on the double-reflecting-surface composite mirror mounting bracket through a tool.
Still further, the CGH sensing plate includes a CGH substrate, a CGH alignment region and a CGH sensing region, both of which are disposed on the CGH substrate, the CGH sensing region being located inside the CGH alignment region.
Still further, the compound mirror of two reflecting surfaces includes first reflecting surface and second reflecting surface, along a plurality of compound mirror supporting ribs of two reflecting surface of circumferencial direction equipartition between first reflecting surface and the second reflecting surface, the light passing hole that runs through first reflecting surface and second reflecting surface is seted up at the compound mirror center of two reflecting surfaces, a plurality of compound mirror mounting holes of two reflecting surfaces have been seted up on the compound mirror of two reflecting surfaces.
The invention also provides a detection method of the double-reflecting-surface composite mirror optical axis deviation detection system, which comprises the following steps:
step 1: setting up an optical axis detection mechanism, arranging a CGH detection plate and an interferometer in front of two reflecting surfaces of a double reflecting surface composite mirror, and arranging the CGH detection plate and the interferometer on an adjusting table;
step 2: according to the optical design result of the two reflecting surfaces of the double reflecting surface compound mirror, the positions of the CGH detection plate and the interferometer in the two groups of optical axis detection mechanisms are adjusted through the adjusting table, the two groups of optical axis detection mechanisms are used for respectively detecting the surface shapes of the two reflecting surfaces, so that the optical axes of the two reflecting surfaces are respectively parallel to the optical axes of the interferometer on the corresponding side, and the optical axes of the two reflecting surfaces are respectively perpendicular to the CGH detection plate on the corresponding side;
step 3: the theodolite is placed between the two CGH detection plates and is used for measuring the relative angles of the horizontal angles and the vertical angles of the two CGH detection plates, and the deviation between the angles and the theoretical design value is the deviation of the two optical axes of the double-reflecting-surface compound mirror.
Furthermore, in the step 2, the positions of the CGH detection plate and the interferometer are adjusted, so that the measuring beam emitted by the interferometer returns to the interferometer through the CGH alignment area, and the defocus and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, thereby realizing the alignment of the interferometer and the CGH detection plate.
Furthermore, in the step 2, the relative positions of the interferometer, the CGH detection plate and the dual-reflection-surface compound mirror are changed by adjusting the adjustment table on the first reflection surface side, so that when a measuring beam emitted by the interferometer enters the first reflection surface through the CGH detection area and returns to the interferometer, the defocus and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the first reflection surface is parallel to the optical axis of the interferometer, and alignment of the interferometer and the first reflection surface is realized.
Furthermore, in the step 2, the relative positions of the interferometer and the CGH detection plate and the double-reflection-surface compound mirror are changed by adjusting the adjusting table on the second reflection surface side, so that when the measuring beam emitted by the interferometer enters the second reflection surface through the CGH detection area and returns to the interferometer, the defocusing and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the second reflection surface is parallel to the optical axis of the interferometer, and the alignment of the interferometer and the second reflection surface is realized.
Compared with the prior art, the invention has the beneficial effects that: the existing reflector structure is a single reflector, a processing detection reference is easy to establish, optical axis detection is relatively accurate and convenient, and the positions of two reflecting surfaces of the double-reflecting-surface integrated reflector are fixed, so that optical axis deviation is more sensitive, and optical axis detection is more complex.
The invention provides a double-sided compound mirror optical axis deviation detection system, which can rapidly and accurately display the optical axis deviation, more intuitively and accurately reflect the angle of an optical axis to be adjusted, enable the optical processing detection process to be visualized, be efficient and intuitive, and make up the defect that the deviation is caused by theoretical calculation and actual processing size in the past. The system can rapidly detect the optical axis deviation of the two reflecting surfaces and improve the optical processing efficiency.
