CN213570705U - Heating sensing device in coating equipment - Google Patents

Heating sensing device in coating equipment Download PDF

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Publication number
CN213570705U
CN213570705U CN202022103360.8U CN202022103360U CN213570705U CN 213570705 U CN213570705 U CN 213570705U CN 202022103360 U CN202022103360 U CN 202022103360U CN 213570705 U CN213570705 U CN 213570705U
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water tank
heating
heating device
coating
inlet pipe
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CN202022103360.8U
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Chinese (zh)
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曾宇
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Shirui Optical Technology Dongguan Co ltd
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Shirui Optical Technology Dongguan Co ltd
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Abstract

The utility model discloses a heating sensing device in coating equipment, which relates to the technical field of coating, the utility model comprises a workbench, a heating device, a water tank and a coating reaction kettle, wherein the surface of the workbench is welded with the lower surface of the heating device, the heating device comprises a heating device body, a support frame and an insulating column, one end of the plurality of support frames is connected with the lower surface of the heating device body, the peripheral side surface of the insulating column is welded with the surface of the support frame, the surface of the heating device is connected with one side surface of the water tank, the water tank comprises a water tank body, a water inlet pipe and a first control valve, one end of the water inlet pipe is connected with one side surface of the water tank body, the first control valve is arranged on the peripheral side surface of the water inlet pipe, the surface of the water tank is provided with a mounting groove, and the lower surface of the coating reaction kettle is connected with the mounting groove. Thereby achieving induction heating.

