CN212218924U - Monocrystalline silicon bar transfer device - Google Patents
Monocrystalline silicon bar transfer device Download PDFInfo
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- CN212218924U CN212218924U CN202020548285.3U CN202020548285U CN212218924U CN 212218924 U CN212218924 U CN 212218924U CN 202020548285 U CN202020548285 U CN 202020548285U CN 212218924 U CN212218924 U CN 212218924U
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Abstract
The utility model relates to the technical field of hard and brittle material cutting, in particular to a monocrystalline silicon bar material transfer device, which comprises a rotary reversing mechanism, a round bar clamping mechanism, a rim charge clamping mechanism and a square charge clamping mechanism; the rotary reversing mechanism comprises a steering driving mechanism and a rotary seat; the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism are respectively fixed on different side walls of the rotary seat, the round bar clamping mechanism is used for clamping a single crystal silicon rod to be processed, the rim charge clamping mechanism is used for clamping rim charges cut after the single crystal silicon rod is cut, and the square charge clamping mechanism is used for clamping a square bar after the single crystal silicon rod is cut; the steering driving mechanism is used for driving the rotary seat to perform steering motion so as to drive the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism to perform position conversion. Transfer device simple structure in this scheme, the suitability is strong, and degree of automation is high, can reduce use cost when improving transportation efficiency.
Description
Technical Field
The utility model relates to a hard and brittle material cutting technical field especially relates to a monocrystalline silicon bar transfer device.
Background
Silicon crystals are used very widely in the photovoltaic industry. The silicon rod is subjected to primary processing in order to meet the quality parameters of the silicon crystal rod and the appearance and the size of the next process.
The processing of the single silicon crystal rod generally comprises the following steps: firstly, cutting a long silicon crystal bar to form a plurality of sections of short silicon crystal bars, after cutting, squaring the cut short silicon crystal bars to form silicon crystal square bars, generating rim charge after squaring, and then, using a slicer to slice a crystal silicon square body to obtain a silicon wafer. In the process of squaring the monocrystalline silicon rod, the clamping and the transferring of three different bars, namely the monocrystalline silicon rod (round rod), the squared bar (square rod) and the bar (rim charge) cut off by cutting the round rod into the square rod are involved. Among the current apparatus for producing, the transportation of pole and square stick generally can set up the fixture of two sets of independent operation and operate, and the rim charge is then collected or let its nature drop through the manual work. The process operation is complicated, the transfer structure is numerous and complex, the automation degree is low, the use cost is high, and the efficiency is not good.
Disclosure of Invention
Therefore, a single crystal silicon bar material transfer device is needed to be provided to solve the problems that in the existing silicon crystal processing equipment, the transfer structure of the silicon crystal bar material is complex, the automation degree is low, the use cost is high, and the efficiency is poor.
In order to achieve the aim, the inventor provides a monocrystalline silicon bar material transfer device which comprises a rotary reversing mechanism, a round bar clamping mechanism, an edge material clamping mechanism and a square material clamping mechanism;
the rotary reversing mechanism comprises a steering driving mechanism and a rotary seat;
the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism are respectively fixed on different side walls of the rotary seat, the round bar clamping mechanism is used for clamping a single crystal silicon rod to be processed, the rim charge clamping mechanism is used for clamping rim charges cut after the single crystal silicon rod is cut, and the square charge clamping mechanism is used for clamping a square bar after the single crystal silicon rod is cut;
the steering driving mechanism is used for driving the rotary seat to perform steering motion so as to drive the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism to perform position conversion.
As a preferred structure of the utility model, the steering driving mechanism includes a rotary driving motor and a revolving shaft, the revolving shaft is connected with the transmission of the rotary driving motor, and the revolving shaft is sleeved with the rotary seat.
