CN211504609U - Detection device and detection equipment - Google Patents

Abstract

The utility model discloses a detection device and check out test set, detection device includes: the device comprises a first lens barrel, a second lens barrel and a detection assembly; a first optical passage is formed in the first lens barrel, a collection lens group is arranged in the first optical passage, a second optical passage is formed in the second lens barrel, and the detection assembly is connected with the second lens barrel; the butt joint end of the first lens barrel is connected with the butt joint end of the second lens barrel through a connecting component, and the connecting component is used for adjusting the position between the first lens barrel and the second lens barrel. Each part of the detection device can be independently adjusted, so that the detection device has higher flexibility, the adjustment process is simple and convenient to realize, and the detection efficiency and the detection precision can be obviously improved.

Description

Detection device and detection equipment

Technical Field

The utility model belongs to the technical field of the check out test set technique and specifically relates to check out test set's detection device. The utility model discloses still relate to and be equipped with detecting device's check out test set.

Background

The existing optical detection instrument generally comprises a light source unit, a detection unit and a control unit, wherein the detection unit is an important component of the optical detection instrument, and the detection unit directly influences the accuracy of a detection result.

When the detection unit is used for detecting an object to be detected, such as a wafer, an LCD substrate, an OLED substrate, a mobile phone shell and the like, the position relation between the detection unit and the object to be detected needs to be adjusted at first so as to accurately detect the object to be detected.

The general detection unit includes a signal light collection assembly for collecting signal light on the surface of the object to be detected and imaging the signal light to a detection area of the detector, and a detector for forming detection information, such as image information or light intensity information, according to the signal light.

The detection unit is adjusted by the signal light collection assembly and the detector, so that the detection unit obtains accurate detection information, the existing detection unit is poor in flexibility when being adjusted, the adjustment process is complex, the detection efficiency and the detection precision are not improved, and further improvement is to be made.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a detection device. Each part of the detection device can be independently adjusted, so that the detection device has higher flexibility, the adjustment process is simple and convenient to realize, and the detection efficiency and the detection precision can be obviously improved.

Another object of the present invention is to provide a detection apparatus equipped with the detection device.

In order to achieve the above object, the present invention provides a detecting device, including:

the device comprises a first lens barrel, a second lens barrel and a detection assembly; a first optical passage is formed in the first lens barrel, a collection lens group is arranged in the first optical passage, a second optical passage is formed in the second lens barrel, and the detection assembly is connected with the second lens barrel; the butt joint end of the first lens barrel is connected with the butt joint end of the second lens barrel through a connecting component, and the connecting component is used for adjusting the position between the first lens barrel and the second lens barrel.

Preferably, the connection assembly comprises: the first axial adjusting mechanism adjusts the position of the first lens barrel relative to the second lens barrel along the optical axis direction of the first optical path, and the first axial fixing mechanism fixes the position of the first lens barrel relative to the second lens barrel along the optical axis direction of the first optical path.

Preferably, the first axial adjustment mechanism includes a first thread pair, the first thread pair includes an external thread or an internal thread provided at the butt joint end of the first lens barrel and an internal thread or an external thread provided at the butt joint end of the second lens barrel, and the butt joint end of the first lens barrel is connected to the butt joint end of the second lens barrel through a thread.

Preferably, the first axial fixing mechanism comprises a first buckle arranged on the periphery of the first thread pair to lock the first thread pair.

Preferably, the detection assembly includes a third lens barrel and a detector, the detector is connected to the second lens barrel through the third lens barrel, the third lens barrel includes a third lens barrel a or a third lens barrel b, and the third lens barrel a and the third lens barrel b can be connected to the second lens barrel in order in a replaceable manner; the detector comprises a first detector mounted on the third lens barrel a or a second detector mounted on the third lens barrel b.

