CN109306457A - High-frequency sputtering device and high-frequency sputtering method - Google Patents
High-frequency sputtering device and high-frequency sputtering method Download PDFInfo
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- CN109306457A CN109306457A CN201811256655.XA CN201811256655A CN109306457A CN 109306457 A CN109306457 A CN 109306457A CN 201811256655 A CN201811256655 A CN 201811256655A CN 109306457 A CN109306457 A CN 109306457A
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 119
- 239000000758 substrate Substances 0.000 claims abstract description 71
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 105
- 238000000034 method Methods 0.000 claims description 21
- 239000012495 reaction gas Substances 0.000 claims description 17
- 238000000746 purification Methods 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000001465 metallisation Methods 0.000 claims 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims 1
- 229920002554 vinyl polymer Polymers 0.000 claims 1
- 239000012212 insulator Substances 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 28
- 229920001296 polysiloxane Polymers 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Abstract
The invention discloses a kind of high-frequency sputtering device and high-frequency sputtering methods.The device includes sputtering chamber, target, high-frequency electrode, high frequency oscillator, DC power supply, substrate, substrate holder and inflation system；For sputtering chamber for providing vacuum environment, target setting is sputtering indoor top, and the target back side and high-frequency electrode are fixedly connected electrically conductively, and high-frequency electrode is mounted on the upper end of sputtering chamber by insulating materials；High frequency oscillator is adjustable vibration device, and input terminal connects DC power supply, and output end connects high-frequency electrode；Substrate setting is fixedly mounted on substrate holder in the indoor lower part of sputtering, substrate, and substrate holder is installed in rotation on the lower end of sputtering chamber；Inflation system is connected to sputtering chamber.High-frequency sputtering device and high-frequency sputtering method of the invention, can sputter insulator target, to deposit required insulator film on substrate, and can guarantee the uniformity of the insulator film thickness of acquisition, structure is simple, and manufacturing cost is low, easy to operate.
Description
Technical field
The present invention relates to technical field of film preparation more particularly to a kind of high-frequency sputtering device and high-frequency sputtering methods.
Background technique
The different purposes of film have different want to the electric conductivity of film, optical property, crystalline orientation, surface smoothness etc.
It asks, currently, having developed a variety of method for manufacturing thin film in order to meet each performance requirement of film, having specifically included that pulse laser
Depositing operation, sol gel process, evaporation, chemical vapor deposition and electron cyclotron resonance microwave plasmas reactive sputtering
Deng being required according to production application, suitably select different preparation processes.
Sputtering method includes d.c. sputtering and high-frequency sputtering, and d.c. sputtering is commonly used in deposited metal or conductive film,
When preparing insulator film, using d.c. sputtering, the cation of sputter gas can be built up on the surface of insulator target, thus
Repel later bombardment ion；And in high-frequency sputtering, high-frequency alternating electrical potential energy is periodically in the electronics of plasma
With the surface charge of insulator target.Since the performance and preparation method and technology parameter of film are closely related, therefore, it is necessary to
Large area uniform film, and the high-frequency sputtering device that structure is simple, manufacturing cost is low can be prepared by providing one kind, and corresponding
High-frequency sputtering method.
Summary of the invention
To solve above-mentioned the technical problems existing in the prior art, the present invention provides a kind of high-frequency sputtering device and high frequency splashes
Shooting method.
