CN210956628U - Feeding and discharging mechanism convenient for crystal silicon wafer detection - Google Patents
Feeding and discharging mechanism convenient for crystal silicon wafer detection Download PDFInfo
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- CN210956628U CN210956628U CN201921835171.0U CN201921835171U CN210956628U CN 210956628 U CN210956628 U CN 210956628U CN 201921835171 U CN201921835171 U CN 201921835171U CN 210956628 U CN210956628 U CN 210956628U
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Abstract
The utility model discloses a feeding and discharging mechanism convenient for crystal silicon wafer detection, which comprises a feeding and discharging assembly, wherein the feeding assembly comprises a feeding machine and a discharging machine, the feeding machine provides a crystal silicon wafer to be detected, and the discharging machine stores the crystal silicon wafer qualified for detection; the conveying assembly comprises a first conveying belt, a second conveying belt and a third conveying belt which are sequentially arranged, one end of the second conveying belt is in butt joint with the first conveying belt, and the other end of the second conveying belt is in butt joint with the third conveying belt; the transfer assembly comprises a first manipulator and a second manipulator, the first manipulator transfers the crystalline silicon wafers on the feeding machine to the first conveying belt, and the second manipulator transfers the crystalline silicon wafers on the third conveying belt to the blanking machine; the protective cover assembly comprises a first dust-free cover and a second dust-free cover, the transfer assembly is positioned in the first dust-free cover, and the conveying assembly is positioned in the second dust-free cover; the protective cover component is connected with the fan filtering unit. The silicon wafer conveying device can ensure that the silicon wafer is not polluted in the conveying process, and is compact in structure, convenient and practical.
Description
Technical Field
The utility model relates to a silicon chip detects technical field, concretely relates to last unloading mechanism convenient to crystal silicon chip detects.
Background
At present, in the detection process of the crystalline silicon wafer, the crystalline silicon wafer is usually taken out from a feeding machine and placed at a detection station for detection, and after the detection is finished, the crystalline silicon wafer is placed into a blanking machine. The detection of the crystal silicon wafer has severe requirements on the environment, and the crystal silicon wafer is easily polluted in the detection process of the current silicon wafer. In addition, because the crystal silicon wafer needs to be detected in multiple stations, the silicon wafer is generally required to be transferred from one station to another station by a manipulator, the transfer mode has low efficiency, and the requirement on the precision of the machine is very high.
Disclosure of Invention
The to-be-solved technical problem of the utility model is to provide an go up unloading mechanism convenient to crystal silicon piece detects, it can guarantee that the silicon chip is not polluted in transmission process, compact structure, convenient and practical.
In order to solve the technical problem, the utility model provides a feeding and discharging mechanism convenient for crystal silicon wafer detection, which comprises a feeding and discharging assembly, wherein the feeding and discharging assembly comprises a feeding machine and a discharging machine, the feeding machine provides a crystal silicon wafer to be detected, and the discharging machine stores the qualified crystal silicon wafer to be detected;
the conveying assembly comprises a first conveying belt, a second conveying belt and a third conveying belt which are sequentially arranged, wherein the first conveying belt, the second conveying belt and the third conveying belt are on the same straight line, one end of the second conveying belt is in butt joint with the first conveying belt, and the other end of the second conveying belt is in butt joint with the third conveying belt;
the transfer assembly comprises a first manipulator and a second manipulator, the first manipulator transfers the crystal silicon wafers on the feeding machine onto the first conveying belt, and the second manipulator transfers the crystal silicon wafers on the third conveying belt to the blanking machine;
the protective cover assembly comprises a first dust-free cover and a second dust-free cover, the transfer assembly is positioned in the first dust-free cover, the conveying assembly is positioned in the second dust-free cover, and the first dust-free cover is communicated with the second dust-free cover; a partition plate is arranged at the communication position of the first dust-free cover and the second dust-free cover, and an opening is formed in the partition plate so as to facilitate the transfer assembly to transfer the crystal silicon wafer; the protective cover assembly is connected with the fan filtering unit.
Preferably, the second conveyor belt has a plurality of second conveyor belts, and the plurality of second conveyor belts are butted in sequence.
Preferably, a first stopper is disposed on a side of the first conveyor belt away from the first manipulator.
Preferably, second limiting parts are arranged on two sides of the second conveyor belt.
Preferably, a third limiting member is disposed on a side of the third conveyor belt away from the second manipulator.
Preferably, a flower basket for placing unqualified products is further arranged in the first dust cover, and the flower basket is located on one side of the second manipulator.
Preferably, the loader comprises a front opening unified pod.
Preferably, the blanking machine comprises a front opening type wafer transfer box.
Preferably, a first door plate is arranged on the second dust-free cover, and the first door plate is positioned on one side of the conveying component.