Preferably, the third lens barrel is connected to the second lens barrel through a second axial fixing mechanism, the second axial fixing mechanism includes a second thread pair, the second thread pair includes an external thread or an internal thread provided at a butt joint end of the second lens barrel and an internal thread or an external thread provided at a butt joint end of the third lens barrel, and the butt joint end of the second lens barrel is connected to the butt joint end of the third lens barrel through a thread.

Preferably, the axial fixing mechanism further comprises a third axial fixing mechanism, and the third axial fixing mechanism comprises a second buckle arranged on the periphery of the second thread pair so as to lock the second thread pair.

Preferably, the first detector comprises an area array detector and the second detector comprises a line array detector.

Preferably, the third lens barrel b is provided with an optical element, and the optical element is used for shaping the signal light collected by the collection lens group and then entering the second detector.

Preferably, the optical element comprises a filter or a polarizer.

Preferably, the third barrel b is provided with a lateral opening area perpendicular to the third optical path to accommodate the optical element, the optical element is connected to the third barrel b, and the optical lens thereof protrudes into the lateral opening area from the side and can move in the lateral opening area.

Preferably, the second barrel is configured to be rotatably connected with the detection assembly about the lens collection assembly optical axis.

Preferably, the second lens barrel is connected with the detection assembly through threads.

Preferably, an adjusting mechanism is arranged between the second lens barrel and the third lens barrel; the adjusting mechanism comprises a first screw and a second screw which are arranged on the second lens cone, the adjusting directions of the first screw and the second screw are perpendicular to the optical axis of the lens cone assembly, an adjusting piece located between the first screw and the second screw is arranged on the peripheral portion of the third lens cone, and the end portions of the first screw and the second screw are respectively abutted to the adjusting piece from two sides.

Preferably, the optical detection device further comprises a mounting table, and a first adjusting mechanism for shifting the detection device in a plane perpendicular to the optical axis and/or a second adjusting mechanism for rotating the detection device around a rotating shaft or translating the detection device relative to the mounting table are arranged between the second lens barrel and the mounting table.

Preferably, the mount table has a mount hole therein, the second barrel penetrates the mount hole, and the second barrel is configured to move in an offset direction or rotate about a rotation axis within the mount hole.

Preferably, the first adjusting mechanism includes two first adjusting screws disposed on two sides of the second barrel, adjustment directions of the two first adjusting screws are collinear, the first adjusting screws are in threaded connection with a screw mounting portion on the mounting table, and opposite ends of the first adjusting screws respectively abut against adjustment portions of an outer peripheral portion of the second barrel from two sides of the second barrel.

Preferably, the second adjustment mechanism includes a plurality of second adjustment screws arranged in a vertical direction, adjustment directions of the plurality of second adjustment screws are parallel and not collinear, the second adjustment screws are screwed to the adjustment portion of the outer peripheral portion of the second barrel, and a screw end of the second adjustment screw abuts against the support surface of the mount table.

Preferably, the collection lens group comprises a first lens and a second lens for collecting the signal light on the surface of the object to be measured, and the detector is arranged on the focal point of the collection lens group consisting of the first lens and the second lens.

Preferably, the detector and the third lens barrel are connected through threads.

In order to achieve the above-mentioned other object,

the utility model provides a detection device, including light source unit, detecting element and the control unit, wherein, detecting element is above-mentioned arbitrary detecting device.

The utility model provides a detection device, the first lens cone and the second lens cone are connected through the connecting component, and the relative position of the first lens cone and the second lens cone can be adjusted through the arrangement; by adjusting the position of the first lens barrel relative to the second lens barrel, the distance between the collection lens group and the object to be measured can be changed. Like this, each part of this detection device can adjust alone for this detection device has higher flexibility, simple structure, the regulation of being convenient for can show improvement detection efficiency and detection precision.

The utility model also provides a check out test set, because detection device has above-mentioned technological effect, then the check out test set that is equipped with this detection device should also have corresponding technological effect.

