CN211123568U - Motion control system - Google Patents
Motion control system Download PDFInfo
- Publication number
- CN211123568U CN211123568U CN201921983169.8U CN201921983169U CN211123568U CN 211123568 U CN211123568 U CN 211123568U CN 201921983169 U CN201921983169 U CN 201921983169U CN 211123568 U CN211123568 U CN 211123568U
- Authority
- CN
- China
- Prior art keywords
- imaging
- motion
- light
- motion control
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a motion control system, which comprises a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller comprises a focusing plane motion control unit and a workbench motion control unit, which are respectively used for controlling an imaging objective lens to move up and down in the vertical direction, focus through an imaging detection part and keep a focusing plane on the surface of a light polarization sensitive material all the time and controlling the workbench carrying the light polarization sensitive material to move in a two-dimensional plane; the motor driving device is used for driving the motor to drive the focusing plane and the workbench to move. The utility model discloses a two-dimensional plane removes is done to high accuracy workstation accurate control sample, writes to realizing the big breadth and has great meaning.
Description
Technical Field
The utility model relates to a liquid crystal orientation arranges the control field, especially relates to a motion control system among patterned liquid crystal photo-alignment device.
Background
Liquid crystals have wide applications in the fields of information display, optics, photonics devices and the like; the liquid crystal can further realize amplitude, phase and polarization modulation of light according to designed orientation arrangement, and plays an important role in the applications, so the orientation arrangement control mode of the liquid crystal becomes a research hotspot of academia and industrial production, and the prior art disclosed at present is mainly a photoalignment technology.
Photoalignment is a non-contact liquid crystal aligning method which is newly developed, and the photoalignment technology is divided into four types at present, wherein the photoalignment technology utilizes photosensitive materials to perform oriented photocrosslinking, isomerization or photocracking reaction under the irradiation of ultraviolet or blue light polarized light to obtain the required arrangement: mask overlay polarization patterning techniques, periodic liquid crystal alignment techniques obtained by holographic interference methods, dynamic mask photo-alignment techniques based on DMDs, and also polarization alignment techniques based on spatial modulators.
The polarization orientation technology based on the liquid crystal spatial modulator is a programmable control device capable of modulating the phase and amplitude of incident light, and pattern recording of different orientation arrangements of liquid crystals in different selected areas can be realized by single projection orientation.
Patent application No. CN201820881217.1 discloses a photo-alignment apparatus for realizing arbitrary distribution by one exposure, which introduces a photo-alignment method for single exposure using a pixelated electrically controlled phase delay device, wherein the phase delay of each pixel of the pixelated electrically controlled phase delay device is controlled by a corresponding voltage respectively for generating the phase delay of arbitrary pattern distribution, but the problem of generating a phase pattern by one exposure is that the data size is proportional to the format size, which limits the format size of the prepared device, and also considers that a high-precision high-resolution photo-alignment pattern cannot be generated.
foreign beam corporation has provided an apparatus and method for photoalignment using continuous laser irradiation of an L COS phase modulation device (De Sio L, Roberts D E, L iao Z, et al, digital polarization lithography geographic phase Optics [ J ]. Optics express, 2016, 24 (16): 18297-18306.), they have employed low energy continuous laser for exposure, taking into account the amount of information of an image and the uniformity of exposure and the properties of heat capacity of a material, thermal diffusion, etc., tens of seconds to tens of minutes are required for exposure to a single field of view, and the exposure profile is limited by image information, and large area profiles cannot be photoaligned.
Therefore, a device capable of realizing large-scale patterned liquid crystal photo-alignment is desired.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems of the prior art, on one hand, the utility model discloses a motion control system, which comprises a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller is used for converting collected light path data comprising motion information into control signals and sending the control signals to each execution component;
The motion controller comprises a focusing plane motion control unit and a workbench motion control unit;
The focusing plane motion control unit is used for controlling the imaging objective lens to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component;
The workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields;
The motor driving device is used for driving the motor to drive the focusing plane and the workbench to move.
As a further improvement of the embodiment of the present invention, the main shaft direction perpendicular to of the light path of the imaging objective lens group is perpendicular to the table, the motor drives the imaging objective lens group to make the up-and-down movement of the vertical direction form on the table the focusing plane.