The invention discloses a kind of high-frequency sputtering devices thus.The high-frequency sputtering device is by applying in a vacuum to target
Increase frequency current potential, the device of film process is carried out with the one side to substrate, comprising: sputtering chamber, target, high-frequency electrode, high frequency vibrating
Swing device, DC power supply, substrate, substrate holder and inflation system；
The sputtering chamber is used to provide vacuum environment for the film process of the substrate；
Target setting on the indoor top of sputtering, the target back side and the high-frequency electrode it is electrically conductive it is solid
Fixed connection, the high-frequency electrode are fixedly mounted on the upper end of the sputtering chamber by insulating materials；
The high frequency oscillator is adjustable vibration device, and the input terminal of the high frequency oscillator connects the DC power supply,
Output end connects the high-frequency electrode；
Substrate setting in the indoor lower part of sputtering, and with target front face, the fixed peace of the substrate
On the substrate holder, the substrate holder is installed in rotation on the lower end of the sputtering chamber；
The inflation system is connected to the sputtering chamber, for providing sputter gas and reaction gas to the sputtering chamber.
Further, in the high-frequency sputtering device, the target back side uses metalized, and the target passes through
Welding manner or conducting resinl bonding mode are connect with the high-frequency electrode.
Further, in the high-frequency sputtering device, the high-frequency electrode is made of oxygen-free copper, and interposition installs
It is equipped with channel, the channel is cooling for water flowing, and the high-frequency electrode outer layer is using polytetrafluoroethylene (PTFE) set insulation.
Further, in the high-frequency sputtering device, impedance matching network is provided in the high frequency oscillator, it is described
High frequency oscillator couples the way of output using double tuned transformer.
Further, in the high-frequency sputtering device, the substrate holder is made of stainless steel, and interposition installs
It is equipped with the cooling duct cooling for water flowing.
Further, in the high-frequency sputtering device, described device further includes rotating mechanism, the rotating mechanism connection
In the substrate holder lower end, for driving the substrate holder and the substrate rotation installed thereon.
Further, in the high-frequency sputtering device, the inflation system includes that charge valve, gas purification apparatus are gentle
Tank；
Described charge valve one end is connected to the sputtering chamber, and the other end is connected to the gas purification apparatus, for controlling
The indoor gas flow of sputtering；
Described gas purification apparatus one end is connected to the charge valve, and the other end is connected to the gas tank；
Described gas tank one end is connected to the gas purification apparatus, and the other end is connected to gas source.
Further, in the high-frequency sputtering device, the gas tank includes the first gas tank, the second gas tank and gaseous mixture
Tank；
First gas tank is for accommodating the sputter gas；
Second gas tank is for accommodating the reaction gas；
The mixed gas tank is used to receive the sputter gas and the institute of first gas tank and second gas tank discharge
Reaction gas is stated, to form mixed gas.
In addition, the invention also discloses a kind of high-frequency sputtering method implemented using above-mentioned high-frequency sputtering device, the side
Method includes the following steps:
11) cleaning treatment is carried out to substrate；
12) vacuumize process is carried out to sputtering chamber, and the vacuum degree of the sputtering chamber is made to reach 1 × 10-1Torr or more；
13) sputter gas and reaction gas are filled with to the sputtering chamber using inflation system；
14) apply high pressure to high-frequency electrode and target using DC power supply and high frequency oscillator, to be sputtered；
15) after the substrate completes film deposition, high frequency oscillator and DC power supply switch are cut off, terminates sputtering.
The major advantage of technical solution of the present invention is as follows:
High-frequency sputtering device and high-frequency sputtering method provided by the invention can sputter insulator target, thus
Required insulator film is deposited on substrate, and can guarantee the uniformity of the insulator film thickness of acquisition, and structure is simple, system
Make it is at low cost, it is easy to operate.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes of the invention one
Point, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, does not constitute improper limitations of the present invention.Attached
In figure:
Fig. 1 is the structural schematic diagram of high-frequency sputtering device provided by one embodiment of the present invention.
Description of symbols:
1- sputtering chamber, 2- target, 3- high-frequency electrode, 4- high frequency oscillator, 5- DC power supply, 6- substrate, 7- substrate holder,
8- inflation system, 81- charge valve, 82- gas purification apparatus, 83- gas tank, 9- rotating mechanism.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with the specific embodiment of the invention and
Technical solution of the present invention is clearly and completely described in corresponding attached drawing.Obviously, described embodiment is only of the invention
A part of the embodiment, instead of all the embodiments.Based on the embodiment of the present invention, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
Below in conjunction with attached drawing, the technical solution of embodiment that the present invention will be described in detail offer.
