CN212168431U - Auxiliary furnace chamber cleaning device and auxiliary furnace chamber cleaning system - Google Patents
Auxiliary furnace chamber cleaning device and auxiliary furnace chamber cleaning system Download PDFInfo
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- CN212168431U CN212168431U CN202020754127.3U CN202020754127U CN212168431U CN 212168431 U CN212168431 U CN 212168431U CN 202020754127 U CN202020754127 U CN 202020754127U CN 212168431 U CN212168431 U CN 212168431U
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Abstract
The utility model relates to a vice furnace chamber cleaning device, include: the main frame comprises an accommodating cavity formed by a bottom plate and side walls surrounding the bottom plate, and a cover plate covering the opening end of the accommodating cavity; the brush disc is arranged on one side of the cover plate of the main frame, and brushes are arranged on the top surface of the brush disc, which is far away from the main frame, and the side surface adjacent to the top surface; the moving structure comprises a rotating part and a lifting part which are positioned in the accommodating cavity, the rotating part comprises a rotary driving unit and a rotating shaft, one end of the rotating shaft is connected with the driving unit, and the other end of the rotating shaft penetrates through a through hole in the cover plate and is connected with the brush disc; the lifting part comprises a walking motor arranged on the side wall of the main frame, a through hole is formed in the side wall, and a shell of the walking motor is exposed out of the through hole to be in contact with the inner wall of the auxiliary furnace chamber so as to drive the main frame to move in the auxiliary furnace chamber and enable the brush to clean the inner wall of the auxiliary furnace chamber. The utility model discloses still relate to a clean system of auxiliary furnace room.
Description
Technical Field
The utility model relates to a clean technical field especially relates to an auxiliary furnace room cleaning device and auxiliary furnace room cleaning system.
Background
Polycrystalline silicon is a major raw material for producing solar photovoltaic products and semiconductor products. The Czochralski (Cz) method is one of the most commonly used methods for producing single crystal silicon. After the traditional Cz single crystal furnace finishes the production of a furnace of polysilicon raw material pulled single crystal silicon rods, a great deal of complicated work needs to be done for cleaning a single crystal silicon growth system, and the working procedures of taking out and cleaning a thermal field part, cleaning the inside of a dome chamber, cleaning a heat shield, cleaning the outer surface of a main furnace chamber, cleaning the inside of an auxiliary furnace chamber and the like are carried out. The processes are time-consuming and labor-consuming, the overall working hour for producing the silicon single crystal rod is increased, and the production efficiency of the straight pull type single crystal silicon is severely limited. Especially, in the clean in-process of monocrystalline silicon production system equipment, relate to manual operation in a large number, the clean degree of difficulty is great, and the cleaning personnel figure is many and efficiency is lower. In addition, excessive manual operations may increase the cost of business training for the associated operators and risk damage to equipment associated with the single crystal silicon growth system. On the other hand, with the continuous improvement of the requirements of the industry, the monocrystalline silicon growth system is more and more complex, and the traditional manual operation can not meet the requirements any more. All in all, manual operation is complicated, the efficiency is low, potential safety hazards exist, and the training cost of enterprise personnel is high.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides an auxiliary furnace room cleaning device and auxiliary furnace room cleaning system solves the problem of artifical clean inefficiency.
In order to achieve the above purpose, the utility model discloses a technical scheme is: a secondary furnace chamber cleaning apparatus comprising:
the main frame comprises an accommodating cavity formed by a bottom plate and side walls surrounding the bottom plate, and a cover plate covering the opening end of the accommodating cavity;
the brush disc is arranged on one side of the cover plate of the main rack, and brushes are arranged on the top surface of the brush disc, which is far away from the main rack, and the side surface adjacent to the top surface;
the moving structure comprises a rotating part and a lifting part which are positioned in the accommodating cavity, the rotating part comprises a rotary driving unit and a rotating shaft, one end of the rotating shaft is connected with the driving unit, and the other end of the rotating shaft penetrates through a through hole in the cover plate to be connected with the brush disc; the lifting part comprises a walking motor arranged on the side wall of the main frame, a through hole is formed in the side wall, a shell of the walking motor is exposed out of the through hole to be in contact with the inner wall of the auxiliary furnace chamber and drive the main frame to move in the auxiliary furnace chamber and enable the brush to clean the inner wall of the auxiliary furnace chamber.
Optionally, the rotary driving unit includes a rotary driving motor, the rotary part further includes a gear transmission unit disposed between the rotary driving motor and the rotary shaft, the gear transmission unit includes a driving gear connected to the rotary driving motor and a driven gear connected to the rotary shaft, the driving gear is engaged with the driven gear to drive the rotary shaft to rotate under the driving of the driving motor.
Optionally, the rotating portion further includes a first adjustment control unit for controlling a state of the rotary drive motor to adjust a rotation speed of the rotating shaft.