Description

Heating sensing device in coating equipment
Technical Field
The utility model relates to the technical field of coating, in particular to a heating sensing device in coating equipment.
Background
Common coating methods can be divided into physical vapor deposition and chemical vapor deposition, the physical vapor deposition technology refers to a technology of gasifying a material source, namely a solid or a liquid surface, into gaseous atoms, molecules or parts of the gaseous atoms and the molecules under a vacuum condition by adopting a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas process, the main methods of the physical vapor deposition include vacuum evaporation, ion coating, arc plasma plating, molecular beam epitaxy and the like, the chemical vapor deposition is a chemical technology, the technology mainly utilizes one or more gaseous compounds or simple substances containing film elements to perform a chemical reaction on the surface of the substrate to generate the film, and the heat provided in the coating working process is a heating sensing device.
At present, the existing heating sensing device is generally resistance-type heating, but the heating mode has more defects, uneven heating is easy to occur, and the resistance changes in the heating process of the resistance wire, so that the working efficiency becomes low, and therefore, the heating sensing device in the coating equipment is needed.
SUMMERY OF THE UTILITY MODEL
The main object of the utility model is to provide a heating sensing device among coating equipment can effectively solve current heating sensing device and generally be resistance-type heating, but this kind of heating methods has more shortcoming, and it is inhomogeneous to appear heating easily, and resistance in the resistance wire heating process resistance changes moreover, work efficiency step-down scheduling problem.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a heating sensing device in coating equipment, includes workstation, heating device, water tank and coating film reation kettle, a workstation surface and the lower surface welding of heating device, heating device includes heating device body, support frame and insulated column, and is a plurality of support frame one end all is connected with heating device body lower surface, insulated column week side and a support frame surface welding, a heating device surface and a water tank side surface connection, the water tank includes water tank body, inlet tube and a control flap, inlet tube one end is connected with water tank body side surface, a control flap installs in inlet tube week side, a water tank surface is equipped with the mounting groove, coating film reation kettle lower surface is connected with the mounting groove.
Preferably, the workstation includes workstation body, alternating-frequency electromagnetic induction control box, wire tube and support column, an alternating-frequency electromagnetic induction control box surface is connected with workstation body upper surface, and a plurality of support column one end all welds with workstation body upper surface, wire tube one end is connected with the alternating-frequency electromagnetic induction control box, the wire tube other end is connected with heating device body surface, and the setting of alternating-frequency electromagnetic induction control box makes can become alternating voltage then becoming high frequency alternating voltage with alternating voltage to realize induction heating.
Preferably, the heating device further comprises a high-frequency wire and a heat-conducting metal rod, the high-frequency wire is connected with the peripheral side face of the heat-conducting metal rod, and the heat generated by the induced current can be transmitted into the water tank through the conductor by the arrangement of the heat-conducting metal rod, so that energy is provided for reaction.
Preferably, the water tank further comprises a water outlet pipe and a second control valve, one end of the water outlet pipe is connected with one side surface of the water tank body, and the second control valve is installed on the peripheral side surface of the water outlet pipe, so that water feeding and discharging operations can be realized.
Preferably, coating film reation kettle includes coating film reation kettle body and gaseous state raw materials intake pipe, gaseous state raw materials intake pipe one end and coating film reation kettle body upper surface connection, the setting of gaseous state raw materials intake pipe for the raw materials passes through the pipeline and gets into equipment, and the leakproofness is good, is favorable to improving the purity quality of coating film.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model discloses in, through the setting of AC electromagnetic induction control box for can become DC voltage with AC voltage then becoming high frequency AC voltage, thereby realize induction heating.
2. The utility model discloses in, through the setting of heat conduction metal bar, can pass through the conductor with the heat that induced-current produced and transmit to the water tank, provide the energy for the reaction.
3. The utility model discloses in, through the setting of gaseous state raw materials intake pipe for the raw materials passes through pipeline entering equipment, and the leakproofness is good, is favorable to improving the purity quality of coating film.
Drawings
FIG. 1 is a schematic view of the overall structure of a heating sensor device in a coating apparatus of the present invention;
FIG. 2 is a schematic side view of a heating sensor device in a coating apparatus of the present invention;
FIG. 3 is a schematic view of a front view of a heating sensor device in a coating apparatus of the present invention;
FIG. 4 is a schematic sectional view taken along line A-A in FIG. 2.
In the figure: 110. a work table; 111. an alternating frequency electromagnetic induction control box; 112. a wire tube; 113. a support pillar; 120. a heating device; 121. a support frame; 122. a high-frequency wire; 123. an insulating column; 124. a heat conductive metal rod; 130. a water tank; 131. a water inlet pipe; 132. a first control valve; 133. a water outlet pipe; 134. a second control valve; 140. coating a film on the reaction kettle; 141. and a gaseous raw material inlet pipe.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
referring to fig. 1-4, the utility model relates to a heating sensing device in coating equipment, including workstation 110, heating device 120, water tank 130 and coating reation kettle 140, workstation 110 surface and heating device 120 lower surface welding, heating device 120 includes the heating device body, support frame 121 and insulated column 123, a plurality of support frame 121 one end all with heating device body lower surface connection, insulated column 123 week side and support frame 121 a surface welding, a heating device 120 surface and water tank 130 side surface connection, water tank 130 includes the water tank body, inlet tube 131 and first control valve 132, inlet tube 131 one end and water tank body side surface connection, first control valve 132 is installed in inlet tube 131 week side, a water tank 130 surface is equipped with the mounting groove, coating reation kettle 140 lower surface is connected with the mounting groove.
Further, the workbench 110 comprises a workbench body, an alternating-frequency electromagnetic induction control box 111, a wire tube 112 and supporting columns 113, wherein one surface of the alternating-frequency electromagnetic induction control box 111 is connected with the upper surface of the workbench body, one ends of the supporting columns 113 are welded with the upper surface of the workbench body, one end of the wire tube 112 is connected with the alternating-frequency electromagnetic induction control box 111, the other end of the wire tube 112 is connected with one surface of the heating device body, and the alternating-frequency electromagnetic induction control box 111 is arranged to change alternating voltage into direct current voltage and then into high-frequency alternating current voltage, so that induction heating is realized.
Further, the heating device 120 further includes a high-frequency wire 122 and a heat conducting metal rod 124, the high-frequency wire 122 is connected to the peripheral side of the heat conducting metal rod 124, and the heat conducting metal rod 124 is configured to transmit the heat generated by the induced current to the water tank 130 through a conductor, so as to provide energy for the reaction.
Further, the water tank 130 further comprises a water outlet pipe 133 and a second control valve 134, wherein one end of the water outlet pipe 133 is connected with one side surface of the water tank body, and the second control valve 134 is installed on the peripheral side surface of the water outlet pipe 133, so that water inlet and outlet operations can be realized.
Further, coating film reation kettle 140 includes coating film reation kettle body and gaseous state raw materials intake pipe 141, gaseous state raw materials intake pipe 141 one end and coating film reation kettle body upper surface connection, gaseous state raw materials intake pipe 141's setting for the raw materials passes through pipeline entering equipment, and the leakproofness is good, is favorable to improving the purity quality of coating film.
Example two:
referring to fig. 1-4, the utility model relates to a heating sensing device in coating equipment, the during operation is handled the electric current through alternating current electromagnetic induction control box 111, becomes alternating voltage and then becomes high frequency alternating voltage with direct current voltage to realize induction heating, then spread into the heat into water tank 130 through heat conduction metal rod 124, carry out water bath heating, let in coating film raw and other materials through gaseous state raw materials intake pipe 141 and react in coating film reation kettle 140.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are intended to illustrate the principles of the invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined by the appended claims and their equivalents.