In a first aspect, the high-frequency sputtering device passes through the embodiment of the invention provides a kind of high-frequency sputtering device for one kind
Apply high frequency current potential to target in a vacuum, the device of film process, as shown in Fig. 1, the height are carried out with the one side to substrate
RF sputtering device includes: sputtering chamber 1, target 2, high-frequency electrode 3, high frequency oscillator 4, DC power supply 5, substrate 6, substrate holder 7
With inflation system 8.Sputtering chamber 1 is used to provide vacuum environment for the film process of substrate 6, and target 2 is arranged in upper in sputtering chamber 1
Portion, 2 back side of target and high-frequency electrode 3 are fixedly connected electrically conductively, and high-frequency electrode 3 is fixedly mounted on sputtering chamber by insulating materials
1 upper end；High frequency oscillator 4 is adjustable vibration device, and the input terminal of high frequency oscillator 4 connects DC power supply 5, output end connection
High-frequency electrode 3；Substrate 6 is arranged in the lower part in sputtering chamber 1, and with the positive face of target 2, substrate 6 is fixedly mounted on substrate branch
On seat 7, substrate holder 7 is installed in rotation on the lower end of sputtering chamber 1；Inflation system 8 is connected to sputtering chamber 1, is used for sputtering
Room 1 provides sputter gas and reaction gas.
The working principle of high-frequency sputtering device provided in an embodiment of the present invention is illustrated below:
In application, first carrying out vacuumize process to sputtering chamber 1, the vacuum degree of sputtering chamber is made to reach 1 × 10-1Torr(1Torr
=133.322Pa) more than, the sputter gas and reaction gas of proper proportion are filled with into sputtering chamber 1 using inflation system 8, is splashed
Body of emanating can be inert gas such as argon gas, and the film of reaction gas deposition according to needed for substrate 6 in actual production is selected,
High pressure is applied to high-frequency electrode 3 and target 2 using DC power supply 5 and high frequency oscillator 4, the gas in sputtering chamber 1 is under high pressure
Breakdown and start to discharge, since target 2 has an alternation current potential, cation, electronics and the atom in gas discharge are in meeting
Always the constantly target surface of directive target 2, so that the surface atom on target 2 be made to escape, the surface atom escaped on target 2 exists
The upper surface of substrate 6 deposits and forms film.
As it can be seen that high-frequency sputtering device provided in an embodiment of the present invention can sputter insulator target, thus serving as a contrast
Deposit required insulator film on bottom, and can guarantee the uniformity of the insulator film thickness of acquisition, structure is simple, manufacture at
This is low and easy to operate.
Wherein, in order to reduce the contact resistance between the impedance of target 2 and target 2 and high-frequency electrode 3 as much as possible, to improve
Sputter effect.In the embodiment of the present invention, smooth processing is made on the surface of target 2, and target 2 is made to have biggish area x thickness ratio,
And fillet is set by each corner angle of target 2, so set, can reduce the impedance of target 2；Meanwhile 2 back side of target is used
Target 2 is connect by welding manner or conducting resinl bonding mode with high-frequency electrode 3, so set, can drop by metalized
Contact resistance between low target 2 and high-frequency electrode 3.
Further, high-frequency electrode 3 is made of oxygen-free copper, and middle position is provided with channel, and channel is cold for water flowing
But, 3 outer layer of high-frequency electrode using polytetrafluoroethylene (PTFE) set insulation, using the cooling water of 3 internal circulation of high-frequency electrode come to target 2 into
Row cooling, while shielding case is done using high-purity aluminium, and the position of shielding case is adjustable.
