CN213933636U - Detection device and silicon wafer sorting equipment - Google Patents
Detection device and silicon wafer sorting equipment Download PDFInfo
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- CN213933636U CN213933636U CN202022470035.5U CN202022470035U CN213933636U CN 213933636 U CN213933636 U CN 213933636U CN 202022470035 U CN202022470035 U CN 202022470035U CN 213933636 U CN213933636 U CN 213933636U
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Abstract
The utility model provides a detection device, including conveying mechanism and detection mechanism, detection mechanism is used for detecting the object that awaits measuring and the detection of two perpendicular edges of conveying mechanism's direction of delivery, and detection mechanism is including detecting camera, first edge irradiation light source, second edge irradiation light source and reflection mechanism, wherein: the first edge irradiation light source is used for irradiating a first edge of the object to be measured; the second edge irradiation light source is used for irradiating a second edge of the object to be detected; the reflection mechanism is used for reflecting the first edge irradiation light emitted by the first edge irradiation light source so that the first edge irradiation light is detected by the detection camera after being reflected by the first edge; the reflection mechanism is used for reflecting second edge irradiation light emitted by the second edge irradiation light source so that the second edge irradiation light is detected by the detection camera after being reflected by the second edge. The utility model discloses only set up one set of detection mechanism and realized treating the detection at two edges of detection object promptly, reduced detection device's cost.
Description
Technical Field
The utility model belongs to silicon chip detection area especially relates to a detection device and silicon chip sorting facilities.
Background
The silicon wafer edge detection is an essential step in the silicon wafer detection process. In order to detect two opposite edges of a silicon wafer, a conventional silicon wafer detecting device includes a first edge detecting device and a second edge detecting device. The first edge detection device and the second edge detection device respectively comprise a light source, a reflection mechanism and a detection camera. The traditional silicon wafer detection has the defects of complex structure and high cost.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned technical defect that traditional detection device exists, the utility model discloses the first aspect provides a detection device, its technical scheme as follows:
a detection apparatus, comprising a conveying mechanism for conveying an object to be detected and a detection mechanism, the detection mechanism being configured to detect a first edge and a second edge of the object to be detected conveyed by the conveying mechanism, the first edge and the second edge being two edges of the object to be detected that are opposite to each other and perpendicular to a conveying direction of the conveying mechanism, the detection mechanism comprising a detection camera, a first edge illumination light source, a second edge illumination light source, and a reflection mechanism, wherein:
the first edge illumination light source is configured to illuminate a first edge of the object to be measured;
the second edge illumination light source is configured to illuminate a second edge of the object to be measured;
the reflection mechanism is configured to reflect the first edge illumination light emitted by the first edge illumination light source at least once, so that the first edge illumination light is detected by the detection camera after being reflected by the first edge of the object to be detected;
the reflection mechanism is configured to reflect the second edge illumination light emitted by the second edge illumination light source at least once, so that the second edge illumination light is detected by the detection camera after being reflected by the second edge of the object to be detected.
Through the cooperation of first edge irradiation light source, second edge irradiation light source, detection camera and reflecting mechanism, the utility model discloses a detection device can realize treating the detection of two relative edges of the perpendicular to conveying mechanism's of detecting the object direction of delivery. Compared with the detection device in the prior art, the utility model discloses only need set up one set of reflecting mechanism, detection camera and can realize treating the detection of treating two relative edges of detecting the object, it has greatly reduced detection device's structural complexity and cost.
In some embodiments, the conveying mechanism conveys the object to be detected from back to front, the first edge is the front edge of the object to be detected, the second edge is the rear edge of the object to be detected, the first edge illumination light source is positioned at the front side of the conveying mechanism, the second edge illumination light source is positioned at the rear side of the conveying mechanism, and the detection camera is positioned above or below the conveying mechanism and between the first edge illumination light source and the second edge illumination light source; when the edge of the front end of the object to be detected reaches the first detection position, first edge illumination light emitted by the first edge illumination light source illuminates the edge of the front end of the object to be detected, and the first edge illumination light reflected from the edge of the front end is reflected to the detection camera through the reflection mechanism; when the rear end edge of the object to be detected reaches the second detection position, second edge irradiation light emitted by the second edge irradiation light source irradiates the rear end edge of the object to be detected, and the second edge irradiation light reflected from the rear end edge is reflected to the detection camera through the reflection mechanism.