Claims (5)

1. The utility model provides a heating sensing device in coating equipment, includes workstation (110), heating device (120), water tank (130) and coating reation kettle (140), its characterized in that: one surface of the workbench (110) is welded with the lower surface of the heating device (120), the heating device (120) comprises a heating device body, a support frame (121) and an insulating column (123), one end of the support frame (121) is connected with the lower surface of the heating device body, the peripheral side surface of the insulating column (123) is welded with the peripheral side surface of the support frame (121), one surface of the heating device (120) is connected with one side surface of a water tank (130), the water tank (130) comprises a water tank body, a water inlet pipe (131) and a first control valve (132), one end of the water inlet pipe (131) is connected with one side surface of the water tank body, the first control valve (132) is installed on the peripheral side surface of the water inlet pipe (131), one surface of the water tank (130) is provided with an installation groove, and the lower surface of the film-coating reaction.
2. The heating sensor device in a plating apparatus according to claim 1, characterized in that: workstation (110) are including workstation body, alternating-frequency electromagnetic induction control box (111), wire tube (112) and support column (113), an alternating-frequency electromagnetic induction control box (111) surface is connected with workstation body upper surface, and is a plurality of support column (113) one end all welds with workstation body upper surface, wire tube (112) one end is connected with alternating-frequency electromagnetic induction control box (111), wire tube (112) other end and a heating device body surface are connected.
3. The heating sensor device in a plating apparatus according to claim 1, characterized in that: the heating device (120) further comprises a high-frequency electric wire (122) and a heat-conducting metal rod (124), wherein the high-frequency electric wire (122) is connected with the peripheral side surface of the heat-conducting metal rod (124).
4. The heating sensor device in a plating apparatus according to claim 1, characterized in that: the water tank (130) further comprises a water outlet pipe (133) and a second control valve (134), one end of the water outlet pipe (133) is connected with one side surface of the water tank body, and the second control valve (134) is installed on the peripheral side surface of the water outlet pipe (133).
5. The heating sensor device in a plating apparatus according to claim 1, characterized in that: the coating reaction kettle (140) comprises a coating reaction kettle body and a gaseous raw material inlet pipe (141), wherein one end of the gaseous raw material inlet pipe (141) is connected with the upper surface of the coating reaction kettle body.
CN202022103360.8U 2020-09-23 2020-09-23 Heating sensing device in coating equipment Active CN213570705U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022103360.8U CN213570705U (en) 2020-09-23 2020-09-23 Heating sensing device in coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022103360.8U CN213570705U (en) 2020-09-23 2020-09-23 Heating sensing device in coating equipment

Publications (1)

Publication Number Publication Date
CN213570705U true CN213570705U (en) 2021-06-29

Family

ID=76577062

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022103360.8U Active CN213570705U (en) 2020-09-23 2020-09-23 Heating sensing device in coating equipment

Country Status (1)

Country Link
CN (1) CN213570705U (en)

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