CN110733889A

CN110733889A - multi-claw clamping mechanism, transfer device and piece shifting equipment

Info

Publication number: CN110733889A
Application number: CN201911008544.1A
Authority: CN
Inventors: 白文; 徐虎; 陆一锋
Original assignee: Core Technology Shenzhen Co Ltd
Current assignee: Core Technology Shenzhen Co Ltd
Priority date: 2019-10-22
Filing date: 2019-10-22
Publication date: 2020-01-31

Abstract

The invention relates TO an device multi-claw clamping mechanism, a transfer device and a piece shifting device, wherein the multi-claw clamping mechanism comprises a fixing plate, a plurality of fixing arms, a plurality of finger cylinders and a plurality of fixing blocks, the fixing arms are respectively parallel and connected with the fixing plate, the finger cylinders are correspondingly connected with the fixing arms, each finger cylinder comprises a cylinder body and two clamping jaws, the cylinder body is connected with the fixing arms, the two clamping jaws are respectively connected with fixing blocks, and an openable limiting cavity is formed between the two fixing blocks and matched with a TO device.

Description

multi-claw clamping mechanism, transfer device and piece shifting equipment

Technical Field

The invention relates to the technical field of semiconductor device production equipment, in particular to an device multi-jaw clamping mechanism, a transfer device and piece shifting equipment.

Background

, when a piece shifting error occurs, the unqualified TO device enters the qualified product, the series functions of the follow-up TO device can be influenced, so that the work of sorting and shifting the piece is very important.

Accordingly, it is desirable to provide an device multi-jaw clamping mechanism, transfer device and pick device that address the deficiencies of the prior art.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides an multi-jaw clamping mechanism, a transfer device and a piece poking device.

multi-jaw clamping mechanism for device, which comprises a fixed plate, multiple fixed arms, multiple finger cylinders and multiple fixed blocks;

the fixed arms are respectively parallel and are respectively connected with the fixed plate;

a plurality of finger cylinders are connected to a plurality of fixed arms, respectively;

every the finger cylinder includes cylinder body and two clamping jaws, the cylinder body with the fixed arm is connected, two the clamping jaw respectively connects the fixed block, two form between the fixed block with TO device matches and spacing chamber that can open and shut.

, the fixed arm comprises a main arm and an L-arm, the L-arm comprises a th plate and a second plate which are perpendicular to each other and connected, the th plate is perpendicular to the end of the main arm, the length of the second plate is less than that of the main arm, and the second plate and the main arm are on the same side of the th plate;

the finger cylinder is connected to the side of the second plate distal from the main arm, and the finger cylinder's jaws are translatable in a direction toward or away from the second plate.

, a side of the main arm, which is far away from the L-shaped arm, is provided with a th sliding block, and the fixed plate is provided with a th sliding rail which is perpendicular to the main arm;

and a plurality of fixed arms are respectively connected with the fixed arms in a sliding way through the matching of an th sliding block and a th sliding rail.

, the device further comprises a distance adjusting plate and a lifting piece, wherein the fixed end of the lifting piece is connected with the fixed plate, and the lifting end of the lifting piece is connected with the distance adjusting plate;

the distance adjusting plate is parallel to the fixing plate and provided with a plurality of second sliding rails, and the distance between the plurality of second sliding rails gradually increases or decreases along the extending direction of the main arm;

the main arms are provided with second sliding blocks at the side far away from the fixed plate, and the plurality of main arms are respectively and correspondingly connected with the plurality of second sliding rails in a sliding manner through the second sliding blocks.

And , connecting the L-shaped arm with a monitoring board, and arranging a distance sensor on the monitoring board, wherein the distance sensor is used for detecting the distance between the monitoring board and the fixed blocks.

, an opening for the support foot of the TO device TO pass through is arranged at the end of the limit cavity far away from the finger cylinder.

, the end of the opening near the limiting cavity extends TO the periphery TO form a ring-shaped clamping groove, and the size and the shape of the clamping groove are matched with those of the TO device.

, a plurality of supporting foot holes are arranged on the edge of the opening, the supporting foot holes are formed by extending from the edge of the opening TO the inside of the fixing block, and the plurality of supporting foot holes are matched with the plurality of supporting feet of the TO device.