Drawings

Fig. 1 is a schematic structural diagram of a detection device disclosed in an embodiment of the present invention, in which a third lens barrel is a third lens barrel a, and a detector is a first detector;

fig. 2 is a schematic structural diagram of a detecting device disclosed in the embodiment of the present invention, in which a third lens barrel is a third lens barrel b, and a detector is a second detector;

FIG. 3 is a cross-sectional view of the probe assembly shown in FIG. 2;

FIG. 4 is a schematic structural diagram of the detecting device shown in FIG. 2 at another viewing angle;

fig. 5 is a side view of the probe assembly of fig. 2.

In the figure:

1. first lens barrel 2, second lens barrel 3, third lens barrel 4, first lens 5, second lens 6, first detector 7, second detector 8, first fastener 9, second fastener 10, optical element 11, first screw 12, second screw 13, adjusting plate 14, mounting table 15, positioning part 16, support plate 17, first adjusting screw 18, second adjusting screw

Detailed Description

In order to make the technical field better understand the solution of the present invention, the following detailed description of the present invention is provided with reference to the accompanying drawings and the detailed description.

In this document, terms such as "upper, lower, left, right" and the like are established based on positional relationships shown in the drawings, and the corresponding positional relationships may vary depending on the drawings, and therefore, they are not to be construed as absolute limitations on the scope of protection; moreover, relational terms such as "first" and "second," and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.

Referring to fig. 1, fig. 1 is a schematic structural diagram of a detecting device according to an embodiment of the present invention, in which a third lens barrel is a third lens barrel a, and a detector is a first detector.

In a specific embodiment, the utility model provides a detecting device is used for adjusting the detecting element on the check out test set, and this check out test set is used for detecting the await measuring object such as wafer, LCD base plate, OLED base plate and cell-phone shell, can set up one or more detecting device on the same check out test set.

As shown in the figure, the detection device mainly comprises a first lens barrel 1, a second lens barrel 2, a detector assembly and the like, wherein the detection assembly comprises a third lens barrel 3 and a detector, the first lens barrel 1, the second lens barrel 2, the third lens barrel 3 and the detector are of a split structure and are sequentially connected and assembled together along an optical axis direction, a first optical path is formed inside the first lens barrel 1, a first lens 4 and a second lens 5 are installed on the first optical path, the first lens 4 and the second lens 5 form a collection lens group together for collecting signal light on the surface of an object to be detected, and the first lens barrel 1 is used for installing the first lens 4 and the second lens 5 and is also used for being connected with the second lens barrel 2.

A second optical passage is formed in the second lens barrel 2, a third optical passage is formed in the third lens barrel 3, the optical axes of the first optical passage, the second optical passage and the third optical passage are overlapped, the detector is positioned at the upper end of the third lens barrel 3 and is separately designed from the third lens barrel 3 and can be connected into a whole through threads, the third lens barrel 3 is divided into a third lens barrel a and a third lens barrel b, correspondingly, the detector is divided into a first detector 6 and a second detector 7, wherein the first detector 6 is an area array detector and mainly has the function of focusing the detection area of the detector on the surface of an object to be detected and is overlapped with a detection light spot, and the area array detector is convenient to align because the detection area of the detector is larger when the area array detector is used for focusing and aligning the light spot; the second detector 7 is a linear array detector, and mainly functions to process the signal light collected by the first lens 4 and the second lens 5 in the detection process and then enter the second detector 7 to form a detection signal.

In the adjusting process, the third lens barrel a and the first detector 6 are installed and used firstly, and then the third lens barrel b and the second detector 7 are installed and used, namely the third lens barrel a and the third lens barrel b can be installed on the second lens barrel 2 in a replaceable mode in sequence, and when the second detector 7 is used, the second detector 7 is positioned at the focus of the collecting lens group consisting of the first lens 4 and the second lens 5.

