CN210952723U - Micro deformation measuring instrument - Google Patents
Micro deformation measuring instrument Download PDFInfo
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- CN210952723U CN210952723U CN201922240302.7U CN201922240302U CN210952723U CN 210952723 U CN210952723 U CN 210952723U CN 201922240302 U CN201922240302 U CN 201922240302U CN 210952723 U CN210952723 U CN 210952723U
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- reflector
- supporting plate
- ccd
- elastic sheet
- adjusting
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- 239000000523 sample Substances 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The utility model provides a small deformation measuring apparatu, it can measure the small deformation of material, and measurement accuracy is high, receives external influence for a short time. The device comprises a laser, a first reflector, a second reflector, a ccd, a controller, a worktable which is driven by a stepping motor to lift and translate, a sample which is placed on the worktable, and a probe which is contacted with the upper surface of the sample; the upper end of the probe is fixed at the free end of the elastic sheet, the fixed end of the elastic sheet is fixed, and the elastic sheet has elasticity for enabling the free end to swing downwards in a normal state; the upper surface of the free end of the elastic sheet is provided with a reflective film; the light beam emitted by the laser sequentially passes through the reflection of the first reflector, the reflection of the reflective film and the reflection of the second reflector and is emitted into the CCD, the output of the CCD is connected with the controller, and the output of the controller is connected with the stepping motor.
Description
Technical Field
The utility model relates to a deformation measuring device, specifically speaking is a small deformation measuring apparatu.
Background
The micro deformation of the material refers to the influence of external factors (pressure, temperature, humidity, and the like) on the surface characteristics of the material, and some micro changes (such as elastic modulus, thermal expansion, elastic deformation, and the like) occur in the material itself. These small changes are difficult to detect with the naked eye or to quantify.
Disclosure of Invention
The utility model provides a small deformation measuring apparatu, it can measure the small deformation of material, and measurement accuracy is high, receives external influence for a short time.
The utility model relates to a micro-deformation measuring instrument, which comprises a laser, a first reflector, a second reflector, a ccd, a controller, a worktable which can be lifted and translated through the driving of a stepping motor, a sample which is placed on the worktable, and a probe which is contacted with the upper surface of the sample; the upper end of the probe is fixed at the free end of the elastic sheet, the fixed end of the elastic sheet is fixed, and the elastic sheet has elasticity for enabling the free end to swing downwards in a normal state; the upper surface of the free end of the elastic sheet is provided with a reflective film; the light beam emitted by the laser sequentially passes through the reflection of the first reflector, the reflection of the reflective film and the reflection of the second reflector and is emitted into the CCD, the output of the CCD is connected with the controller, and the output of the controller is connected with the stepping motor.
In the micro deformation measuring instrument, the first reflector is arranged on the support plate through the adjusting device, and the adjusting device is used for adjusting the included angle between the plane where the first reflector is located and the support plate.
In the micro-deformation measuring instrument, the first reflector is arranged in the lens frame, the two adjusting bolts which are in threaded fit with the supporting plate penetrate through the supporting plate, and the end parts of the two adjusting bolts are in contact with the side surface of the lens frame opposite to the supporting plate; two fixing bolts arranged on the supporting plate penetrate through the mirror frame, springs are sleeved on the fixing bolts and located between the side face, back to the supporting plate, of the mirror frame and the end portions of the fixing springs, and the springs are used for enabling the frame to be in a state of being in contact with the end portions of the adjusting bolts; when one or two adjusting bolts are rotated, the adjusting bolts push the mirror frame to move against the elastic force of the springs, so that the included angle between the plane of the first reflector and the supporting plate is adjusted.
The beneficial effect of this device: when the reflective film is used, the laser is turned on, the inclination angle of the first reflector is adjusted, so that the light spot position of a laser beam emitted by the laser on the first reflector is basically located at the center of the mirror surface, and the reflected light of the first reflector is projected to the front end of the reflective film as far as possible (the detection effect on micro deformation is better). The inclination angle of the second reflector is adjusted to make the light spot on the second reflector be basically positioned at the center of the mirror surface and the position of the reflected light be positioned at the upper half part of the CCD, so that the bending of the reflecting film is prevented when in detection, and the position of the light spot on the CCD is moved out of the detection range of the CCD.
