CN112748510A - Scanning type automatic focusing method and device with automatic leveling function - Google Patents
Scanning type automatic focusing method and device with automatic leveling function Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
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Abstract
The invention provides a scanning type automatic focusing method and a device with an automatic leveling function, wherein the device comprises the following components: the laser light source is used for generating a focusing light beam; the beam combining device is used for combining the focusing light beam and the working light beam of the optical system; the scanning system enables the focusing light spot to move on the focusing plane by changing the angle of the focusing light beam; the focusing system is used for focusing the focusing light beam into a focusing light spot on the back focal plane of the objective lens; the confocal intensity detection device is used for carrying out confocal imaging on the focusing light spots and detecting the light intensity change of the positions of the image points; and the feedback motion mechanism is used for converting the detected light intensity change into a corresponding feedback control signal, and driving the motion mechanism according to the signal to drive the focusing object to rotate or translate so as to finish automatic adjustment and automatic focusing. The invention controls the focusing light beam to scan through the scanning system, thereby realizing multi-point focusing. Compared with the existing focusing device, the automatic leveling device has the advantages that the automatic leveling function is added, and the application range of the device is greatly expanded.
Description
Technical Field
The invention belongs to the field of optical engineering, and particularly relates to a scanning type automatic focusing method and device with an automatic leveling function.
Background
The auto-focusing technique is an important technique applied to an imaging optical system and an optical processing system. In both the imaging optical system and the optical machining system, it is necessary to accurately position the focal point of the objective lens on the imaging surface or the machining surface of the object before imaging or machining the object. The application of autofocus techniques in optical imaging systems or optical processing systems can well meet this requirement.
The current automatic focusing technologies include confocal intensity detection, imaging passive detection, astigmatism, spot displacement detection, moire fringe method, and the like. The hardware of the confocal intensity detection method is simple to implement, but detection signals are easily affected by stray light, feedback signals are nonlinear, and the adjustment difficulty is high. The imaging passive detection method and the astigmatic method both generate feedback signals according to the shape change of a feedback graph, and have lower feedback precision and smaller focusing depth. The spot displacement detection method is limited by factors such as diffraction limit, detector position resolution and the like, and the focusing precision cannot be further improved. The moire fringe method has high focusing precision, but is limited by factors such as processing precision of the grating, flexible selectivity of the grating period and the like, and is difficult to further improve, and the focusing depth is small. In addition, various devices designed according to the above techniques often have only an auto-focusing function and no auto-leveling function. In the optical machining system and the partial scanning optical imaging system, however, the requirement for the levelness of the machining object or the imaging object is relatively high. The application of the focusing device without the automatic leveling function in the above system is greatly limited.
Therefore, an automatic focusing device with an automatic leveling function is needed to be designed aiming at the limitation of the existing automatic focusing technology, the application field of the automatic focusing technology is expanded, and the technology is applied to a wider optical-mechanical system.
Disclosure of Invention
The present invention provides a scanning auto-focusing method and apparatus with auto-leveling function for an imaging optical system or a lithography system, aiming at the defects of the prior art.
In order to achieve the purpose of the present invention, the present invention provides a scanning type auto-focusing method with an auto-leveling function, comprising:
generating focusing light beams, changing the angle of the focusing light beams through a scanning system, and sequentially focusing on a back focal plane of the objective lens to form four focusing light spots, wherein the four focusing light spots are distributed in a diamond shape on a focusing plane;
the four focusing light beams are reflected by a focusing plane of a focusing object, returned by an original light path and sequentially incident into a differential confocal detection mechanism;
the light intensity is detected by the differential confocal detection mechanism, the defocusing amount is obtained according to the detected light intensity change, a feedback control signal is generated, the movement mechanism is driven according to the signal, the focusing object is driven to rotate or translate, and automatic adjustment and automatic focusing are completed.
Furthermore, after four focusing light beams are focused in sequence, the light intensity of the aperture is limited to be detected, and a feedback control signal is generated according to the detection result.
Further, the control strategy of the feedback motion is to level firstly, and the leveling value takes the detection average value of four points as a reference; after leveling, the intensity detection deviation amounts corresponding to the four points are the same, and then focusing is carried out, wherein the focusing value takes the detection extreme value as a reference.