Through setting up first edge irradiation light source, second edge irradiation light source, detection camera and reflection mechanism, the object to be measured from back to front transportation process, detection camera can realize the detection to the front and back end edge of object to be measured in proper order, continuously to guarantee detection efficiency.
In some embodiments, a distance between the first detection position and the second detection position is greater than a distance between a front end edge of the object to be detected and a rear end edge of the object to be detected, the rear end edge of the object to be detected reaches the second detection position at a first time, and the front end edge of the object to be detected reaches the first detection position at a second time, wherein the first time is earlier than the second time.
Through the distance between first detection position and the second detection position, conveying mechanism's transport length adjusts promptly, and the object that awaits measuring is from back to preceding transportation process, and the detection camera can successively realize the detection to the rear end edge of the object that awaits measuring, front end edge.
In some embodiments, a distance between the first detection position and the second detection position is smaller than a distance between a front end edge of the object to be detected and a rear end edge of the object to be detected, the front end edge of the object to be detected reaches the first detection position at a third time, the rear end edge of the object to be detected reaches the second detection position at a fourth time, and the third time is earlier than the fourth time.
Through the distance between first detection position and the second detection position, conveying mechanism's transport length adjusts promptly, and the object that awaits measuring is from back to preceding transportation process, and the detection camera can successively realize the detection to the front end edge of the object that awaits measuring, rear end edge.
In some embodiments, the detection device further comprises a feeding conveyor mechanism and a discharging conveyor mechanism, wherein: the feeding conveying mechanism is located on the rear side of the conveying mechanism and used for conveying the object to be detected to the conveying mechanism from an upper station, and a first mounting gap is reserved between the feeding conveying mechanism and the conveying mechanism. The blanking conveying mechanism is located on the front side of the conveying mechanism and used for conveying the object to be detected to a next station from the conveying mechanism, and a second mounting gap is reserved between the blanking conveying mechanism and the conveying mechanism.
Through setting up material loading conveying mechanism and unloading conveying mechanism, realized treating the automatic material loading of detected object, unloading, further promoted detection efficiency.
In some embodiments, the reflection mechanism comprises a first edge light reflection mechanism, a second edge light reflection mechanism and a light path integration mechanism, wherein: the first edge light reflection mechanism is configured to reflect the first edge irradiation light emitted by the first edge irradiation light source to the light path integration mechanism; the second edge light reflecting mechanism is configured to reflect second edge illumination light rays emitted by the second edge illumination light source to the light path integration mechanism; the optical path integration mechanism is configured to reflect the first edge illumination light reflected to the optical path integration mechanism to the detection camera and transmit the second edge illumination light reflected to the optical path integration mechanism to the detection camera.
Through setting up reflection mechanism, can guarantee that the first edge of first edge light reflection mechanism output shines light, the second edge of second edge light reflection mechanism output shines light and when passing through light path integration mechanism, the homoenergetic enters into the detection camera according to predetermineeing the light path, and first edge shines light, second edge shines light and finally can both get into same detection camera promptly.
In some embodiments, the optical path integration mechanism comprises a transflective lens, the transflective lens is disposed between the detection camera and the conveying mechanism, a reflective surface of the transflective lens faces the detection camera, and a light transmissive surface of the transflective lens faces the conveying mechanism. The first edge light reflection mechanism is configured to reflect the first edge irradiation light emitted by the first edge irradiation light source to the reflection surface of the transflective mirror, and the first edge irradiation light is reflected to the reflection surface of the transflective mirror and then reflected to the detection camera through the reflection surface of the transflective mirror; the second edge light reflection mechanism is configured to reflect second edge illumination light emitted by the second edge illumination light source to the light transmission surface of the reflecting mirror, and the second edge illumination light directly passes through the reflecting mirror and enters the detection camera after being reflected to the light transmission surface of the reflecting mirror.
The light path integration mechanism is simple in structure, and the transflective lens is arranged in the detection device, so that the first edge irradiation light output by the first edge light reflection mechanism and the second edge irradiation light output by the second edge light reflection mechanism can enter the detection camera through the transflective lens.