The optical axis deviation detection system of the double-sided compound mirror provided by the invention does not need repeated clamping in the optical axis deviation detection process, does not have repeated conversion calibration reference error accumulation, and has high measurement precision and simple measurement method.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a schematic diagram of a system for detecting optical axis deviation of a double-reflecting-surface composite mirror according to the present invention;
FIG. 2 is a schematic diagram of detecting the surface shape of two reflecting surfaces of the double reflecting surface composite mirror according to the present invention;
FIG. 3 is a schematic view of a first reflecting surface structure of a dual-reflecting-surface composite mirror according to the present invention;
FIG. 4 is a schematic view of a second reflecting surface structure of the dual-reflecting-surface composite mirror according to the present invention;
FIG. 5 is a schematic cross-sectional view of a dual-reflector composite mirror according to the present invention;
fig. 6 is a schematic diagram of the structure of the CGH detection plate according to the present invention;
FIG. 7 is a schematic view of the horizontal angular deviation according to the present invention;
fig. 8 is a schematic view of the vertical angular deviation according to the present invention.
The device comprises a 1-double-reflecting-surface composite mirror, a 2-CGH detection plate, a 3-CGH detection plate adjusting frame, a 4-interferometer, a 5-adjusting table, a 6-double-reflecting-surface composite mirror mounting bracket, a 7-theodolite, a 101-first reflecting surface, a 102-second reflecting surface, a 103-double-reflecting-surface composite mirror mounting hole, a 104-double-reflecting-surface composite mirror supporting rib, a 105-light-transmitting hole, a 201-CGH substrate, a 202-CGH alignment area and a 203-CGH detection area.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be noted that, in the case of no conflict, embodiments of the present invention and features of the embodiments may be combined with each other, and the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-8, this embodiment is described, a dual-reflecting-surface composite mirror optical axis deviation detecting system, it includes optical axis detecting mechanism and theodolite 7, optical axis detecting mechanism quantity is two sets, and two sets of optical axis detecting mechanism are set up respectively in front of two reflection surfaces of dual-reflecting-surface composite mirror 1, dual-reflecting-surface composite mirror 1 passes through the frock and sets up on dual-reflecting-surface composite mirror installing support 6, optical axis detecting mechanism includes CGH pick-up plate 2, interferometer 4 and adjustment platform 5, CGH pick-up plate 2 sets up in interferometer 4 outgoing light the place ahead, CGH pick-up plate 2 and interferometer 4 all set up on adjustment platform 5, preferably, CGH pick-up plate 2 installs on CGH pick-up plate adjustment frame 3, CGH pick-up plate adjustment frame 3 sets up plate 2's position, adjustment platform 5 is preferably six degrees of freedom adjustment platform, and adjustment platform 5 is used for adjusting CGH pick-up plate 2, interferometer 4 and interferometer 4 are all set up on adjustment platform 5, preferably, CGH pick-up plate 2 is used for setting up two relative angle pick-up plates 2.
In an embodiment, the CGH detection plate 2 includes a CGH substrate 201, a CGH alignment region 202, and a CGH detection region 203, the CGH alignment region 202 and the CGH detection region 203 are both disposed on the CGH substrate 201, and the CGH detection region 203 is located inside the CGH alignment region 202.
The double-reflecting-surface composite mirror 1 comprises a first reflecting surface 101 and a second reflecting surface 102, a plurality of double-reflecting-surface composite mirror supporting ribs 104 are uniformly distributed between the first reflecting surface 101 and the second reflecting surface 102 along the circumferential direction, a light passing hole 105 penetrating through the first reflecting surface 101 and the second reflecting surface 102 is formed in the center of the double-reflecting-surface composite mirror 1, and a plurality of double-reflecting-surface composite mirror mounting holes 103 are formed in the double-reflecting-surface composite mirror 1.