The upper end of the first lens cone 1 is provided with an external thread, the lower end of the second lens cone 2 is provided with an internal thread, the upper end of the first lens cone 1 and the lower end of the second lens cone 2 form a thread pair, the thread pair is connected, the first lens cone 1 can move downwards or upwards relative to the second lens cone 2 by rotating the first lens cone 1, so that the position of the first lens cone relative to the second lens cone along the optical axis direction of the first optical path is adjusted, meanwhile, the periphery of the thread pair is provided with a first buckle 8, the thread pair can be slightly deformed by locking the first buckle 8, the threads are mutually meshed, and the position of the first lens cone 1 and the second lens cone 2 along the optical axis direction of the first optical path after adjustment is fixed.

The upper end of the second lens cone 2 is provided with an external thread, the lower end of the third lens cone 3 is provided with an internal thread, the upper end of the second lens cone 2 and the lower end of the third lens cone 3 form a thread pair, the two are connected through the thread to fix the position of the third lens cone relative to the second lens cone, meanwhile, the periphery of the thread pair is provided with a second buckle 9, the thread pair can be slightly deformed through locking the second buckle 9, the threads are mutually meshed, and the third lens cone 3 and the second lens cone 2 are more reliably fixed.

Referring to fig. 2 and fig. 3, fig. 2 is a schematic structural diagram of a detecting device according to an embodiment of the present invention, in which a third lens barrel is a third lens barrel b, and a detector is a second detector; fig. 3 is a cross-sectional view of the probe assembly shown in fig. 2.

As shown in the figure, the third barrel a and the third barrel b have different structures, the third barrel a is a closed structure, and when the third barrel a is used, no optical element is arranged in the third barrel a, and the third barrel a is mainly used for connecting the second barrel 2 and the first detector 6.

Different from the third barrel a, the third barrel b is provided with an optical element 10, the optical element can shape the signal light collected by the first lens 4 and the second lens 5 and then enter the second detector 7, so that the detector or the obtained detection information is clearer and more accurate, the optical element 10 can comprise an optical filter or a polarizing plate, and the like, for example, when the optical element 10 is a polarizing component, the polarizing component can be provided with a plurality of polarizing plates, the optical axes of the polarizing plates are matched with the polarization direction of the detection light, and the polarizing plates can be driven by a driving mechanism of the polarizing plates, so that different polarizing plates can be selected to enter or exit a third optical path of the third barrel b.

The third barrel b is provided with a lateral opening area perpendicular to the third optical path to accommodate the optical element 10, the body of the optical element 10 is connected to the third barrel b, the optical lens thereof extends into the lateral opening area from the side and can move in the lateral opening area, and the semi-open lateral opening area can provide enough moving space for the optical element.

An adjusting mechanism is arranged between the second lens barrel 2 and the third lens barrel b to adjust the relative relationship between the second detector 7 and the object to be detected, namely, the second lens barrel 2 and the detection component are rotatably connected around the optical axis of the lens collection component.

Specifically, the adjusting mechanism mainly includes a first screw 11 and a second screw 12, the second barrel 2 is provided with two adjusting blocks at the periphery, the first screw 11 and the second screw 12 are rotatably mounted on the two adjusting blocks of the second barrel 2 in an opposite manner and in a thread fit relationship with the adjusting blocks, the adjusting directions of the first screw and the second screw are perpendicular to the optical axis of the barrel assembly, the periphery of the third barrel 3 is provided with an adjusting plate 13 located between the first screw 11 and the second screw 12, the ends of the first screw 11 and the second screw 12 respectively abut against the adjusting plate 13 from both sides, and the second detector 7 can be rotated in the horizontal plane by screwing the first screw and the second screw 11 12, so that the second detector reaches a predetermined position in the detection area of the surface of the object to be detected. For example, if the first screw 11 and the second screw 12 are screwed to move leftward, the second screw 12 will push the third barrel b and the second detector 7 to rotate clockwise through the adjustment plate 13, and if the first screw 11 and the second screw 12 are screwed to move rightward, the first screw 11 will push the third barrel b and the second detector 7 to rotate counterclockwise through the adjustment plate 13, and the first screw 11 and the second screw 12 may rotate simultaneously, or may rotate one of them first and then rotate the other one, which is not only manually operated, but also may be automatically operated by being driven by a micro motor.

