CN214369272U - Equipment for conveying special gas at ultrahigh flow rate - Google Patents
Equipment for conveying special gas at ultrahigh flow rate Download PDFInfo
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- CN214369272U CN214369272U CN202120268808.3U CN202120268808U CN214369272U CN 214369272 U CN214369272 U CN 214369272U CN 202120268808 U CN202120268808 U CN 202120268808U CN 214369272 U CN214369272 U CN 214369272U
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Abstract
An apparatus for ultra-high flow delivery of a specialty gas, comprising: the technical scheme includes that the intelligent cabinet comprises a main cabinet body, a process gas supply unit, a purging unit, a discharge unit, a deep purging box, a control display operation unit and an alarm unit, wherein the process gas supply unit, the purging unit and the discharge unit are arranged inside the main cabinet body, the deep purging box and the control display operation unit are connected with the outside of the main cabinet body, and the alarm unit is connected with the main cabinet body. Wherein the process gas supply unit includes: the device comprises an inlet isolation valve, a buffer sleeve, a branch isolation valve, a branch pneumatic isolation valve, a heating module, an overflow switch, a pressure regulating valve, a filter, a first pneumatic isolation valve, a manual isolation valve, an outlet isolation valve and a first pressure sensor. Compared with the prior art, the utility model, add the process gas supply unit through the design, realize switching the supply and trade the bottle flow, through form control pneumatic valve oneself completion work to avoid the equipment harm and the personal harm that arouse because of the people is maloperation.
Description
Technical Field
The utility model relates to a special gas transport technical field, concretely relates to equipment for special gas superelevation flow is carried.
Background
Due to the vigorous development of global electronic and photovoltaic industries and the strong promotion of science and technology by our government, the semiconductor and photovoltaic manufacturing industries in China develop rapidly. According to the research report of the semiconductor industry in 2006, the method comprises the following steps: in 2006, there were nearly 50 wafer fabrication plants, 112 IC packaging and IC assembly plants, and 450 IC design companies in china. In 2006, the semiconductor industry in China has a production value of 807 million yuan, which is about 100 million dollars, wherein the package is 350 million yuan, the wafer is manufactured into 242 million yuan, and the IC design is 215 million yuan. The semiconductor market in china is over 600 billion dollars in 2006. With the first 20 plants occupying over 300 billion dollars. The photovoltaic industry develops rapidly in the last two years and is the leading force of the new energy industry in the future.
The BSGS is mainly used for continuously distributing process gas to process tools in the semiconductor and photovoltaic industries. Because the flow required by some machines is ultrahigh, the flow requirement is difficult to meet by the conventional BSGS (bulk service system).
In order to solve the above problems, we have made a series of improvements.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an equipment for special gaseous superelevation flow is carried to overcome the above-mentioned shortcoming and not enough that prior art exists.
An apparatus for ultra-high flow delivery of a specialty gas, comprising: the device comprises a main cabinet body, a process gas supply unit, a purging unit, a discharge unit, a deep purging box, a control display operation unit and an alarm unit, wherein the process gas supply unit, the purging unit and the discharge unit are arranged inside the main cabinet body;
wherein the process gas supply unit includes: the device comprises an inlet isolation valve, a buffer sleeve, a branch isolation valve, a branch pneumatic isolation valve, a heating module, a flow passing switch, a pressure regulating valve, a filter, a first pneumatic isolation valve, a manual isolation valve, an outlet isolation valve and a first pressure sensor, wherein the inlet isolation valve is connected with a process gas inlet end, the front end of the buffer sleeve is connected with the inlet isolation valve, the rear end of the buffer sleeve is connected with the branch isolation valve, the rear end of the branch isolation valve is connected with the branch pneumatic isolation valve, the rear end of the branch pneumatic isolation valve is connected with the heating module, the rear end of the heating module is connected with the flow passing switch, the rear end of the flow passing switch is connected with the pressure regulating valve, the rear end of the pressure regulating valve is connected with the filter, the rear end of the filter is connected with the first pneumatic isolation valve, the rear end of the first pneumatic isolation valve is connected with the manual isolation valve, and the rear end of the manual isolation valve is connected with the outlet isolation valve, the rear end of the outlet isolation valve is connected with the machine table, and the first pressure sensor is connected with the pressure regulating valve and the filter in the middle.