Another object of the present invention is to provide a scanning type auto-focusing device with an auto-leveling function, comprising:
the laser light source is used for generating a focusing light beam;
a beam combining device for combining the focusing light beam with the working light beam of the applied optical system;
the scanning system moves the focusing light spots on the focusing plane by changing the angle of the focusing light beam, and sequentially generates four focusing light spots which are distributed in a diamond shape on the focusing plane;
the focusing system is used for focusing the focusing light beam into a focusing light spot on the back focal plane of the objective lens;
the confocal intensity detection device is used for carrying out confocal imaging on the focusing light spots and detecting the light intensity change of the positions of the image points;
and the feedback motion mechanism is used for converting the detected light intensity change into a corresponding feedback control signal, and driving the motion mechanism according to the signal to drive the focusing object to rotate or translate so as to finish automatic adjustment and automatic focusing.
Further, the beam combining device consists of a beam splitter and a dichroic mirror;
the beam splitter transmits the focusing light beam to make the focusing light beam incident to the dichroic mirror;
the dichroic mirror reflects the focusing light beams and transmits the working light beams of the optical system, and combines the focusing light beams and the working light beams of the optical system.
Further, the scanning system is shared by the applied optical system and the auto-focusing device;
the scanning system consists of an angle scanning mechanism and a scanning lens;
the angle scanning mechanism can control the focusing light beams to enter the scanning lens at any two-dimensional space angle; the scanning lens is an f-theta lens, and incident focusing light beams with different angles are converted into focusing light spots at different positions on a focal plane behind the scanning lens.
Further, the angle scanning mechanism comprises a first galvanometer, a first concave mirror, a second concave mirror and a second galvanometer;
the rotating shafts of the first galvanometer and the second galvanometer are mutually vertical, so that the focusing light beam has two scanning dimensions; the first concave mirror and the second concave mirror are arranged in a confocal manner to form an f system, and rotating shafts of the first vibrating mirror and the second vibrating mirror are imaged on the same plane;
the first galvanometer and the second galvanometer control focusing light beams, the incident angles of the focusing light beams are changed for four times, and four focusing light spots are sequentially generated on the back focal plane of the scanning lens.
Further, the focusing system is shared by the applied optical system and the autofocus device;
the focusing system consists of a field lens and an objective lens;
the field lens and the scanning lens are arranged in a confocal mode, the field lens and the objective lens image the four focusing light spots on the rear focal plane of the scanning lens, and the four focusing light spots are generated on the focusing plane through reflection of the focusing plane.
Furthermore, the confocal intensity detection device consists of a focusing lens and a light intensity detector limited by an aperture; the focusing light beam is reflected on the focusing plane of the focusing object, returns to the beam splitter from the original light path and then is reflected by the beam splitter to enter the confocal intensity detection device;
the focusing lens converges the parallel focusing light beams reflected by the beam splitter to generate focusing light spots, and the focusing light spots are real images of the focusing light spots on a focusing plane;
the aperture-limited light intensity detector is placed at the focusing light spot, and the aperture-limited light intensity measurement is carried out on the focusing light spot.
Further, the feedback motion mechanism is realized by a piezoelectric platform; the piezoelectric platform is provided with at least three adjustment dimensions, including x-direction rotation adjustment and y-direction rotation adjustment, and is used for automatic leveling; and z-direction movement adjustment is used for automatic focusing.
The principle of the invention is as follows:
the scanning system changes the incident angle of the focusing light beam four times, and four focusing light spots are sequentially generated on the focusing plane and distributed in a diamond shape. Meanwhile, the confocal intensity detection device sequentially detects and records the four signals.
When focusing is accurate, namely when the focusing plane of the focusing object is superposed with the back focal plane of the objective lens, the focusing light spot on the focusing plane is minimum, and an extreme value can be obtained by using the confocal intensity detection device and detecting the light intensity limited by the aperture. When defocusing occurs, the focusing plane is not overlapped with the back focal plane of the objective lens, the focusing light spot becomes large, the confocal intensity detection device is used for detecting the light intensity under the condition of the same limited aperture, and the detected light intensity deviates from the extreme value. And generating corresponding feedback control signals through detecting the deviation of the intensity, and controlling the motion mechanism to realize automatic leveling and automatic focusing.