Referring to fig. 4 and 5, fig. 4 is a schematic structural view of the detecting device shown in fig. 2 at another viewing angle; fig. 5 is a side view of the probe assembly of fig. 2.

As shown, in at least one embodiment, a mount 14 is further provided, and a first adjustment mechanism for offsetting the adjustment device in a plane perpendicular to the optical axis and a second adjustment mechanism for rotating the detection device about a rotation axis or translating the detection device relative to the mount are provided between the second barrel and the mount.

The mounting table 14 is provided with a supporting platform for mounting the detection device, the supporting platform is provided with a mounting hole, the second lens barrel 2 penetrates through the mounting hole on the supporting platform and is configured to move along the offset direction or rotate around a rotating shaft in the mounting hole, the detection device is provided with a positioning component 15 similar to a flange on the outer periphery of the second lens barrel 2, the positioning component 15 is substantially square, four corners of the positioning component 15 are partially cut off to form unfilled corner parts, the upper surface of the supporting platform is provided with vertical supporting plates 16 positioned on two sides of the through hole, and two unfilled corner parts in the diagonal direction of the positioning component 15 correspond to the two vertical supporting plates 16 respectively.

The first adjusting mechanism is provided with first adjusting screws 17 which are symmetrically arranged on two sides of the second lens cone 2, a threaded hole is formed in the supporting plate 16, the first adjusting screws 17 are in threaded connection with the supporting plate 16 on the mounting table 14, opposite ends of the first adjusting screws 17 abut against a lateral plane formed by unfilled corner parts of the positioning part 15 from two sides of the second lens cone 2 respectively, adjusting directions of the two first adjusting screws 17 are collinear, and the detecting device can be deviated in a plane perpendicular to an optical axis by screwing the first adjusting screws 17. For example, when the two first adjusting screws 17 are screwed together to move leftward, the detecting means will be shifted leftward, and when the two first adjusting screws 17 are screwed together to move rightward, the detecting means will be shifted rightward.

The second adjusting mechanism is provided with four second adjusting screws 18 perpendicular to the direction of the first adjusting screw, two second adjusting screws 18 are symmetrically arranged on four sides of the second lens barrel 2, a threaded hole is formed in the positioning part 15 on the periphery of the second lens barrel 2, the second adjusting screws 18 are in threaded fit with the threaded holes of the positioning part 15, the threaded ends of the second adjusting screws abut against the supporting surface of the supporting platform, the adjusting directions of the four second adjusting screws are parallel and not collinear, and the axis of the first adjusting screw 17 is perpendicular to the connecting line between the two second adjusting screws 18 on each side and is generally located in the middle of the two second adjusting screws 18. When the four second adjusting screws 18 are adjusted by the same distance, the detection device moves up and down relative to the mounting table 14, and when the four second adjusting screws 18 are adjusted by different distances, the detection device performs pitching motion relative to the mounting table 14.

The detection device mainly can realize the following functions: the alignment process of the detector and the detection light spot and the detection process of the detector. Firstly, a third lens barrel a and the first detector 6 are adopted to enable the detection area of the detector to be focused on the surface of an object to be detected and to be overlapped with a detection light spot (because the detection area of the area array detector is large, the alignment is easy and time-saving); and after the light spots are aligned, replacing the third lens barrel b with the third lens barrel a, replacing the first detector 6 with the second detector 7, and carrying out fine adjustment through the adjusting mechanism, the first adjusting mechanism and the second adjusting mechanism, so that the linear array detector area of the second detector 7 is overlapped with the center of the detection light spots, and the detection area of the second detector 7 is focused on the detection light spots on the surface of the object to be detected.