Optionally, the side wall is evenly provided with a plurality of through holes, the lifting part comprises a plurality of walking motor sets which are arranged in a one-to-one correspondence manner with the through holes, and each walking motor set comprises at least one walking motor which is arranged along the lifting direction of the main frame.
Optionally, the lifting unit further includes a second adjustment control unit for controlling a state of the traveling motor to adjust a lifting speed of the main frame.
Optionally, the moving structure further includes a horizontal moving part, configured to control the traveling motor to move in a direction perpendicular to a lifting direction of the main frame, so as to increase or decrease an area of a portion of the traveling motor exposed out of the through hole, where the horizontal moving part includes horizontal moving units corresponding to the plurality of traveling motor sets one to one.
Optionally, the horizontal moving unit further includes a horizontal moving driving motor and a transmission assembly disposed between the walking motor and the horizontal moving driving motor;
the horizontal movement part further comprises a third adjustment control unit for controlling the state of the horizontal movement driving motor to adjust the moving speed of the traveling motor in the direction perpendicular to the lifting direction of the main frame.
Optionally, the moving structure further includes a bracket for fixing the traveling motor in each traveling motor set, the bracket includes two connecting plates connected to two opposite sides of the through hole, and two supporting rods arranged between the two connecting plates and opposite to each other, and each supporting rod is provided with at least one connecting hole along the lifting direction of the main frame for the connecting shaft of the traveling motor to pass through;
a track with the extending direction perpendicular to the lifting direction of the main rack is arranged on the connecting plate, a connecting shaft of the walking motor penetrates through a connecting hole in the supporting rod to be movably connected to the track, and a connecting rod is connected between the two supporting rods;
the transmission assembly comprises a lead screw arranged between the horizontal movement driving motor and the connecting rod, and the horizontal movement driving motor drives the corresponding walking motor set to move along the direction vertical to the lifting direction of the main frame.
Optionally, the rotating shaft is a hollow shaft, and a through hole communicated with the center of the rotating shaft is formed in the brush disc;
the mobile structure is still including being used for the response the sensor of the lift position of main frame, and according to the signal control that the sensor sent the control portion that the lift portion stopped to go up and down, the sensor wears to locate the rotation axis and in the through-hole on the brush dish, the top of sensor expose in through-hole on the brush dish, perhaps the top of sensor with the brush dish is kept away from the one side parallel and level of main frame, perhaps the top of sensor is located in the through-hole of brush dish.
Optionally, the device further comprises a recovery structure, wherein the recovery structure comprises an air injection part and an adsorption part;
the air injection part comprises a plurality of air injection holes arranged at the edge of the cover plate, a plurality of air inlet holes arranged on the bottom plate and a pipeline arranged between the air injection holes and the air inlet holes, and the air inlet holes are communicated with an external dry compressed air supply structure through the pipeline;
the rotary shaft is a hollow shaft arranged in a hollow mode, a through hole which is right opposite to the center of the rotary shaft is formed in the brush disc, the adsorption part comprises an adsorption hole which is formed in the bottom plate and communicated with the inside of the rotary shaft, and the adsorption hole is communicated with an external vacuum pump through a pipeline.
Optionally, the walking motor includes a cylindrical body, an extending direction of the cylindrical body is perpendicular to a lifting direction of the main frame, and the outer portion of the cylindrical body is coated with the outer shell made of rubber.
Optionally, the traveling motor is an outer rotor brushless dc speed reduction motor.
The embodiment of the utility model also provides an auxiliary furnace chamber cleaning system, which comprises the auxiliary furnace chamber cleaning device,
the rotating part further comprises a first adjusting and controlling unit which is used for controlling the state of the rotating driving motor so as to adjust the rotating speed of the rotating shaft;
the lifting part also comprises a second adjusting and controlling unit which is used for controlling the state of the walking motor so as to adjust the lifting speed of the main frame;
the moving structure further comprises a horizontal moving part, the horizontal moving part comprises horizontal moving units which correspond to the plurality of walking motor sets one to one, the horizontal moving units further comprise horizontal moving driving motors and transmission assemblies arranged between the walking motors and the horizontal moving driving motors, and the horizontal moving part further comprises a third adjusting and controlling unit which is used for controlling the states of the horizontal moving driving motors so as to adjust the moving speed of the walking motors in the direction perpendicular to the lifting direction of the main frame;
the first regulation control unit, the second regulation control unit and the third regulation control unit are all electrically connected with a plug socket on the bottom plate of the main frame;
the auxiliary furnace chamber cleaning system also comprises a wire controller used for sending control signals to the first adjusting control unit, the second adjusting control unit and the third adjusting control unit, and the wire controller is electrically connected with the plug socket through a cable.