As a further improvement of the embodiment of the present invention, the workbench is disposed below the imaging objective lens group and has a two-dimensional motion track for bearing the light polarization sensitive material and driving the light polarization sensitive material to move in a two-dimensional plane under the drive of the motion control component, so that the surface of the light polarization sensitive material is always kept on the focusing plane of the imaging objective lens group.
As a further improvement of the embodiment of the present invention, the motion control system further includes a detection device, the detection device is used for monitoring the motion of the motor in real time, and sending the motion position and the speed of the motor to the motion controller.
As a further improvement of the embodiment of the present invention, the motion controller is configured to receive the collected two-dimensional physical coordinate signal of the worktable and send an exposure switch command to the polarization pattern generating component.
As a further improvement of the embodiment of the present invention, the worktable is provided with a scanning shaft, and the scanning shaft comprises a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
As a further improvement of the embodiment of the present invention, the motion control system further includes a detection device for monitoring the motion state information of the motor in real time and sending the motion position and speed of the motor to the motion controller;
The workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
As a further improvement of the embodiment of the present invention, the imaging detection unit includes a first light splitter, a cylindrical lens, an imaging objective lens group, a polarizing plate, a first lens, and a first imaging CCD, which are connected in sequence; the front focal plane of the imaging objective group is positioned near the rear focal plane of the tube mirror; the imaging surface of the first imaging CCD is positioned on the front focal plane of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
As a further improvement of the embodiment of the present invention, the imaging detection assembly is connected to a miniature imaging component, and is used for miniature polarization pattern output by the polarization pattern generation component and writing the polarization pattern into the light polarization sensitive material;
The polarization pattern generation component comprises a phase modulator for outputting a pixelated programmable polarization pattern; or the electric adjustable polaroid is rotated to the corresponding polarization angle by controlling the rotating motor, and the polarized light with the fixed polarization angle is generated.
As a further improvement of the embodiment of the present invention, the motion control system is connected to a focal length servo system, and the focal length servo system is used for correcting the out-of-focus phenomenon generated by the motion;
The focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
The detection light source is positioned on the front focal plane of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
The first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. The utility model adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-breadth writing;
2. The utility model adopts the light energy not concentrated, and eliminates the abutted seam between each light-operated orientation view field by controlling the relation between the size of a single view field and the single translation distance, thereby improving the resolution;
3. The utility model has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of single exposure polarization pattern, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices;
4. The utility model discloses utilize the formation of image detection subassembly through the image that gets into first formation of image CCD through first lens from light polarization sensitive material surface reflection, judge whether objective focal plane is on the photosensitive material surface through the contrast of the profile of observing the formation of image facula in the first formation of image CCD, realized the accurate detection to the formation of image, have the significance to the liquid crystal light orientation that realizes big breadth, high efficiency, good reliability;
5. The utility model discloses a focus servo's assistance, control objective do and reciprocate, real-time focusing improves resolution ratio.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a motion control system according to an embodiment of the present invention;
Fig. 2 is a schematic structural diagram of a patterned liquid crystal photo-alignment device according to an embodiment of the present invention;
Fig. 3 is a schematic diagram showing the selection of the pulse laser frequency and the refresh frequency of the phase modulation device of the high-speed exposure patterned liquid crystal photo-alignment device according to the embodiment of the present invention;
Fig. 4 is a schematic diagram of the peak absorption characteristics of a light polarization sensitive material employed in an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
On one hand, the utility model discloses a motion control system, as shown in fig. 1, comprising a workbench, a motion controller, a motor and a motor driving device;
The motion controller is used for converting the collected light path data including the motion information into control signals and sending the control signals to each execution component; specifically, the motion controller receives the acquired two-dimensional physical coordinate signal of the workbench and sends an exposure switching instruction to the polarization pattern generation component.
In the embodiment of the utility model, the workbench is provided with a scanning shaft, and the scanning shaft comprises a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time; the location may be located in two-dimensional physical coordinates.
In an embodiment of the present invention, the motion controller includes a focusing plane motion control unit and a table motion control unit;
The focusing plane motion control unit is used for controlling the imaging objective lens group to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component; specifically, the main axis direction of the optical path of the imaging objective lens group is perpendicular to the workbench, and the motor drives the imaging objective lens group to vertically move up and down to form the focusing plane on the workbench.
The workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields; the workbench is arranged below the imaging objective lens group and is provided with a two-dimensional motion track which is used for bearing the light polarization sensitive material and driving the light polarization sensitive material to move on a two-dimensional plane under the drive of the motion control component, so that the surface of the light polarization sensitive material is always kept on the focusing plane of the imaging objective lens group.
The motor driving device is used for driving the motor to drive the focusing plane and the workbench to move; it should be noted that, in the embodiment of the present invention, the concept of "focal plane" is introduced for the requirement of the description of the focused imaging, and the focal plane is a functional plane formed on the mechanical structure table.
The embodiment of the utility model provides an in, motion control system still includes detection device, and detection device is used for the motion of real-time supervision motor to send the motion position and the speed of motor for motion controller.
The workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
Specifically, the imaging detection component comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing plate, a first lens and a first imaging CCD which are connected in sequence; wherein, the front focal plane of the imaging objective group is positioned near the back focal plane of the tube lens; the imaging surface of the first imaging CCD is positioned on the front focal surface of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
Further, the imaging detection assembly is connected with the miniature imaging component and used for carrying out miniature on the polarization pattern output by the polarization pattern generating component and writing the polarization pattern into the light polarization sensitive material;
In an embodiment of the present invention, the liquid crystal photo-alignment polarization pattern generating part includes a quarter-wave plate and a phase modulator connected in sequence, for outputting a pixilated programmable polarization pattern; the phase modulator is connected with the imaging detection component; the phase modulation device is a liquid crystal phase modulation device and is used for loading different phases to each pixel.
In other alternative embodiments, the liquid crystal photoalignment polarization pattern generation component comprises a digitally controlled micromirror DMD, a computer control system, an electrically adjustable polarizer, and a beam splitter prism;
The electrically adjustable polaroid and the beam splitter prism are positioned on the horizontal central axis of the digital control micromirror DMD in an open state;
And the computer control system is used for rotating the electrically adjustable polaroid to a corresponding polarization angle by controlling the rotating motor according to the gray value of the numerical control micro-mirror DMD refreshing graph to generate the polarized light with a fixed polarization angle.
In the embodiment of the utility model, the motion control system is connected with the focal length servo system, and the focal length servo system is used for correcting the defocusing phenomenon generated by the motion;
Specifically, the focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
The detection light source is positioned on the front focal surface of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
The first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
Specifically, the embodiment of the present invention is applied to a patterned liquid crystal photo-alignment device, as shown in fig. 2, including an illumination component, a polarization pattern generation component, an imaging detection component, a focal length servo system and a motion control component, which are connected in sequence;
The illumination component is used for providing a light source for continuous stroboscopic exposure and realizing single-polarization collimation uniform surface light spots;
The polarization pattern generating component comprises a quarter-wave plate and a phase modulator which are connected in sequence and is used for outputting a pixilated programmable polarization pattern to a workpiece; the phase modulator is connected with the imaging detection component; the phase modulation device is a liquid crystal phase modulation device and is used for loading different phases to each pixel;
An imaging detection component for detecting the generated pattern imaging; the focal length servo system comprises a normally open light source insensitive to the light polarization sensitive material and a vertical direction correction assembly, and is used for correcting the defocusing phenomenon generated by movement;
And the motion control component is used for adjusting the spatial position of the workbench loaded with the light polarization sensitive material so as to realize light field splicing.
In the embodiment of the present invention, the illumination component is a pulse light source, specifically, a pulse laser 11; in other alternative embodiments the illumination means may also be a continuous light source with a controllable barrier system; the pulse width of the pulse laser generated by the lighting component is in the picosecond to second level, and the wavelength of the pulse laser 11 is 340nm to 600 nm; the energy per unit area of the pulse light source is higher than the threshold energy of the optical polarization sensitive material on the liquid crystal substrate and lower than the damage threshold of the phase modulation device.
in other alternative embodiments, the pulsed light source may also be generated by a continuous laser plus a mechanical or electro-optical barrier, or by a pulsed L ED or continuous L ED plus a controllable barrier system.
Preferably, the pulse width of the pulse laser is less than or equal to the image holding time of the phase modulation device, and when one image of the phase modulation device is held, at least one pulse laser peak is irradiated onto the phase modulation device.