In some embodiments, the first edge light reflecting mechanism comprises a first edge entrance mirror and a first edge exit mirror group, the first edge exit mirror group comprises at least one first edge exit mirror, the first edge illumination light source emits first edge illumination light to the first edge of the object to be measured, the first edge entrance mirror receives the first edge illumination light reflected by the first edge of the object to be measured and reflects the first edge illumination light to the first edge exit mirror group, and the first edge illumination light is reflected by the first edge exit mirror group to the light path integrating mechanism; the second edge light reflecting mechanism comprises a second edge incident reflector and a second edge emergent reflector set, the second edge emergent reflector set comprises at least one second edge emergent reflector, the second edge irradiation light source emits second edge irradiation light to the second edge of the object to be detected, the second edge incident reflector receives the second edge irradiation light reflected by the second edge of the object to be detected and reflects the second edge irradiation light to the second edge emergent reflector set, and the second edge irradiation light is reflected to the light path integrating mechanism by the second edge emergent reflector set.
The first edge light reflection mechanism and the second edge light reflection mechanism are arranged, so that the first edge irradiation light reflected by the first edge and the second edge irradiation light reflected by the second edge are reflected to the light path integration mechanism.
In some embodiments, the detection mechanism further comprises a first chamfer light source, a second chamfer light source, a third chamfer light source, and a fourth chamfer light source, wherein: the first chamfer light source is configured to illuminate a first chamfer of the object to be measured at one end of the first edge, and the second chamfer light source is configured to illuminate a second chamfer of the object to be measured at the other end of the first edge; the third chamfering light source is configured to irradiate a third chamfer positioned at one end of the second edge of the object to be measured, and the fourth chamfering light source is configured to irradiate a fourth chamfer positioned at the other end of the second edge of the object to be measured; the reflection mechanism is further configured to reflect a first chamfer irradiation light ray emitted by the first chamfer light source and a second chamfer irradiation light ray emitted by the second chamfer light source at least once respectively, so that the first chamfer irradiation light ray and the second chamfer irradiation light ray are detected by the detection camera after being reflected by the first chamfer and the second chamfer; the reflection mechanism is further configured to reflect a third chamfer irradiation light emitted by the third chamfer light source and a fourth chamfer irradiation light emitted by the fourth chamfer light source at least once, so that the third chamfer irradiation light and the fourth chamfer irradiation light are detected by the detection camera after being reflected by the third chamfer and the fourth chamfer.
By arranging the chamfering light source, the detection of four chamfers of the object to be detected is realized.
The utility model discloses the second aspect provides a silicon chip sorting facilities, and this silicon chip sorting facilities includes the utility model discloses the detection device that the first aspect provided, wherein the object that awaits measuring is the silicon chip.
The utility model discloses a silicon chip sorting facilities has silicon chip detection function and silicon chip concurrently and selects separately the function, and it has promoted the sorting efficiency of silicon chip.
Drawings
Fig. 1 is a schematic structural diagram of a detection device according to the present invention in a first embodiment;
fig. 2 is a schematic structural diagram of a second embodiment of the detecting device of the present invention;
fig. 3 is a schematic structural diagram of a detecting device according to a third embodiment of the present invention;
fig. 1 to 3 include:
a conveying mechanism 1;
a detection camera 2;
a first edge illumination light source 3;
a second edge illumination light source 4;
a reflection mechanism 5, a first reflecting mirror 51, a second reflecting mirror 52, a third reflecting mirror 53, a fourth reflecting mirror 54, a fifth reflecting mirror 55, and a mirror 56;
a feeding conveyor mechanism 6;
a blanking conveying mechanism 7;
a first chamfered light source 8;
a second chamfered light source 9;
a third chamfered light source 10;
a fourth chamfered light source 11;
the device comprises an object to be tested 100, a front edge 101, a rear edge 102, a first chamfer 103, a second chamfer 104, a third chamfer 105 and a fourth chamfer 106.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
Before this, the following technical terms mentioned in the present specification are explained:
a reflector: i.e. a common total reflection mirror.
A transflective mirror: it has two opposite surfaces, one of which is a light-reflecting surface (equivalent to a common reflector) and the other of which is a light-transmitting surface through which light can directly pass through the mirror.
As shown in fig. 1 and 2, the detection device of the present invention includes a conveying mechanism 1 and a detection mechanism for conveying an object 100 to be detected, the detection mechanism is configured to detect a first edge and a second edge of the object 100 to be detected conveyed by the conveying mechanism, the first edge and the second edge are two edges which are opposite to each other on the object 100 to be detected and perpendicular to a conveying direction (a direction indicated by an arrow in the figure) of the conveying mechanism 1, such as a front edge 101 and a rear edge 102 in fig. 1.
