CN214278638U

CN214278638U - Positioning mechanism and exposure device composed of same

Info

Publication number: CN214278638U
Application number: CN202023218632.5U
Authority: CN
Inventors: 吴高乾; 尹华景; 吴康
Original assignee: Chibi Wanhuang Intelligent Equipment Co ltd
Current assignee: Chibi Wanhuang Intelligent Equipment Co ltd
Priority date: 2020-12-28
Filing date: 2020-12-28
Publication date: 2021-09-24
Anticipated expiration: 2030-12-28

Abstract

The utility model discloses a positioning mechanism and exposure device who constitutes thereof, positioner is including the support plate that interval distribution and average level set up about in proper order, the mounting panel, the bottom plate, first driving piece, second driving piece and third driving piece, support plate and bottom plate are fixed through the sliding bar connection of many vertical settings, mounting panel and many slide bar sliding connection, be equipped with a plurality of first bar holes that are parallel to each other and interval distribution and a plurality of second bar holes that are parallel to each other and interval distribution on the support plate respectively, it is equipped with two first sliders and two second sliders to slide on the mounting panel, and be equipped with many vertical settings on every first slider and lean on the gauge rod with the first of a plurality of first bar hole one-to-ones, be equipped with many vertical settings on every second slider and lean on the gauge rod with the second of a plurality of second bar hole one-to-ones. The structure is simple, and the control difficulty is small.

Description

Positioning mechanism and exposure device composed of same

Technical Field

The utility model belongs to the exposure equipment field especially relates to a positioning mechanism and exposure device who constitutes thereof.

Background

Currently, positioning equipment adopted in the field of exposure equipment is usually realized based on a CCD (charge coupled device) vision alignment platform, but the positioning equipment is complex in structure, high in control difficulty and high in cost.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, an object of the present invention is to provide a mechanical positioning mechanism with simple structure and convenient positioning.

In order to achieve the above purpose, the technical solution of the present invention is as follows: a positioning mechanism comprises a carrier plate, a mounting plate, a bottom plate, a first driving piece, a second driving piece and a third driving piece which are sequentially arranged at an upper interval and a lower interval and are arranged horizontally, the carrier plate and the bottom plate are fixed through a plurality of slide bar connections arranged vertically, the mounting plate is connected with a plurality of slide bar sliding connections, the carrier plate is respectively provided with a plurality of first strip-shaped holes which are parallel to each other and are distributed at intervals and a plurality of second strip-shaped holes which are parallel to each other and are distributed at intervals, the middle parts of the plurality of first strip-shaped holes and the plurality of second strip-shaped holes are vertically crossed, the upper end of the carrier plate is positioned at the crossed parts of the plurality of first strip-shaped holes and the plurality of second strip-shaped holes for placing square glass plates, the mounting plate is provided with two first sliding blocks and two second sliding blocks in a sliding manner, and the two first sliding blocks are respectively positioned below the two ends of the plurality of the first strip-shaped holes, the two second sliding blocks are respectively positioned below two ends of the plurality of second bar-shaped holes, each first sliding block is provided with a plurality of first gauge-leaning rods which are vertically arranged and correspond to the plurality of first bar-shaped holes one by one, each first gauge-leaning rod is aligned with the corresponding first bar-shaped hole, each second sliding block is provided with a plurality of second gauge-leaning rods which are vertically arranged and correspond to the plurality of second bar-shaped holes one by one, each second gauge-leaning rod is aligned with the corresponding second bar-shaped hole, the second driving piece and the third driving piece are respectively provided with two driving ends, the second driving piece and the third driving piece are both installed on the installation plate, the two driving ends of the second driving piece are respectively in transmission connection with the two first sliding blocks, and the two driving ends of the third driving piece are respectively in transmission connection with the two second sliding blocks; the bottom plate is provided with a first driving piece, the driving end of the first driving piece is in transmission connection with the mounting plate, the first driving piece is used for driving the mounting plate to slide upwards along the sliding rods and driving the first gauge-leaning rods and the second gauge-leaning rods to extend out of the upper portion of the support plate through the corresponding first strip-shaped holes and second strip-shaped holes or slide downwards to drive the first gauge-leaning rods and the second gauge-leaning rods to retract to the lower portion of the support plate through the corresponding first strip-shaped holes and second strip-shaped holes; and when many first lean on gauge rod and second to lean on the gauge rod to stretch out to the support plate top, second driving piece and third driving piece are used for driving two respectively first slider and two the second slider slides to being close to each other with many first lean on gauge rod and second to lean on the gauge rod with square glass plate presss from both sides tightly on the support plate in order to fix a position, or slide to keeping away from each other in order to loosen square glass plate.