The utility model has the advantages that:
1. the utility model discloses the transmission assembly includes first conveyer belt, second conveyer belt and third conveyer belt, and the combination of a plurality of conveyer belts can realize that the silicon chip transmits to each detection station in proper order, and because each conveyer belt is independent mutually, adaptable different detection device, the combination of a plurality of conveyer belts is convenient for adjust the transfer rate of each conveyer belt of control respectively, can control each conveyer belt motion respectively or stop to also convenient to overhaul.
2. The utility model discloses be provided with the protection casing subassembly, the protection casing subassembly includes first dustless cover and second dustless cover, and it is inside that the subassembly is located first dustless cover to transfer, and the conveying subassembly is located inside the dustless cover of second, so can guarantee that the silicon chip is not polluted in transmission process.
3. The utility model discloses compact structure, convenient and practical.
Drawings
Fig. 1 is a first schematic structural diagram of the present invention;
FIG. 2 is a second schematic structural view of the present invention;
FIG. 3 is a schematic view of the transfer and take-off assemblies, with the shield assembly hidden;
fig. 4 is a third schematic structural diagram of the present invention, which hides the first door panel.
The reference numbers in the figures illustrate: 10. a feeding machine; 11. a blanking machine; 20. a first dust cover; 21. a second dust-free cover; 22. a first door panel; 30. a first manipulator; 31. a second manipulator; 40. a first conveyor belt; 401. a first limit piece; 41. a second conveyor belt; 411. a second limiting member; 42. a third conveyor belt; 421. a third limiting member; 50. a first separator; 60. a flower basket.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Referring to fig. 1-4, the utility model discloses a go up unloading mechanism convenient to crystal silicon piece detects, including last unloading subassembly, conveying assembly, transfer subassembly and protection casing subassembly.
The feeding and discharging assembly comprises a feeding machine 10 and a discharging machine 11, the feeding machine 10 provides the crystalline silicon wafer to be detected, and the discharging machine 11 stores the crystalline silicon wafer qualified for detection.
The conveying assembly comprises a first conveyor belt 40, a second conveyor belt 41 and a third conveyor belt 42 which are arranged in sequence,
the first conveyor belt 40, the second conveyor belt 41 and the third conveyor belt 42 are in the same straight line, one end of the second conveyor belt 41 is in butt joint with the first conveyor belt 40, and the other end of the second conveyor belt 41 is in butt joint with the third conveyor belt 42. Different detection devices are arranged on one side of the first conveyor belt 40, one side of the second conveyor belt 41 and one side of the third conveyor belt 42, the detection devices can be arranged as required, and the detection of different stations of the crystal silicon wafer can be realized by the aid of the detection devices. One side of each conveyor belt is provided with a detection device, and the silicon wafers can be sequentially transferred to each detection device due to the fact that the first conveyor belt 40, the second conveyor belt 41 and the fourth conveyor belt are sequentially arranged. Due to the fact that the detection time of each detection device is inconsistent, the combination of the plurality of conveyor belts is convenient for adjusting and controlling the conveying speed of each conveyor belt respectively, and the movement or the stop of each conveyor belt can be controlled respectively. And also facilitates maintenance.
The transfer assembly comprises a first manipulator 30 and a second manipulator 31, the first manipulator 30 transfers the crystalline silicon wafers on the feeding machine 10 to the first conveyor belt 40, and the second manipulator 31 transfers the crystalline silicon wafers on the third conveyor belt 42 to the blanking machine 11. As such, the first robot 30 is a multi-axis robot, which is prior art and will not be described in detail herein. The end part of the manipulator is provided with an adsorption hole, and the adsorption hole has vacuum negative pressure so as to adsorb the crystal silicon wafer. The way of using vacuum suction holes to suck silicon wafers is prior art and will not be described here. The second robot 31 is a multi-axis robot. When the silicon wafer is detected on the conveying assembly, the second manipulator 31 transfers the silicon wafer qualified by detection to the blanking machine 11. The feeder 10 and the unloader 11 have two. The loader 10 includes a front opening unified pod. The stocker 11 includes a front opening foup. For such a feeder 10 and a unloader 11, the purpose thereof is to sequentially discharge and store silicon wafers, and for the prior art, they will not be described in detail herein.
The shield assembly comprises a first dust free cover 20 and a second dust free cover 21, the transfer assembly is positioned inside the first dust free cover 20, the transfer assembly is positioned inside the second dust free cover 21, and the first dust free cover 20 is communicated with the second dust free cover 21. A partition plate is arranged at the communication position of the first dust-free cover 20 and the second dust-free cover 21, and an opening is formed in the partition plate so as to facilitate the transfer assembly to transfer the crystal silicon wafer. The protection casing subassembly is connected with fan filter unit, and fan filter unit is FFU promptly. Through setting up the protection casing subassembly, can guarantee that the internal environment of cover is dustless to avoid silicon chip contaminated among the testing process. The detection device is also arranged in the second dust-free cover.