The embodiment of the utility model provides an optical wavelength that the laser instrument sent is 442nm, the monopulse energy is 0.2mJ, and the pulsewidth is 10ns, is pulse light and S polarization, and the adjustment of collimating is carried out through expanding the beam system, after the polarizer again, forms a facula diameter and is 2cm, and the divergence angle is less than 10mrad, and S polarization, light intensity uniformity is superior to the even facula of 80% collimation.
Specifically, in an embodiment of the present invention, the illumination component includes a collimating assembly and a polarizer; the collimating component and the polarizing plate form a collimating polarizing component.
The collimation assembly is used for adjusting the linear light source or the point light source into a parallel surface light source and outputting the parallel surface light source to the polarization image generation component;
The polarizer is connected with the collimation assembly and is used for controlling the initial polarization direction of light and generating a surface light source with any polarization direction within the range of 0-179 degrees.
In the embodiment of the present invention, the phase modulation device is a phase difference adjustable pixel type phase retarder; reflecting the polarized surface light source into light spots containing different polarization information and transmitting the light spots to the light splitting component; the phase delay modulation of the phase modulation device on the pulse light source is more than 2 pi; the single gray level controlled by a computer program has the phase modulation precision superior to 0.01 pi so as to realize random phase delay modulation in one period; the phase delay amount drift of the phase modulation device is less than 0.005 pi.
In the embodiment of the present invention, the quarter-wave plate is disposed between the phase modulator and the imaging detection module; the phase modulator 22 is a liquid crystal spatial light modulator, and is a phase difference adjustable pixel type phase retarder; the polarization rotation direction is one half/2; the polarization direction of incident light, the crystal axis direction of the phase modulation device and the crystal axis direction of the quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In another practical way, the polarization pattern generation component comprises a first quarter-wave plate, a phase modulation device and a second quarter-wave plate which are connected in sequence; the number of quarter-wave plates may not be unique.
Wherein, the major axis direction of the first quarter-wave plate, the crystal axis direction of the phase modulation device and the crystal axis direction of the first quarter-wave plate form included angles of 0 degree, 45 degrees and 90 degrees.
In some embodiments, to address the problem of generating arbitrary polarization orientations, a polarization pattern generation component, comprising a quarter-wave plate and a phase modulator connected in series, is used to generate a pattern of arbitrary polarization distribution; the phase modulation device regulates and controls the polarization level of each pixel point through voltage, and each pixel point determines the size of the voltage through different gray scale information, so that the regulation and control of the gray scale image on the polarization information are realized. The gray scale map can be written in real time or pre-loaded; the phase modulation device can be but is not limited to an ultra-high speed liquid crystal spatial light modulator, and can be used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized. The resolution of the original polarized light field is determined by the pixel size of the liquid crystal spatial light modulator.
The specific process of forming the polarization pattern based on the phase modulation device is as follows: the fast axis direction of the first quarter-wave plate is orthogonal to that of the second quarter-wave plate, and the first quarter-wave plate and the second quarter-wave plate are in alignment with the liquid crystal row of the phase modulator the alignment light spot passes through the first quarter wave plate and then enters the phase modulation device at an angle of 3 degrees with the normal of the phase modulation device to irradiate the phase modulation device uniformly, the phase modulation device adopted in the embodiment is an L COS device, the working frequency is 50Hz to 400Hz, and the damage threshold of the pulse laser 11 is more than 300mJ/cm 210ns, 1920 × 1080 pixels, 8 microns in size of a single pixel, 1.54cm × 0.86cm in size of the whole phase modulation device 22, and the phase modulation precision is better than 0.03 pi for a phase modulation amount of 442nm larger than 2 pi.
The embodiment of the present invention provides a control logic specifically comprising: the control software in the industrial personal computer transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, and the motor driver controls the motion of the motor according to the received control signal; the detection device is responsible for monitoring the motion of the motor in real time and sending the motion position and the motion speed of the motor to the motion control module; and the motion control module feeds back the current position and speed of the workbench to the software.
the phase modulator L COS in the optical system is connected with the industrial personal computer through a data transmission line, so that the control software can transmit phase diagram data to the L COS.