, arranging a semi-limiting cavity on the side of each fixing block opposite to the other fixing blocks;

when the two fixing blocks are tightly attached, the two semi-limiting cavities form the limiting cavity.

step, every keeping away from of fixed block the end of finger cylinder all is equipped with the slope chamfer, two the slope chamfer of fixed block constitute to spacing sunken groove of dodging of chamber.

Based on the same concept as , the invention also provides a device transfer device which comprises the device multi-jaw clamping mechanism.

, the three-dimensional moving support comprises a guide rail in the X direction, a second guide rail in the X direction, a third guide rail in the Y direction, a fourth guide rail in the Y direction, a fifth guide rail in the Z direction and a sixth guide rail in the Z direction, wherein the third guide rail is respectively connected with the guide rail and the second guide rail in a sliding manner, the fourth guide rail in the Y direction is respectively connected with the guide rail and the second guide rail in a sliding manner, the fifth guide rail in the Z direction is connected with the third guide rail in a sliding manner, and the sixth guide rail in the Z direction is connected with the fourth guide rail in a sliding manner;

the device multi-claw clamping mechanism is connected with the fifth guide rail in a sliding manner, and the sixth guide rail is connected with the suction nozzle in a sliding manner;

the X direction, the Y direction and the Z direction are vertical to each other.

Based on the same inventive concept, the invention also provides device shifting devices comprising the device transferring device.

, the device further comprises a conveying mechanism, a second conveying mechanism and a third conveying mechanism, wherein the conveying directions of the conveying mechanism, the second conveying mechanism and the third conveying mechanism are all X directions;

the th conveying mechanism and the third conveying mechanism are respectively arranged on two sides of the second conveying mechanism, the th conveying mechanism is used for conveying test carriers provided with a plurality of TO devices, the second conveying mechanism is used for conveying packaging carriers, and the third conveying mechanism is used for conveying supplementary material carriers.

, the apparatus further comprises a defective area disposed between the th transport mechanism and the second transport mechanism.

Compared with the closest prior art, the technical scheme of the invention has the following advantages:

according to the multi-jaw clamping mechanism for the device, the two clamping jaws of the finger cylinder move relatively to drive the two fixing blocks connected with the finger cylinder to approach or separate from each other, the limiting cavity formed between the two fixing blocks is gradually closed in the approaching process, and the limiting cavity formed between the two fixing blocks is gradually opened in the separating process; the limiting cavity is matched with the TO device, and the TO device can enter the limiting cavity through opening and closing of the limiting cavity TO finish clamping operation of the TO device; the fixing plate is connected with a plurality of fixing arms, and each fixing arm is connected with a finger cylinder, so that the fixing plate can drive the position of the whole clamping mechanism to move, namely, the fixing plate can drive the finger cylinders and the fixing blocks connected with the finger cylinders to move; accomplish centre gripping operation and position removal back in succession, open spacing chamber again, place the TO device in new position department, fixture just so can replace the artifical direct contact TO the TO device, has avoided causing damage or potential damage TO the TO device, can transfer a plurality of TO devices of centre gripping simultaneously moreover, has also improved the letter sorting of TO device and has dialled a efficiency and accuracy.

Drawings

FIG. 1 is a front view of a device multi-jaw clamping mechanism provided by the present invention (fixed plate not shown);

FIG. 2 is a side view of a device multi-jaw clamping mechanism provided by the present invention (fixed plate not shown);

FIG. 3 is a schematic diagram of the structure of the components above fixed arms in a multi-jaw holding mechanism for a device provided by the present invention;

fig. 4 is a partially enlarged view of a portion a of fig. 3;

FIG. 5 is a side view of the components above securing arms in a device multi-jaw clamping mechanism provided by the present invention;

fig. 6 is a schematic structural diagram of the device dialing apparatus provided by the present invention.

The device comprises a main arm 1, a main arm 2, an L arm 3, a monitoring board 4, a distance sensor 5, a finger cylinder 5, a fixed block 6, a sliding block 7, a sliding block , a sliding block 8, a limiting cavity 9, an opening 10, a supporting pin hole 11, a supporting pin 12, an inclined chamfer 13, a device 14, a guide rail 15, a second guide rail 16, a third guide rail 17, a fourth guide rail 18, a transport mechanism 19, a second transport mechanism 20, a test carrier 21, a packaging carrier 22, a multi-claw clamping mechanism 23, a supporting column 24, a fifth guide rail 25, a sixth guide rail 26, a suction nozzle 27, a material supplementing carrier 28, a lifting piece 29, a distance adjusting board 30, a second slide rail 31, a slide rail 32, a slide rail 33 and a third transport mechanism.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer and more complete, the technical solutions in the embodiments of the present invention will be described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention.

