CN211225456U

CN211225456U - Device clamping mechanism, transfer device and piece shifting equipment

Info

Publication number: CN211225456U
Application number: CN201921796012.4U
Authority: CN
Inventors: 白文; 刘宏亮; 徐虎
Original assignee: Core Technology Shenzhen Co ltd
Current assignee: Core Technology Shenzhen Co ltd
Priority date: 2019-10-22
Filing date: 2019-10-22
Publication date: 2020-08-11
Anticipated expiration: 2029-10-22

Abstract

The utility model relates to a device clamping mechanism, a transfer device and a piece shifting device, wherein the clamping mechanism comprises a fixed arm, a finger cylinder and two fixed blocks; the finger cylinder comprises a cylinder body and two clamping jaws, the cylinder body is connected with one end of the fixing arm, and the two clamping jaws are correspondingly connected with the two fixing blocks one by one; and a limit cavity which is matched with the TO device and can be opened and closed is formed between the two fixing blocks. The TO device can enter the limiting cavity through opening and closing of the limiting cavity, and clamping operation of the TO device is completed; the fixed arm of being connected with the cylinder body of finger cylinder can drive whole fixture's position and remove, accomplishes centre gripping operation and position removal back in succession, opens spacing chamber again, arranges the TO device in new position department, and fixture just so can replace artifical direct contact TO the TO device, has avoided causing damage or potential damage TO the TO device, has also improved the letter sorting of TO device simultaneously and has dialled a efficiency and accuracy.

Description

Device clamping mechanism, transfer device and piece shifting equipment

Technical Field

The utility model relates to a semiconductor device production facility technical field especially relates to a device fixture, transfer device and piece equipment of dialling.

Background

The TO packaging system is a device which is common and widely used in the semiconductor field. After the TO device is manufactured, the TO device needs TO be arranged on a test board for quality test, and after the test is finished, qualified products and unqualified products need TO be sorted and pulled. Once a piece shifting error occurs, an unqualified TO device enters a qualified product, a series of functions of a subsequent TO device can be affected, and therefore the piece shifting operation is very important. Present letter sorting group work is mainly after the test finishes, sorts through the manual work and dials the piece, and this is not only inefficient, and manual operation uniformity is poor moreover, often produces damage or potential damage TO the TO device.

Therefore, it is desirable to provide a device clamping mechanism, a transferring device and a piece poking device to solve the deficiencies of the prior art.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems in the prior art, the utility model provides a device fixture, transfer device and piece shifting equipment.

A device clamping mechanism comprises a fixed arm, a finger cylinder and two fixed blocks;

the finger cylinder comprises a cylinder body and two clamping jaws, the cylinder body is connected with one end of the fixing arm, and the two clamping jaws are correspondingly connected with the two fixing blocks one by one;

and a limit cavity which is matched with the TO device and can be opened and closed is formed between the two fixing blocks.

Furthermore, an opening for a support leg of the TO device TO pass through is formed in one end, far away from the finger cylinder, of the limiting cavity.

Furthermore, one end of the opening, which is close TO the limiting cavity, extends TO the periphery of the limiting cavity TO form an annular clamping groove, and the size and the shape of the clamping groove are matched with those of the TO device.

Furthermore, a plurality of supporting foot holes are formed in the edge of the opening and matched with a plurality of supporting feet of the TO device.

Furthermore, a semi-limiting cavity is arranged on one side of each fixed block, which is opposite to the other fixed block;

when the two fixing blocks are tightly attached, the two semi-limiting cavities form the limiting cavity.

Further, every keeping away from of fixed block the one end of pointing the cylinder all is equipped with the slope chamfer, two the slope chamfer of fixed block constitute to spacing sunken groove of dodging in chamber.

Further, the fixing arm comprises a main arm and an L-arm, the L-arm comprises a first plate and a second plate which are perpendicular to each other and connected, the first plate is perpendicular to the main arm, the length of the second plate is smaller than that of the main arm, and the second plate and the main arm are on the same side of the first plate;

the finger cylinder is connected with one side of the second plate far away from the main arm, and a clamping jaw of the finger cylinder can translate in a direction close to or far away from the second plate.

Furthermore, the L-shaped arm is connected with a monitoring board, a distance sensor is arranged on the monitoring board, and the distance sensor is used for detecting the distance between the monitoring board and the fixed block.