In the detection process, firstly, a third lens barrel a and a first detector 6 are installed on a second lens barrel 2, the first lens barrel 1 and the second lens barrel 2 are rotated, the distance between the tail end of the first lens barrel 1 and an object to be detected is changed, namely, the distance between a first lens 4 and a second lens 5 and the object to be detected is changed, and when the object to be detected is positioned at the focal position of a lens group formed by the first lens 4 and the second lens 5, the pitch angle of a detection device can be adjusted through a second adjusting mechanism; the fixing is carried out by utilizing a buckle, so that the relative position between the first lens barrel 1 and the second lens barrel 2 is not changed any more; after focusing and aligning are completed, the third lens barrel a and the first detector are replaced by a third lens barrel b and a second detector, at the moment, the first lens barrel 1 and the second lens barrel 2 are kept unchanged, the position of a linear array detection area of the linear array detector on an object to be detected is changed through an adjusting mechanism, the linear array detection area is mainly rotated on the surface of the object to be detected, and the detection area of the second detector 7 on the surface of the object to be detected can be positioned in a preset direction through the adjusting mechanism; the appropriate optical elements are chosen for varying the signal light entering the second detector 7, optimizing the detection information generated by the second detector 7.

Through the arrangement, the detection device can accurately acquire the detection information of the object to be detected, and is simple to use.

The above embodiments are merely preferred embodiments of the present invention, and are not limited thereto, and different embodiments can be obtained by performing targeted adjustment according to actual needs. For example, the first barrel 1 and the second barrel 2 are matched with each other through an axial slider and a sliding slot to perform axial adjustment, or the positioning member 15 at the outer periphery of the second barrel 2 is designed into other shapes, and so on. This is not illustrated here, since many implementations are possible.

The utility model also provides a detection device, including light source unit, detecting element and the control unit, wherein, detecting element is the detection device that the above-mentioned described, and other structures about detection device please refer to prior art, and this text is no longer repeated.

It is right above the utility model provides a detection device, check out test set have carried out detailed introduction. The principles and embodiments of the present invention have been explained herein using specific examples, and the above descriptions of the embodiments are only used to help understand the core concepts of the present invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the protection scope of the appended claims.

Claims (21)

1. A probe apparatus, comprising: the device comprises a first lens barrel, a second lens barrel and a detection assembly; a first optical passage is formed in the first lens barrel, a collection lens group is arranged in the first optical passage, a second optical passage is formed in the second lens barrel, and the detection assembly is connected with the second lens barrel; the butt joint end of the first lens barrel is connected with the butt joint end of the second lens barrel through a connecting component, and the connecting component is used for adjusting the position between the first lens barrel and the second lens barrel.

2. The probe apparatus of claim 1, wherein the linkage assembly comprises: the first axial adjusting mechanism adjusts the position of the first lens barrel relative to the second lens barrel along the optical axis direction of the first optical path, and the first axial fixing mechanism fixes the position of the first lens barrel relative to the second lens barrel along the optical axis direction of the first optical path.

3. The apparatus according to claim 2, wherein the first axial adjustment mechanism comprises a first screw pair, the first screw pair comprises an external thread or an internal thread provided at the butt joint end of the first barrel and an internal thread or an external thread provided at the butt joint end of the second barrel, and the butt joint end of the first barrel is connected to the butt joint end of the second barrel through a screw.

4. A probe device according to claim 3, wherein the first axial securing means comprises a first catch provided on the periphery of the first thread pair for locking the first thread pair.

5. The detection device according to claim 1, wherein the detection assembly comprises a third lens barrel and a detector, the detector is connected with the second lens barrel through the third lens barrel, the third lens barrel comprises a third lens barrel a or a third lens barrel b, and the third lens barrel a and the third lens barrel b can be connected with the second lens barrel in a replaceable manner in sequence; the detector comprises a first detector mounted on the third lens barrel a or a second detector mounted on the third lens barrel b.