Alternatively to this, the first and second parts may,
the rotating shaft is a hollow shaft which is arranged in a hollow mode, and a through hole communicated with the center of the rotating shaft is formed in the brush disc;
the moving structure further comprises a sensor used for sensing the lifting position of the main frame and a control part used for controlling the lifting part to stop lifting according to signals sent by the sensor, the sensor is arranged in the rotating shaft and the through hole in the brush disc in a penetrating mode, the top end of the sensor is exposed out of the through hole in the brush disc, or the top end of the sensor is flush with one surface, far away from the main frame, of the brush disc, or the top end of the sensor is located in the through hole in the brush disc;
the wire controller is also used for receiving a signal which is sent by the sensor and comprises position information that the main frame moves to the top of the auxiliary furnace chamber, and sending a signal which comprises information for stopping the lifting of the main frame to the first adjusting control unit according to the signal sent by the sensor.
The utility model has the advantages that: the inner wall of the auxiliary furnace chamber is automatically cleaned through the auxiliary furnace chamber cleaning device, the cleaning difficulty is reduced, and the cleaning efficiency is improved.
Drawings
FIG. 1 is an exploded view of an auxiliary furnace chamber cleaning apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating an internal structure of a main frame according to an embodiment of the present invention;
FIG. 3 is a schematic view showing a part of a cleaning device for a sub-furnace chamber according to an embodiment of the present invention;
fig. 4 shows a schematic diagram of a line controller in an embodiment of the present invention.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Among the conventional art, carry out the auxiliary furnace room through manual operation and clean, inefficiency, this embodiment provides an auxiliary furnace room cleaning device, cleans automatically, reduces and washs the degree of difficulty, promotes the cleaning efficiency.
Specifically, referring to fig. 1 to 3, the present embodiment provides a cleaning apparatus for a sub-furnace chamber 1, including:
the main frame comprises an accommodating cavity formed by a bottom plate 18 and a side wall 6 surrounding the bottom plate 18, and a cover plate 5 covering the opening end of the accommodating cavity;
the brush disc 2 is arranged on one side of a cover plate 5 of the main rack, and brushes are arranged on the top surface of the brush disc 2, which is far away from the main rack, and the side surface adjacent to the top surface;
the moving structure comprises a rotating part and a lifting part which are positioned in the accommodating cavity, the rotating part comprises a rotating driving unit and a rotating shaft 14, one end of the rotating shaft 14 is connected with the driving unit, and the other end of the rotating shaft 14 penetrates through a through hole in the cover plate 5 to be connected with the brush disc 2; the lift portion including set up in walking motor 7 on the lateral wall 6 of main frame, be provided with the through-hole on the lateral wall 6, the shell of walking motor 7 expose in the through-hole in order can with the contact of 1 inner wall of auxiliary furnace room, in order to drive the main frame is in remove, make in 1 inner wall of auxiliary furnace room the brush cleans to the auxiliary furnace room.
Through the control of lift portion the host computer frame removes in auxiliary furnace room 1, drives through the rotating part brush dish 2 is rotatory to through brush on the dish 2 cleans 1 inner walls in auxiliary furnace room, need not the manual work, carries out the cleanness of 1 inner walls in auxiliary furnace room automatically, and is simple swift, uses manpower sparingly, promotes clean efficiency.
In addition, in this embodiment, the lifting unit adopts the traveling motor 7 to realize the lifting motion of the main frame, and the lifting of the main frame is realized by the friction force between the shell of the traveling motor 7 and the inner wall of the auxiliary furnace chamber 1, so that the structure is simple.
In the embodiment, the traveling motor adopts the outer rotor brushless direct current speed reduction motor, and the reversing electric brush does not exist, so that sparks or impurities such as carbon powder and the like are not generated in the using process, and the cleanliness is improved.
In this embodiment, the traveling motor 7 includes a cylindrical body, an extending direction of the cylindrical body is perpendicular to a lifting direction of the main frame, and the outer portion of the cylindrical body is coated with the outer shell made of rubber.
The shell is made of rubber, so that when the shell is cleaned, the friction force between the walking motor 7 and the inner wall of the auxiliary furnace chamber 1 can be enhanced, the main frame is prevented from falling in the cleaning process, other impurities cannot be generated in the friction process with the inner wall of the auxiliary furnace chamber 1 by the rubber material, and the cleanliness is improved.
The specific structural form of the rotating unit may be various, in this embodiment, the rotating driving unit includes a rotating driving motor 15, the rotating part further includes a gear transmission unit disposed between the rotating driving motor 15 and the rotating shaft 14, the gear transmission unit includes a driving gear connected to the rotating driving motor 15 and a driven gear connected to the rotating shaft 14, and the driving gear is engaged with the driven gear to drive the rotating shaft 14 to rotate under the driving of the driving motor.
Referring to fig. 2, the driven gear is disposed at one end of the rotating shaft 14 close to the bottom plate 18, and the driving gear drives the driven gear to rotate, so as to drive the rotating shaft 14 to rotate, thereby realizing rotation of the brush disc 2 connected with the rotating shaft 14, so that the brush cleans the inner wall of the auxiliary furnace chamber 1.
In this embodiment, the rotating portion further includes a first adjustment control unit for controlling a state of the rotation driving motor 15 to adjust the rotation speed of the rotating shaft 14.