Optionally, the conveying mechanism 1 includes a supporting structure, two conveying belts and a driving portion for driving the conveying belts to convey, the conveying belts are disposed on the supporting structure through belt wheels, the two conveying belts are parallel to each other and are spaced by a predetermined distance, and the object to be measured 100 is horizontally placed on the two conveying belts to be conveyed.
The detection mechanism includes a detection camera 2, a first edge illumination light source 3, a second edge illumination light source 4, and a reflection mechanism 5. Wherein:
the first edge illumination light source 3 is configured to illuminate a first edge of the object to be measured 100, and the second edge illumination light source 4 is configured to illuminate a second edge of the object to be measured 100. The first edge irradiation light source 3 and the second edge irradiation light source 4 may be a common light source, a laser, or other light sources, and the specific type and wavelength of the light sources are not limited.
The reflection mechanism 5 is configured to reflect the first edge illumination light emitted from the first edge illumination light source 3 at least once, so that the first edge illumination light is detected by the detection camera 2 after being reflected by the first edge of the object 100 to be detected. The reflection mechanism 5 is further configured to reflect the second edge illumination light emitted by the second edge illumination light source 4 at least once, so that the second edge illumination light is detected by the detection camera 2 after being reflected by the second edge of the object 100 to be detected. The object 100 to be measured is a silicon wafer or other sheet-like member, and the object 100 to be measured is taken as a silicon wafer in this specification as an example.
As shown in fig. 1 and fig. 2, the first edge irradiation light source 3, the detection camera 2 and the second edge irradiation light source 4 are sequentially arranged in the front-back direction of the conveying mechanism 1, that is, the first edge irradiation light source 3 is located at the front, the second edge irradiation light source 4 is located at the back, and the detection camera 2 is located between the first edge irradiation light source 3 and the second edge irradiation light source 4 and above the conveying mechanism 1.
The conveying mechanism 1 conveys the object 100 to be measured from back to front (indicated by an arrow in the figure). In the embodiment of fig. 1 and 2, the first edge is the front edge 101 of the object 100 to be measured when being transported on the transport mechanism 1, and the second edge is the rear edge 102 of the object 100 to be measured when being transported on the transport mechanism 100.
The conveying mechanism 1 has a first detection position a at a front edge position and a second detection position B at a rear edge position of the conveying mechanism 1. The first irradiation light source 3 is disposed on the front side of the first detection position a, and the second irradiation light source 4 is disposed on the rear side of the second detection position B.
In the embodiment of fig. 1 and 2, the reflecting mechanism 5 includes a first reflecting mirror 51, a second reflecting mirror 52, a third reflecting mirror 53, a fourth reflecting mirror 54, a fifth reflecting mirror 55, and a transflective mirror 56. Specifically, the method comprises the following steps: the first reflecting mirror 51 and the second reflecting mirror 52 are located on the front side of the conveyance mechanism 1, the third reflecting mirror 53 and the fourth reflecting mirror 54 are located on the rear side of the conveyance mechanism 1, and the fifth reflecting mirror 55 and the mirror 56 are sequentially provided between the conveyance mechanism 1 and the detection camera 2. The first reflective mirror 51, the second reflective mirror 52, the third reflective mirror 53, the fourth reflective mirror 54, the fifth reflective mirror 55 and the transflective mirror 56 are all arranged at 45 degrees, and of course, the installation angle of each reflective mirror and each transflective mirror is not limited to 45 degrees, and angle adjusting devices are arranged on the reflective mirrors and the transflective mirrors for adjusting the installation angle of each mirror. The reflecting surface of the mirror 56 faces the detection camera 2, and the light transmitting surface of the mirror 56 faces the transport mechanism 1.
In the embodiments of fig. 1 and 2, the transmission optical paths of the first edge illumination light and the second edge illumination light are specifically as follows:
the conveying mechanism 1 conveys the object 100 to be detected from the back to the front, when the front edge 101 of the object 100 to be detected reaches the first detection position a, the first edge irradiation light source 3 emits first edge irradiation light to the front edge 101 of the object 100 to be detected, the front edge 101 reflects the first edge irradiation light to the first reflective mirror 51, the first reflective mirror 51 reflects the first edge irradiation light to the second reflective mirror 52, the second reflective mirror 52 reflects the first edge irradiation light to the upper surface (reflection surface) of the transflective mirror 56, and the upper surface of the transflective mirror 56 reflects the first edge irradiation light to the detection camera 2. Thus, the detection of the front end edge 101 of the object 100 to be detected by the detection mechanism is realized.