As the utility model discloses a preferred structure, pole fixture includes first mount pad and pole centre gripping subassembly, pole centre gripping subassembly is fixed in the lateral wall of gyration seat through first mount pad, and pole centre gripping subassembly includes pole clamping jaw and pole clamping jaw actuating mechanism that opens and shuts, the pole clamping jaw actuating mechanism that opens and shuts is used for driving the pole clamping jaw and presss from both sides tightly or loosen the single silicon crystal bar.
As a preferred structure of the utility model, pole fixture still includes a elevating system, a elevating system is used for driving pole centre gripping subassembly lifting or decline.
As the utility model discloses a preferred structure, rim charge fixture includes second mount pad and rim charge centre gripping subassembly, rim charge centre gripping subassembly is fixed in the lateral wall of revolving bed through the second mount pad, and rim charge centre gripping subassembly includes rim charge clamping jaw and rim charge clamping jaw actuating mechanism that opens and shuts, the rim charge clamping jaw drive mechanism that opens and shuts is used for driving the rim charge clamping jaw to press from both sides tightly or loosen the monosilicon crystal bar.
As the utility model discloses a preferred structure, rim charge fixture still includes second elevating system, second elevating system is used for driving rim charge centre gripping subassembly lifting or descends.
As the utility model discloses a preferred structure, square stock fixture includes third mount pad and square stock centre gripping subassembly, square stock centre gripping subassembly is fixed in the lateral wall of gyration seat through the third mount pad, and square stock centre gripping subassembly includes that square stock clamping jaw and square stock clamping jaw open and shut actuating mechanism, the square stock clamping jaw opens and shuts actuating mechanism and is used for driving the square stock clamping jaw to press from both sides tightly or loosen the monosilicon crystal bar.
As a preferred structure of the utility model, square stock fixture still includes third elevating system, third elevating system is used for driving square bar centre gripping subassembly lifting or descends.
As a preferred structure of the utility model, the transfer device still includes slide mechanism, gyration reversing mechanism sets up on slide mechanism for drive gyration reversing mechanism along predetermineeing the path motion.
As a preferred structure of the utility model, transfer device still includes crystal line orienting mechanism, crystal line orienting mechanism sets up in one side of slide mechanism, crystal line orienting mechanism includes base, rotary worktable and detecting element all set up on the base, and the detecting element is located one side of rotary worktable for confirm the crystal line of single silicon crystal bar.
Different from the prior art, the technical scheme has the following advantages: the utility model relates to a monocrystalline silicon bar transfer device, transfer device includes gyration reversing mechanism, pole fixture, rim charge fixture and square stock fixture, and the steering drive mechanism among the gyration reversing mechanism can drive the revolving bed to carry out rotary motion, thereby makes pole fixture, rim charge fixture and square stock fixture fixed on the revolving bed rotate, so that pole fixture, rim charge fixture and square stock fixture stop on the clamping station as required, uses pole fixture to centre gripping the monocrystalline silicon bar to be processed as required; and clamping the cut offcut after the silicon single crystal rod is cut by using an offcut clamping mechanism, and clamping the square rod after the silicon single crystal rod is cut by using a square material clamping mechanism. In this scheme, use one set of transfer device alright in order to accomplish the centre gripping of treating the evolution single crystal silicon rod and transport, the centre gripping of the rim charge that the evolution drops is collected and the centre gripping of evolution rear side shape bar is transported, transfer device simple structure, the suitability is strong, and degree of automation is high, can be when improving transport efficiency, reduces use cost.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of a single crystal silicon bar transfer device according to the present invention;
fig. 2 is a schematic cross-sectional view of an embodiment of a rotary reversing mechanism in a single crystal silicon bar transfer device according to the present invention;
fig. 3 is a schematic perspective view of an embodiment of a crystal line orientation mechanism in a single crystal silicon bar transfer device according to the present invention;
fig. 4 is a schematic perspective view of an embodiment of a cutting and grinding all-in-one machine.