In the embodiment of the present invention, impedance matching network is provided in high frequency oscillator 4, high frequency oscillator 4 uses double tunning
The transformer coupled way of output.So set, can by sputtering system be tuned to resonance to obtain most in gas discharge
Big power transfer.
As described above, high frequency oscillator 4 is adjustable vibration device in the high-frequency sputtering device of the embodiment of the present invention, due to
The frequency of high frequency oscillator 4 is higher, and the series connection capacitive reactance of target 2 is lower, but relatively, the attenuating of sputtering system is higher, and
In high-frequency, it is difficult to accomplish suitable earth-return circuit.It is best to have high-frequency sputtering device provided in an embodiment of the present invention
Performance, the frequency of high frequency oscillator 4 are preferably 10~20MHz.
In the embodiment of the present invention, substrate holder 7 is made of stainless steel, and middle position is provided with for water flowing cooling
Cooling duct.So set, fixation can be supported to substrate 6, and utilize the cooling water energy pair of 7 internal flow of substrate holder
Substrate 6 is cooled down.In addition, installation site of the substrate holder 7 on sputtering chamber 1 is adjustable, adjusted with the position to substrate 6
It is whole, it is thin with the deposition for obtaining high quality so as to according to the actual situation, be adjusted to the interval between substrate 6 and target 2
Film.
As shown in Fig. 1, in the embodiment of the present invention, high-frequency sputtering device further includes rotating mechanism 9, and rotating mechanism 9 connects
In 7 lower end of substrate holder, for driving substrate holder 7 and the substrate 6 installed rotates thereon.So set, passing through rotating mechanism 9
Substrate 6 be can be realized relative to the rotation of target 2, to prepare film in homogeneous thickness on substrate 6.
As shown in Fig. 1, in the embodiment of the present invention, inflation system 8 includes charge valve 81, gas purification apparatus 82 and gas tank
83；81 one end of charge valve is connected to sputtering chamber 1, and the other end is connected to gas purification apparatus 82, for controlling the gas in sputtering chamber 1
The scale of construction；82 one end of gas purification apparatus is connected to charge valve 81, and the other end is connected to gas tank 83；83 one end of gas tank and purification for gas
Device 82 is connected to, and the other end is connected to gas source.
Wherein, charge valve 81 may include fine tuning charge valve and magnetic force charge valve, to realize the gas being added in sputtering chamber 1
The accurate regulation of amount；Gas purification apparatus 82 is used to remove the impurity in sputter gas and reaction gas；Gas tank 83 can be three
It is a, it can specifically include the first gas tank, the second gas tank and mixed gas tank, the gas source connection of the first gas tank and sputter gas is used for
Sputter gas is accommodated, the gas source of the second gas tank and reaction gas connects, and for accommodating reaction gas, mixed gas tank is separately connected the
One gas tank and the second gas tank, for receiving the sputter gas and reaction gas of the first gas tank and the discharge of the second gas tank, to form spy
The mixed gas of certainty ratio, and the first gas tank, the second gas tank and mixed gas tank are mounted on pressure vacuum gauge, in gas tank
Gas pressure is monitored.
In addition, filter device is provided in the first gas tank, the second gas tank and mixed gas tank, to sputter gas and reaction
Gas is filtered, it is ensured that the normal operation of high-frequency sputtering.
Wherein, in order to guarantee that the deposition rate of the film on substrate 6 is kept constant, the thickness to ensure film is uniform.This
In inventive embodiments, the gas pressure in sputtering chamber 1 is controlled 2 × 10-3~1.5 × 10-2Torr。
In the embodiment of the present invention, electric power silicone tube and thermocouple silicone tube can be installed on sputtering chamber 1, wherein electric power silicone tube is used
It is measured in the high vacuum of sputtering chamber 1, thermocouple silicone tube is used for the low-vacuum measurement of sputtering chamber 1.
