CN212925145U

CN212925145U - Brand-new 12-inch physical vapor deposition titanium cavity covering ring accessory device

Info

Publication number: CN212925145U
Application number: CN202021699824.XU
Authority: CN
Inventors: 刘祥超
Original assignee: Shanghai Zhihao Electronic Technology Co ltd
Current assignee: Shanghai Zhihao Electronic Technology Co ltd
Priority date: 2020-08-15
Filing date: 2020-08-15
Publication date: 2021-04-09
Anticipated expiration: 2030-08-15

Abstract

The utility model discloses a brand-new 12 inches physical vapor deposition titanium cavity cover ring accessory device, including the cavity retaining ring, cavity retaining ring upper surface machine-shaping has three concentric rings of group and is concentric ring one, concentric ring two and concentric ring three respectively from inside to outside, and concentric ring one, concentric ring two and concentric ring three all are protruding column structure and the equal machine-shaping in surface have the annular groove, and the annular groove is recessed annular structure, and the edge machine-shaping of concentric ring three has the turn-ups, and turn-ups machine-shaping has the installing port for the cambered surface structure of turning up and peripheral lower surface machine-shaping, and the opening part of installing port is connected with the blade. The utility model discloses an at the carving patterns on accessory surface, increase area of contact can the adhesion attachment more, disperses the stress distribution of these attachments simultaneously, and adnexed attachment is difficult to peel off, reduces the probability that the granule produced, improves the quality of processing procedure, prolongs the cycle of cavity maintenance to improve the rate of utilization of machine, reduce cost.

Description

Brand-new 12-inch physical vapor deposition titanium cavity covering ring accessory device

Technical Field

The utility model relates to a physical vapor deposition technical field specifically is a brand-new 12 inches physical vapor deposition titanium cavity cover ring accessory device.

Background

The physical vapor deposition technology means a technology of gasifying a material source-solid or a liquid surface into gaseous atoms, molecules or partially ionizing into ions under a vacuum condition by adopting a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process, and the main methods of the physical vapor deposition include vacuum evaporation, sputtering coating, arc plasma coating, ion coating, molecular beam epitaxy and the like. Physical vapor deposition techniques have been developed to date to deposit not only metallic films, alloy films, but also chemical compounds, ceramics, semiconductors, polymer films, etc., and physical vapor deposition of titanium chamber cover rings is an important component in physical vapor deposition operations.

However, the existing pvd titanium chamber cover ring assembly has the following problems during use: the existing 12 inch PVD titanium chamber cover ring assembly has a limited ability to adhere reactive attachments to the surface, and as the adhered attachments accumulate, the attachments may peel off the apparatus, generate particles, affect the quality of the process, and shorten the chamber maintenance cycle. For this reason, a corresponding technical scheme needs to be designed to solve the existing technical problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a brand-new 12 inches physical vapor deposition titanium cavity covers ring accessory device, has solved current 12 inches physical vapor deposition titanium cavity and has covered the ring accessory, and the ability of surface adhesion reaction annex is limited, and along with the accumulation of the annex of adhesion, these annexs can peel off from the device, produce the granule, influence the quality of processing procedure, shorten cavity maintenance cycle, this technical problem.

In order to achieve the above object, the utility model provides a following technical scheme: a novel 12-inch physical vapor deposition titanium cavity cover ring accessory device comprises a cavity cover ring, three groups of concentric rings are formed on the upper surface of the cavity cover ring and respectively a first concentric ring, a second concentric ring and a third concentric ring from inside to outside, the first concentric ring, the second concentric ring and the third concentric ring are all in a convex structure, the surfaces of the first concentric ring, the second concentric ring and the third concentric ring are all provided with annular notches, the annular notch is of a concave annular structure, the edge of the concentric ring III is processed and formed with a flange, the flanging is processed and formed into an eversion cambered surface structure, the lower surface of the periphery of the flanging is processed and formed with a mounting hole, the opening of the mounting opening is connected with a blade, one end of the blade is fixedly connected with the inner wall of the mounting opening, the other end of the blade is a free end, a plurality of groups of notch grooves are evenly formed in the surface of the turned edge, and two adjacent groups of notch grooves are formed at equal intervals and are of strip-shaped concave structures.

As a preferred embodiment of the present invention, the diameter of the first concentric ring is smaller than that of the second concentric ring, and the diameter of the second concentric ring is smaller than that of the third concentric ring.

As a preferred embodiment of the utility model, concentric ring one, concentric ring two and concentric ring three all are bellied cyclic annular structure, the thickness of concentric ring two is greater than the thickness of concentric ring one and concentric ring three.

As an optimal implementation mode of the utility model, it is adjacent two sets of a plurality of groups adsorption holes, a plurality of groups have evenly been seted up on the surface of concentric ring the adsorption holes are cyclic annular and distribute.