Similarly, when the rear end edge 102 of the object 100 to be detected reaches the second detection position B, the second edge irradiation light source 4 emits second edge irradiation light to the rear end edge 102 of the object 100 to be detected, the rear end edge 102 reflects the second edge irradiation light to the third reflective mirror 53, the third reflective mirror 53 reflects the second edge irradiation light to the fourth reflective mirror 54, the fourth reflective mirror 54 reflects the second edge irradiation light to the fifth reflective mirror 55, the fifth reflective mirror 55 reflects the second edge irradiation light to the lower surface (light-transmitting surface) of the transflective mirror 56, and the second edge irradiation light passes through the transflective mirror 56 and reaches the detection camera 2. Thus, the detection of the rear end edge 102 of the object 100 to be detected by the detection mechanism is realized.
It can be seen that the reflecting mechanism 5 in the embodiment of fig. 1 and 2 comprises the following three parts:
a first edge light reflecting mechanism constituted by a first reflecting mirror 51 and a second reflecting mirror 52 for reflecting the first edge illumination light, wherein: the first mirror 51 constitutes a first edge-incident mirror that receives the first edge-impinging light rays reflected by the first edge, and the second mirror 52 constitutes a first edge-exiting mirror that exits and transmits the first edge-impinging light rays.
A second edge light reflection mechanism composed of a third reflecting mirror 53, a fourth reflecting mirror 54, and a fifth reflecting mirror 55, for reflecting a second edge illumination light, wherein: the third reflector 53 constitutes a second edge-entering reflector for receiving the second edge-illuminating light reflected by the second edge, and the fourth reflector 54 and the fifth reflector 55 constitute a second edge-exiting reflector group for exiting and transmitting the second edge-illuminating light. And
the light path integrating mechanism formed by the mirror 56 reflects the first edge illumination light output by the first edge light reflecting mechanism to the detection camera 2 according to a preset light path, and transmits the second edge illumination light output by the second edge light reflecting mechanism to the detection camera 2 according to a preset light path, i.e., in the vertical direction.
The reflecting mechanism 5 is arranged in such a way, so that the first edge irradiation light output by the first edge light reflecting mechanism and the second edge irradiation light output by the second edge light reflecting mechanism can enter the detection camera 2 according to a preset light path when passing through the light path integrating mechanism, and the front edge and the rear edge of the object to be detected are detected by the same detection camera 2.
Of course, in other embodiments, the specific composition of the reflecting mechanism 5 may be adapted. In addition, optionally, in order to avoid the interference of ambient light, all the components of the reflection mechanism are encapsulated in the light shielding plate.
In the embodiment shown in fig. 1, the distance L between the first detection position a and the second detection position B is greater than the distance between the front edge 101 and the rear edge 102 of the object 100 to be measured (i.e., the length dimension of the object 100 to be measured in the conveying direction of the conveying mechanism 1). In this example:
when the conveying mechanism 1 conveys the object 100 to be tested from the rear to the front, the rear edge 102 of the object 100 to be tested reaches the second detection position B at the first time T1, the front edge 101 of the object 100 to be tested reaches the first detection position a at the second time T2, and the first time T1 is earlier than the second time T2. That is, in the embodiment of fig. 1, the detection mechanism completes the detection of the rear end edge 102 first, and then completes the detection of the front end edge 101.
In the embodiment shown in fig. 2, the distance L between the first detection position a and the second detection position B is different from the distance between the front edge 101 and the rear edge 102 of the object 100 (i.e., the length dimension of the object 100 in the conveying direction of the conveying mechanism 1). In this example:
when the conveying mechanism 1 conveys the object 100 to be tested from the back to the front, the front edge 101 of the object 100 to be tested reaches the first detection position a at the third time T3, the rear edge 102 of the object 100 to be tested reaches the second detection position B at the fourth time T4, and the third time T3 is earlier than the fourth time T4. Namely: in the embodiment of fig. 2, the detection mechanism completes the detection of the front edge 101 first, and then completes the detection of the rear edge 102.
As shown in fig. 2, optionally, the detecting device of the present invention further includes a feeding conveying mechanism 6 and a discharging conveying mechanism 7, wherein: the feeding conveying mechanism 6 is positioned at the rear side of the conveying mechanism 1 and is used for conveying the object 100 to be detected onto the conveying mechanism 1 from an upper station, so that the automatic feeding of the object 100 to be detected is realized; the blanking conveying mechanism 7 is located on the front side of the conveying mechanism 1 and is used for conveying the object 100 to be detected to the next station from the conveying mechanism 1, so that automatic blanking of the object 100 to be detected is realized.