Based on the same inventive concept, the utility model also provides a device transfer device, including the device fixture.

The three-dimensional moving support comprises a first guide rail in the X direction, a second guide rail in the X direction, a third guide rail in the Y direction and a fourth guide rail in the Z direction, wherein the third guide rail is respectively connected with the first guide rail and the second guide rail in a sliding manner, the fourth guide rail is connected with the third guide rail in the Z direction in a sliding manner, and one side, far away from the L arm, of the main arm is connected with the third guide rail;

the X direction, the Y direction and the Z direction are vertical to each other.

Based on the same inventive concept, the utility model also provides a device shifting device, including the device transfer device.

The device further comprises a first conveying mechanism and a second conveying mechanism, wherein the conveying directions of the first conveying mechanism and the second conveying mechanism are both X directions;

the first conveying mechanism is used for conveying a test carrier provided with a plurality of TO devices, and the second conveying mechanism is used for conveying a package carrier.

Further, the conveying device further comprises a bad area, and the bad area is arranged between the first conveying mechanism and the second conveying mechanism.

The technical scheme of the utility model compare with closest prior art and have following advantage:

the device clamping mechanism provided by the technical scheme provided by the utility model can drive the two fixed blocks connected with the device clamping mechanism to relatively approach or keep away from the device clamping mechanism through the relative movement between the two clamping jaws of the finger cylinder, the limiting cavity formed between the two fixed blocks is gradually closed in the approach process, and the limiting cavity formed between the two fixed blocks is gradually opened in the keeping away process; the limiting cavity is matched with the TO device, and the TO device can enter the limiting cavity through opening and closing of the limiting cavity TO finish clamping operation of the TO device; the fixed arm of being connected with the cylinder body of finger cylinder can drive whole fixture's position and remove, accomplishes centre gripping operation and position removal back in succession, opens spacing chamber again, arranges the TO device in new position department, and fixture just so can replace artifical direct contact TO the TO device, has avoided causing damage or potential damage TO the TO device, has also improved the letter sorting of TO device simultaneously and has dialled a efficiency and accuracy.

Drawings

Fig. 1 is a schematic structural diagram of a device holding mechanism provided by the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1;

fig. 3 is a side view of a device holding mechanism provided by the present invention;

fig. 4 is a schematic structural diagram of the device shifting apparatus provided by the present invention.

Wherein, 1-main arm; 2-L arm; 3-a monitoring board; 4-a distance sensor; 5-finger cylinder; 6, fixing blocks; 7-a first slider; 8-a second slide block; 9-a limiting cavity; 10-opening; 11-pin holes; 12-a leg; 13-inclined chamfering; 14-TO devices; 15-a first guide rail; 16-a second guide rail; 17-a third guide rail; 18-a fourth guide rail; 19-a first transfer mechanism; 20-a second transport mechanism; 21-a test carrier; 22-packaging the carrier; 23-a device holding mechanism; 24-support column.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In this application, the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "disposed," "connected," and "secured" are to be construed broadly. For example, "connected" may be a fixed connection, a detachable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail with reference to the accompanying examples and figures 1-4. Fig. 1 is a schematic structural diagram of a device holding mechanism provided by the present invention; FIG. 2 is an enlarged view of a portion A of FIG. 1; fig. 3 is a side view of a device holding mechanism provided by the present invention; and, fig. 4 is a schematic structural diagram of the device shifting apparatus provided by the present invention.

As shown in fig. 1, the utility model provides a device clamping mechanism, in particular TO a TO device clamping mechanism, which comprises a fixed arm, a finger cylinder 5 and two fixed blocks 6; the finger cylinder 5 comprises a cylinder body and two clamping jaws, the cylinder body is connected with one end of the fixing arm, and the two clamping jaws are correspondingly connected with the two fixing blocks 6 one by one; a limit cavity 9 which is matched with the TO device 14 and can be opened and closed is formed between the two fixed blocks 6.