In another aspect, the present invention also provides a high-speed exposure patterning liquid crystal photo-alignment method, comprising the steps of:
S1, adjusting the linear light source or point light source emitted by the light source into a collimated polarized light source through a polarizing collimator;
S2, loading corresponding phases by a phase modulation device of the polarization pattern generation component according to the pattern information, and reflecting the polarization surface light source into light spots containing different polarization information to transmit the light spots to the light splitting component;
S3, the light splitting component transmits the light with polarization information to the imaging detection assembly;
S4, adjusting the distance between the imaging objective lens group and the light polarization sensitive material surface by the servo focusing system to ensure that the focal plane of the imaging objective lens group is always kept at the light polarization sensitive material surface;
S5, recording the single light control orientation on the light polarization sensitive material;
And S6, moving the workbench carrying the light polarization sensitive material to the next designated position for the next pattern light field recording.
In the embodiment of the present invention, the following steps are further included after step S3: the miniature imaging component forms a fixed miniature multiplying power through the ratio of the focal lengths of the cylindrical lens and the imaging objective lens group, and miniature the polarization pattern output by the phase modulation component so as to output a polarization pattern light field.
Further, the high-speed exposure patterned liquid crystal photoalignment method further includes, after the step S6:
And S7, splicing each orientation unit together to form the optical orientation structure with large-area polarization light pattern on the optical polarization sensitive material.
Step S2 is to adjust the polarization information of each pixel in each sub-image by using a gray scale image, specifically including that the phase modulation device adjusts the polarization level of each pixel by using voltage, and each pixel determines the magnitude of the voltage by using different gray scale information, so as to adjust and control the polarization information by using the gray scale image;
The gray-scale image is written in real time or pre-loaded;
The phase modulation device is a high-speed liquid crystal phase modulation device and is used as a real-time programmable phase plate to perform wavefront correction on linearly polarized light, so that pixelation control on a polarization pattern is realized.
Preferably, the wavelength of light emitted by the light source is detected to be a value outside the polarization photosensitive absorption wavelength region; in step S4, detecting that the wavelength of light emitted from the light source is any value between 550nm and 650 nm;
The second lens reflects the light spots projected to the light polarization sensitive material surface to the second imaging CCD, the Z-axis servo focusing position is mapped through the light spot diameter, the vertical height of the Z-axis lens is adjusted, the light spot diameter in the second imaging CCD can be always kept to be R, and whether the light polarization sensitive material surface is on the focusing surface of the objective lens or not is judged by detecting the size of the light spots projected to the light polarization sensitive material surface through the second imaging CCD.
In an embodiment of the present invention, after the step S6 of recording the single polarization pattern on the light polarization sensitive material, the workbench carrying the light polarization sensitive material is moved to the next designated position for the next alignment, which is specifically realized by the following steps:
The controller transmits the position data to the motion control module, the motion control module converts the received data into a control signal and transmits the control signal to the motor driver, the motor driver controls the motion of the motor according to the received control signal, and the detection device is responsible for monitoring the motion of the motor in real time and transmitting the motion position and the motion speed of the motor to the motion control module; and then the motion control module feeds back the current position and the speed of the workbench to the controller.
After the single light-operated orientation is recorded on the light polarization sensitive material, the moving distance of the workbench carrying the light polarization sensitive material to the next specified position is the size of the single orientation unit through the motion control module, and the moving mode is that the workbench moves and scans line by line in sequence; specifically, the time of each moving step is integral multiple of the pulse width of the pulse laser, and the same pattern light field can be exposed by using multiple laser pulses.
The relationship between the pulse laser frequency and the phase modulation device refresh frequency is shown in fig. 3, the pulse laser frequency corresponds to the phase modulation device frequency, and the pulse width is less than or equal to the image maintaining time of the phase modulation device, that is, when one image of the phase modulation device is maintained, one pulse laser peak irradiates the phase modulation device.
In the image maintaining time of the phase modulation device, a plurality of pulse laser peaks can be irradiated on the receiving window of the phase modulation device, so that the single exposure energy can be enhanced.
The wavelength absorption characteristics of the photoalignment material used in this example are shown in fig. 4; the material used is azo photo-alignment material, corresponding to material 3 in fig. 4, when laser with wavelength of 442nm is used for illumination, a good photo-alignment effect can be obtained, and the material can be selected according to the photo-alignment material The pulse laser light source with the same wavelength or the corresponding optical orientation material is selected according to the pulse laser light source with different wavelengths, the miniature part adopts a miniature objective lens with the size of 20 times, namely, the area of a light spot is reduced by 400 times, the energy density is improved by 400 times, the size of a single pixel after the miniature is only 0.4 micron, and the high-precision pattern information exposure direct writing can be realized. At this time, the photosensitive amount of the photo-alignment material was 50mJ/cm 2Above the photoalignment energy threshold and below the damage threshold.