As shown in fig. 1 TO 5, the invention provides an device multi-jaw clamping mechanism, in particular TO a TO device multi-jaw clamping mechanism, which comprises a fixing plate, a plurality of fixing arms, a plurality of finger cylinders 5 and a plurality of fixing blocks 6, wherein the fixing arms are respectively parallel TO and respectively connected with the fixing plate, the finger cylinders 5 are correspondingly connected with the fixing arms, each finger cylinder 5 comprises a cylinder body and two clamping jaws, the cylinder body is connected with the fixing arms, the two clamping jaws are respectively connected with the fixing blocks 6, and an openable limiting cavity 9 matched with a TO device 14 is formed between the two fixing blocks 6 connected with the finger cylinders 5.

The two fixing blocks 6 connected with the finger cylinder 5 can be driven to relatively approach or separate from each other through the relative movement between the two clamping jaws of the finger cylinder 5, a limiting cavity 9 formed between the two fixing blocks 6 is gradually closed in the approaching process, and the limiting cavity 9 formed between the two fixing blocks 6 is gradually opened in the separating process; the limiting cavity 9 is matched with the TO device 14, and the TO device 14 can enter the limiting cavity 9 through opening and closing of the limiting cavity 9, so that the clamping operation of the TO device 14 is completed; the fixing plate is connected with a plurality of fixing arms, and each fixing arm is connected with a finger cylinder 5, so that the fixing plate can drive the position of the whole clamping mechanism to move, namely, the fixing plate can drive the plurality of finger cylinders 5 and the fixing blocks 6 connected with the finger cylinders to move; after accomplishing clamping operation and position removal in succession, open spacing chamber 9 again, place TO device 14 in new position department, fixture just so can replace the manual work TO the direct contact of TO device 14, avoided causing damage or potential damage TO TO device 14, can the multiple TO devices 14 of centre gripping simultaneously moreover shift, also improved TO device 14's letter sorting and dial a efficiency and accuracy.

In examples of the invention, the fixed arm comprises a main arm 1 and an L arm 2, the L arm 2 comprises a th plate and a second plate which are perpendicular to each other and connected, the th plate is perpendicular to the end of the main arm 1, the length of the second plate is smaller than that of the main arm 1, the second plate is on the same side of the th plate with the main arm 1, the finger cylinder 5 is connected with the side of the second plate far away from the main arm 1, the clamping jaw of the finger cylinder 5 can move in a direction close to or far away from the second plate in a translation mode, the L arm 2 and the main arm 1 form a U-shaped fixed arm, but due to the different effects of different positions of the fixed arm, the length difference of two vertical edges of the U-shaped fixed arm is large, the length of the main arm 1 is large, the length of the second plate is small, the outer side of the main arm 1 is connected with a parent device, the outer side of the second plate is connected with the finger cylinder 5, and the clamping jaw of the finger cylinder 5 is parallel.

In embodiments of the present invention, the side of the main arm 1 away from the L-arm 2 is provided with a th sliding block 7, the fixing plate is provided with a th sliding rail 32 perpendicular TO the main arm 1, a plurality of fixing arms are slidably connected with the th sliding block 7 and the th sliding rail 32 respectively, the plurality of fixing arms are connected with the th sliding rail 32 on the fixing plate respectively, so that the position of each fixing arm can be adjusted by sliding in the th sliding rail 32, the th sliding rail 32 is selectively arranged in the horizontal direction, the main arm 1 of the fixing arm is in the vertical state, the th plate is in the horizontal direction, the second plate is in the vertical state, the clamping jaws of the finger cylinder 5 are in the vertical state and under the cylinder body, the position of the corresponding limiting cavity 9 of each main arm 1 is adjusted by sliding, the positions of the pairs of fixing blocks 6 are adjusted, when the pairs of fixing blocks 6 are used simultaneously and the plurality of TO devices 14 are clamped simultaneously, the pair of the fixing blocks 6 (i.e.e. the main arm 1, , the main arm and the two TO devices are aligned TO clamp the two TO devices 14 simultaneously, and the two TO clamp the fixing blocks are aligned TO clamp the devices 14 simultaneously.