The two fixing blocks 6 connected with the finger cylinder 5 can be driven to relatively approach or separate from each other through the relative movement between the two clamping jaws of the finger cylinder 5, a limiting cavity 9 formed between the two fixing blocks 6 is gradually closed in the approaching process, and the limiting cavity 9 formed between the two fixing blocks 6 is gradually opened in the separating process; the limiting cavity 9 is matched with the TO device 14, and the TO device 14 can enter the limiting cavity 9 through opening and closing of the limiting cavity 9, so that the clamping operation of the TO device 14 is completed; the fixed arm that is connected with the cylinder body of finger cylinder 5 can drive whole fixture's position and remove, accomplishes centre gripping operation and position removal back in succession, opens spacing chamber 9 again, arranges TO device 14 in new position department, fixture just so can replace artifical direct contact TO TO device 14, has avoided causing damage or potential damage TO TO device 14, has also improved TO device 14's letter sorting simultaneously and has dialled a efficiency and accuracy.

In some embodiments of the present invention, the end of the limiting cavity 9 away from the finger cylinder 5 is provided with an opening 10 for the foot 12 of the TO device 14 TO pass through. The TO devices 14 generally comprise a main body and radial support legs 12 arranged below the main body, and when the TO devices 14 are intensively placed on a test board, the support legs 12 are inserted into specific containing holes for positioning and limiting; spacing chamber 9 is mainly used for the restriction and holds the main part of TO device 14, and the stabilizer blade 12 of TO device 14 then the accessible is predetermine opening 10 and is run through and stretch out spacing chamber 9, has reduced the volume in spacing chamber 9 like this greatly, makes the TO device 14 more stable in the position in spacing chamber 9 moreover, and difficult the removal has strengthened the centre gripping effect.

In some embodiments of the present invention, the end of the opening 10 close TO the spacing cavity 9 extends TO its periphery TO form an annular clamping groove, and the size and shape of the clamping groove are matched with the TO device 14. The function of opening 10 is that the stabilizer blade 12 that supplies the TO device 14 stretches out, restricts the main part of TO device 14 simultaneously in spacing chamber 9, and TO device 14 at this moment is in a suspension state, and the position of TO device 14 on vertical direction has obtained the restriction by the effect of gravity promptly, and the position on the horizontal direction does not obtain accurate restriction, and even vertical direction, when whole fixture takes place TO rock or when violent actions such as upset, the position of its vertical direction still can not guarantee stability. The clamping groove is formed at the upper end of the opening 10, the peripheral edge of the clamping groove is matched with the shape and size of the body of the TO device 14, the body of the TO device 14 can be just embedded into the clamping groove, the operation of clamping requires that the two fixing blocks 6 are far away from the clamping groove TO approach the clamping groove, the body of the TO device 14 is limited in the limiting cavity 9 in the process of gradually closing the limiting cavity 9, the whole TO device 14 is suspended in the limiting cavity 9, then the two fixing blocks 6 are controlled by the finger cylinder 5 TO be far away from the clamping groove until the body of the TO device 14 falls into the clamping groove, and then the two fixing blocks are quickly approached TO clamp the TO device 14 in the clamping groove, so that the vertical direction and the horizontal direction of the TO device 14 are limited, and the position of the TO device 14 is quite stable no matter which violent actions are carried out by the clamping mechanism in the follow-up process.

In some embodiments of the present invention, the edge of the opening 10 is provided with a plurality of supporting leg holes 11, and the plurality of supporting leg holes 11 are matched with a plurality of supporting legs 12 of the TO device 14. It has been described above that the legs 12 of the TO device 14 are gradually separated from each other in the direction away from the main body thereof TO form the radial legs 12, the snap-fit arrangement can facilitate the passage of the legs 12, and the arrangement of the leg holes 11 is more adapted TO the position and shape of the legs 12, the position of which corresponds TO the legs 12 one by one, so that the legs 12 of the TO device 14 can be more accurately avoided TO prevent the damage TO the legs 12 during the process of closing the limit cavities 9 by the fixing blocks 6 approaching each other, and the clamping and positioning of the TO device are facilitated.

In some embodiments of the present invention, a half-limit cavity 9 is disposed on one side of each fixed block 6 opposite to the other fixed block 6; when the two fixing blocks 6 are tightly attached, the two semi-limiting cavities 9 form a limiting cavity 9. Two are half spacing chamber 9 exactly are half of spacing chamber 9, be the sunken of fixed block 6 inside extension formation promptly, two are sunken TO be spacing chamber 9 together, spacing chamber 9 can run through whole fixed block 6 in the direction perpendicular with fixed block 6 direction of motion, in the direction of fixed block 6 motion, exactly be sunken form, consequently two fixed blocks 6 are at the in-process of centre gripping TO device 14, can observe through spacing chamber 9 both sides, the convenience of operation is improved, the accuracy of centre gripping has been increased.