Description of reference numerals:
100. a rotary reversing mechanism;
110. a steering drive mechanism; 111. a rotary drive motor; 112. a rotating shaft; 113. a base; 114. a speed reducer; 115. a rotating bearing;
120. a rotary base;
200. a round bar clamping mechanism;
210. a first mounting seat;
220. a round bar clamping assembly; 221. a round bar jaw; 222. the round bar clamping jaw opening and closing driving mechanism;
230. a first lifting mechanism;
300. an edge material clamping mechanism;
310. a second mounting seat;
320. an edge material clamping component; 321. a rim charge clamping jaw; 322. the opening and closing driving mechanism of the rim charge clamping jaw;
330. a second lifting mechanism;
400. a square stock clamping mechanism;
410. a third mounting seat;
420. a square stock clamping component; 421. a square stock clamping jaw; 422. a square material clamping jaw opening and closing driving mechanism;
430. a third lifting mechanism;
500. a sliding mechanism; 510. a sliding base; 520. a sliding table;
600. a crystal line orientation mechanism; 610. an orientation base; 620. a rotary table; 630. a detection element;
700. a single crystal silicon rod;
800. leftover materials;
900. and (5) preparing the square stock.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 1 to 4, the present invention provides a transfer device for transferring a single crystal silicon rod 700, which is used to clamp and transfer the rod during the processing of the single crystal silicon rod, so as to improve the transportation efficiency of the rod and the stability during the transfer process. Specifically, the transfer device comprises a rotary reversing mechanism 100, a round bar clamping mechanism 200, an edge material clamping mechanism 300 and a square material clamping mechanism 400;
the rotary reversing mechanism 100 is used for driving the round bar clamping mechanism 200, the rim charge clamping mechanism 300 and the square charge clamping mechanism 400 to perform position conversion. Specifically, the driving mechanism 100 includes a steering driving mechanism 110 and a rotary base 120;
the round bar clamping mechanism 200, the rim charge clamping mechanism 300 and the square bar clamping mechanism 400 are respectively fixed on different side walls of the rotary base 120, the round bar clamping mechanism 200 is used for clamping a single crystal silicon bar 700 to be processed, the rim charge clamping mechanism 300 is used for clamping a rim charge 800 cut after the single crystal silicon bar 700 is cut, and the square bar clamping mechanism 400 is used for clamping a square bar after the single crystal silicon bar is cut;
the steering driving mechanism 110 is used for driving the rotary base 120 to perform steering motion so as to drive the round bar clamping mechanism 200, the rim charge clamping mechanism 300 and the square charge clamping mechanism 400 to switch positions.
The transfer device comprises a rotary reversing mechanism 100, a round bar clamping mechanism 200, an edge material clamping mechanism 300 and a square material clamping mechanism 400, wherein a steering driving mechanism 110 in the rotary reversing mechanism 100 can drive a rotary base 120 to perform rotary motion, so that the round bar clamping mechanism 200, the edge material clamping mechanism 300 and the square material clamping mechanism 400 fixed on the rotary base 120 rotate, the round bar clamping mechanism 200, the edge material clamping mechanism 300 and the square material clamping mechanism 400 stay on a clamping station as required, and the round bar clamping mechanism 200 is used for clamping a single crystal silicon bar 700 to be processed as required; the cut-out scrap 800 after the silicon single crystal rod is cut is clamped by the scrap clamping mechanism 300, and the square rod after the silicon single crystal rod is cut is clamped by the square material clamping mechanism 400. In this scheme, use one set of transfer device alright in order to accomplish the centre gripping of treating the evolution single crystal silicon rod and transport, the centre gripping of the rim charge 800 that the evolution drops is collected and the centre gripping of evolution rear material 900 is transported, transfer device simple structure, the suitability is strong, and degree of automation is high, can be when improving transport efficiency, reduces use cost.