Second aspect, the embodiment of the invention also provides a kind of high-frequency sputterings implemented using above-mentioned high-frequency sputtering device
Method, this method comprises the following steps:
11) cleaning treatment is carried out to substrate 6；
12) vacuumize process is carried out to sputtering chamber 1, and the vacuum degree of sputtering chamber 1 is made to reach 1 × 10-1Torr or more；
13) sputter gas and reaction gas are filled with to sputtering chamber 1 using inflation system 8；
14) apply high pressure to high-frequency electrode 3 and target 2 using DC power supply 5 and high frequency oscillator 4, to be sputtered；
15) it after substrate 6 completes film deposition, cuts off high frequency oscillator 4 and DC power supply 5 switchs, terminate sputtering.
In step 11), different cleaning modes is used according to different substrate materials, to remove the pollutant on substrate 6,
To improve the adhesive force between deposition film and substrate 6.
In step 12), before carrying out vacuum pumping to sputtering chamber 1, it first is filled with air to sputtering chamber 1, and adjust target
The spacing of material 2 and substrate 6 makes target 2 and 6 face of substrate, and substrate 6 is overlapped with the center line of magnet exciting coil, to ensure to obtain most
High deposition rate and uniform film.
In step 13), sputter gas and reaction gas are filled with the first gas tank and the second gas tank respectively, then by the first gas
Tank and sputter gas in the second gas tank and reaction gas are filled with third gas tank in ratio needed for actual production, utilize charge valve
Mixed gas in third gas tank is filled with sputtering chamber 1 by fine tuning charge valve and magnetic force charge valve in 81.
In step 14), before applying high pressure, the inner case of sputtering chamber 1, the stable gas pressure in room 1 to be sputtered are first checked
Afterwards, so that the cooling water in high-frequency electrode 3 is circulated, and ensure that the connection of coaxial cable and high-frequency electrode 3 is reliable, target 2 and substrate 6
After all right, high-voltage switch gear is connected, high frequency oscillator 4 is adjusted, high-frequency electrode 3 is made to be in glow discharge dark space.
High-frequency sputtering method provided in an embodiment of the present invention can sputter insulator target, thus on substrate
Insulator film needed for deposition, and can guarantee the uniformity of the insulator film thickness of acquisition, it is easy to operate.
It should be noted that, in this document, the relational terms of such as " first " and " second " or the like are used merely to one
A entity or operation with another entity or operate distinguish, without necessarily requiring or implying these entities or operation it
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to
Cover non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or setting
Standby intrinsic element.In addition, placement shape of "front", "rear", "left", "right", "upper", the "lower" herein to be indicated in attached drawing
State is reference.
Finally, it should be noted that the above examples are only used to illustrate the technical scheme of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (9)
1. a kind of high-frequency sputtering device, for by applying high frequency current potential to target in a vacuum, with the one side to substrate carry out at
The device of film process, which is characterized in that described device includes: sputtering chamber (1), target (2), high-frequency electrode (3), high frequency oscillator
(4), DC power supply (5), substrate (6), substrate holder (7) and inflation system (8)；
The sputtering chamber (1) is used to provide vacuum environment for the film process of the substrate (6)；
The top that the target (2) is arranged in the sputtering chamber (1), target (2) back side and the high-frequency electrode (3) can
It is conductively fixedly connected, the high-frequency electrode (3) is fixedly mounted on the upper end of the sputtering chamber (1) by insulating materials；
The high frequency oscillator (4) is adjustable vibration device, and the input terminal of the high frequency oscillator (4) connects the DC power supply
(5), output end connects the high-frequency electrode (3)；
The lower part that the substrate (6) is arranged in the sputtering chamber (1), and with the positive face of the target (2), the substrate
(6) it is fixedly mounted on the substrate holder (7), the substrate holder (7) is installed in rotation under the sputtering chamber (1)
End；
The inflation system (8) is connected to the sputtering chamber (1), for providing sputter gas and reaction to the sputtering chamber (1)
Gas.