The embodiment is a detection method of a double-reflecting-surface composite mirror optical axis deviation detection system, which comprises the following steps:
step 1: setting up an optical axis detection mechanism, arranging a double-reflecting surface composite mirror 1 on a double-reflecting surface composite mirror mounting bracket 6 through a tool, arranging a CGH detection plate 2 and an interferometer 4 in front of two reflecting surfaces of the double-reflecting surface composite mirror 1, and arranging the CGH detection plate 2 and the interferometer 4 on an adjusting table 5;
step 2: according to the optical design result of the two reflecting surfaces of the double reflecting surface compound mirror 1, the positions of the CGH detection plate 2 and the interferometer 4 in the two groups of optical axis detection mechanisms are adjusted through an adjusting table 5 and a CGH detection plate adjusting frame 3, the two groups of optical axis detection mechanisms are utilized to respectively detect the surface shapes of the two reflecting surfaces, so that the optical axes of the two reflecting surfaces are respectively parallel to the optical axes of the corresponding side interferometer 4, and the optical axes of the two reflecting surfaces are respectively perpendicular to the corresponding side CGH detection plate 2;
step 3: the theodolite 7 is placed between the two CGH detection plates 2 and is used for measuring the relative angles of the horizontal angles and the vertical angles of the two CGH detection plates 2, and the deviation of the angles and the theoretical design value is the deviation of the two optical axes of the double-reflecting-surface composite mirror 1.
The specific process of step 2 in the embodiment is as follows:
by adjusting the positions of the CGH detection plate 2 and the interferometer 4, the measuring beam emitted by the interferometer 4 returns to the interferometer 4 through the CGH alignment area 202, and the defocusing and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, so that the alignment of the interferometer 4 and the CGH detection plate 2 is realized.
The relative positions of the interferometer 4 and the CGH detection plate 2 and the double-reflecting-surface composite mirror 1 are changed by adjusting the adjusting table 5 on the first reflecting surface 101 side, so that when a measuring beam emitted by the interferometer 4 enters the first reflecting surface 101 of the double-reflecting-surface composite mirror 1 through the CGH detection region 203 and returns to the interferometer 4, the defocus and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the first reflecting surface 101 is parallel to the optical axis of the interferometer 4, and the alignment of the interferometer 4 and the first reflecting surface 101 is realized.
The relative positions of the interferometer 4 and the CGH detection plate 2 and the double-reflecting-surface composite mirror 1 are changed by adjusting the adjusting table 5 on the second reflecting surface 102 side, so that when a measuring beam emitted by the interferometer 4 enters the second reflecting surface 102 of the double-reflecting-surface composite mirror 1 through the CGH detection region 203 and returns to the interferometer 4, the defocus and coma terms of the Zernike coefficient are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the second reflecting surface 102 is parallel to the optical axis of the interferometer 4, and the alignment of the interferometer 4 and the second reflecting surface 102 is realized.
At this time, the optical axis of the first reflecting surface 101 is perpendicular to the CGH detection plate 2 placed in front of it, and the optical axis of the second reflecting surface 102 is perpendicular to the CGH detection plate 2 placed in front of it.
The embodiments of the invention disclosed above are intended only to help illustrate the invention. The examples are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention.
Claims (9)
1. A detection method of a double-reflecting-surface composite mirror optical axis deviation detection system is characterized by comprising the following steps: the detection system comprises optical axis detection mechanisms and theodolites (7), wherein the number of the optical axis detection mechanisms is two, the two optical axis detection mechanisms are respectively arranged in front of two reflecting surfaces of the double-reflecting-surface composite mirror (1), the optical axis detection mechanisms comprise a CGH detection plate (2), an interferometer (4) and an adjusting table (5), the CGH detection plate (2) is arranged in front of emergent light of the interferometer (4), the CGH detection plate (2) and the interferometer (4) are both arranged on the adjusting table (5), and the theodolites (7) are arranged between the two CGH detection plates (2);
the detection method comprises the following steps:
step 1: setting up an optical axis detection mechanism, arranging a CGH detection plate (2) and an interferometer (4) in front of two reflecting surfaces of a double-reflecting-surface compound mirror (1), and arranging the CGH detection plate (2) and the interferometer (4) on an adjusting table (5);
step 2: according to the optical design result of the two reflecting surfaces of the double reflecting surface compound mirror (1), the positions of the CGH detection plate (2) and the interferometer (4) in the two groups of optical axis detection mechanisms are adjusted through an adjusting table (5), the two groups of optical axis detection mechanisms are used for respectively detecting the surface shapes of the two reflecting surfaces, so that the optical axes of the two reflecting surfaces are respectively parallel to the optical axes of the interferometer (4) on the corresponding side, and the optical axes of the two reflecting surfaces are respectively perpendicular to the CGH detection plate (2) on the corresponding side;
step 3: the theodolite (7) is placed between the two CGH detection plates (2) and is used for measuring the relative angle between the horizontal angle and the vertical angle of the two CGH detection plates (2), and the deviation between the angle and the theoretical design value is the deviation of the two optical axes of the double-reflecting-surface composite mirror (1).
2. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: the CGH detection plate (2) is arranged on the CGH detection plate adjusting frame (3), and the CGH detection plate adjusting frame (3) is arranged on the adjusting table (5).
3. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: the adjusting table (5) is a six-degree-of-freedom adjusting table.
4. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: the double-reflecting-surface composite mirror (1) is arranged on a double-reflecting-surface composite mirror mounting bracket (6) through a tool.
5. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: the CGH detection plate (2) comprises a CGH substrate (201), a CGH alignment area (202) and a CGH detection area (203), wherein the CGH alignment area (202) and the CGH detection area (203) are arranged on the CGH substrate (201), and the CGH detection area (203) is located inside the CGH alignment area (202).
6. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: the double-reflecting-surface composite mirror (1) comprises a first reflecting surface (101) and a second reflecting surface (102), a plurality of double-reflecting-surface composite mirror supporting ribs (104) are uniformly distributed between the first reflecting surface (101) and the second reflecting surface (102) along the circumferential direction, a light transmission hole (105) penetrating through the first reflecting surface (101) and the second reflecting surface (102) is formed in the center of the double-reflecting-surface composite mirror (1), and a plurality of double-reflecting-surface composite mirror mounting holes (103) are formed in the double-reflecting-surface composite mirror (1).
7. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: in the step 2, the positions of the CGH detection plate (2) and the interferometer (4) are adjusted, so that a measuring beam emitted by the interferometer (4) returns to the interferometer (4) through the CGH alignment area (202), and the defocusing and coma terms of the Zernike coefficients are adjusted to be smaller than 0.003 wavelength, so that the alignment of the interferometer (4) and the CGH detection plate (2) is realized.
8. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: in the step 2, the relative positions of the interferometer (4) and the CGH detection plate (2) and the double-reflection-surface composite mirror (1) are changed by adjusting the adjusting table (5) at the side of the first reflection surface (101), so that when a measuring light beam emitted by the interferometer (4) enters the first reflection surface (101) through the CGH detection area (203) and returns to the interferometer (4), defocusing and coma items of Zernike coefficients are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the first reflection surface (101) is parallel to the optical axis of the interferometer (4), and alignment of the interferometer (4) and the first reflection surface (101) is realized.
9. The method for detecting the optical axis deviation of the double-reflecting-surface composite mirror according to claim 1, wherein the method comprises the following steps: in the step 2, the relative positions of the interferometer (4) and the CGH detection plate (2) and the double-reflection-surface composite mirror (1) are changed by adjusting the adjusting table (5) at the side of the second reflection surface (102), so that when a measuring beam emitted by the interferometer (4) enters the second reflection surface (102) through the CGH detection area (203) and returns to the interferometer (4), the defocusing and coma terms of the Zernike coefficients are adjusted to be smaller than 0.003 wavelength, and at the moment, the optical axis of the second reflection surface (102) is parallel to the optical axis of the interferometer (4), and the alignment of the interferometer (4) and the second reflection surface (102) is realized.
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