Further, the purge unit includes: the device comprises a micro-leakage valve, a first one-way valve, a second pneumatic isolating valve, a second pressure sensor, a purging isolating valve, a second one-way valve and a purging filter, wherein the front end of the micro-leakage valve is connected with a purging gas, the rear end of the micro-leakage valve is connected with the first one-way valve, the rear end of the first one-way valve is connected with the second pneumatic isolating valve, the rear end of the second pneumatic isolating valve is connected with the purging isolating valve through a pipeline branch, the second pressure sensor is connected with the second pneumatic isolating valve and the purging isolating valve in the middle, the rear end of the purging isolating valve is connected with the rear end of the branch pneumatic isolating valve, the rear end of the purging isolating valve is connected with the front end of a heating module, the second one-way valve is connected with the front end of the purging isolating valve, and the purging filter is connected with the rear end of the micro-leakage valve.
Further, the discharge unit includes: the pneumatic isolation valve is characterized by comprising a discharge pneumatic isolation valve, a third pressure sensor, a vacuum generator, a third one-way valve, a test valve and a flow orifice plate, wherein the front end of the discharge pneumatic isolation valve is connected with the front end of the first pneumatic isolation valve, the rear end of the discharge pneumatic isolation valve is connected with the third pneumatic isolation valve, the third pressure sensor is connected with the middle of the discharge pneumatic isolation valve and the third pneumatic isolation valve, the rear end of the third pneumatic isolation valve is connected with the vacuum generator, the rear end of the vacuum generator is connected with an external discharge point, the third one-way valve is connected with the rear end of the discharge pneumatic isolation valve, the front end of the test valve is connected with the rear end of the discharge pneumatic isolation valve, the rear end of the test valve is connected with a test pipeline, and the flow orifice plate is connected with the rear end of the third pneumatic isolation valve.
Further, the number of the deep blowing boxes is 2-3.
Further, the control display operation unit includes: the touch screen comprises a microprocessor and a touch screen, wherein the microprocessor is connected with the touch screen.
Further, the alarm unit includes: the gas leakage alarm comprises a gas leakage sensor, a flame detector and a sound-light alarm, wherein the gas leakage sensor and the sound-light alarm are connected with the inside of the main cabinet body, the flame detector is connected with the outside of the main cabinet body, and the gas leakage sensor and the sound-light alarm are connected with a microprocessor.
The utility model has the advantages that:
compared with the prior art, the utility model, add the process gas supply unit through the design, realize switching the supply and trade the bottle flow, through form control pneumatic valve oneself completion work to avoid the equipment harm and the personal harm that arouse because of the people is maloperation.
Description of the drawings:
fig. 1 is a schematic diagram of the external structure of the present invention.
Reference numerals:
a main cabinet 100, a process gas supply unit 200, an inlet isolation valve 210, a buffer sleeve 220, a bypass isolation valve 230, a bypass pneumatic isolation valve 240, a heating module 250, an overflow switch 260, a pressure regulating valve 270, a filter 280, a first pneumatic isolation valve 290, a manual isolation valve 2100, an outlet isolation valve 2200, and a first pressure sensor 2300.
A purge unit 300, a microleak valve 310, a first check valve 320, a second pneumatic isolation valve 330, a second pressure sensor 340, a purge isolation valve 350, a second check valve 360, and a purge filter 370.
A vent unit 400, a vent pneumatic isolation valve 410, a third pneumatic isolation valve 420, a third pressure sensor 430, a vacuum generator 440, a third one-way valve 450, a test valve 460, and a flow orifice 470.