As a preferred structure of the present invention, the steering driving mechanism 110 includes a rotation driving motor 111 and a rotation shaft 112, the rotation shaft 112 is connected to the rotation driving motor 111 in a transmission manner, and the rotation base 120 is sleeved on the rotation shaft 112. The rotary driving motor 111 drives the rotary shaft 112 to move, and then drives the rotary base 120 to rotate, so as to change the positions of the round bar clamping mechanism 200, the rim charge clamping mechanism 300 and the square charge clamping mechanism 400 arranged on the side wall of the rotary base 120, and enable the corresponding clamping mechanism to be positioned at a clamping station, so as to clamp and transfer the corresponding bar. Specifically, the steering driving mechanism 110 further includes a base 113, a speed reducer 114 and a rotary bearing 115, the rotary driving motor 111 is mounted on the base 113, the speed reducer 114 is connected to the rotary driving motor 111, and the rotary bearing 115 is sleeved between the rotary shaft 112 and the base 113, so that the rotary shaft 112 can rotate more smoothly. In a preferred embodiment, the rotary seat 120 is a rectangular seat, the round bar clamping mechanism 200, the rim charge clamping mechanism 300 and the square charge clamping mechanism 400 are respectively fixed on three adjacent side walls of the rectangular seat, and the round bar clamping mechanism 200 is located in the middle, so that the rotary seat 120 can complete the switching of the clamping mechanisms only by clockwise or counterclockwise rotating 90 degrees, and the rotary seat is convenient to use and simple to operate.
As a preferred structure of the utility model, pole fixture 200 includes first mount pad 210 and pole clamping component 220, pole clamping component 220 is fixed in the lateral wall of gyration seat 120 through first mount pad 210, and pole clamping component 220 includes pole clamping jaw 221 and pole clamping jaw actuating mechanism 222 that opens and shuts, pole clamping jaw actuating mechanism 222 that opens and shuts is used for driving pole clamping jaw 221 to press from both sides tightly or unclamp the single silicon crystal bar. Specifically, the round bar clamping jaw 221 comprises a left side jaw and a right side jaw, the left side jaw and the right side jaw are symmetrically arranged, and the inner walls of the left side jaw and the right side jaw are arc-shaped, so that the clamping is more stable and firm due to the fact that the inner walls of the left side jaw and the right side jaw are adapted to the arc-shaped surface of the single crystal silicon rod 700. The round bar clamping jaw opening and closing driving mechanism 222 comprises a driving motor, a screw rod and a ball sliding block, the driving motor is connected with the screw rod in a transmission mode, the left clamping jaw and the right clamping jaw are fixed with the screw rod through the ball sliding block, the screw rod is driven to move through the driving motor, the ball sliding block is driven to move, the left clamping jaw and the right clamping jaw are close to or far away from each other, and opening and closing of the round bar clamping jaw 221 are achieved.
As a preferred structure of the present invention, the round bar clamping mechanism 200 further comprises a first lifting mechanism 230, wherein the first lifting mechanism 230 is used for driving the round bar clamping assembly 220 to lift or descend. The position of the round bar clamping assembly 220 can be adjusted by arranging the first lifting mechanism 230, so that the round bar clamping assembly can be clamped to a proper height position of the single crystal silicon rod 700, and the clamping stability is improved. Specifically, the first lifting mechanism 230 includes a lifting driving motor and a ball screw, the lifting driving motor is connected to the ball screw, and the round bar clamping assembly 220 is connected to the ball screw through a mounting sliding plate. In a preferred embodiment, the two groups of the round bar clamping assemblies 220 can be used for clamping two ends of a single silicon crystal bar, so that the clamping is firmer. In a more preferable embodiment, the mounting slide plate is further provided with a guide rail, and the round bar clamping jaw 221 is fixed with the slide rail through a sliding block, so that the clamping jaw moves more stably.