It should be noted that the "stroboscopic" defined in the present invention is to emit light and/or quench light at a certain preset frequency.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. The utility model adopts the high-precision workbench to accurately control the sample to do two-dimensional plane movement, thereby providing favorable conditions for realizing large-breadth writing;
2. The utility model adopts the light energy not concentrated, and eliminates the abutted seam between each light-operated orientation view field by controlling the relation between the size of a single view field and the single translation distance, thereby improving the resolution;
3. The utility model has the advantages of high precision, arbitrary controllability, large-area writing and high efficiency of single exposure polarization pattern, and has important significance for designing and manufacturing large-size, high-precision and multifunctional liquid crystal optical devices;
4. The utility model discloses utilize the formation of image detection subassembly through the image that gets into first formation of image CCD through first lens from light polarization sensitive material surface reflection, judge whether objective focal plane is on the photosensitive material surface through the contrast of the profile of observing the formation of image facula in the first formation of image CCD, realized the accurate detection to the formation of image, have the significance to the liquid crystal light orientation that realizes big breadth, high efficiency, good reliability;
5. The utility model discloses a focus servo's assistance, control objective do and reciprocate, real-time focusing improves resolution ratio.
Above-mentioned all optional technical scheme can adopt arbitrary combination to form the optional embodiment of this utility model, and the repeated description is no longer given here.
It should be noted that: in the motion control system provided in the above embodiment, when executing a motion control method, only the division of the above functional modules is taken as an example, and in practical applications, the above function distribution may be completed by different functional modules according to needs, that is, the internal structure of the system is divided into different functional modules to complete all or part of the above described functions. In addition, the embodiments of the motion control system and the motion control method provided by the embodiments belong to the same concept, and specific implementation processes thereof are described in the embodiments of the methods for details, which are not described herein again.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (10)
1. A motion control system is characterized by comprising a workbench, a motion controller, a motor and a motor driving device, wherein the motion controller is used for converting collected light path data comprising motion information into control signals and sending the control signals to each execution component;
The motion controller comprises a focusing plane motion control unit and a workbench motion control unit;
The focusing plane motion control unit is used for controlling the imaging objective lens to vertically move up and down, and the focusing plane is always kept on the surface of the light polarization sensitive material through the focusing of the imaging detection component;
The workbench motion control unit is used for controlling the workbench carrying the optical polarization sensitive material to move on a two-dimensional plane so as to realize splicing of polarized light fields or interconnection of different polarized light fields;
The motor driving device is used for driving the motor to drive the focusing plane and the workbench to move.
2. The motion control system according to claim 1, wherein the principal axis direction of the optical path of the imaging objective lens group is perpendicular to the stage, and the motor drives the imaging objective lens group to move up and down in the vertical direction, forming the focusing plane on the stage.
3. The motion control system according to claim 2, wherein the stage is disposed below the imaging objective lens group and has a two-dimensional motion track for carrying the light polarization sensitive material and driving the light polarization sensitive material to move in a two-dimensional plane under the driving of the motion control component, so that the surface of the light polarization sensitive material is always kept at the focusing plane of the imaging objective lens group.
4. The motion control system of claim 1, further comprising a detection device for monitoring the motion of the motor in real time and sending the position and speed of the motion of the motor to the motion controller.
5. The motion control system of claim 1, wherein the motion controller is configured to receive the acquired two-dimensional physical coordinate signal of the stage and send an exposure switching command to the polarization pattern generation unit.
6. The motion control system of claim 1, wherein the table is provided with a scan axis, the scan axis including a position collector; the motion controller is provided with a position feedback module matched with the position collector, and the position feedback module is used for detecting the moving position of the scanning shaft in real time.
7. The motion control system of claim 1, further comprising a detection device for monitoring the motion status information of the motor in real time and sending the motion position and speed of the motor to a motion controller;
The workbench carries the light polarization sensitive material to move in a two-dimensional plane so as to further realize the splicing of polarized light fields or the interconnection of different polarized light fields.