The first regulation control unit includes an electronic governor, but is not limited thereto. The cleaning effect is ensured by controlling the rotating speed of the rotating disc.
In this embodiment, a plurality of through holes are uniformly formed in the side wall 6, the lifting unit includes a plurality of traveling motor units that are disposed in one-to-one correspondence with the plurality of through holes, and each traveling motor unit includes at least one traveling motor 7 that is arranged along the lifting direction of the main frame.
When cleaning, through the shell of walking motor 7 and the contact of the 1 inner wall of auxiliary furnace room to remove along 1 inner wall of auxiliary furnace room, in order to increase the frictional force between the shell of walking motor 7 and the 1 inner wall of auxiliary furnace room, in order to guarantee that the main frame can be stable carry out elevating movement in auxiliary furnace room 1, and then guarantee clean effect, can increase the quantity of walking motor 7, the setting of the concrete quantity of walking motor 7 can be set for according to actual need.
A plurality of traveling motor group along the circumference direction of main frame, even set up in on the lateral wall 6 of main frame, guarantee that the atress is even between main frame and the 1 inner wall of auxiliary furnace room, when guaranteeing to clean, the clean effect is guaranteed to the connection stability between main frame and the 1 inner wall of auxiliary furnace room.
It should be noted that, the distance between the walking motor in each walking motor set and the center of the main frame is the same, so that the consistent friction force between the walking motor and the inner wall of the auxiliary furnace chamber is ensured when the walking motor contacts the inner wall of the auxiliary furnace chamber.
In an embodiment of the present embodiment, the lifting part includes three traveling motor sets, and each traveling motor set includes two traveling motors 7 arranged along the lifting direction of the main frame, that is, the lifting part includes six traveling motors 7, but is not limited thereto.
In this embodiment, the lifting unit further includes a second adjustment control unit for controlling a state of the traveling motor 7 to adjust a lifting speed of the main frame.
The second adjusting and controlling unit may be an electronic speed regulator, but not limited thereto, and the cleaning effect is ensured by adjusting and controlling the lifting speed of the lifting part.
In this embodiment, the moving structure further includes a horizontal moving unit, configured to control the traveling motor 7 to move along a direction perpendicular to a lifting direction of the main frame, so as to increase or decrease an area of a portion of the traveling motor 7 exposed to the through hole, where the horizontal moving unit includes horizontal moving units corresponding to the plurality of traveling motor sets one to one.
In order to ensure the friction force between the walking motor 7 and the inner wall of the auxiliary furnace chamber 1, the area of the part of the walking motor 7 exposed out of the through hole can be adjusted through the horizontal moving part, namely, the distance between the walking motor 7 and the inner wall of the auxiliary furnace chamber 1 in the direction perpendicular to the lifting direction of the main frame is adjusted, so that the main frame can be controlled to stably move up and down in the auxiliary furnace chamber 1.
In this embodiment, the horizontal movement unit further includes a horizontal movement driving motor 8 and a transmission assembly disposed between the walking motor 7 and the horizontal movement driving motor;
the horizontal movement section further includes a third adjustment control unit for controlling a state of the horizontal movement driving motor 8 to adjust a moving speed of the traveling motor 7 in a direction perpendicular to a lifting direction of the main frame.
The third adjustment control unit may include an electronic governor, but is not limited thereto, and controls the movement of the traveling motor 7 in a direction perpendicular to the lifting direction of the main frame to stably adjust the frictional force between the traveling motor 7 and the inner wall of the auxiliary furnace chamber 1.
In this embodiment, the moving structure further includes a bracket (a first bracket 10) for fixing the traveling motor 7 in each traveling motor set, the bracket includes two connecting plates connected to two opposite sides of the through hole, and two supporting rods arranged between the two connecting plates and arranged oppositely, and each supporting rod is provided with at least one connecting hole along the lifting direction of the main frame, through which a connecting shaft of the traveling motor 7 passes;
a track 11 with the extending direction perpendicular to the lifting direction of the main frame is arranged on the connecting plate, a connecting shaft of the walking motor 7 penetrates through a connecting hole in the supporting rod to be movably connected to the track 11, and a connecting rod is connected between the two supporting rods;
the transmission assembly comprises a lead screw 9 arranged between the horizontal movement driving motor 8 and the connecting rod, and the horizontal movement driving motor drives the corresponding walking motor set to move along the direction vertical to the lifting direction of the main frame.
Referring to fig. 2, under the driving of the horizontal movement driving motor 8, the movement of a corresponding group of the traveling motor sets in the direction perpendicular to the lifting direction of the main frame can be controlled integrally, and the distance between all the traveling motors 7 in one traveling motor set and the inner wall of the auxiliary furnace chamber 1 is ensured to be consistent.
In this embodiment, the tracks 11 are sliding grooves disposed on the corresponding connecting plates, but not limited thereto.
In this embodiment, the device further includes a second bracket 16 for supporting the transmission assembly, the lead screw 9 passes through a through hole on the second bracket 16 to be connected with the first bracket 10, the second bracket 16 includes a connecting rod arranged crosswise, and the second bracket 16 is fixedly connected between the bottom plate and the side wall.