A deep purge bin 500, a control display operating unit 600, a microprocessor 610, and a touch screen 620.
An alarm unit 700, a gas leak sensor 710, a flame detector 720 and an audible and visual alarm 730.
Detailed Description
The present invention will be further described with reference to the following examples. It should be understood that the following examples are illustrative only and are not intended to limit the scope of the present invention.
Example 1
Fig. 1 is a schematic diagram of the external structure of the present invention.
As shown in fig. 1, an apparatus for ultra-high flow delivery of a special gas, comprising: the deep purging device comprises a main cabinet body 100, a process gas supply unit 200, a purging unit 300, a discharging unit 400, a deep purging box 500, a control display operation unit 600 and an alarm unit 700, wherein the process gas supply unit 200, the purging unit 300 and the discharging unit 400 are arranged inside the main cabinet body 100, the deep purging box 500 and the control display operation unit 600 are connected with the outside of the main cabinet body 100, and the alarm unit 700 is connected with the main cabinet body 100;
wherein the process gas supply unit 200 includes: the system comprises an inlet isolation valve 210, a buffer sleeve 220, a branch isolation valve 230, a branch pneumatic isolation valve 240, a heating module 250, an overflow switch 260, a pressure regulating valve 270, a filter 280, a first pneumatic isolation valve 290, a manual isolation valve 2100, an outlet isolation valve 2200 and a first pressure sensor 2300, wherein the inlet isolation valve 210 is connected with a process gas inlet end, the front end of the buffer sleeve 220 is connected with the inlet isolation valve 210, the rear end of the buffer sleeve 220 is connected with the branch isolation valve 230, the rear end of the branch isolation valve 230 is connected with the branch pneumatic isolation valve 240, the rear end of the branch pneumatic isolation valve 240 is connected with the heating module 250, the rear end of the heating module 250 is connected with the overflow switch 260, the rear end of the overflow switch 260 is connected with the pressure regulating valve 270, the rear end of the pressure regulating valve 270 is connected with the filter 280, the rear end of the filter 280 is connected with the first pneumatic isolation valve 290, the rear end of the first pneumatic isolation valve 290 is connected with the manual isolation valve 2100, the manual isolation valve 2100 is connected to the outlet isolation valve 2200 at the rear end thereof, the outlet isolation valve 2200 is connected to the machine at the rear end thereof, and the first pressure sensor 2300 is connected to the pressure regulating valve 270 and the filter 280 at the intermediate portion thereof.
The purge unit 300 includes: the device comprises a micro-leakage valve 310, a first one-way valve 320, a second pneumatic isolation valve 330, a second pressure sensor 340, a purging isolation valve 350, a second one-way valve 360 and a purging filter 370, wherein the front end of the micro-leakage valve 310 is connected with purging gas, the rear end of the micro-leakage valve 310 is connected with the first one-way valve 320, the rear end of the first one-way valve 320 is connected with the second pneumatic isolation valve 330, the rear end of the second pneumatic isolation valve 330 is connected with the purging isolation valve 350 through a pipeline branch, the second pressure sensor 340 is connected with the middle of the second pneumatic isolation valve 330 and the purging isolation valve 350, the rear end of the purging isolation valve 350 is connected with the rear end of the branch pneumatic isolation valve 240, the rear end of the purging isolation valve 350 is connected with the front end of the heating module 250, the second one-way valve 360 is connected with the front end of the purging isolation valve 350, and the purging filter 370 is connected with the rear end of the micro-leakage valve 310.