When the intensity detection deviation amounts generated by four focusing light spots which are sequentially generated on a focusing plane and distributed in a diamond shape are different, leveling is firstly carried out, and the leveling value takes the detection average value of four points as a reference. After leveling, the intensity detection deviation amounts corresponding to the four points are the same, and then focusing is carried out, wherein the focusing value takes the detection extreme value as a reference.
Compared with the prior art, the invention has the advantages that:
the four focusing light beams can be sequentially generated, the distance between the light beams can be flexibly adjusted according to actual requirements, the defocusing amount of different positions of a focusing plane is rapidly detected respectively, more comprehensive defocusing information of a focusing object is obtained, and automatic leveling and automatic focusing are performed on the focusing object overall.
Drawings
Fig. 1 is a schematic view of a scanning auto-focusing device with an auto-leveling function according to an embodiment of the present invention;
fig. 2 is a schematic distribution diagram of four focusing light spots sequentially generated on the back focal plane of the objective lens according to the embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
The invention relates to a scanning type automatic focusing device with an automatic leveling function, which can be matched with optical systems such as an optical microscope system or a photoetching system and the like to realize automatic leveling and automatic focusing of a focusing object in the corresponding optical system.
The invention generates focusing light beams by a laser light source. The focusing light beam is controlled by the scanning system and sequentially focused on the back focal plane of the objective lens to form four focusing light spots. The four focusing light beams are reflected by the focusing plane, returned by the original light path, reflected by the beam splitter, sequentially subjected to light intensity detection by the differential confocal detection mechanism, defocused amount is obtained according to the measurement signal, a feedback signal is generated, and automatic leveling and automatic focusing of the sample are realized.
As shown in fig. 1, wherein a module 1 represents an auxiliary structure of an optical system used in conjunction with the automatic focusing apparatus of the present invention, a working light beam is generated for realizing an optical function of the optical system itself. The present embodiment provides a scanning type auto-focusing device with auto-leveling function, which includes: the device comprises a laser light source 2, a first beam splitter 3, a dichroic mirror 4, a first vibrating mirror 5, a first concave mirror 6, a second concave mirror 7, a second vibrating mirror 8, a scanning lens 9, a field lens 10, an objective lens 11, a sample holder 12, a piezoelectric platform 13, a second beam splitter 14, a first convex lens 15, a first small hole 16, a first photoelectric detector 17, a second convex lens 18, a second small hole 19 and a second photoelectric detector 20.
The method for realizing the automatic leveling and automatic focusing of the focusing plane by adopting the device shown in FIG. 1 is as follows:
the laser source 2 emits a focusing light beam, which is transmitted by the first beam splitter 3 and reflected by the dichroic mirror 4 to be combined with the working light beam of the optical system. The wavelength of the focusing light beam is different from that of the optical system working light beam, and the dichroic mirror 4 reflects the focusing light beam and transmits the optical system working light beam.
The focused light beam reflected by the dichroic mirror 4 is reflected by the first galvanometer 5, the first concave mirror 6, the second concave mirror 7 and the second galvanometer 8 in sequence, and then is focused on the back focal plane of the scanning lens 9. The first galvanometer 5 and the second galvanometer 8 have rotation axes which are perpendicular to each other, so that the focusing light beam has two scanning dimensions. The first concave mirror 6 and the second concave mirror 7 are arranged in a confocal mode to form a 4f system, and the rotating shafts of the first vibrating mirror 5 and the second vibrating mirror 8 are imaged on the same plane. The first galvanometer 5 and the second galvanometer 8 control focusing light beams, the incident angles of the focusing light beams are changed for four times, four focusing light spots are sequentially generated on the back focal plane of the scanning lens 9, and the four light spots are distributed in a diamond shape.
The scanning lens 9 and the field lens 10, the field lens 10 and the objective lens 11 are respectively disposed in a confocal manner, the field lens 10 and the objective lens 11 image the four focusing light spots on the back focal plane of the scanning lens 9 on the back focal plane of the objective lens 11, and the four focusing light spots are generated on the focusing plane through the reflection of the focusing plane and are distributed as shown in fig. 2.