The utility model discloses an in some embodiments, the one end of keeping away from finger cylinder 5 of every fixed block 6 all is equipped with slope chamfer 13, and the groove of dodging to spacing chamber 9 is sunken is constituteed to the slope chamfer 13 of two fixed blocks 6. When the TO devices 14 are arranged on the test board, the support legs 12 are inserted into the corresponding holes of the test board, the mounting positions on the test board corresponding TO each TO device 14 are conical or truncated cone-shaped protrusions, then, the side walls of the protrusions are provided with insertion holes, when the TO devices 14 are arranged on the test board, the support legs 12 are inserted into the insertion holes on the side walls, and the main body is placed above the protrusions; when the two fixing blocks 6 respectively clamp the TO device 14 from two sides, the two inclined chamfers 13 can avoid the bulge on the mounting position, so that the matching degree of the clamping mechanism and the test board is further improved.

In some embodiments of the present invention, the fixing arm includes a main arm 1 and an L arm 2, the L arm 2 includes a first plate and a second plate perpendicular to each other and connected to each other, the first plate is perpendicular to the main arm 1, the length of the second plate is smaller than that of the main arm 1, and the second plate and the main arm 1 are on the same side of the first plate; a finger cylinder 5 is connected to the side of the second plate remote from the main arm 1, and the clamping jaw of the finger cylinder 5 can translate in a direction towards or away from the second plate. L arm 2 and main arm 1 constitute the fixed arm of U-shaped, but because the effect of the different positions of fixed arm is different, therefore the length difference of two perpendicular limits of the fixed arm of U-shaped is great, the length of main arm 1 is great, the length of second board is less, consequently the both sides of main arm 1 can be equipped with first slider 7 and second slider 8, first slider 7 and second slider 8 can be used for being connected with the parent device, and the outside of second board is connected with finger cylinder 5, and the clamping jaw of finger cylinder 5 is parallel clamping jaw moreover, the direction of its translation is in the direction that is close to and keeps away from the second board.

The utility model discloses an in some embodiments, L arm 2 is connected with control board 3, is equipped with distance sensor 4 on the control board 3, and distance sensor 4 is used for detecting the distance between control board 3 and fixed block 6. The monitoring board 3 can set up in the below of first board, on the position relative with the second board, and distance sensor 4 sets up on monitoring board 3, and its direction of detection is towards fixed block 6, and it can judge the distance between two fixed blocks 6 through the distance that detects fixed block 6 and distance sensor 4, namely can judge the condition of opening and shutting of spacing chamber 9.

Based on the same inventive concept, the utility model also provides a device transfer device, including device fixture 23. The transfer device can drive the device clamping mechanism TO clamp and transfer the TO devices 14, and is suitable for being applied TO sorting and shifting operations of the TO devices 14.

In some embodiments of the present invention, the three-dimensional moving rack further comprises a first guide rail 15 in the X direction, a second guide rail 16 in the X direction, a third guide rail 17 in the Y direction and a fourth guide rail 18 in the Z direction, wherein the third guide rail 17 is slidably connected to the first guide rail 15 and the second guide rail 16, respectively, and the side of the main arm 1 away from the L arm 2 is connected to the third guide rail 17; the X direction, the Y direction and the Z direction are vertical to each other.

The X direction in the three-dimensional moving support can be horizontal and transverse, the Y direction can be horizontal and longitudinal, and the Z direction can be vertical; the first guide rail 15 and the second guide rail 16 are both horizontal and transverse guide rails, and both ends of the horizontal and transverse guide rails are supported to a certain height by a support column 24; the third guide rail 17 is a horizontal longitudinal guide rail, is lapped on the two horizontal transverse guide rails, and can slide on the first guide rail 15 and the second guide rail 16 along the horizontal transverse direction; the fourth rail 18 is a vertically oriented rail and is itself disposed above the third rail 17 and slidable in the horizontal longitudinal direction, and then the device holding mechanism is disposed on the fourth rail 18 and slidable in the vertical direction. Therefore, the device clamping mechanism can be flexibly adjusted and transferred in the three-dimensional position through the sliding of the third guide rail 17, the sliding of the fourth guide rail 18 and the sliding of the clamping mechanism, and the clamping, picking and placing functions of the clamping mechanism are matched, so that the device clamping mechanism can be applied TO the sorting and piece-shifting process of the TO device 14, the TO device 14 is prevented from being damaged or potentially damaged, and meanwhile, the sorting and piece-shifting efficiency and accuracy of the TO device 14 are improved.