The discharge unit 400 includes: the pneumatic isolation valve 410, the third pneumatic isolation valve 420, the third pressure sensor 430, the vacuum generator 440, the third check valve 450, the test valve 460 and the flow orifice plate 470 are arranged in sequence, the front end of the pneumatic isolation valve 410 is connected with the front end of the first pneumatic isolation valve 290, the rear end of the pneumatic isolation valve 410 is connected with the third pneumatic isolation valve 420, the third pressure sensor 430 is connected with the middle of the pneumatic isolation valve 410 and the third pneumatic isolation valve 420, the rear end of the third pneumatic isolation valve 420 is connected with the vacuum generator 440, the rear end of the vacuum generator 440 is connected with an external discharge point, the third check valve 450 is connected with the rear end of the pneumatic isolation valve 410, the front end of the test valve 460 is connected with the rear end of the pneumatic isolation valve 410, the rear end of the test valve 460 is connected with a test pipeline, and the flow orifice plate 470 is connected with the rear end of the third pneumatic isolation valve 420.
The number of the deep purging boxes 500 is 2-3.
The control display operation unit 600 includes: microprocessor 610 and touch-sensitive screen 620, microprocessor 610 is connected with touch-sensitive screen 620.
The alarm unit 700 includes: the gas leakage sensor 710, the flame detector 720 and the audible and visual alarm 730, wherein the gas leakage sensor 710 and the audible and visual alarm 730 are connected with the inside of the main cabinet 100, the flame detector 720 is connected with the outside of the main cabinet 100, and the gas leakage sensor 710 and the audible and visual alarm 730 are connected with the microprocessor 610.
The working principle of the utility model is that, designing process gas supply unit 200, newly-increased response equipment provides a large amount of reference data, and the cooperation pneumatic valve is controlled. The process medium is conveyed by controlling the pneumatic valve, the purge gas is supplied, purging is carried out before bottle replacement, a steel bottle interface is subjected to leakage test, purging is carried out after bottle replacement, switching supply and bottle replacement processes are realized, the device adopts the touch screen 620 to control as a human-computer interface, the process gas supply unit 200, the purge unit 300 and the discharge unit 400 are arranged inside the main cabinet body 100, the deep purge box 500, the control display operation unit 600 and the alarm unit 700 are connected with the main cabinet body 100, an operator does not need to directly operate a valve, the action of the valve can be controlled through the touch screen 620, and the running state of the device can be observed through double-layer explosion-proof glass. Thereby avoiding equipment damage and personal injury caused by manual misoperation.
The above description has been made of the embodiments of the present invention, but the present invention is not limited thereto, and various changes may be made without departing from the spirit of the present invention.
Claims (6)
1. An apparatus for ultra-high flow delivery of a specialty gas, comprising: the device comprises a main cabinet body (100), a process gas supply unit (200), a purging unit (300), a discharging unit (400), a deep purging box (500), a control display operation unit (600) and an alarm unit (700), wherein the process gas supply unit (200), the purging unit (300) and the discharging unit (400) are arranged inside the main cabinet body (100), the deep purging box (500) and the control display operation unit (600) are connected with the outside of the main cabinet body (100), and the alarm unit (700) is connected with the main cabinet body (100);
wherein the process gas supply unit (200) comprises: an inlet isolation valve (210), a buffer sleeve (220), a branch isolation valve (230), a branch pneumatic isolation valve (240), a heating module (250), an overflow switch (260), a pressure regulating valve (270), a filter (280), a first pneumatic isolation valve (290), a manual isolation valve (2100), an outlet isolation valve (2200) and a first pressure sensor (2300), wherein the inlet isolation valve (210) is connected with a process gas inlet end, the front end of the buffer sleeve (220) is connected with the inlet isolation valve (210), the rear end of the buffer sleeve (220) is connected with the branch isolation valve (230), the rear end of the branch isolation valve (230) is connected with the branch pneumatic isolation valve (240), the rear end of the branch pneumatic isolation valve (240) is connected with the heating module (250), the rear end of the heating module (250) is connected with the overflow switch (260), and the rear end of the overflow switch (260) is connected with the pressure regulating valve (270), the rear end of the pressure regulating valve (270) is connected with a filter (280), the rear end of the filter (280) is connected with a first pneumatic isolation valve (290), the rear end of the first pneumatic isolation valve (290) is connected with a manual isolation valve (2100), the rear end of the manual isolation valve (2100) is connected with an outlet isolation valve (2200), the rear end of the outlet isolation valve (2200) is connected with a machine table, and a first pressure sensor (2300) is connected with the middle of the pressure regulating valve (270) and the filter (280).