The subject of focusing is placed on the sample holder 12, and the sample holder 12 is connected to the piezoelectric stage 13. The piezoelectric platform 13 has at least three adjustment dimensions, including x-direction rotation adjustment and y-direction rotation adjustment, and is used for automatic leveling; and the z direction is horizontally adjusted for automatic focusing.
The objective lens focused light beam is reflected by the focusing plane of the focusing object and returns to the first beam splitter 3 along the original optical path. The focused light beam is reflected by the first beam splitter 3 and then enters a differential confocal detection mechanism consisting of a second beam splitter 14, a first convex lens 15, a first small hole 16, a first photoelectric detector 17, a second convex lens 18, a second small hole 19 and a second photoelectric detector 20. After the focused light beam is split by the second beam splitter 14 with equal energy, the reflected light beam is focused by the first convex lens 15, passes through the first small hole 16 and enters the first photoelectric detector 17; the transmitted beam is focused by the second convex lens 18, passes through the second aperture 19, and is incident on the second photodetector 20. The first convex lens 15 and the second convex lens 18 have the same focal length, and the first aperture 16 and the second aperture 19 have the same aperture. The first aperture 16 is placed behind the back focal plane of the first convex lens 15 and the second aperture 19 is placed in front of the back focal plane of the second convex lens 18. A first photodetector 17 is positioned proximate the first aperture 16 and a second photodetector 20 is positioned proximate the second aperture 19.
When the back focal plane of the objective lens coincides with the focal plane, the distance from the first aperture 16 to the back focal plane of the first convex lens 15 is equal to the distance from the second aperture 19 to the back focal plane of the second convex lens 18. I.e. the clear aperture limits of the light beam are the same for the first aperture 16 and the second aperture 19. The first photodetector 17 and the second photodetector 20 receive the same light intensity, and the light intensities are subtracted by a difference value of 0. When negative defocusing occurs, namely when the focusing spot of the objective lens is on the side of the focusing plane far away from the objective lens, the focusing image point of the first convex lens 15 and the focusing image point of the second convex lens 18 move along the negative direction of the optical axis, the light flux of the first photoelectric detector 17 is reduced, the light flux of the second photoelectric detector 19 is unchanged, the two light intensities are subtracted, and the difference is a negative value. When positive defocusing occurs, namely when the focusing spot of the objective lens is on the side of the focusing plane close to the objective lens, the focusing image point of the first convex lens 15 and the focusing image point of the second convex lens 18 move along the positive direction of the optical axis, the light flux of the first photoelectric detector 17 is unchanged, the light flux of the second photoelectric detector 19 is reduced, the light intensities are subtracted, and the difference value is a positive value. The light intensity difference value in the adjustable range of the focal plane is in direct proportion to the defocusing amount of the corresponding focus.
The first galvanometer 5 and the second galvanometer 8 control the incident direction of the focusing light beam to change, four focusing light spots are sequentially generated, the differential confocal detection mechanism also performs corresponding four-time measurement, corresponding feedback signals are generated according to the light intensity detection difference quantity of four times, the piezoelectric platform 13 is controlled to rotate or move in a translation mode, and automatic leveling and automatic focusing are achieved.
The above description is only exemplary of the preferred embodiments of the present invention, and is not intended to limit the present invention, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A scanning type automatic focusing method with an automatic leveling function is characterized by comprising the following steps:
generating focusing light beams, changing the angle of the focusing light beams through a scanning system, and sequentially focusing on a back focal plane of the objective lens to form four focusing light spots, wherein the four focusing light spots are distributed in a diamond shape on a focusing plane;
the four focusing light beams are reflected by a focusing plane of a focusing object, returned by an original light path and sequentially incident into a differential confocal detection mechanism;
the light intensity is detected by the differential confocal detection mechanism, the defocusing amount is obtained according to the detected light intensity change, a feedback control signal is generated, the movement mechanism is driven according to the signal, the focusing object is driven to rotate or translate, and automatic adjustment and automatic focusing are completed.
2. The scanning auto-focusing method with auto-leveling function as claimed in claim 1, wherein after focusing four focusing beams in sequence, the light intensity of the aperture is detected and a feedback control signal is generated according to the detection result.
