CN211957557U - Radio frequency MEMS switch facing 5G - Google Patents

Radio frequency MEMS switch facing 5G Download PDF

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Publication number
CN211957557U
CN211957557U CN202020601092.XU CN202020601092U CN211957557U CN 211957557 U CN211957557 U CN 211957557U CN 202020601092 U CN202020601092 U CN 202020601092U CN 211957557 U CN211957557 U CN 211957557U
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China
Prior art keywords
electrode
box body
signal line
cover plate
mems switch
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Application number
CN202020601092.XU
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Chinese (zh)
Inventor
朱振宇
俞紫锋
李永飞
刘庆涛
汤文益
陈经建
张旗
李剑
程云辉
章超
俞凯旗
张龙
纪扬
张松涛
向周
吴伟
刘本江
丁伟亮
韩鹏飞
王朝敏
徐栋
姜精诚
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Zhejiang 8Telecom Co Ltd
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Zhejiang 8Telecom Co Ltd
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Priority to CN202020601092.XU priority Critical patent/CN211957557U/en
Application granted granted Critical
Publication of CN211957557U publication Critical patent/CN211957557U/en
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Abstract

The utility model belongs to the field of communication equipment, in particular to a radio frequency MEMS switch facing 5G, which comprises a box body component and a switch component, wherein the box body component comprises a box body and a cover plate, the box body is provided with a mounting groove, the front end of the box body is hinged with the front end of the cover plate, and the rear end of the box body and the rear end of the cover plate are fixed by screws; the switch assembly is arranged in the mounting groove of the box body and comprises a substrate, a signal line, a ground wire, a driving electrode and a first electrode are arranged on the substrate, a second electrode corresponding to the first electrode is arranged on the signal line, one end of the second electrode is connected with the signal line, the other end of the second electrode overhangs the upper end of the driving electrode, one end of the first electrode, which is close to the second electrode, is provided with two first protruding portions, a first contact is arranged on each first protruding portion, and a plurality of through holes are formed in the second electrode. The utility model relates to a rationally, simple structure, the drive voltage who solves traditional PIN, FET switch is on the high side, the volume is great, the performance is relatively poor, the application frequency range is on the low side scheduling problem.