As a preferred structure of the utility model, rim charge fixture 300 includes second mount pad 310 and rim charge clamping component 320, rim charge clamping component 320 is fixed in the lateral wall of revolving bed 120 through second mount pad 310, and rim charge clamping component 320 includes rim charge clamping jaw 321 and rim charge clamping jaw actuating mechanism 322 that opens and shuts, rim charge clamping jaw actuating mechanism 322 that opens and shuts is used for driving rim charge clamping jaw 321 to press from both sides tightly or loosen the monocrystalline silicon ingot. Specifically, rim charge clamping jaw 321 includes left side claw, right side claw, left splint and right splint, and left side claw, left splint set up with right side claw, right splint symmetry, be the arc in splint left side claw and the right side claw to the arcwall face of rim charge 800 that the adaptation monocrystalline silicon rod was cut off, splint and rim charge 800's plane looks adaptation, so that the centre gripping is more stable firm. That is to say, the rim charge clamping jaw is provided with a left fixed clamping plate and a right fixed clamping plate on the basis of the round bar clamping jaw 221. Rim charge clamping jaw actuating mechanism 322 that opens and shuts is the same with pole clamping jaw actuating mechanism 222 that opens and shuts, including driving motor, lead screw and ball, driving motor is connected with screw drive, and left clamping jaw and right clamping jaw pass through ball and fixed with the lead screw, drive the lead screw motion through driving motor to drive ball motion, make left clamping jaw be close to or keep away from left splint realize that the clamp of left side rim charge gets and right clamping jaw is close to or keep away from right splint and realize that the clamp of right side rim charge 800 gets.
As a preferred structure of the present invention, the rim charge clamping mechanism 300 further includes a second lifting mechanism 330, the second lifting mechanism 330 is used to drive the rim charge clamping assembly 320 to lift or descend. Can adjust the position of rim charge centre gripping subassembly 320 through setting up first elevating system 230 to its suitable high position that can the centre gripping to rim charge 800 prevents that the rim charge focus from too high or low excessively, leads to the unstable or even cracked problem of rim charge centre gripping. In a preferred embodiment, the second elevating mechanism 330 may have the same structure as the first elevating mechanism 230.
As the utility model discloses a preferred structure, square stock fixture 400 includes third mount pad 410 and square stock clamping component 420, square stock clamping component 420 is fixed in the lateral wall of gyration seat 120 through third mount pad 410, and square stock clamping component 420 includes square stock clamping jaw 421 and square stock clamping jaw actuating mechanism 422 that opens and shuts, square stock clamping jaw actuating mechanism 422 that opens and shuts is used for driving square stock clamping jaw 421 to press from both sides tightly or loosen the monocrystalline silicon crystal bar. Specifically, the square bar clamping jaw includes left side claw and right side claw, controls the symmetrical setting of side claw, and left side claw and right side claw are the plane splint to the plane lateral wall of adaptation square stock 900, the centre gripping is more stable firm. The square material clamping jaw opening and closing driving mechanism 422 comprises a driving motor, a screw rod and a ball sliding block, the driving motor is connected with the screw rod in a transmission mode, the left clamping jaw and the right clamping jaw are fixed with the screw rod through the ball sliding block, the screw rod is driven to move through the driving motor, the ball sliding block is driven to move, the left clamping jaw and the right clamping jaw are close to or far away from each other, and opening and closing of the square material clamping jaw 421 are achieved.
As an optimized structure of the present invention, the square stock clamping mechanism 400 further includes a third lifting mechanism 430, and the third lifting mechanism 430 is used to drive the square bar clamping assembly to lift or descend. The position of the square stock clamping assembly 420 can be adjusted by arranging the third lifting mechanism 430, so that the square stock can be clamped to a proper height position, and the clamping stability is improved. In a preferred embodiment, the square material clamping assemblies 420 are divided into an upper group and a lower group, so that the square rods can be clamped from the upper end and the lower end simultaneously, and the clamping is more stable and firm.