As shown in fig. 2, the feeding conveyor 6, the discharging conveyor 7 and the conveyor 1 are all in a conveyor structure. And the feeding conveying mechanism 6, the conveying mechanism 1 and the blanking conveying mechanism 7 are positioned on the same axis, and the conveying bearing surfaces of the feeding conveying mechanism 6, the conveying mechanism 1 and the blanking conveying mechanism 7 are positioned on the same horizontal plane. Thus, under the action of inertia, the object 100 to be detected on the feeding conveying mechanism 6 can be smoothly transited to the conveying mechanism 1 to complete automatic feeding, and the object 100 to be detected on the conveying mechanism 1 can be smoothly transited to the discharging conveying mechanism 7 to complete automatic discharging.
In the embodiment shown in fig. 2, the reflection mechanisms 5 are disposed above the conveying and carrying surface of the conveying mechanism 1, and correspondingly, the first edge-illuminating light source 3 and the second edge-illuminating light source 4 are required to be installed at positions lower than the conveying and carrying surface of the conveying mechanism 1. Therefore, in order to facilitate the installation of the first edge irradiation light source 3 and the second edge irradiation light source 4, optionally, a first gap for installing the second edge irradiation light source 4 is maintained between the feeding conveyor 6 and the conveyor 1, and a second gap for installing the first edge irradiation light source 3 is maintained between the feeding conveyor 7 and the conveyor 1.
As described above, the detection device of the present invention can detect two opposite edges of the object to be detected 100 (such as a silicon wafer) perpendicular to the conveying direction of the conveying mechanism 1 by the cooperation of the first edge light source 3, the second edge light source 4, the detection camera 2 and the reflection mechanism 5.
However, as shown in fig. 3, a silicon wafer as the object 100 to be inspected is generally formed with chamfers at four corners, including: a first chamfer 103 at one end of the front edge 101, a second chamfer 104 at the other end of the front edge 101, a third chamfer 105 at one end of the rear edge 102, and a fourth chamfer 106 at a second end of the rear edge 102.
As known by those skilled in the art, the silicon wafer is prone to crack defects at the chamfered locations, and therefore it is necessary to detect the chamfer. However, as shown in fig. 3, the first edge irradiation light emitted from the first edge irradiation light source 3 cannot irradiate the first chamfer 103 and the second chamfer 104, and the second edge irradiation light emitted from the second edge irradiation light source 4 cannot irradiate the third chamfer 105 and the fourth chamfer 106. Therefore, the inspection camera 2 cannot image and inspect each chamfer.
In order to solve the chamfer detection problem, as shown in fig. 3, it is optional that the detection device of the present invention further comprises a first chamfer irradiation light source 8, a second chamfer irradiation light source 9, a third chamfer irradiation light source 10 and a fourth chamfer irradiation light source 11. Wherein: the first chamfer light source 8 is configured to illuminate a first chamfer 103 of the object to be measured at one end of the first edge, and the second chamfer light source 9 is configured to illuminate a second chamfer 104 of the object to be measured at the other end of the first edge; the third chamfer light source 10 is configured to illuminate a third chamfer 105 of the object to be measured at one end of the second edge, and the fourth chamfer light source 11 is configured to illuminate a fourth chamfer 106 of the object to be measured at the other end of the second edge.
In the embodiment of fig. 3, the first chamfer irradiation light source 8 and the second chamfer irradiation light source 9 are respectively disposed on both sides of the first edge irradiation light source 3, and the second chamfer irradiation light source 9 and the third chamfer irradiation light source 10 are respectively disposed on both sides of the second edge irradiation light source 3.
After the chamfer irradiation light emitted by each chamfer irradiation light source irradiates to the corresponding chamfer, the chamfer irradiation light is reflected to the reflection mechanism 5 by the chamfer and is finally reflected by the reflection mechanism 5 and transmitted to the detection camera 2, so that the detection of the chamfer of the silicon wafer by the detection mechanism is realized. Specifically, the method comprises the following steps:
when the front edge 101 of the silicon wafer reaches the first detection position A, the first chamfer 103 and the second chamfer 104 are respectively irradiated by the first chamfer irradiation light source 8 and the second chamfer irradiation light source 9 while the front edge 101 is irradiated by the first edge irradiation light source 3, so that the front edge 101, the first chamfer 103 and the second chamfer 104 of the silicon wafer are simultaneously detected by the detection mechanism.