The beneficial effects of the above technical scheme are that: when the mounting plate slides upwards until the first gauge-leaning rods and the second gauge-leaning rods all extend upwards to protrude above the carrier plate, the second driving piece and the third driving piece drive the two first sliding blocks and the two second sliding blocks to drive the first gauge-leaning rods and the second gauge-leaning rods to move from four sides of the square glass plate to clamp the square glass plate at the upper end of the carrier plate, and the square glass plate is positioned, after the positioning is completed, the second driving piece and the third driving piece drive the two first sliding blocks and the two second sliding blocks to drive the first gauge-leaning rods and the second gauge-leaning rods to move away from each other from four sides of the square glass plate to loosen the square glass plate, and simultaneously the first driving piece drives the mounting plate to move downwards, and at the moment, the first gauge-leaning rods and the second gauge-leaning rods move downwards to the lower part of the carrier plate, so that only the square glass plate is left at the upper end of the square glass plate after the square glass plate is positioned, thus facilitating the processing.

In the technical scheme, the second driving piece and the third driving piece are both double-acting sliding table cylinders.

The beneficial effects of the above technical scheme are that: the structure is simple, and the two driving ends can be synchronously extended or contracted, so that the positioning precision is high.

In the above technical scheme, the first driving member is a telescopic electric cylinder.

The beneficial effects of the above technical scheme are that: the structure is simple, and the installation is convenient.

In the technical scheme, the first strip-shaped hole and the second strip-shaped hole are both provided with two strips.

The beneficial effects of the above technical scheme are that: so make whole device simple structure, positioning accuracy is high simultaneously.

The second objective of the present invention is to provide an exposure device with simple structure and high automation.

In order to achieve the above object, another technical solution of the present invention is as follows: the utility model provides an exposure device, includes translation mechanism, exposure mechanism, elevating system and as above positioning mechanism, translation mechanism sets up along the fore-and-aft direction level, positioning mechanism installs on translation mechanism's drive end, exposure mechanism is through setting up the top at translation mechanism middle part, its exposure portion down, translation mechanism is used for the drive positioning mechanism removes and passes through by preceding backward exposure mechanism's below exposes, elevating system is used for the drive exposure mechanism moves down to its lower extreme and passes through its below positioning mechanism upper end laminating is in order right square glass board exposes, or upward movement is to reseing.

The beneficial effects of the above technical scheme are that: the structure is simple, and the exposure precision is high.

In the technical scheme, the translation mechanism comprises a sliding seat, a sliding block and a fourth driving part, the sliding seat is in a straight bar shape and is horizontally arranged along the front square and the rear square, the sliding block is slidably mounted at the upper end of the sliding seat, the fourth driving part is mounted on the sliding seat, the driving end of the fourth driving part is in transmission connection with the sliding block and is used for driving the sliding block to slide at the upper end of the sliding seat along the front-rear direction, and the sliding block forms the driving end of the translation mechanism.

The beneficial effects of the above technical scheme are that: therefore, the positioning mechanism can stably reciprocate along the front and back directions.

In the above technical solution, the fourth driving member is a linear module or a lead screw driving mechanism.

The beneficial effects of the above technical scheme are that: the driving is convenient, and the control is convenient.

Drawings

Fig. 1 is a schematic structural diagram of a positioning mechanism according to embodiment 1 of the present invention;

fig. 2 is a partial view of the positioning mechanism according to embodiment 1 of the present invention;

fig. 3 is another partial view of the positioning mechanism according to embodiment 1 of the present invention;

fig. 4 is a schematic structural view of a second driving member according to embodiment 1 of the present invention;

fig. 5 is a schematic view of the structure of an exposure apparatus according to embodiment 2 of the present invention;

fig. 6 is a side view of an exposure apparatus according to embodiment 2 of the present invention.

In the figure: the device comprises a positioning mechanism 1, a carrier plate 11, a first strip-shaped hole 111, a second strip-shaped hole 112, a mounting plate 12, a first sliding block 121, a first gauge-leaning rod 1211, a second sliding block 122, a second gauge-leaning rod 1221, a bottom plate 13, a first driving member 14, a second driving member 15, a servo motor 151, a belt 152, a belt 153, a belt pulley 154, a connecting block 154, a third driving member 16, a sliding rod 17, a translation mechanism 2, a sliding seat 21, a sliding block 22, a fourth driving member 23, an exposure mechanism 3, a lifting mechanism 4, a telescopic member 41, a support 42 and a square glass plate 5.