The second conveyor belt 41 has a plurality of second conveyor belts 41, and the plurality of second conveyor belts 41 are sequentially butted. The plurality of second conveyor belts 41 can correspond to the plurality of detection devices, and the number of the second conveyor belts 41 can be changed by workers according to requirements. The second belt conveyor 41 is three in the present invention.
A first stopper 401 is provided on a side of the first conveyor belt 40 remote from the first robot 30. The second conveyor belt 41 is provided with second stoppers 411 at both sides. A third stopper 421 is disposed on a side of the third conveyor belt 42 away from the second manipulator 31. The movement of the silicon wafer can be limited by arranging the limiting part.
A flower basket 60 for placing unqualified products is also arranged in the first dust cover 20, and the flower basket 60 is positioned at one side of the second manipulator 31.
The second dust-free cover 21 is provided with a first door panel 22, and the first door panel 22 is positioned at one side of the conveying component. The first door panel 22 can be opened and closed relative to the first housing, thus facilitating installation and replacement of the detection device.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (9)
1. The utility model provides a go up unloading mechanism convenient to crystal silicon piece detects which characterized in that includes:
the feeding and discharging assembly comprises a feeding machine and a discharging machine, the feeding machine provides a to-be-detected crystal silicon wafer, and the discharging machine stores the qualified crystal silicon wafer;
the conveying assembly comprises a first conveying belt, a second conveying belt and a third conveying belt which are sequentially arranged, wherein the first conveying belt, the second conveying belt and the third conveying belt are on the same straight line, one end of the second conveying belt is in butt joint with the first conveying belt, and the other end of the second conveying belt is in butt joint with the third conveying belt;
the transfer assembly comprises a first manipulator and a second manipulator, the first manipulator transfers the crystal silicon wafers on the feeding machine onto the first conveying belt, and the second manipulator transfers the crystal silicon wafers on the third conveying belt to the blanking machine;
the protective cover assembly comprises a first dust-free cover and a second dust-free cover, the transfer assembly is positioned in the first dust-free cover, the conveying assembly is positioned in the second dust-free cover, and the first dust-free cover is communicated with the second dust-free cover; a partition plate is arranged at the communication position of the first dust-free cover and the second dust-free cover, and an opening is formed in the partition plate so as to facilitate the transfer assembly to transfer the crystal silicon wafer; the protective cover assembly is connected with the fan filtering unit.
2. The loading and unloading mechanism convenient for crystalline silicon wafer detection as claimed in claim 1, wherein the second conveyor belt is provided with a plurality of second conveyor belts, and the plurality of second conveyor belts are butted in sequence.
3. The loading and unloading mechanism for facilitating the detection of the crystalline silicon wafer as claimed in claim 1, wherein a first position limiting member is disposed on a side of the first conveyor belt away from the first robot.
4. The loading and unloading mechanism for crystalline silicon wafer inspection as claimed in claim 1, wherein second stoppers are disposed at two sides of the second conveyor belt.
5. The loading and unloading mechanism for crystalline silicon wafer inspection as claimed in claim 1, wherein a third limiting member is disposed on a side of the third conveyor belt away from the second robot.
6. The loading and unloading mechanism convenient for crystalline silicon wafer detection as claimed in claim 1, wherein a basket for placing unqualified products is further arranged in the first dust-free cover, and the basket is positioned at one side of the second manipulator.
7. The loading and unloading mechanism for crystalline silicon wafer inspection as claimed in claim 1, wherein the loader comprises a front opening type wafer transport box.
8. The loading and unloading mechanism for crystalline silicon wafer inspection as claimed in claim 1, wherein the unloading machine comprises a front opening type wafer transport box.
9. The loading and unloading mechanism for crystalline silicon wafer detection as claimed in claim 1, wherein a first door plate is disposed on the second dust-free cover, and the first door plate is located at one side of the conveying assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921835171.0U CN210956628U (en) | 2019-10-29 | 2019-10-29 | Feeding and discharging mechanism convenient for crystal silicon wafer detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921835171.0U CN210956628U (en) | 2019-10-29 | 2019-10-29 | Feeding and discharging mechanism convenient for crystal silicon wafer detection |
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| Publication Number | Publication Date |
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| CN210956628U true CN210956628U (en) | 2020-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921835171.0U Active CN210956628U (en) | 2019-10-29 | 2019-10-29 | Feeding and discharging mechanism convenient for crystal silicon wafer detection |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112420580A (en) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | Automatic wafer discharging and detecting production line |
| CN112420577A (en) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | Automatic wafer discharging device |
-
2019
- 2019-10-29 CN CN201921835171.0U patent/CN210956628U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112420580A (en) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | Automatic wafer discharging and detecting production line |
| CN112420577A (en) * | 2021-01-22 | 2021-02-26 | 山东元旭光电股份有限公司 | Automatic wafer discharging device |
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