In some embodiments of the present invention , the distance adjusting device further comprises a distance adjusting plate 30 and a lifting member 29, a fixed end of the lifting member 29 is connected TO the fixed plate, a lifting end of the lifting member 29 is connected TO the distance adjusting plate 30, the distance adjusting plate 30 is parallel TO the fixed plate, the distance adjusting plate 30 is provided with a plurality of second slide rails 31, a distance between the plurality of second slide rails 31 gradually increases or decreases along an extending direction of the main arm 1, the main arm 1 is provided with a second slider 8 on a side away from the fixed plate, the plurality of main arms 1 are respectively connected with the plurality of second slide rails 31 in a sliding manner through the second slider 8, the distance adjusting plate 30 can be lifted and lowered along with the lifting member 29, the distance adjusting plate 30 can only slide in a horizontal direction because a position of the main arm 1 is fixed in a vertical direction during lifting and lowering, a position at a height equal TO the second slider 31 is changed along with lifting and lowering of the distance adjusting plate 30, or a mutual distance between the plurality of main arms 1 increases, and a distance adjusting device 30 can be controlled TO be lifted and a distance adjusting device 365 and a plurality of main arms 30 can be controlled by a plurality of the main arm units (i.e., a plurality of main arms 14 and a plurality of main arms 14, thereby a plurality of main arms 14 and a plurality of main arm 14 can be controlled automatically controlled by a plurality of fingers.

In embodiments of the present invention, the L-arm 2 is connected to a monitor board 3, a distance sensor 4 is disposed on the monitor board 3, and the distance sensor 4 is used to detect the distance between the monitor board 3 and a fixed block 6. the monitor board 3 can be disposed under the th board and opposite to the second board, and the distance sensor 4 is disposed on the monitor board 3, and the detection direction thereof faces the fixed block 6, which can determine the distance between the two fixed blocks 6 by detecting the distance between the fixed block 6 and the distance sensor 4, that is, can determine the opening and closing condition of the spacing cavity 9.

In embodiments of the invention, an opening 10 for allowing the support leg 12 of the TO device 14 TO pass through is arranged at the end of the limiting cavity 9 far away from the finger cylinder 5. the TO device 14 generally comprises a main body and the support legs 12 arranged below the main body and in a radial shape, when the TO device 14 is intensively placed on the test board, the support legs 12 are inserted into a specific containing hole TO be positioned and limited, the limiting cavity 9 is mainly used for limiting and containing the TO device 14, and the support legs 12 of the TO device 14 can penetrate through the preset opening 10 and extend out of the limiting cavity 9, so that the volume of the limiting cavity 9 is greatly reduced, the position of the TO device 14 in the limiting cavity 9 is more stable, the TO device is not easy TO move, and the clamping effect is enhanced.

In the embodiments of the invention, the end of the opening 10 near the position-limiting cavity 9 extends TO the periphery TO form an annular clamping groove, the size and shape of the clamping groove are matched with those of the TO device 14, the opening 10 is used for allowing the support leg 12 of the TO device 14 TO extend out and simultaneously limiting the main body of the TO device 14 in the position-limiting cavity 9, the TO device 14 is in suspension states at the moment, namely, the position of the TO device 14 in the vertical direction is limited by gravity, the position in the horizontal direction is not limited accurately, even in the vertical direction, when the whole clamping mechanism shakes or overturns violently, the position in the vertical direction still cannot ensure stability, the clamping groove forms steps at the upper end of the opening 10, the peripheral edge of the clamping groove is matched with the shape and size of the main body of the TO device 14, the main body of the TO device 14 can be just embedded in the clamping groove, the operation of the TO device 14 needs two fixing blocks 6 TO be far from the position TO be close TO the position of the position-limiting cavity 9 gradually, the TO device 14 falls into the position-limiting cavity 14 in the horizontal direction, and then the whole clamping mechanism is controlled TO be in the TO device 14 TO be in the horizontal direction quickly, and then the position of the TO device 14, and the whole clamping mechanism is controlled by the subsequent horizontal direction, and the clamping mechanism, and the TO device 14, and the whole clamping mechanism is controlled TO be in the horizontal direction, and then the horizontal direction, and the TO device 14 TO be clamped by the horizontal direction, and then the.