3. The scanning auto-focusing method with auto-leveling function as claimed in claim 1, wherein the control strategy of the feedback motion is to level first, and the leveling value is based on the average value of four points detected; after leveling, the intensity detection deviation amounts corresponding to the four points are the same, and then focusing is carried out, wherein the focusing value takes the detection extreme value as a reference.
4. A scanning type automatic focusing device with an automatic leveling function is characterized by comprising:
the laser light source is used for generating a focusing light beam;
a beam combining device for combining the focusing light beam with the working light beam of the applied optical system;
the scanning system moves the focusing light spots on the focusing plane by changing the angle of the focusing light beam, and sequentially generates four focusing light spots which are distributed in a diamond shape on the focusing plane;
the focusing system is used for focusing the focusing light beam into a focusing light spot on the back focal plane of the objective lens;
the confocal intensity detection device is used for carrying out confocal imaging on the focusing light spots and detecting the light intensity change of the positions of the image points;
and the feedback motion mechanism is used for converting the detected light intensity change into a corresponding feedback control signal, and driving the motion mechanism according to the signal to drive the focusing object to rotate or translate so as to finish automatic adjustment and automatic focusing.
5. The scanning autofocus device with automatic leveling function of claim 4 wherein the beam combiner is composed of a beam splitter and a dichroic mirror;
the beam splitter transmits the focusing light beam to make the focusing light beam incident to the dichroic mirror;
the dichroic mirror reflects the focusing light beams and transmits the working light beams of the optical system, and combines the focusing light beams and the working light beams of the optical system.
6. The scanning type automatic focusing device with the automatic leveling function as claimed in claim 4, wherein the scanning system is shared by the applied optical system and the automatic focusing device;
the scanning system consists of an angle scanning mechanism and a scanning lens;
the angle scanning mechanism can control the focusing light beams to enter the scanning lens at any two-dimensional space angle; the scanning lens is an f-theta lens, and incident focusing light beams with different angles are converted into focusing light spots at different positions on a focal plane behind the scanning lens.
7. The scanning type automatic focusing device with the automatic leveling function as claimed in claim 6, wherein the angle scanning mechanism comprises a first vibrating mirror, a first concave mirror, a second concave mirror and a second vibrating mirror;
the rotating shafts of the first galvanometer and the second galvanometer are mutually vertical, so that the focusing light beam has two scanning dimensions; the first concave mirror and the second concave mirror are arranged in a confocal manner to form an f system, and rotating shafts of the first vibrating mirror and the second vibrating mirror are imaged on the same plane;
the first galvanometer and the second galvanometer control focusing light beams, the incident angles of the focusing light beams are changed for four times, and four focusing light spots are sequentially generated on the back focal plane of the scanning lens.
8. The scanning autofocus device with auto-leveling as claimed in claim 4, wherein the focusing system is shared by the applied optical system and the autofocus device;
the focusing system consists of a field lens and an objective lens;
the field lens and the scanning lens are arranged in a confocal mode, the field lens and the objective lens image the four focusing light spots on the rear focal plane of the scanning lens, and the four focusing light spots are generated on the focusing plane through reflection of the focusing plane.
9. The scanning auto-focusing device with auto-leveling function as claimed in claim 4 wherein the confocal intensity detection means is composed of a focusing lens and an aperture-limited light intensity detector; the focusing light beam is reflected on the focusing plane of the focusing object, returns to the beam splitter from the original light path and then is reflected by the beam splitter to enter the confocal intensity detection device;
the focusing lens converges the parallel focusing light beams reflected by the beam splitter to generate focusing light spots, and the focusing light spots are real images of the focusing light spots on a focusing plane;
the aperture-limited light intensity detector is placed at the focusing light spot, and the aperture-limited light intensity measurement is carried out on the focusing light spot.
10. The scanning type automatic focusing device with the automatic leveling function as claimed in claim 4, wherein the feedback motion mechanism is realized by a piezoelectric platform; the piezoelectric platform is provided with at least three adjustment dimensions, including x-direction rotation adjustment and y-direction rotation adjustment, and is used for automatic leveling; and z-direction movement adjustment is used for automatic focusing.
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