2. high-frequency sputtering device according to claim 1, which is characterized in that target (2) back side is using at metallization
Reason, the target (2) are connect by welding manner or conducting resinl bonding mode with the high-frequency electrode (3).
3. high-frequency sputtering device according to claim 1 or 2, which is characterized in that the high-frequency electrode (3) uses oxygen-free copper
Production, and middle position is provided with channel, the channel is cooling for water flowing, and high-frequency electrode (3) outer layer uses polytetrafluoro
Vinyl covering insulation.
4. high-frequency sputtering device according to claim 3, which is characterized in that be provided with resistance in the high frequency oscillator (4)
Anti- matching network, the high frequency oscillator (4) couple the way of output using double tuned transformer.
5. high-frequency sputtering device according to claim 1 or 4, which is characterized in that the substrate holder (7) uses stainless steel
Production, and middle position is provided with the cooling duct cooling for water flowing.
6. high-frequency sputtering device according to claim 5, which is characterized in that described device further includes rotating mechanism (9), institute
It states rotating mechanism (9) and is connected to the substrate holder (7) lower end, for driving the substrate holder (7) and the institute installed thereon
State substrate (6) rotation.
7. high-frequency sputtering device according to claim 1 or 6, which is characterized in that the inflation system (8) includes charge valve
(81), gas purification apparatus (82) and gas tank (83)；
Described charge valve (81) one end is connected to the sputtering chamber (1), and the other end is connected to the gas purification apparatus (82), is used
Gas flow in the control sputtering chamber (1)；
Described gas purification apparatus (82) one end is connected to the charge valve (81), and the other end is connected to the gas tank (83)；
Described gas tank (83) one end is connected to the gas purification apparatus (82), and the other end is connected to gas source.
8. high-frequency sputtering device according to claim 7, which is characterized in that the gas tank (83) includes the first gas tank, the
Two gas tanks and mixed gas tank；
First gas tank is for accommodating the sputter gas；
Second gas tank is for accommodating the reaction gas；
The mixed gas tank is used to receive the sputter gas of first gas tank and second gas tank discharge and described anti-
Gas is answered, to form mixed gas.
9. it is a kind of using the high-frequency sputtering method implemented such as high-frequency sputtering device described in any item of the claim 1 to 8, it is special
Sign is that described method includes following steps:
11) cleaning treatment is carried out to substrate (6)；
12) vacuumize process is carried out to sputtering chamber (1), and the vacuum degree of the sputtering chamber (1) is made to reach 1 × 10-1Torr or more；
13) sputter gas and reaction gas are filled with to the sputtering chamber (1) using inflation system (8)；
14) apply high pressure to high-frequency electrode (3) and target (2) using DC power supply (5) and high frequency oscillator (4), to be splashed
It penetrates；
15) after the substrate (6) complete film deposition, high frequency oscillator (4) and DC power supply (5) switch is cut off, terminate to splash
It penetrates.
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| CN201811256655.XA CN109306457A (en) | 2018-10-26 | 2018-10-26 | High-frequency sputtering device and high-frequency sputtering method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811256655.XA CN109306457A (en) | 2018-10-26 | 2018-10-26 | High-frequency sputtering device and high-frequency sputtering method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110468381A (en) * | 2019-08-30 | 2019-11-19 | 西安理工大学 | A kind of higher-order of oscillation pulsed magnetron sputtering method |
| CN114178067A (en) * | 2022-01-14 | 2022-03-15 | 罗刚 | Nano-imprinting colloid sputtering device and method |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
Citations (3)
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| CN110468381B (en) * | 2019-08-30 | 2021-08-10 | 西安理工大学 | High-frequency oscillation pulse magnetron sputtering method |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
| CN114178067A (en) * | 2022-01-14 | 2022-03-15 | 罗刚 | Nano-imprinting colloid sputtering device and method |
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