In embodiments of the invention, the rim of the opening 10 is provided with a plurality of support holes 11, the support holes 11 are formed extending from the rim of the opening 10 into the fixing block 6, the plurality of support holes 11 are matched with the plurality of support legs 12 of the TO device 14. it has been described above that the support legs 12 of the TO device 14 are gradually separated from each other in the direction away from the main body thereof, so as TO form radial support legs 12, the snap-fit arrangement can facilitate the passage of the support legs 12, and the support holes 11 are more matched with the position and shape of the support legs 12, which correspond TO the position of the support legs 12 , so that the support legs 12 of the TO device 14 can be more accurately retracted TO prevent damage TO the support legs 12 and facilitate the clamping and positioning of the support legs during the process that the fixing block 6 approaches each other and closes the spacing cavity 9.

In embodiments of the invention, semi-limiting cavities 9 are arranged on sides of each fixing block 6 opposite TO the other fixing blocks 6, when the two fixing blocks 6 are tightly attached, the two semi-limiting cavities 9 form the limiting cavity 9, the two limiting semi-cavities are halves of the limiting cavity 9, namely, the fixing block 6 extends inwards TO form a recess, the two recesses are combined at TO form the limiting cavity 9, the limiting cavity 9 can penetrate through the whole fixing block 6 in the direction perpendicular TO the moving direction of the fixing block 6, and the limiting cavity is in a recessed form in the moving direction of the fixing block 6, so that the two fixing blocks 6 can be observed through two sides of the limiting cavity 9 in the process of clamping the TO device 14, the operation convenience is improved, and the clamping accuracy is improved.

In embodiments of the present invention, each fixing block 6 has an inclined chamfer 13 at the end far away from the finger cylinder 5, and the inclined chamfers 13 of the two fixing blocks 6 form an avoiding groove recessed toward the limiting cavity 9. when the TO devices 14 are disposed on the test board, the TO devices 14 are inserted into corresponding holes of the test board through the support legs 12, and the mounting positions on the test board corresponding TO each TO devices 14 are all conical or truncated cone-shaped protrusions, and then the side walls of the protrusions are provided with insertion holes, when the TO devices 14 are disposed on the test board, the support legs 12 are inserted into the insertion holes on the side walls, and the main body is placed above the protrusions, and when the TO devices 14 are respectively clamped by the two fixing blocks 6 from both sides, the two inclined chamfers 13 can avoid the protrusions on the mounting positions, so that the matching degree of the clamping mechanism and the test board is higher.

Based on the same concept as , the invention also provides a device transfer device, which comprises a device multi-claw clamping mechanism 23. the transfer device can drive the device multi-claw clamping mechanism TO complete clamping and transferring of the TO device 14, and is suitable for being applied TO the sorting and shifting operation of the TO device 14.

In some embodiments of the invention, the device sorter further comprises a three-dimensional moving rack, the three-dimensional moving rack comprises a third guide 15 in the X direction, a second guide 16 in the X direction, a third guide 17 in the Y direction slidably connected with the third guide 15 and the second guide 16 respectively, a fourth guide 18 in the Y direction slidably connected with the guide 15 and the second guide 16 respectively, a fifth guide 25 in the Z direction slidably connected with the third guide 17, a sixth guide 26 in the Z direction slidably connected with the fourth guide 18, a device multi-claw clamping mechanism slidably connected with the fifth guide 25, the sixth guide 26 slidably connected with the suction nozzles 27, the X direction, the Y direction and the Z direction are vertical, the X direction in the three-dimensional moving rack can be horizontal and transverse, the Y direction can be horizontal and longitudinal, the Z direction can be vertical, the guide 15 and the second guide 16 are horizontal and transverse guides, two ends of the horizontal guides support columns 24 support the vertical support columns TO , the third guide 17 and the fourth guide 18 are horizontal guides, the horizontal and vertical guide 14 and the horizontal and vertical guide 18, the horizontal and vertical guide 14 can be arranged TO the horizontal and vertical guide 14 TO clamp mechanism 18 TO clamp the horizontal and vertical clamp the horizontal TO clamp the device 14 TO the horizontal and vertical clamp the horizontal guide 14 TO the horizontal and vertical clamp 14 TO avoid the horizontal TO the horizontal and vertical clamp TO the horizontal TO clamp TO the horizontal TO clamp TO the horizontal guide 14.