In this embodiment, the rotating shaft 14 is a hollow shaft, and the brush tray 2 is provided with a through hole communicated with the center of the rotating shaft 14;
the mobile structure further comprises a sensor 3 used for sensing the lifting position of the main frame, and a control part used for controlling the lifting part to stop lifting according to a signal sent by the sensor 3, the sensor 3 penetrates through the rotating shaft 14 and the through hole in the brush disc 2, the top end of the sensor 3 is exposed in the through hole in the brush disc 2, or the top end of the sensor 3 is parallel and level to one surface of the main frame away from the brush disc 2, or the top end of the sensor 3 is located in the through hole in the brush disc 2.
The setting of sensor 3, response that can be accurate the rising position of main frame avoids brush dish 2 and the 1 top of auxiliary furnace room produce the collision, the position on the top of sensor 3 can be set for according to actual need, in the embodiment of this embodiment, the top of sensor 3 with brush dish 2 is kept away from the one side parallel and level of main frame, both can effectual induction signal when the main frame removes 1 top of auxiliary furnace room, and can avoid 1 top of auxiliary furnace room to the damage of sensor 3, and can make the main frame removes brush dish 2 is kept away from distance between the one side of main frame and the 1 top of auxiliary furnace room is little, guarantees clean effect.
In this embodiment, in order to improve the cleaning effect, the cleaning device for the auxiliary furnace chamber 1 further comprises a recovery structure, wherein the recovery structure comprises an air injection part and an adsorption part;
the air injection part comprises a plurality of air injection holes 4 arranged at the edge of the cover plate 5, a plurality of air inlet holes 12 arranged on the bottom plate 18 and a pipeline 13 arranged between the air injection holes 4 and the air inlet holes 12, and the air inlet holes 12 are communicated with an external dry compressed air supply structure through the pipeline 13;
the rotary shaft 14 is a hollow shaft arranged in a hollow mode, a through hole opposite to the center of the rotary shaft 14 is formed in the brush disc 2, the adsorption part comprises an adsorption hole 19 which is formed in the bottom plate 18 and communicated with the inside of the rotary shaft 14, and the adsorption hole 19 is communicated with an external vacuum pump through a pipeline.
The setting of jet-propelled portion can with particulate matter etc. after the brush is clean blow up, and with the cooperation of absorption portion will the recovery is gone up to the clear particulate matter etc. of brush, and is effectual to 1 inner wall of vice furnace chamber, avoid by particulate matter etc. after the cleanness of brush remain.
The air injection holes 4 are arranged at the edge of the cover plate 5, namely are laterally injected from the bottom of the brush disc 2, so that a rotating air flow is formed, particles and the like can enter the rotating shaft 14 along with the air flow, and the cleaned foreign matters can be effectively recovered.
In an embodiment of this embodiment, the distance between the brush plate 2 and the cover plate 5 is set to a preset distance, and the extending direction of the gas injection hole 4 and the plane where the surface of the cover plate 5 close to the brush plate 2 is inclined at an angle, for example, the angle between the extending direction of the gas injection hole 4 and the plane where the surface of the cover plate 5 close to the brush plate 2 is 45 degrees, so that the gas injection hole 4 injects the injected gas to the inner wall of the sub-furnace chamber 1 in the 45 degree direction, but not limited sequentially.
In this embodiment, the edge of the brush disc 2 is provided with a plurality of through holes 21, and during the rotation process, airflow is ejected from the through holes 21, so that a part of the air can be obliquely ejected to the inner wall (for example, 45 degrees) of the auxiliary furnace chamber, rather than being ejected from the gap between the brush disc 2 and the cover plate 5; the vortex flow of the gas in the auxiliary furnace chamber is formed, so that the blown foreign matters enter the rotating shaft 14 along with the gas flow and are effectively recovered.
It should be noted that, the through hole 21 is relatively large, and the gas orifice 4 is relatively small, referring to fig. 1, in order to avoid the setting of the through hole 21 from affecting the flow direction of the gas ejected from the gas orifice 4, that is, the gas ejected from the gas orifice 4 directly passes through the through hole 21 without passing through the side wall of the through hole 21, the orthographic projection of the gas orifice 4 on the brush plate 2 is located in the through hole 21, the orthographic projection of the gas orifice 4 on the brush plate 2 deviates from the center of the through hole 21 and is located at the part of the through hole 21 close to the rotating shaft, the thickness of the brush plate 2 is smaller than the diameter of the through hole 21, but not limited thereto, in practical application, the thickness of the brush plate 2, the diameter of the through hole 21, the diameter of the gas orifice 4, and the relative positional relationship between the orthographic projections of the through hole 21 and the gas orifice 4 on the brush plate 2 determine the relative position of the gas ejected from the gas orifice Whether the flow direction is changed (the flow direction is changed when the gas is sprayed to the side wall of the through hole 21 or the gas directly penetrates through the through hole 21) or not can be set according to actual needs, so that the flow direction of the gas sprayed from the gas spraying holes 4 is prevented from being influenced.