As a preferred structure of the utility model, the transfer device still includes slide mechanism 500, gyration reversing mechanism 100 sets up on slide mechanism 500 for drive gyration reversing mechanism 100 along predetermineeing the route motion. The sliding mechanism 500 can be used for driving the rotary reversing mechanism 100 to slide along the track of the sliding mechanism 500 so as to facilitate the transportation of the rod material, for example, the monocrystalline silicon rod 700 is transported to the lower part of the wire saw cutting mechanism through the round rod clamping mechanism 200 so as to facilitate the cutting operation. Specifically, the sliding mechanism 500 includes a sliding base 510 and a sliding table 520, the sliding table 520 is slidably disposed on the sliding base 510, and the rotary reversing mechanism 100 is disposed on the sliding table 520. Preferably, the transfer device further comprises a sliding table 520 displacement driving mechanism to drive the sliding table 520 to move along the sliding base 510.
As a preferred structure of the utility model, the transfer device still includes crystal line orientation mechanism 600 on rotary worktable 620, crystal line orientation mechanism 600 sets up in one side of slide mechanism 500, crystal line orientation mechanism 600 includes orientation base 610, rotary worktable 620 and detecting element 630 all set up on base 113, and the detecting element is located one side of rotary worktable 620 for confirm the crystal line of single silicon crystal bar. The single crystal silicon rod 700 is placed on the rotary table 620, and the single crystal silicon rod 700 is adjusted to be concentric with the rotary table 620 by clamping the single crystal silicon rod by the round rod clamping mechanism 200. Then, the rotary table 620 rotates to drive the single crystal silicon rod 700 to rotate, and the crystal line of the single crystal silicon rod 700 is detected through the detection unit, so that the angle of the crystal line is determined, and the cutting of the single crystal silicon rod 700 is facilitated. The angle alignment of the crystal line is simple and the operation is convenient.
In a further embodiment as shown in fig. 4, the present invention further provides a cutting and grinding integrated machine, which is suitable for the cutting of silicon crystal bar and the polishing and grinding work after the cutting. The cutting and grinding integrated machine comprises a cutting operation mechanism, a grinding head mechanism, a bar clamping tool and a transfer device, wherein the transfer device is the single crystal silicon bar transfer device, the bar clamping tool is used for fixing a bar to be processed, the cutting operation mechanism is used for cutting the bar, and the grinding head mechanism is arranged on a rack of the cutting operation mechanism and used for polishing and grinding after the bar is cut. The grinding head mechanism is used for grinding and polishing the cut surfaces of the silicon crystal bars, and the grinding head mechanism can be made of existing mature products. The cutting and grinding all-in-one machine uses the transfer device to process the silicon single crystal rod, and is high in efficiency and low in use cost.
It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the scope of the present invention.
Claims (10)
1. The transfer device for the monocrystalline silicon bar materials is characterized by comprising a rotary reversing mechanism, a round bar clamping mechanism, an edge material clamping mechanism and a square material clamping mechanism;
the rotary reversing mechanism comprises a steering driving mechanism and a rotary seat;
the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism are respectively fixed on different side walls of the rotary seat, the round bar clamping mechanism is used for clamping a single crystal silicon rod to be processed, the rim charge clamping mechanism is used for clamping rim charges cut after the single crystal silicon rod is cut, and the square charge clamping mechanism is used for clamping a square bar after the single crystal silicon rod is cut;
the steering driving mechanism is used for driving the rotary seat to perform steering motion so as to drive the round bar clamping mechanism, the rim charge clamping mechanism and the square charge clamping mechanism to perform position conversion.
2. The single crystal silicon ingot transfer device of claim 1, wherein the steering driving mechanism comprises a rotary driving motor and a rotary shaft, the rotary shaft is in transmission connection with the rotary driving motor, and the rotary seat is sleeved on the rotary shaft.