Detailed Description

The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.

Example 1

As shown in fig. 1-3, the embodiment provides a positioning mechanism, which includes a carrier plate 11, a mounting plate 12, a bottom plate 13, a first driving member 14, a second driving member 15, and a third driving member 16 that are sequentially and vertically spaced and horizontally disposed, the carrier plate 11 and the bottom plate 13 are connected and fixed by a plurality of vertically disposed sliding rods 17, the mounting plate 12 is slidably connected to the plurality of sliding rods 17, the carrier plate 11 is respectively provided with a plurality of first bar-shaped holes 111 that are parallel to each other and spaced and a plurality of second bar-shaped holes 112 that are parallel to each other and spaced, the middle portions of the plurality of first bar-shaped holes 111 and the plurality of second bar-shaped holes 112 are vertically intersected, the upper end of the carrier plate 11 is located at the intersection of the plurality of the first bar-shaped holes 111 and the plurality of second bar-shaped holes 112 for placing a square glass plate 5, the mounting plate 12 is slidably provided with two first sliders 121 and two second sliders 122, the two first sliders 121 are respectively positioned below two ends of the plurality of first strip-shaped holes 111, the two second sliders 122 are respectively positioned below two ends of the plurality of second strip-shaped holes 112, each first slider 121 is provided with a plurality of first gauge bars 1211 which are vertically arranged and correspond to the plurality of first strip-shaped holes 111 one by one, each first gauge bar 1211 is aligned with the corresponding first strip-shaped hole 111, each second slider 122 is provided with a plurality of second gauge bars 1221 which are vertically arranged and correspond to the plurality of second strip-shaped holes 112 one by one, each second gauge bar 1221 is aligned with the corresponding second strip-shaped hole 112, each second driving piece 15 and each third driving piece 16 are provided with two driving ends, the second driving piece 15 and the third driving piece 16 are both mounted on the mounting plate 12, and the two driving ends of the second driving piece 15 are respectively in transmission connection with the two first sliders 121, the two driving ends of the third driving element 16 are respectively in transmission connection with the two second sliding blocks 122; a first driving part 14 is installed on the bottom plate 13, a driving end of the first driving part 14 is in transmission connection with the mounting plate 12, and the first driving part 14 is used for driving the mounting plate 12 to slide upwards along the plurality of slide bars 17 and driving the plurality of first gauge bars 1211 and second gauge bars 1221 to extend out to the upper side of the support plate 11 through the corresponding first strip-shaped holes 111 and second strip-shaped holes 112, or slide downwards to drive the plurality of first gauge bars 1211 and second gauge bars 1221 to retract to the lower side of the support plate 11 through the corresponding first strip-shaped holes 111 and second strip-shaped holes 112; and when the first and

second master bars

1211 and 1221 are protruded above the carrier plate 11, the second and

third driving members

15 and 16 are respectively used for driving the two first sliders 121 and the two second sliders 122 to slide to be close to each other to clamp the square glass plate 5 on the carrier plate 11 by the first and

second master bars

1211 and 1221 for positioning, or to slide to be far away from each other to release the square glass plate 5, so that when the mounting plate is slid upward until the first and second master bars are protruded above the carrier plate, the second and third driving members drive the two first and second sliders to drive the first and second master bars to move from the four sides of the square glass plate 5 to clamp the upper end of the square glass plate 5 and position the square glass plate 5, after the location is accomplished simultaneously, two first sliders of second driving piece and third driving piece drive and two second sliders drive a plurality of first lean on the rule pole and a plurality of second lean on the rule pole to move to keeping away from each other in order to loosen square glass plate 5 from four sides of square glass plate 5, first driving piece drive mounting panel moves down this moment a plurality of first lean on the rule pole and a plurality of second lean on the below that the rule pole moved down to the support plate, so can realize only remaining square glass plate 5 in the support plate upper end after 5 location to square glass plate, so be convenient for process.

In the above technical scheme, the second driving member 15 and the third driving member 16 are both double-acting sliding table cylinders, the structure is simple, and the two driving ends can be synchronously extended or contracted, so that the positioning accuracy is high.

In the above technical solution, the first driving member 14 is a telescopic electric cylinder, and has a simple structure and is convenient to install.