In this embodiment, the duct 13 between the air injection hole 4 and the air intake hole 12 is an intake manifold.
The number of the gas pipelines included in the gas inlet manifold corresponds to the number of the gas injection holes 4, in an embodiment of the present embodiment, 6 gas injection holes 4 are disposed on the cover plate 5, and the gas inlet manifold has 6 gas pipelines to correspond to the 6 gas injection holes 4 one by one, but not limited thereto.
The embodiment of the utility model also provides a cleaning system of the auxiliary furnace chamber 1, which comprises the cleaning device of the auxiliary furnace chamber 1,
the rotating portion further includes a first adjustment control unit for controlling a state of the rotary drive motor 15 to adjust a rotation speed of the rotating shaft 14;
the lifting part also comprises a second adjusting and controlling unit which is used for controlling the state of the walking motor 7 so as to adjust the lifting speed of the main frame;
the horizontal movement part further comprises a third adjustment control unit for controlling the state of the horizontal movement driving motor 8 to adjust the moving speed of the traveling motor 7 in the direction perpendicular to the lifting direction of the main frame;
the first regulation control unit, the second regulation control unit and the third regulation control unit are all electrically connected with a plug socket 17 on the bottom plate 18 of the main frame;
the cleaning system for the auxiliary furnace chamber 1 further comprises a wire controller for sending control signals to the first regulation control unit, the second regulation control unit and the third regulation control unit, wherein the wire controller is electrically connected with the plug socket 17 through a cable.
Fig. 4 is a schematic view of a wire controller for simply and conveniently controlling the cleaning state of the cleaning device of the auxiliary furnace chamber 1, and the wire controller is provided with a switch for controlling the operation state of the elevating unit, for example, an ascending switch, a descending switch, an accelerating switch, and a decelerating switch for controlling the elevation of the traveling motor 7 by sending a control signal to the first regulation control unit, and an accelerating switch, a decelerating switch for controlling the operation state of the rotation driving motor 15 by sending a control signal to the second regulation control unit.
In this embodiment, the plug socket 17 is an aviation plug, which ensures the reliability of the circuit, but is not limited thereto.
In this embodiment, the rotating shaft 14 is a hollow shaft, and the brush tray 2 is provided with a through hole communicated with the center of the rotating shaft 14;
the moving structure further comprises a sensor 3 for sensing the lifting position of the main frame and a control part for controlling the lifting part to stop lifting according to a signal sent by the sensor 3, the sensor 3 is arranged in the rotating shaft 14 and the through hole on the brush disc 2 in a penetrating way, the top end of the sensor 3 is exposed out of the through hole on the brush disc 2, or the top end of the sensor 3 is flush with the surface of the brush disc 2 far away from the main frame, or the top end of the sensor 3 is positioned in the through hole of the brush disc 2;
the wire controller is also used for receiving a signal which is sent by the sensor 3 and comprises position information of the main frame moving to the top of the auxiliary furnace chamber 1, and sending a signal which comprises information of stopping the lifting of the main frame to the first regulation control unit according to the signal sent by the sensor 3.
Before the auxiliary furnace chamber 1 is cleaned, the controller controls the auxiliary furnace chamber 1 to rotate to a specified position around a main frame of a monocrystalline silicon production system, so that the cleaning work of the inner wall of the auxiliary furnace chamber 1 is facilitated; putting the cleaning device of the auxiliary furnace chamber 1 into the bottom of the auxiliary furnace chamber 1, and aligning the center of the cleaning device of the auxiliary furnace chamber 1 with the center of the auxiliary furnace chamber 1; connecting a CDA (dry compressed air) pipeline to communicate with a dry compressed air supply structure, and connecting a vacuum pump; the operator adjusts the up-and-down moving speed of the cleaning device of the auxiliary furnace chamber 1 (the lifting speed in the auxiliary furnace chamber 1) according to the actual situation; an operator adjusts the rotating speed of a brush disc 2 of the cleaning device of the auxiliary furnace chamber 1 according to the actual situation; when an operator presses an UP key (ascending switch) on the wire controller, the cleaning device of the auxiliary furnace chamber 1 starts to work, ascends along the inner wall of the auxiliary furnace chamber 1 while cleaning, and when the cleaning device of the auxiliary furnace chamber 1 ascends to the top of the inside of the auxiliary furnace chamber 1, the sensor 3 is triggered, and the cleaning device of the auxiliary furnace chamber 1 stops working. The operator then presses the DOWN key (DOWN switch) on the controller and the cleaning device of the sub-furnace 1 moves DOWN along the inner wall of the sub-furnace 1 while cleaning. When the auxiliary furnace chamber 1 cleaning device moves to the bottom of the auxiliary furnace chamber 1, the auxiliary furnace chamber 1 cleaning device stops moving, and an operator takes down the auxiliary furnace chamber 1 cleaning device to complete the auxiliary furnace chamber 1 cleaning work and enter the next working procedure.