When the rear edge 102 of the silicon wafer reaches the second detection position B, the third chamfer 105 and the fourth chamfer 106 are respectively irradiated by the third chamfer irradiation light source 10 and the fourth chamfer irradiation light source 11 while the rear edge 102 is irradiated by the second edge irradiation light source 4, so that the rear edge 102, the third chamfer 105 and the fourth chamfer 106 of the silicon wafer are simultaneously detected by the detection mechanism.
The utility model also discloses a silicon wafer sorting device, which comprises the detection device, wherein the object to be detected is a silicon wafer; the silicon wafer sorting equipment further comprises overall dimension detection equipment for detecting whether the overall dimension of the silicon wafer conveyed on the conveying mechanism 1 is qualified, a subfissure detection device for detecting whether the silicon wafer is qualified, a thickness detection device for detecting whether the thickness of the silicon wafer is qualified and the like.
The invention has been described above with a certain degree of particularity and detail. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that may be made without departing from the true spirit and scope of the present invention are intended to be within the scope of the present invention. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.
Claims (10)
1. The detection device is characterized by comprising a conveying mechanism and a detection mechanism, wherein the conveying mechanism is used for conveying an object to be detected, the detection mechanism is configured to detect a first edge and a second edge of the object to be detected conveyed by the conveying mechanism, the first edge and the second edge are two opposite edges on the object to be detected and are perpendicular to the conveying direction of the conveying mechanism, the detection mechanism comprises a detection camera, a first edge irradiation light source, a second edge irradiation light source and a reflection mechanism, and the detection mechanism comprises a detection camera, a first edge irradiation light source, a second edge irradiation light source and a reflection mechanism, wherein:
the first edge illumination light source is configured to illuminate the first edge of an object to be measured;
the second edge illumination light source is configured to illuminate the second edge of an object to be measured;
the reflection mechanism is configured to reflect a first edge illumination light emitted by the first edge illumination light source at least once, so that the first edge illumination light is detected by the detection camera after being reflected by a first edge of the object to be detected;
the reflection mechanism is configured to reflect a second edge illumination light emitted by the second edge illumination light source at least once, so that the second edge illumination light is detected by the detection camera after being reflected by a second edge of the object to be detected.
2. The detection device of claim 1, wherein:
the conveying mechanism conveys the object to be detected from back to front, the first edge is the edge of the front end of the object to be detected, the second edge is the edge of the rear end of the object to be detected, the first edge irradiation light source is positioned on the front side of the conveying mechanism, the second edge irradiation light source is positioned on the rear side of the conveying mechanism, and the detection camera is positioned above or below the conveying mechanism and between the first edge irradiation light source and the second edge irradiation light source;
when the edge of the front end of the object to be detected reaches a first detection position, first edge illumination light emitted by the first edge illumination light source illuminates the edge of the front end of the object to be detected, and the first edge illumination light reflected from the edge of the front end is reflected to the detection camera through the reflection mechanism;
when the rear end edge of the object to be detected reaches a second detection position, second edge irradiation light emitted by the second edge irradiation light source irradiates the rear end edge of the object to be detected, and the second edge irradiation light reflected by the rear end edge is reflected to the detection camera through the reflection mechanism.
3. The detection device of claim 2, wherein:
the distance between the first detection position and the second detection position is greater than the distance between the front end edge of the object to be detected and the rear end edge of the object to be detected, the rear end edge of the object to be detected reaches the second detection position at the first moment, the front end edge of the object to be detected reaches the first detection position at the second moment, and the first moment is earlier than the second moment.
4. The detection device of claim 2, wherein:
the distance between the first detection position and the second detection position is smaller than the distance between the front end edge of the object to be detected and the rear end edge of the object to be detected, the front end edge of the object to be detected reaches the first detection position at the third moment, the rear end edge of the object to be detected reaches the second detection position at the fourth moment, and the third moment is earlier than the fourth moment.
5. The inspection device of claim 2, further comprising a feed conveyor mechanism and a discharge conveyor mechanism, wherein:
the feeding conveying mechanism is positioned at the rear side of the conveying mechanism and used for conveying an object to be detected to the conveying mechanism from an upper station, and a first mounting gap is reserved between the feeding conveying mechanism and the conveying mechanism;
the blanking conveying mechanism is located on the front side of the conveying mechanism and used for conveying the object to be detected to a next station from the conveying mechanism, and a second mounting gap is reserved between the blanking conveying mechanism and the conveying mechanism.