In the above technical scheme, the first strip-shaped hole 111 and the second strip-shaped hole 112 are both provided with two strips, so that the whole device is simple in structure, and the positioning accuracy is high.

As shown in fig. 4, the second driving member 15 and the third driving member 16 may also be replaced by other structures, for example, the second driving member 15 may be replaced by a servo motor 151, a belt 152, two belt pulleys 153 and two connecting blocks 154, the wheel shafts of the two belt pulleys 153 are respectively connected to the mounting plate 12 in a vertical rotation manner, the belt pulleys 153 are fixedly connected to the wheel shafts thereof, the two belt pulleys 153 are respectively located at sides of the two first sliding blocks 121 away from each other, the belt 152 is sleeved on the two belt pulleys 153, the servo motor 151 is installed on the mounting plate 12, the driving end thereof is connected to the wheel shaft of any one of the belt pulleys 153 in a transmission manner, the connecting blocks 154 are respectively installed at portions of the belt 152 located at two sides of the two belt pulleys 153, the two connecting blocks 154 are in one-to-one correspondence with the two first sliding blocks 121, the two connecting blocks 154 are connected and fixed with the corresponding first sliding blocks 121, so that the servo motor 151 rotates forward or backward to drive the two first sliding blocks 121 to slide to be close to or away from each other, and the two connecting blocks 154 form two driving ends of the second driving member 15.

Example 2

As shown in fig. 5, the present embodiment provides an exposure apparatus, which includes a translation mechanism 2, an exposure mechanism 3, a lifting mechanism 4, and a positioning mechanism 1 as in embodiment 1, wherein the translation mechanism 2 is horizontally disposed along a front-back direction, the positioning mechanism 1 is installed on a driving end of the translation mechanism 2, the exposure mechanism 3 is disposed above a middle portion of the translation mechanism 2, an exposure portion of the exposure mechanism faces downward, the translation mechanism 2 is configured to drive the positioning mechanism 1 to move from front to back and expose through a lower portion of the exposure mechanism 3, the lifting mechanism 4 is configured to drive the exposure mechanism 3 to move downward to a lower end thereof to be attached to an upper end of the positioning mechanism 1 passing through the lower portion thereof to expose the square glass plate 5, or move upward to be reset, and the exposure apparatus is simple in structure and high in exposure accuracy.

In the above technical solution, the translation mechanism 2 includes a sliding base 21, a sliding block 22 and a fourth driving part 23, the sliding base 21 is in a straight bar shape and horizontally arranged along a front square and a rear square, the sliding block 22 is slidably mounted at the upper end of the sliding base 21, the fourth driving part 23 is mounted on the sliding base 21, and a driving end thereof is in transmission connection with the sliding block 22 and is used for driving the sliding block 22 to slide on the upper end of the sliding base 21 along the front-rear direction, and the sliding block 22 constitutes the driving end of the translation mechanism 2, so that the positioning mechanism can stably reciprocate along the front square and the rear square.

In the above technical solution, the fourth driving member 23 is a linear module or a screw rod driving mechanism, and is convenient to drive and control.

As shown in fig. 6, the lifting mechanism 4 includes a support 42 and an expansion member 41, the support 42 is n-shaped, the lower ends of the two sides of the support 42 are respectively connected and fixed with the two sides of the slide base 21, the exposure mechanism 3 is slidably mounted in the support 42, the expansion member 41 is mounted at the upper end of the support 42, the expansion end of the expansion member faces downwards and is in transmission connection with the exposure mechanism 3, and the expansion member 3 expands and contracts to drive the exposure mechanism to move up and down. Wherein, the telescopic part is preferably a telescopic electric cylinder.