2. The apparatus of claim 1 for ultra-high flow delivery of a specialty gas, wherein: the purge unit (300) comprises: the device comprises a micro-leakage valve (310), a first one-way valve (320), a second pneumatic isolation valve (330), a second pressure sensor (340), a purging isolation valve (350), a second one-way valve (360) and a purging filter (370), wherein the front end of the micro-leakage valve (310) is connected with a purging gas, the rear end of the micro-leakage valve (310) is connected with the first one-way valve (320), the rear end of the first one-way valve (320) is connected with the second pneumatic isolation valve (330), the rear end of the second pneumatic isolation valve (330) is connected with the purging isolation valve (350) through a pipeline branch, the second pressure sensor (340) is connected with the middle of the second pneumatic isolation valve (330) and the purging isolation valve (350), the rear end of the purging isolation valve (350) is connected with the rear end of the branch pneumatic isolation valve (240), the rear end of the purging isolation valve (350) is connected with the front end of a heating module (250), and the second one-way valve (360) is connected with the front end of the purging isolation valve (350), the sweeping filter (370) is connected with the rear end of the micro-leakage valve (310).
3. The apparatus of claim 1 for ultra-high flow delivery of a specialty gas, wherein: the discharge unit (400) includes: the device comprises a discharge pneumatic isolation valve (410), a third pneumatic isolation valve (420), a third pressure sensor (430), a vacuum generator (440), a third one-way valve (450), a test valve (460) and a flow orifice plate (470), wherein the front end of the discharge pneumatic isolation valve (410) is connected with the front end of a first pneumatic isolation valve (290), the rear end of the discharge pneumatic isolation valve (410) is connected with the third pneumatic isolation valve (420), the third pressure sensor (430) is connected with the middle of the discharge pneumatic isolation valve (410) and the third pneumatic isolation valve (420), the rear end of the third pneumatic isolation valve (420) is connected with the vacuum generator (440), the rear end of the vacuum generator (440) is connected with an external discharge point, the third one-way valve (450) is connected with the rear end of the discharge pneumatic isolation valve (410), and the front end of the test valve (460) is connected with the rear end of the discharge pneumatic isolation valve (410), the rear end of the test valve (460) is connected with a test pipeline, and the flow orifice plate (470) is connected with the rear end of the third pneumatic isolation valve (420).
4. The apparatus of claim 1 for ultra-high flow delivery of a specialty gas, wherein: the number of the deep blowing boxes (500) is 2-3.
5. The apparatus of claim 1 for ultra-high flow delivery of a specialty gas, wherein: the control display operation unit (600) includes: the touch screen display comprises a microprocessor (610) and a touch screen (620), wherein the microprocessor (610) is connected with the touch screen (620).
6. The apparatus for ultra-high flow delivery of special gases as claimed in claim 5, wherein: the alarm unit (700) comprises: gas leakage sensor (710), flame detector (720) and audible-visual annunciator (730), gas leakage sensor (710) and audible-visual annunciator (730) and main cabinet body (100) internal connection, flame detector (720) and main cabinet body (100) external connection, gas leakage sensor (710) and audible-visual annunciator (730) are connected with microprocessor (610).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120268808.3U CN214369272U (en) | 2021-01-29 | 2021-01-29 | Equipment for conveying special gas at ultrahigh flow rate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120268808.3U CN214369272U (en) | 2021-01-29 | 2021-01-29 | Equipment for conveying special gas at ultrahigh flow rate |
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| CN214369272U true CN214369272U (en) | 2021-10-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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2021
- 2021-01-29 CN CN202120268808.3U patent/CN214369272U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117450423A (en) * | 2023-09-20 | 2024-01-26 | 上海良薇机电工程有限公司 | Special gas conveying and supplying device, system and method and semiconductor process system |
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