In practical application, the cleaning can be carried out repeatedly according to the actual cleaning condition.
After the cleaning process is completed, an operator can also take the cleaning device of the auxiliary furnace chamber 1 out of the auxiliary furnace chamber 1, clean the brush disc 2 and wrap the special dust-free cloth dipped with a proper amount of ethanol outside the brush disc 2, and then put the cleaning device of the auxiliary furnace chamber 1 into the auxiliary furnace chamber 1 again according to the operation flow, so that the deep cleaning of the interior of the auxiliary furnace chamber 1 can be realized.
The above is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should be considered as the protection scope of the present invention.
Claims (14)
1. A secondary furnace chamber cleaning apparatus, comprising:
the main frame comprises an accommodating cavity formed by a bottom plate and side walls surrounding the bottom plate, and a cover plate covering the opening end of the accommodating cavity;
the brush disc is arranged on one side of the cover plate of the main rack, and brushes are arranged on the top surface of the brush disc, which is far away from the main rack, and the side surface adjacent to the top surface;
the moving structure comprises a rotating part and a lifting part which are positioned in the accommodating cavity, the rotating part comprises a rotary driving unit and a rotating shaft, one end of the rotating shaft is connected with the driving unit, and the other end of the rotating shaft penetrates through a through hole in the cover plate to be connected with the brush disc; the lifting part comprises a walking motor arranged on the side wall of the main frame, a through hole is formed in the side wall, a shell of the walking motor is exposed out of the through hole to be in contact with the inner wall of the auxiliary furnace chamber and drive the main frame to move in the auxiliary furnace chamber and enable the brush to clean the inner wall of the auxiliary furnace chamber.
2. The auxiliary furnace chamber cleaning apparatus according to claim 1, wherein the rotary driving unit includes a rotary driving motor, the rotary part further includes a gear transmission unit disposed between the rotary driving motor and the rotary shaft, the gear transmission unit includes a driving gear connected to the rotary driving motor and a driven gear connected to the rotary shaft, and the driving gear is engaged with the driven gear to rotate the rotary shaft by the driving of the driving motor.
3. The auxiliary furnace chamber cleaning apparatus according to claim 2, wherein the rotating portion further comprises a first adjustment control unit for controlling a state of the rotary drive motor to adjust a rotation speed of the rotating shaft.
4. The auxiliary furnace chamber cleaning apparatus as claimed in claim 1, wherein a plurality of through holes are uniformly formed on the side wall, the elevating part includes a plurality of traveling motor units disposed in one-to-one correspondence with the plurality of through holes, and each of the traveling motor units includes at least one traveling motor arranged along an elevating direction of the main frame.
5. The auxiliary furnace chamber cleaning apparatus as claimed in claim 4, wherein the elevating part further comprises a second adjustment control unit for controlling a state of the traveling motor to adjust an elevating speed of the main chassis.
6. The auxiliary furnace chamber cleaning apparatus according to claim 4, wherein the moving structure further comprises a horizontal moving part for controlling the traveling motor to move in a direction perpendicular to a lifting direction of the main frame to increase or decrease an area of a portion of the traveling motor exposed to the through hole, the horizontal moving part including horizontal moving units in one-to-one correspondence with the plurality of traveling motor groups.
7. The auxiliary furnace chamber cleaning apparatus of claim 6, wherein the horizontal moving unit further comprises a horizontal moving driving motor and a transmission assembly disposed between the traveling motor and the horizontal moving driving motor;
the horizontal movement part further comprises a third adjustment control unit for controlling the state of the horizontal movement driving motor to adjust the moving speed of the traveling motor in the direction perpendicular to the lifting direction of the main frame.
8. The auxiliary furnace chamber cleaning apparatus according to claim 7, wherein the moving structure further comprises a bracket for fixing the traveling motor in each traveling motor unit, the bracket comprises two connecting plates connected to opposite sides of the through hole, two oppositely disposed supporting rods disposed between the two connecting plates, and each supporting rod is provided with at least one connecting hole for the connecting shaft of the traveling motor to pass through along the lifting direction of the main frame;
a track with the extending direction perpendicular to the lifting direction of the main rack is arranged on the connecting plate, a connecting shaft of the walking motor penetrates through a connecting hole in the supporting rod to be movably connected to the track, and a connecting rod is connected between the two supporting rods;
the transmission assembly comprises a lead screw arranged between the horizontal movement driving motor and the connecting rod, and the horizontal movement driving motor drives the corresponding walking motor set to move along the direction vertical to the lifting direction of the main frame.