6. The detecting device according to claim 2, wherein the reflecting means comprises a first edge light reflecting means, a second edge light reflecting means and a light path integrating means, wherein:
the first edge light reflecting mechanism is configured to reflect the first edge illumination light emitted by the first edge illumination light source to the light path integrating mechanism;
the second edge light reflecting mechanism is configured to reflect a second edge illumination light emitted by the second edge illumination light source to the light path integration mechanism;
the optical path integration mechanism is configured to reflect the first edge illumination light reflected to the optical path integration mechanism to the detection camera, and transmit the second edge illumination light reflected to the optical path integration mechanism to the detection camera.
7. The inspection device of claim 6, wherein said optical path integrating mechanism comprises a transflective lens, said transflective lens is disposed between said inspection camera and said conveying mechanism, a reflective surface of said transflective lens faces said inspection camera, and a light transmissive surface of said transflective lens faces said conveying mechanism;
the first edge light reflection mechanism is configured to reflect a first edge illumination light ray emitted by the first edge illumination light source to the reflecting surface of the transflective mirror, and the first edge illumination light ray is reflected to the reflecting surface of the transflective mirror and then reflected to the detection camera through the reflecting surface of the transflective mirror;
the second edge light reflection mechanism is configured to reflect a second edge illumination light emitted by the second edge illumination light source to the light transmission surface of the transflective mirror, and the second edge illumination light directly passes through the transflective mirror and enters the detection camera after being reflected to the light transmission surface of the transflective mirror.
8. The inspection apparatus of claim 6, wherein the first edge light reflecting mechanism comprises a first edge entrance mirror and a first edge exit mirror group, the first edge exit mirror group comprising at least one first edge exit mirror, the first edge illumination light source emitting first edge illumination light to the first edge of the object under test, the first edge entrance mirror receiving the first edge illumination light reflected by the first edge of the object under test and reflecting the first edge illumination light to the first edge exit mirror group, the first edge illumination light being reflected by the first edge exit mirror group to the light path integrating mechanism;
the second edge light reflecting mechanism comprises a second edge incident reflector and a second edge emergent reflector set, the second edge emergent reflector set comprises at least one second edge emergent reflector, the second edge irradiation light source emits second edge irradiation light to the second edge of the object to be detected, the second edge incident reflector receives the second edge irradiation light reflected by the second edge of the object to be detected and reflects the second edge irradiation light to the second edge emergent reflector set, and the second edge irradiation light is reflected to the light path integrating mechanism by the second edge emergent reflector set.
9. The detection device of claim 1, wherein: detection mechanism still includes first chamfer light source, second chamfer light source, third chamfer light source and fourth chamfer light source, wherein:
the first chamfer light source is configured to illuminate a first chamfer of an object to be measured at one end of the first edge, and the second chamfer light source is configured to illuminate a second chamfer of the object to be measured at the other end of the first edge;
the third chamfer light source is configured to illuminate a third chamfer of the object to be measured at one end of the second edge, and the fourth chamfer light source is configured to illuminate a fourth chamfer of the object to be measured at the other end of the second edge;
the reflection mechanism is further configured to reflect a first chamfer illumination light emitted by the first chamfer light source and a second chamfer illumination light emitted by the second chamfer light source at least once, so that the first chamfer illumination light and the second chamfer illumination light are detected by the detection camera after being reflected by the first chamfer and the second chamfer;
the reflection mechanism is further configured to reflect a third chamfer irradiation light emitted by the third chamfer light source and a fourth chamfer irradiation light emitted by the fourth chamfer light source at least once, so that the third chamfer irradiation light and the fourth chamfer irradiation light are detected by the detection camera after being reflected by the third chamfer and the fourth chamfer.
10. A silicon wafer sorting apparatus, characterized in that the silicon wafer sorting apparatus comprises the detecting device according to any one of claims 1 to 9, and the object to be detected is a silicon wafer.
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| WO2024099330A1 (en) * | 2022-11-13 | 2024-05-16 | 无锡奥特维科技股份有限公司 | Silicon wafer side edge detection device and silicon wafer sorting machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024099330A1 (en) * | 2022-11-13 | 2024-05-16 | 无锡奥特维科技股份有限公司 | Silicon wafer side edge detection device and silicon wafer sorting machine |
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