8. The motion control system according to claim 1, wherein the imaging detection unit comprises a first light splitter, a tube lens, an imaging objective lens group, a polarizing plate, a first lens, a first imaging CCD, which are connected in sequence; the front focal plane of the imaging objective group is positioned near the rear focal plane of the tube mirror; the imaging surface of the first imaging CCD is positioned on the front focal plane of the first lens; the back focal plane of the first lens is positioned on the front focal plane of the tube mirror; the imaging detection component is used for detecting the imaging of the generated liquid crystal photo-alignment pattern.
9. The motion control system of claim 1, wherein the imaging detection assembly is connected to a miniature imaging component for miniature polarization pattern output from the polarization pattern generation component and writing into the light polarization sensitive material;
The polarization pattern generation component comprises a phase modulator for outputting a pixelated programmable polarization pattern; or the electric adjustable polaroid is rotated to the corresponding polarization angle by controlling the rotating motor, and the polarized light with the fixed polarization angle is generated.
10. The motion control system of claim 8, wherein the motion control system is coupled to a focus servo for correcting motion-induced defocus;
The focal length servo system comprises a detection light source, a second lens, a second light splitter, an imaging objective lens group, a second imaging CCD and a motor which are connected in sequence;
The detection light source is positioned on the front focal plane of the second lens; the second light splitter is positioned on the back focal plane of the second lens; the imaging surface of the second imaging CCD is positioned on the front focal plane of the second lens; the motor drives the imaging objective lens group;
The first imaging CCD receives a reflected image projected to the light polarization sensitive material surface, and the first imaging CCD and the imaging objective form a conjugate image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921983169.8U CN211123568U (en) | 2019-11-15 | 2019-11-15 | Motion control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921983169.8U CN211123568U (en) | 2019-11-15 | 2019-11-15 | Motion control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211123568U true CN211123568U (en) | 2020-07-28 |
Family
ID=71702321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921983169.8U Expired - Fee Related CN211123568U (en) | 2019-11-15 | 2019-11-15 | Motion control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211123568U (en) |
-
2019
- 2019-11-15 CN CN201921983169.8U patent/CN211123568U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4761432B2 (en) | Laser processing equipment | |
| CN112241070B (en) | Large-breadth optical polarization pattern generation device and generation method | |
| WO2001059505A1 (en) | Laser condensing apparatus and laser machining apparatus | |
| CN101126905B (en) | Direct-writing lithography device with focusing device | |
| JP4647965B2 (en) | Laser processing method, laser processing apparatus, and structure manufactured thereby | |
| CN112068400A (en) | Method and device for realizing high-flux parallel laser scanning direct-writing super-resolution photoetching | |
| CN112748510A (en) | Scanning type automatic focusing method and device with automatic leveling function | |
| CN211014906U (en) | Imaging detection assembly | |
| CN211123568U (en) | Motion control system | |
| CN112817182A (en) | High-speed exposure patterning liquid crystal photo-alignment device and method | |
| CN211123569U (en) | Focus servo system | |
| CN211123567U (en) | High-speed exposure patterning liquid crystal photo-alignment device | |
| CN211123505U (en) | Large-breadth controllable polarization pattern generation device | |
| CN112817181A (en) | Motion control system | |
| CN210690999U (en) | Patterned liquid crystal photo-alignment device with phase compensation function | |
| CN211123570U (en) | Illumination system applied to high-speed exposure patterning liquid crystal photo-alignment device | |
| CN211603794U (en) | Low-speed motion control system applied to LCOS system phase modulation workbench | |
| CN112817168A (en) | Imaging detection assembly | |
| CN112946960A (en) | Large-breadth randomly-distributed optical orientation device and method based on digital micro-reflector | |
| CN112817178A (en) | Focus servo system | |
| CN211478821U (en) | Lighting system applied to DMD patterned liquid crystal photo-alignment device | |
| CN214846119U (en) | Point scanning patterning liquid crystal photo-alignment system | |
| CN112817158A (en) | Large-breadth controllable polarization pattern generation device and method | |
| CN112817185A (en) | Illumination system applied to high-speed exposure patterning liquid crystal photo-alignment device | |
| CN210720960U (en) | Patterned liquid crystal photo-alignment device based on orthogonal circularly polarized light interference |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200728 Termination date: 20211115 |