As shown in FIG. 6, based on the same concept as , the invention also provides device shifting devices comprising the device transferring device.

In the embodiments of the present invention, the test device further includes a transport mechanism 19, a second transport mechanism 20, and a third transport mechanism 33, the transport mechanism 19, the second transport mechanism 20, and the third transport mechanism 33 all have X-direction transport directions, the transport mechanism 19 and the third transport mechanism 33 are respectively disposed on two sides of the second transport mechanism 20, the transport mechanism 19 is used TO transport the test carriers 21 with the TO devices 14, the second transport mechanism 20 is used TO transport the package carriers 22, and the third transport mechanism 33 is used TO transport the supplement carriers 28.

In the embodiments of the present invention, the apparatus further comprises a defective area disposed between the th transport mechanism 19 and the second transport mechanism 20.

When a TO device 14 is required TO be sorted from a defective position by a TO device 14 on a test board, and sorted TO a different position, i.e. a defective device is transferred TO a defective position, and a defective device is transferred TO a package carrier 22 by a transfer unit 22, a defective device is packed after the package carrier 22 is filled with the defective device, and the package is completed simultaneously in the sorting and transfer process, the picking and packing efficiency of the TO device 14 are improved, and the accuracy of the sorting and transfer of the TO device 14 is improved, if the defective device is not picked up by a multi-claw gripper, a transfer device and a transfer device provided by the present application, and the defective device is not picked up by a multi-claw gripper, a transfer device and a transfer device 22, and a defective device is also improved, and damage and potential damage TO the TO device 14 which are easily caused by manual operation, are avoided, a plurality of defective devices 14, particularly, a third transfer mechanism 19, a second transfer mechanism 20 and a third transfer mechanism 33 are disposed between a third and 16 of a three-dimensional moving rack, e.g. a third transfer mechanism, e.g. a lower position, which may be disposed at a position which is equal TO a position with a third moving rack, e.g. which supports, such as a position which supports, e.g. supports, such as is equal TO a position with a straight transfer mechanism supporting a third guide rail 15 and a straight transfer mechanism, a straight transfer medium, a plurality of a defective device, a plurality of a TO device, a plurality of a defective device 14, a plurality of a third transfer track 16, a third transfer track, a plurality of a defective device 14, a plurality of a defective device, a plurality of a TO transfer device 14, a defective device, a plurality of devices, a plurality of defective device, a plurality of devices 14, a plurality of devices, a plurality of defective devices, a plurality of devices, a plurality of test carrier 14, a plurality of feeder, a feeder.

It is noted that, herein, relational terms such as "," "second," and the like are used solely to distinguish entities or operations from another entities or operations without necessarily requiring or implying any actual such relationship or order between such entities or operations.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims

The multi-jaw clamping mechanism for the device is characterized by comprising a fixing plate, a plurality of fixing arms, a plurality of finger cylinders (5) and a plurality of fixing blocks (6);

the fixed arms are respectively parallel and are respectively connected with the fixed plate;

a plurality of finger cylinders (5) are correspondingly connected with the fixed arms;

every finger cylinder (5) include cylinder body and two clamping jaws, the cylinder body with the fixed arm is connected, two the clamping jaw respectively connects fixed block (6), two form between fixed block (6) with TO device (14) are matched and spacing chamber (9) that can open and shut.
2. The device multi-jaw clamp mechanism according to claim 1, wherein the fixed arm comprises a main arm (1) and an L-arm (2), the L-arm (2) comprising th plate and a second plate perpendicular to each other and connected, the th plate being connected perpendicular to the end of the main arm (1), the length of the second plate being smaller than the length of the main arm (1), the second plate being on the same side of the th plate as the main arm (1);

the finger cylinder (5) is connected with the side of the second plate far away from the main arm (1), and the clamping jaw of the finger cylinder (5) can translate in the direction close to or far away from the second plate.
3. The device multi-jaw clamping mechanism according to claim 2, characterized in that the side of the main arm (1) far away from the L-arm (2) is provided with a sliding block (7), and the fixed plate is provided with a sliding rail (32) perpendicular to the main arm (1);