Description

Radio frequency MEMS switch facing 5G
Technical Field
The utility model belongs to the communication equipment field, concretely relates to radio frequency MEMS switch towards 5G.
Background
The traditional PIN and FET switch has the problems of high driving voltage, large volume, poor performance, low application frequency band and the like, and 5G communication has application requirements on small volume, high frequency band and high performance of components, so that the traditional switch is not very suitable for 5G communication. Meanwhile, the traditional switch is directly arranged in the shell, and the shell is difficult to disassemble, so that the detection and maintenance of the switch are inconvenient.
SUMMERY OF THE UTILITY MODEL
In order to compensate the deficiency of the prior art, the utility model provides a radio frequency MEMS switch technical scheme towards 5G.
The radio frequency MEMS switch facing 5G is characterized by comprising a box body assembly and a switch assembly, wherein the box body assembly comprises a box body and a cover plate, the box body is provided with a mounting groove, the front end of the box body is hinged with the front end of the cover plate, and the rear end of the box body and the rear end of the cover plate are fixed through a set screw, so that the cover plate covers the mounting groove of the box body; the switch assembly is arranged in the mounting groove of the box body and comprises a substrate, a signal line, a ground wire, a driving electrode and a first electrode are arranged on the substrate, a second electrode corresponding to the first electrode is arranged on the signal line, one end of the second electrode is connected with the signal line, the other end of the second electrode overhangs the upper end of the driving electrode, one end of the first electrode, which is close to the second electrode, is provided with two first protruding portions, a first contact is arranged on each first protruding portion, and a plurality of through holes are formed in the second electrode.
The radio frequency MEMS switch facing 5G is characterized in that the radio frequency MEMS switch is connected to the cover plate through screws, and the box body is provided with corresponding screw holes.
The radio frequency MEMS switch facing 5G is characterized in that the rear end of the cover plate is provided with a second protruding part, and the second protruding part is connected with a screw.
The radio frequency MEMS switch facing 5G is characterized in that the front end of the box body is provided with a threading pipe.
The radio frequency MEMS switch facing 5G is characterized in that one signal wire is arranged, two ground wires are arranged, three wires are horizontally arranged at intervals, the middle part of each ground wire is disconnected, the disconnected ground wires are connected through an air bridge, a driving electrode is arranged at the disconnection position of the two ground wires and is vertical to the ground wires and the signal wire, the signal wire and a first electrode are positioned on the same straight line, the signal wire and the first electrode are both positioned between the two ground wires, and the signal wire and the first electrode are separated through the disconnection position of the ground wires.
The radio frequency MEMS switch facing 5G is characterized in that a first anchor point used for being connected with a second electrode is arranged on a signal line.
The radio frequency MEMS switch facing 5G is characterized in that a second anchor point used for supporting an air bridge is arranged on a ground wire.
Compared with the prior art, the utility model relates to a rationally, simple structure, the drive voltage who solves traditional PIN, FET switch is on the high side, the volume is great, the performance is relatively poor, the application frequency range is on the low side scheduling problem, moreover the utility model discloses still set up the box body subassembly, with switch unit mount in the box body subassembly, conveniently make things convenient for the dismouting again when providing the protection, be favorable to the detection and the maintenance of switch.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural diagram of a switch assembly according to the present invention;
fig. 3 is a schematic view of a connection structure of the signal line, the first electrode and the second electrode according to the present invention.
In the figure: the device comprises a box body 1, a mounting groove 100, a screw hole 101, a threading pipe 102, a cover plate 2, a second protruding portion 200, a screw 3, a substrate 4, a signal wire 5, a ground wire 6, a driving electrode 7, a first electrode 8, a first protruding portion 800, a first contact 801, a second electrode 9, a through hole 900, an air bridge 10, a first anchor point 11 and a second anchor point 12.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
As shown in the figure, a radio frequency MEMS switch towards 5G, includes box body subassembly and switch module, and the box body subassembly includes box body 1 and apron 2, has mounting groove 100 on the box body 1, and the front end of box body 1 is articulated with the front end of apron 2, and the rear end of box body 1 is fixed through the screw 3 that sets up with the rear end of apron 2, makes 2 lids of apron fit on the mounting groove 100 of box body 1. The switch assembly is arranged in the mounting groove 100 of the box body 1 and comprises a substrate 4, a signal line 5, a ground line 6, a driving electrode 7 and a first electrode 8 are arranged on the substrate 4, wherein the signal line 5 and the ground line 6 form a coplanar waveguide transmission line, a second electrode 9 corresponding to the first electrode 8 is arranged on the signal line 5, one end of the second electrode 9 is connected with the signal line 5, the other end of the second electrode overhangs the upper end of the driving electrode 7, one end of the first electrode 8, close to the second electrode 9, is provided with two first bulges 800, a first contact 801 is arranged on the first bulges 800, and a plurality of through holes 900 are formed in the second electrode 9.
As the utility model discloses an optimize structure: the screw 3 is connected to the cover plate 2, and the box body 1 is provided with a corresponding screw hole 101.
As the utility model discloses an optimize structure: the rear end of the cover plate 2 has a second protrusion 200, and the screw 3 is coupled to the second protrusion 200.
As the utility model discloses an optimize structure: the front end of the box body 1 is provided with a threading pipe 102, and the threading pipe 102 is used for threading.
As the utility model discloses an optimize structure: the signal line 5 has one, the ground wire 6 has two, three lines are set up at the interval horizontally, the middle part of each ground wire 6 is broken and the broken ground wire 6 is connected by the air bridge 10 set up, the driving electrode 7 is set up in the break place of two ground wires 6 and perpendicular to ground wire 6 and signal line 5, the signal line 5 and first electrode 8 lie in the collinear and both lie in the middle of two ground wires 6, the signal line 5 and first electrode 8 are separated by the break place of the ground wire 6.
As the utility model discloses an optimize structure: the signal line 5 is provided with a first anchor point 11 for connecting the second electrode 9.
As the utility model discloses an optimize structure: a second anchor point 12 for supporting the air bridge 10 is provided on the ground line 6.
The second electrode 9 is a straight plate type structure with a single end cantilever beam. The second electrode 9 has a simple and practical structure, facilitates impedance matching, is easy to process, and can well improve the yield and prolong the service life of the switch. Meanwhile, the plurality of through holes are distributed on the surface of the second electrode 9 in order, so that the driving voltage can be reduced, gas can flow out from the two sides of the upper electrode and the release holes at the same time, the switching time is shortened, and the release of the sacrificial layer is facilitated. In addition, considering the stability of switch contact, adopt the first electrode 8 of double contact, can effectually reduce the switch weak contact, avoid the switch to appear ablating and adhesion scheduling problem.
The first protruding part 800 of the first electrode 8 is in arc transition with the body, so that the insertion loss can be effectively reduced, and the microwave performance is improved.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.