6. The detecting device according to claim 5, wherein the third barrel is connected to the second barrel through a second axial fixing mechanism, the second axial fixing mechanism includes a second screw pair, the second screw pair includes an external thread or an internal thread provided at the butt-joint end of the second barrel and an internal thread or an external thread provided at the butt-joint end of the third barrel, and the butt-joint end of the second barrel is connected to the butt-joint end of the third barrel through a screw.

7. The sonde of claim 6, further comprising a third axial securement mechanism including a second snap disposed about the second thread pair to lock the second thread pair.

8. A detection apparatus according to claim 5, wherein the first detector comprises an area array detector and the second detector comprises a line array detector.

9. The detecting device according to claim 5, wherein the third lens barrel b is provided with an optical element for shaping the signal light collected by the collecting lens group and then entering the second detector.

10. A detection device according to claim 9, wherein the optical element comprises a filter or a polariser.

11. The detection device according to claim 9, wherein the third barrel b is provided with a lateral opening area perpendicular to the third optical path for accommodating the optical element, the optical element is connected to the third barrel b, and the optical lens thereof protrudes laterally into the lateral opening area and is movable within the lateral opening area.

12. The detection device of claim 1, wherein the second barrel is configured to be rotatably coupled to the detection assembly about the collection lens assembly optical axis.

13. The probe apparatus of claim 12, wherein the second barrel is threadably connected to the probe assembly.

14. The detection device according to claim 12, wherein an adjustment mechanism is provided between the second barrel and the detection device; the adjusting mechanism comprises a first screw and a second screw which are arranged on the second lens cone, the adjusting directions of the first screw and the second screw are perpendicular to the optical axis of the lens cone assembly, an adjusting piece located between the first screw and the second screw is arranged on the periphery of the connecting end of the detecting device and the second lens cone, and the end parts of the first screw and the second screw are respectively abutted to the adjusting piece from two sides.

15. The detection apparatus according to claim 1, further comprising a mount, wherein a first adjustment mechanism for shifting the detection apparatus in a plane perpendicular to the optical axis and/or a second adjustment mechanism for rotating the detection apparatus about a rotation axis or translating the detection apparatus relative to the mount are provided between the second barrel and the mount.

16. The detection apparatus according to claim 15, wherein the mounting table has a mounting hole therein, the second barrel penetrates through the mounting hole, and the second barrel is configured to move in an offset direction or rotate about a rotation axis within the mounting hole.

17. The detecting device according to claim 15, wherein the first adjusting mechanism includes two first adjusting screws disposed on both sides of the second barrel, the adjusting directions of the two first adjusting screws are collinear, the first adjusting screws are screwed to screw mounting portions on the mounting table, and opposite ends of the first adjusting screws respectively abut against adjusting portions on an outer peripheral portion of the second barrel from both sides of the second barrel.

18. The detecting device according to claim 15, wherein the second adjusting mechanism includes a plurality of second adjusting screws disposed in a vertical direction, the adjusting directions of the plurality of second adjusting screws are parallel and non-collinear, the second adjusting screws are screwed to the adjusting portion of the outer peripheral portion of the second barrel, and a screw end of the second adjusting screw abuts against the supporting surface of the mounting table.

19. The detecting device according to claim 5, wherein the collecting lens group comprises a first lens and a second lens for collecting the signal light on the surface of the object, and the detector is disposed at the focal point of the collecting lens group consisting of the first lens and the second lens.

20. The detection device of claim 5, wherein the detector is threadably connected to the third barrel.

21. Detection apparatus comprising a light source unit, a detection unit and a control unit, characterized in that the detection unit is a detection device according to any of the preceding claims 1 to 20.

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