Wherein, the exposure mechanism can be directly purchased as a finished product, and the light emitting part of the exposure mechanism faces downwards.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The positioning mechanism is characterized by comprising a carrier plate (11), a mounting plate (12), a bottom plate (13), a first driving piece (14), a second driving piece (15) and a third driving piece (16) which are sequentially arranged at an upper and lower interval and are horizontally arranged, wherein the carrier plate (11) and the bottom plate (13) are fixedly connected through a plurality of vertically arranged slide bars (17), the mounting plate (12) is connected with a plurality of slide bars (17) in a sliding manner, a plurality of first strip-shaped holes (111) which are parallel to each other and are distributed at intervals and a plurality of second strip-shaped holes (112) which are parallel to each other and are distributed at intervals are respectively arranged on the carrier plate (11), the middle parts of the plurality of first strip-shaped holes (111) and the plurality of second strip-shaped holes (112) are vertically intersected, the upper end of the carrier plate (11) is positioned at the intersection of the first strip-shaped holes (111) and the plurality of second strip-shaped holes (112) and is used for placing square glass plates (5), the mounting plate (12) is provided with two first sliders (121) and two second sliders (122) in a sliding manner, the two first sliders (121) are respectively located below two ends of the first strip-shaped holes (111), the two second sliders (122) are respectively located below two ends of the second strip-shaped holes (112), each first slider (121) is provided with a plurality of vertical setting parts and a plurality of first gauge bars (1211) which correspond to the first strip-shaped holes (111) one by one, each first gauge bar (1211) is aligned to the corresponding first strip-shaped hole (111), each second slider (122) is provided with a plurality of vertical setting parts and a plurality of gauge bars (1221) which are adjacent to the second strip-shaped holes (112) one by one, each second gauge bar (1221) is aligned to the corresponding second strip-shaped hole (112), and the second driving part (15) and the third driving part (16) are provided with two driving ends, the second driving piece (15) and the third driving piece (16) are both installed on the installation plate (12), two driving ends of the second driving piece (15) are respectively in transmission connection with the two first sliding blocks (121), and two driving ends of the third driving piece (16) are respectively in transmission connection with the two second sliding blocks (122); a first driving piece (14) is installed on the bottom plate (13), a driving end of the first driving piece (14) is in transmission connection with the mounting plate (12), the first driving piece (14) is used for driving the mounting plate (12) to slide upwards along the plurality of sliding rods (17) and driving the plurality of first gauge leaning rods (1211) and second gauge leaning rods (1221) to extend out of the upper portion of the support plate (11) through the corresponding first strip-shaped holes (111) and second strip-shaped holes (112) or slide downwards to drive the plurality of first gauge leaning rods (1211) and second gauge leaning rods (1221) to retract to the lower portion of the support plate (11) through the corresponding first strip-shaped holes (111) and second strip-shaped holes (112); and when the first gauge leaning rod (1211) and the second gauge leaning rod (1221) extend to the position above the carrier plate (11), the second driving piece (15) and the third driving piece (16) are respectively used for driving the two first sliding blocks (121) and the two second sliding blocks (122) to slide to be close to each other so as to clamp the square glass plate (5) on the carrier plate (11) through the first gauge leaning rod (1211) and the second gauge leaning rod (1221) for positioning, or slide to be far away from each other so as to release the square glass plate (5).

2. The positioning mechanism according to claim 1, wherein the second drive member (15) and the third drive member (16) are both double acting slide cylinders.

3. The positioning mechanism according to claim 1, wherein the first drive member (14) is a telescopic electric cylinder.

4. The positioning mechanism according to claim 1, wherein there are two first bar-shaped holes (111) and two second bar-shaped holes (112).

5. An exposure apparatus, comprising a translation mechanism (2), an exposure mechanism (3), a lifting mechanism (4) and a positioning mechanism (1) according to any one of claims 1 to 4, wherein the translation mechanism (2) is horizontally arranged along the front-back direction, the positioning mechanism (1) is installed at the driving end of the translation mechanism (2), the exposure mechanism (3) is arranged above the middle part of the translation mechanism (2) with the exposure part facing downwards, the translation mechanism (2) is used for driving the positioning mechanism (1) to move from front to back and expose through the lower part of the exposure mechanism (3), the lifting mechanism (4) is used for driving the exposure mechanism (3) to move downwards until the lower end of the exposure mechanism is jointed with the upper end of the positioning mechanism (1) passing through the lower part of the exposure mechanism to expose the square glass plate (5), or move up to reset.

6. The exposure apparatus according to claim 5, wherein the translation mechanism (2) comprises a slide base (21), a slide block (22) and a fourth driving member (23), the slide base (21) is in a straight bar shape and is horizontally arranged along a front square and a rear square, the slide block (22) is slidably mounted at the upper end of the slide base (21), the fourth driving member (23) is mounted on the slide base (21), and a driving end of the fourth driving member is in transmission connection with the slide block (22) and is used for driving the slide block (22) to slide on the upper end of the slide base (21) along the front-rear direction, and the slide block (22) constitutes the driving end of the translation mechanism (2).

7. Exposure device according to claim 6, characterised in that the fourth drive (23) is a linear module or a lead screw drive.