3. The single crystal silicon bar transfer device according to claim 2, wherein the round bar clamping mechanism comprises a first mounting seat and a round bar clamping assembly, the round bar clamping assembly is fixed on the side wall of the rotary seat through the first mounting seat, the round bar clamping assembly comprises a round bar clamping jaw and a round bar clamping jaw opening and closing driving mechanism, and the round bar clamping jaw opening and closing driving mechanism is used for driving the round bar clamping jaw to clamp or loosen the single crystal silicon bar.
4. The single crystal silicon rod transfer device of claim 3, wherein the round bar clamping mechanism further comprises a first lifting mechanism, and the first lifting mechanism is used for driving the round bar clamping assembly to lift or lower.
5. The single crystal silicon bar transfer device according to claim 1, wherein the rim charge clamping mechanism comprises a second mounting seat and a rim charge clamping assembly, the rim charge clamping assembly is fixed on the side wall of the rotary seat through the second mounting seat, the rim charge clamping assembly comprises a rim charge clamping jaw and a rim charge clamping jaw opening and closing driving mechanism, and the rim charge clamping jaw opening and closing driving mechanism is used for driving the rim charge clamping jaw to clamp or loosen the single crystal silicon bar.
6. The single crystal silicon rod transfer device of claim 5, wherein the scrap clamping mechanism further comprises a second lifting mechanism, and the second lifting mechanism is used for driving the scrap clamping assembly to ascend or descend.
7. The single crystal silicon bar transfer device according to claim 1, wherein the square material clamping mechanism comprises a third mounting seat and a square material clamping assembly, the square material clamping assembly is fixed on the side wall of the rotary seat through the third mounting seat, the square material clamping assembly comprises a square material clamping jaw and a square material clamping jaw opening and closing driving mechanism, and the square material clamping jaw opening and closing driving mechanism is used for driving the square material clamping jaw to clamp or loosen a single crystal silicon bar.
8. The single crystal silicon rod transfer device of claim 3, wherein the square material clamping mechanism further comprises a third lifting mechanism, and the third lifting mechanism is used for driving the square rod clamping assembly to lift or lower.
9. The transfer device for monocrystalline silicon rods as claimed in claim 1, further comprising a sliding mechanism, wherein the rotary reversing mechanism is disposed on the sliding mechanism and used for driving the rotary reversing mechanism to move along a predetermined path.
10. The transfer device of single crystal silicon bar stock as claimed in claim 1, further comprising a crystal line orientation mechanism, wherein the crystal line orientation mechanism is arranged on one side of the sliding mechanism, the crystal line orientation mechanism comprises a base, a rotary table and a detection element, the rotary table and the detection element are both arranged on the base, and the detection unit is arranged on one side of the rotary table and used for determining the crystal line of the single crystal silicon bar.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020548285.3U CN212218924U (en) | 2020-04-14 | 2020-04-14 | Monocrystalline silicon bar transfer device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020548285.3U CN212218924U (en) | 2020-04-14 | 2020-04-14 | Monocrystalline silicon bar transfer device |
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| CN212218924U true CN212218924U (en) | 2020-12-25 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820681A (en) * | 2021-01-06 | 2021-05-18 | 广州方群科技有限公司 | High-end equipment semiconductor silicon rod transfer device for manufacturing |
| CN112981517A (en) * | 2021-03-21 | 2021-06-18 | 陈文� | Single crystal furnace with automatically-detached single crystal rod and detaching method thereof |
-
2020
- 2020-04-14 CN CN202020548285.3U patent/CN212218924U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820681A (en) * | 2021-01-06 | 2021-05-18 | 广州方群科技有限公司 | High-end equipment semiconductor silicon rod transfer device for manufacturing |
| CN112981517A (en) * | 2021-03-21 | 2021-06-18 | 陈文� | Single crystal furnace with automatically-detached single crystal rod and detaching method thereof |
| CN112981517B (en) * | 2021-03-21 | 2023-09-15 | 昆明汇泉高纯半导材料有限公司 | Single crystal furnace capable of automatically disassembling single crystal rod and disassembling method thereof |
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