As a preferred embodiment of the present invention, the adsorption hole has a concave hemispherical structure and a sealed bottom.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the scheme increases the contact area through the carving on the surface of the accessory, can adhere more attachments, disperses the stress distribution of the attachments, ensures that the attached attachments are not easy to peel off, reduces the probability of particle generation, improves the quality of the manufacturing process, prolongs the maintenance period of the cavity, thereby improving the utilization rate of the machine and reducing the cost.

2. This scheme simple structure can effectual improvement cavity maintenance's cycle on the basis that does not increase the part.

Drawings

FIG. 1 is an overall structure diagram of the present invention;

FIG. 2 is an overall cross-sectional view of the present invention;

fig. 3 is a partial a structure diagram of the present invention.

In the figure, a concentric ring I, a concentric ring II, a concentric ring III, a concentric ring notch.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a brand new 12-inch physical vapor deposition titanium cavity covering ring accessory device comprises a cavity covering ring, wherein three groups of concentric rings are formed on the upper surface of the cavity covering ring and respectively comprise a concentric ring I1, a concentric ring II 2, a concentric ring III 3 and a concentric ring I1 from inside to outside, two 2 concentric rings and three 3 concentric rings all are protruding column structure and the equal machine-shaping in surface has annular notch 4, annular notch 4 is recessed annular structure, the edge machine-shaping of three 3 concentric rings has turn-ups 5, turn-ups 5 machine-shaping has installing port 6 for the cambered surface structure of turning up and the peripheral lower surface machine-shaping of turning up, the opening part of installing port 6 is connected with blade 7, the one end of blade 7 is the free end with the inner wall fixed connection and the other end of installing port 6, a plurality of groups notch 8 that carve flowers have still evenly been seted up on turn-ups 5's surface, adjacent two sets of notch 8 equidistance are seted up and all are banding indent formula structure.

Further improved, as shown in fig. 1: the diameter of the concentric ring one 1 is smaller than the diameter of the concentric ring two 2, and the diameter of the concentric ring two 2 is smaller than the diameter of the concentric ring three 3.

Further improved, as shown in fig. 1: the concentric ring I1, the concentric ring II 2 and the concentric ring III 3 are all in a raised annular structure, and the thickness of the concentric ring II 2 is larger than that of the concentric ring I1 and the concentric ring III 3.

Further improved, as shown in fig. 1: a plurality of groups of adsorption holes 9 are uniformly formed in the surfaces of the two adjacent groups of concentric rings, and the adsorption holes 9 are annularly distributed.

Specifically, the adsorption hole 9 is of a concave hemispherical structure, and the bottom of the adsorption hole is of a sealed structure, so that deposited particles can be conveniently stored in the adsorption hole.

When in use: the utility model discloses an have annular notch 4 and notch 8 at cavity cover ring accessory surface design, increase area of contact, can the adhesion attachment more, disperse the stress distribution of these attachments simultaneously, adnexed attachment is difficult to peel off, reduce the probability that the granule produced, improve the quality of processing procedure, prolong the cycle of cavity maintenance, thereby improve the rate of utilization of machine, reduce the cost, and design to have convenient 5 in the periphery and be convenient for with the better laminating of physical vapor deposition titanium cavity.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a brand-new 12 inches physical vapor deposition titanium cavity cover ring accessory device, includes the cavity cover ring, its characterized in that: the cavity cover ring is characterized in that three groups of concentric rings are formed on the upper surface of the cavity cover ring in a machining mode, the concentric rings are a first concentric ring (1), a second concentric ring (2) and a third concentric ring (3) from inside to outside respectively, the first concentric ring (1), the second concentric ring (2) and the third concentric ring (3) are all in a convex structure, the surface of the first concentric ring is provided with annular notches (4), the annular notches (4) are in a concave annular structure, the edge of the third concentric ring (3) is provided with flanges (5), the flanges (5) are in an outward-turned arc structure, the lower surface of the periphery is provided with mounting openings (6), the opening of each mounting opening (6) is connected with a blade (7), one end of each blade (7) is fixedly connected with the inner wall of each mounting opening (6), the other end of each blade is a free end, and the surface of each flange (5) is provided, two adjacent groups of the engraved notches (8) are equidistantly arranged and are in strip-shaped concave structures.

2. The apparatus of claim 1, wherein the apparatus further comprises: the diameter of the concentric ring I (1) is smaller than that of the concentric ring II (2), and the diameter of the concentric ring II (2) is smaller than that of the concentric ring III (3).

3. The apparatus of claim 2, wherein the titanium chamber cover ring assembly comprises: the first concentric ring (1), the second concentric ring (2) and the third concentric ring (3) are all in a raised annular structure, and the thickness of the second concentric ring (2) is larger than that of the first concentric ring (1) and the third concentric ring (3).

4. The apparatus of claim 1, wherein the apparatus further comprises: a plurality of groups of adsorption holes (9) are uniformly formed in the surfaces of two adjacent groups of concentric rings, and the adsorption holes (9) are annularly distributed.

5. The apparatus of claim 4, wherein the titanium chamber cover ring assembly comprises: the adsorption holes (9) are of a concave hemispherical structure, and the bottoms of the adsorption holes are of a sealed structure.