and a plurality of fixed arms are respectively connected with the fixed arms in a sliding way through the matching of an th sliding block (7) and a th sliding rail (32).
4. The device multi-jaw clamping mechanism according to claim 3, further comprising a distance adjusting plate (30) and a lifting member (29), wherein a fixed end of the lifting member (29) is connected with the fixed plate, and a lifting end of the lifting member (29) is connected with the distance adjusting plate (30);

the distance adjusting plate (30) is parallel to the fixing plate, a plurality of second sliding rails (31) are arranged on the distance adjusting plate (30), and the distance between the plurality of second sliding rails (31) is gradually increased or decreased along the extending direction of the main arm (1);

the side of the main arm (1) far away from the fixed plate is provided with a second sliding block (8), and the main arms (1) are correspondingly and slidably connected with the second sliding rails (31) through the second sliding blocks (8).
5. Device multi-jaw clamping mechanism according to claim 2, characterized in that the L-arm (2) is connected with a monitoring plate (3), a distance sensor (4) is arranged on the monitoring plate (3), and the distance sensor (4) is used for detecting the distance between the monitoring plate (3) and the fixed block (6).
6. Device multi-jaw gripper mechanism according TO claim 1, characterized in that the end of the spacing cavity (9) remote from the finger cylinder (5) is provided with an opening (10) for the passage of the foot (12) of the TO device (14).
7. Device multi-jaw clamp according TO claim 6, characterized in that the end of the opening (10) near the stopper cavity (9) extends around it TO form an annular clamping groove, the size and shape of which matches the TO device (14).
8. Device gripper according TO claim 6, characterized in that the edge of the opening (10) is provided with a plurality of leg holes (11), the leg holes (11) extending from the edge of the opening (10) into the fixture block (6), the plurality of leg holes (11) matching the plurality of legs (12) of the TO device (14).
9. Device multi-jaw clamping mechanism according to claim 1, characterized in that the side of each fixture block (6) opposite to another fixture blocks (6) is provided with a semi-limiting cavity (9);

when the two fixing blocks (6) are tightly attached, the two semi-limiting cavities (9) form the limiting cavity (9).
10. Device multi-jaw clamping mechanism according to claim 9, characterized in that the end of each fixed block (6) that is far away from the finger cylinder (5) is provided with an inclined chamfer (13), the inclined chamfers (13) of the two fixed blocks (6) constituting an avoiding groove that is recessed towards the limiting cavity (9).
Device transfer apparatus according to claim 11, , comprising a device multi-jaw clamping mechanism (23) according to any of claims 1 to 10 to .
12. The device transferring apparatus according to claim 11, further comprising a three-dimensional moving rack including an X-direction -th guide rail (15), an X-direction second guide rail (16), a Y-direction third guide rail (17) slidably connected to the -th guide rail (15) and the second guide rail (16), respectively, a Y-direction fourth guide rail (18) slidably connected to the -th guide rail (15) and the second guide rail (16), respectively, a Z-direction fifth guide rail (25) slidably connected to the third guide rail (17), and a Z-direction sixth guide rail (26) slidably connected to the fourth guide rail (18);

the device multi-jaw clamping mechanism is connected with the fifth guide rail (25) in a sliding mode, and the sixth guide rail (26) is connected with the suction nozzle (27) in a sliding mode;

the X direction, the Y direction and the Z direction are vertical to each other.
An parts mover device, comprising the parts transfer apparatus of claim 11 or 12.
14. The device paddle apparatus of claim 13, further comprising an th transport mechanism (19), a second transport mechanism (20), and a third transport mechanism (33), the transport directions of the th transport mechanism (19), the second transport mechanism (20), and the third transport mechanism (33) all being in the X direction;

the th conveying mechanism (19) and the third conveying mechanism (33) are respectively arranged at two sides of the second conveying mechanism (20), the th conveying mechanism (19) is used for conveying a test carrier (21) provided with a plurality of TO devices (14), the second conveying mechanism (20) is used for conveying a packaging carrier (22), and the third conveying mechanism (33) is used for conveying a supplementary material carrier (28).
15. A device pick apparatus as claimed in claim 14, further comprising a defective area, said defective area being disposed between said -th transport mechanism (19) and said second transport mechanism (20).