As shown in fig. 4, based on the same inventive concept, the present invention also provides a device pick apparatus including the device transferring device.

In some embodiments of the present invention, the present invention further comprises a first conveying mechanism 19 and a second conveying mechanism 20, and the conveying directions of the first conveying mechanism 19 and the second conveying mechanism 20 are both X directions;

the first transport mechanism 19 is used TO transport a test carrier 21 holding a plurality of TO devices 14, and the second transport mechanism 20 is used TO transport a package carrier 22.

In some embodiments of the present invention, the device further comprises a bad area, and the bad area is disposed between the first conveying mechanism 19 and the second conveying mechanism 20.

The TO device 14 of dialling equipment, the TO device 14 that will survey on the board sorts, distinguish certified products and defective products, and sort TO different positions, namely will shift the defective products TO the defective area, shift the certified products TO packing carrier 22 on, wait TO pack carrier 22 and carry out the packing after filling, can carry out the packing of certified products in succession, the packing of product has been accomplished simultaneously promptly in the letter sorting is dialled the piece in-process, utilize the fixture that oneself please provide, transfer device and dialling equipment dial the piece and pack, not only improve the letter sorting of TO device 14 and dial an efficiency and packing efficiency, and the accuracy of the letter sorting is dialled the piece has been improved, the damage and the potential damage TO TO device 14 that very easily take place when also having avoided manual operation. Specifically, the first transport mechanism 19 and the first transport mechanism 19 are disposed between the first guide rail 15 and the second guide rail 16 of the three-dimensional moving frame, and are disposed at a lower position relative TO the three-dimensional moving frame, and may be disposed at a height equal TO or lower than the bottom end of the support column 24 supporting the first guide rail 15 and the second guide rail 16, for example, at a height equal TO or lower than the bottom end of the support column 24, and then the first transport mechanism 19 continuously transports the test carrier 21, the test carrier 21 is filled with the TO devices 14, and a mechanism or a component capable of acquiring information of the TO devices 14 on the test carrier 21 is disposed at the start point of the first transport mechanism 19, that is, after the TO devices 14 start transporting on the first transport mechanism 19, the number of TO devices 14 thereon and the pass or fail information of each TO device 14 are acquired, and at the same time the second transport mechanism 20 continuously transports the packaging carrier 22, the first conveying mechanism 19 and the second conveying mechanism 20 both have a mechanism or a component which can make the test carrier 21 and the packaging carrier 22 on the first conveying mechanism pause and be positioned at a preset position, and the position of the first conveying mechanism 19 for positioning the test carrier 21, the position of the second conveying mechanism 20 for positioning the packaging carrier 22 and the defective area are on the same straight line, and the straight line is a horizontal longitudinal straight line, so the flow of the piece-shifting device is roughly as follows when the piece-shifting device is operated: first, the first transport mechanism 19 acquires TO devices 14 information on the test carrier 21 and positions it at a predetermined position, while the second transport mechanism 20 transports and positions the package carrier 22 at a predetermined position; at the moment, the third guide rail 17 slides TO the position above the straight line where the defective area is located, then the fourth guide rail 18 slides TO the position above the test board, the clamping mechanism slides on the third guide rail 17 TO move up and down, and the TO devices 14 on the test board are clamped and pulled up one by one; after each time of clamping one TO device 14, if the TO device 14 is qualified, the fourth guide rail 18 slides on the third guide rail 17 TO the upper part of the packaging carrier 22, then the clamping mechanism descends along the fourth guide rail 18 and places the TO device 14 on the corresponding position of the packaging carrier 22, if the TO device 14 is unqualified or unqualified, the fourth guide rail 18 slides on the third guide rail 17 TO the upper part of the defective area, and then the clamping mechanism descends along the fourth guide rail 18 and places the TO device 14 in the defective area; in the above-mentioned picking process, every time the TO devices 14 on the test carrier 21 are all taken away, the position restriction on the test carrier 21 is released, and then the test carrier 21 is gradually separated from the first conveying mechanism 19, and then a new test carrier 21 is put into the first conveying mechanism 19 and is successively acquired and positioned by the first conveying mechanism; in the above-described pick-up process, every time the position on the package carrier 22 is filled with the TO devices 14, the position restriction on the package carrier 22 is released, and then it is gradually moved away from the second conveyance mechanism 20, and a new package carrier 22 is immediately placed on the second conveyance mechanism 20 and positioned TO a predetermined position.