9. The auxiliary furnace chamber cleaning device according to claim 1, wherein the rotating shaft is a hollow shaft which is arranged in a hollow manner, and the brush plate is provided with a through hole which is communicated with the center of the rotating shaft;
the mobile structure is still including being used for the response the sensor of the lift position of main frame, and according to the signal control that the sensor sent the control portion that the lift portion stopped to go up and down, the sensor wears to locate the rotation axis and in the through-hole on the brush dish, the top of sensor expose in through-hole on the brush dish, perhaps the top of sensor with the brush dish is kept away from the one side parallel and level of main frame, perhaps the top of sensor is located in the through-hole of brush dish.
10. The auxiliary furnace chamber cleaning apparatus according to claim 1, further comprising a recovery structure including a gas injection part and an adsorption part;
the air injection part comprises a plurality of air injection holes arranged at the edge of the cover plate, a plurality of air inlet holes arranged on the bottom plate and a pipeline arranged between the air injection holes and the air inlet holes, and the air inlet holes are communicated with an external dry compressed air supply structure through the pipeline;
the rotary shaft is a hollow shaft arranged in a hollow mode, a through hole which is right opposite to the center of the rotary shaft is formed in the brush disc, the adsorption part comprises an adsorption hole which is formed in the bottom plate and communicated with the inside of the rotary shaft, and the adsorption hole is communicated with an external vacuum pump through a pipeline.
11. The auxiliary furnace chamber cleaning apparatus as claimed in claim 1, wherein the traveling motor includes a cylindrical body extending in a direction perpendicular to a lifting direction of the main frame, and the cylindrical body is externally coated with the outer case made of rubber.
12. The auxiliary furnace chamber cleaning device according to claim 1, wherein the traveling motor is an outer rotor brushless dc gear motor.
13. A sub-furnace chamber cleaning system comprising the sub-furnace chamber cleaning apparatus according to any one of claims 1 to 12,
the rotating part further comprises a first adjusting and controlling unit which is used for controlling the state of the rotating driving motor so as to adjust the rotating speed of the rotating shaft;
the lifting part also comprises a second adjusting and controlling unit which is used for controlling the state of the walking motor so as to adjust the lifting speed of the main frame;
the moving structure further comprises a horizontal moving part, the horizontal moving part comprises horizontal moving units which correspond to the plurality of walking motor sets one to one, the horizontal moving units further comprise horizontal moving driving motors and transmission assemblies arranged between the walking motors and the horizontal moving driving motors, and the horizontal moving part further comprises a third adjusting and controlling unit which is used for controlling the states of the horizontal moving driving motors so as to adjust the moving speed of the walking motors in the direction perpendicular to the lifting direction of the main frame;
the first regulation control unit, the second regulation control unit and the third regulation control unit are all electrically connected with a plug socket on the bottom plate of the main frame;
the auxiliary furnace chamber cleaning system also comprises a wire controller used for sending control signals to the first adjusting control unit, the second adjusting control unit and the third adjusting control unit, and the wire controller is electrically connected with the plug socket through a cable.
14. The sub-furnace chamber cleaning system of claim 13,
the rotating shaft is a hollow shaft which is arranged in a hollow mode, and a through hole communicated with the center of the rotating shaft is formed in the brush disc;
the moving structure further comprises a sensor used for sensing the lifting position of the main frame and a control part used for controlling the lifting part to stop lifting according to signals sent by the sensor, the sensor is arranged in the rotating shaft and the through hole in the brush disc in a penetrating mode, the top end of the sensor is exposed out of the through hole in the brush disc, or the top end of the sensor is flush with one surface, far away from the main frame, of the brush disc, or the top end of the sensor is located in the through hole in the brush disc;
the wire controller is also used for receiving a signal which is sent by the sensor and comprises position information that the main frame moves to the top of the auxiliary furnace chamber, and sending a signal which comprises information for stopping the lifting of the main frame to the first adjusting control unit according to the signal sent by the sensor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020754127.3U CN212168431U (en) | 2020-05-09 | 2020-05-09 | Auxiliary furnace chamber cleaning device and auxiliary furnace chamber cleaning system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020754127.3U CN212168431U (en) | 2020-05-09 | 2020-05-09 | Auxiliary furnace chamber cleaning device and auxiliary furnace chamber cleaning system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113385442A (en) * | 2021-05-26 | 2021-09-14 | 山东天岳先进科技股份有限公司 | Crystal furnace cleaning device and method |
| CN113909237A (en) * | 2021-09-10 | 2022-01-11 | 徐州鑫晶半导体科技有限公司 | Cleaning device |
| CN116000033A (en) * | 2022-12-15 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Single crystal furnace auxiliary chamber cleaning device and method |
-
2020
- 2020-05-09 CN CN202020754127.3U patent/CN212168431U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113385442A (en) * | 2021-05-26 | 2021-09-14 | 山东天岳先进科技股份有限公司 | Crystal furnace cleaning device and method |
| CN113909237A (en) * | 2021-09-10 | 2022-01-11 | 徐州鑫晶半导体科技有限公司 | Cleaning device |
| CN116000033A (en) * | 2022-12-15 | 2023-04-25 | 西安奕斯伟材料科技有限公司 | Single crystal furnace auxiliary chamber cleaning device and method |
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