Claims (7)

1. A radio frequency MEMS switch facing 5G is characterized by comprising a box body assembly and a switch assembly, wherein the box body assembly comprises a box body and a cover plate, the box body is provided with a mounting groove, the front end of the box body is hinged with the front end of the cover plate, and the rear end of the box body and the rear end of the cover plate are fixed through a set screw, so that the cover plate covers the mounting groove of the box body; the switch assembly is arranged in the mounting groove of the box body and comprises a substrate, a signal line, a ground wire, a driving electrode and a first electrode are arranged on the substrate, a second electrode corresponding to the first electrode is arranged on the signal line, one end of the second electrode is connected with the signal line, the other end of the second electrode overhangs the upper end of the driving electrode, one end of the first electrode, which is close to the second electrode, is provided with two first protruding portions, a first contact is arranged on each first protruding portion, and a plurality of through holes are formed in the second electrode.
2. A 5G-oriented rf MEMS switch as claimed in claim 1, wherein the screws are connected to the cover plate, and the box body is formed with corresponding screw holes.
3. A 5G-oriented rf MEMS switch as claimed in claim 2, wherein the back end of the cover plate has a second protrusion, and the screw is connected to the second protrusion.
4. A 5G-oriented rf MEMS switch as claimed in claim 1, wherein the front end of the box has a threading tube.
5. A5G-oriented RF MEMS switch as claimed in any one of claims 1-4, wherein the signal line has one, the ground line has two, three lines are horizontally spaced, the middle of each ground line is open and the open ground line is closed by an air bridge, the driving electrode is disposed at the open position of the two ground lines and perpendicular to the ground line and the signal line, the signal line and the first electrode are disposed on the same straight line and both are disposed between the two ground lines, and the signal line and the first electrode are spaced from the open position of the ground line.
6. A5G-oriented RF MEMS switch as claimed in claim 5, wherein the signal line is provided with a first anchor point for connecting the second electrode.
7. A5G-oriented RF MEMS switch as claimed in claim 5, wherein the ground line is provided with a second anchor point for supporting the air bridge.
CN202020601092.XU 2020-04-21 2020-04-21 Radio frequency MEMS switch facing 5G Active CN211957557U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020601092.XU CN211957557U (en) 2020-04-21 2020-04-21 Radio frequency MEMS switch facing 5G

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020601092.XU CN211957557U (en) 2020-04-21 2020-04-21 Radio frequency MEMS switch facing 5G

Publications (1)

Publication Number Publication Date
CN211957557U true CN211957557U (en) 2020-11-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020601092.XU Active CN211957557U (en) 2020-04-21 2020-04-21 Radio frequency MEMS switch facing 5G

Country Status (1)

Country Link
CN (1) CN211957557U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113381139A (en) * 2021-04-20 2021-09-10 中北大学南通智能光机电研究院 K ~ D band wide band radio frequency MEMS switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113381139A (en) * 2021-04-20 2021-09-10 中北大学南通智能光机电研究院 K ~ D band wide band radio frequency MEMS switch

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