It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A device clamping mechanism is characterized by comprising a fixed arm, a finger cylinder (5) and two fixed blocks (6);

the finger cylinder (5) comprises a cylinder body and two clamping jaws, the cylinder body is connected with one end of the fixing arm, and the two clamping jaws are correspondingly connected with the two fixing blocks (6) one by one;

and a limit cavity (9) which is matched with the TO device (14) and can be opened and closed is formed between the two fixed blocks (6).

2. Device holding mechanism according TO claim 1, characterized in that the end of the limiting cavity (9) remote from the finger cylinder (5) is provided with an opening (10) for the passage of the foot (12) of the TO device (14).

3. The device holding mechanism according TO claim 2, wherein the end of the opening (10) near the limiting cavity (9) extends TO the periphery thereof TO form an annular holding groove, and the size and shape of the holding groove are matched with those of the TO device (14).

4. A device holding mechanism according TO claim 3, wherein the edge of the opening (10) is provided with a plurality of leg holes (11), the plurality of leg holes (11) matching with the plurality of legs (12) of the TO device (14).

5. The device holding mechanism according to any one of claims 1 to 4, wherein a semi-limiting cavity (9) is provided on the side of each fixing block (6) opposite to the other fixing block (6);

when the two fixing blocks (6) are tightly attached, the two semi-limiting cavities (9) form the limiting cavity (9).

6. The device clamping mechanism according to claim 5, wherein one end of each fixing block (6) far away from the finger cylinder (5) is provided with an inclined chamfer (13), and the inclined chamfers (13) of the two fixing blocks (6) form an avoiding groove sunken towards the limiting cavity (9).

7. The device gripper according to claim 5, characterized in that the fixed arm comprises a main arm (1) and an L-arm (2), the L-arm (2) comprising a first plate and a second plate perpendicular to each other and connected, the first plate being connected perpendicular to the main arm (1), the second plate having a length smaller than the length of the main arm (1), the second plate being on the same side of the first plate as the main arm (1);

the finger cylinder (5) is connected with one side of the second plate far away from the main arm (1), and a clamping jaw of the finger cylinder (5) can translate in a direction close to or far away from the second plate.

8. The device holding mechanism according to claim 7, wherein the L-arm (2) is connected with a monitoring plate (3), a distance sensor (4) is arranged on the monitoring plate (3), and the distance sensor (4) is used for detecting the distance between the monitoring plate (3) and the fixed block (6).

9. A device transfer apparatus, characterized by comprising a device holding mechanism (23) according to any one of claims 1 to 8.

10. The device transfer apparatus according to claim 9, further comprising a three-dimensional moving support including a first guide rail (15) in an X direction, a second guide rail (16) in the X direction, a third guide rail (17) in the Y direction slidably connected to the first guide rail (15) and the second guide rail (16), respectively, and a fourth guide rail (18) in the Z direction slidably connected to the third guide rail (17), wherein a side of the main arm (1) away from the L arm (2) is connected to the third guide rail (17);

11. A device pick apparatus comprising a device transfer apparatus as claimed in claim 9 or 10.

12. The device pick apparatus according to claim 11, further comprising a first transport mechanism (19) and a second transport mechanism (20), the transport directions of the first transport mechanism (19) and the second transport mechanism (20) being both X-directions;

the first transport mechanism (19) is used for transporting a test carrier (21) provided with a plurality of TO devices (14), and the second transport mechanism (20) is used for transporting a package carrier (22).

13. A device pick apparatus according to claim 12, further comprising a defective zone provided between the first transport mechanism (19) and the second transport mechanism (20).