When the instrument works, the workbench is driven by the stepping motor to slowly rise, the position of a light spot on the CCD cannot be changed at the moment, once a sample on the workbench is contacted with the probe below the reflective film, the position of the light spot on the second reflecting mirror is moved downwards due to the action of force by slight movement, the position of the light spot on the light sensing element CCD also moves downwards, the controller detects the change of the position of the light spot by a single chip microcomputer, stops the rise of the workbench, and records the rise height of the workbench (the height measured for the first time is used as a reference height h)0）。
Measuring the rising heights h of the stepping motor at different positions of the sample according to the process, and making differences h-h between the heights and the reference height0The surface shape graph of the sample can be restored by measuring a large number of points, and the micro deformation change of the sample can be clearly found by comparing the two shape graphs which are not deformed with the two shape graphs which are deformed.
The main principle of the design of the device is to use the principle of optical lever. The deformation of the elastic sheet is caused by the deformation of the material, and the displacement of the light spot position on the optical sensor is reflected through the amplification effect of the light path. The device is simple to operate and easy to realize, and tiny deformation which is not easy to perceive in some experimental phenomena can be displayed more like an image.
1. The optical path structure is formed by two reflectors (a first reflector and a second reflector) and the elastic sheet with the reflective film, and small deformation can be amplified and detected through the optical path.
2. The measured micro-deformations are numerically determined by means of a high-precision stepping motor moving in the Z-direction (up-down direction). The measuring precision can be ensured, and the deformation information of any position of the sample can be measured.
3. The speed of the measured data can be freely controlled according to the characteristic requirements of different materials.
4. The measured deformation information can be recorded and compared by utilizing an upper computer communicated with the controller, and the three-dimensional morphology can be drawn by the deformation of a large number of different positions. The upper computer can directly set the effective range and the precision of measurement, and the final result and data of the measurement can be automatically stored.
5. The device simulates the complex optical principle of the atomic force microscope, the simple probe and the elastic sheet macroscopically through structural design, and the production and manufacturing cost is greatly reduced.
Drawings
FIG. 1 is an overall schematic view of a micro-strain gauge;
FIG. 2 is a schematic view of a connection structure of the first reflector with a frame, a support plate, etc.;
FIG. 3 is a schematic view of a first reflector with a fixing bolt, an adjusting bolt, etc.;
fig. 4 is a schematic view of a spring plate and the like.
Detailed Description
As shown in fig. 1, the micro-strain gauge includes: the device comprises a laser 1, a first reflector 3, a support plate 4, a first adjusting bolt 5, a second adjusting bolt 6, a mirror frame 7, a second reflector 8, a CCD9, a detection sample 10, a stepping motor 11, a fixing bolt 12, a spring 13, a nut 14, a steel ball 15, an elastic sheet 17, a reflective membrane 18 and a probe 19.
The laser 1 emits a laser beam 2, the laser beam is reflected by the first reflecting mirror 3, the reflective film 16 and the second reflecting mirror 8 in sequence, and finally the laser beam is irradiated on the CCD 9.
Referring to fig. 2 and 3, a steel ball 15 is disposed between the frame 7 and the support plate 4, and the first reflector 3 is spaced from the support plate 4 by about 2 mm.
One end of each of the four fixing bolts 12 passes through the support plate 4 and is connected with a nut 14, the other end of each fixing bolt passes through the mirror frame 7 and is sleeved with a spring 13 in a compressed state, and the mirror frame 7 is contacted with the end part of the adjusting bolt through the compression of the spring.
The first adjusting bolt 5 and the second adjusting bolt 6 are used for adjusting the distance and the angle between the mirror frame (a first reflector) and the supporting plate, the extension amount of the first adjusting bolt 5 and the second adjusting bolt 6 exceeding the supporting plate part is changed by rotating the first adjusting bolt 5 and the second adjusting bolt 6, the spring can be further compressed because the lengths of the four fixing bolts are fixed, the end part of the adjusting bolt extending out of the supporting plate can extrude the frame, the inclination angles of the mirror frame and the first reflector are adjusted, and therefore the whole detection light path is changed.
The second reflector is similar to the first reflector in design and can be adjusted in angle by a third adjusting bolt 25 and a fourth adjusting bolt 26. When the first adjusting bolt 5 is adjusted, the light spot on the reflective film 18 can be moved horizontally, and when the second adjusting bolt 6 is adjusted, the light spot on the reflective film can be moved back and forth. Similarly, when the light spot on the CCD is moved horizontally up and down by adjusting the third adjusting bolt 25 on the second reflecting mirror, and the light spot on the CCD is moved vertically by adjusting the fourth adjusting bolt 26, the initial position of the light spot on the CCD9 can be made appropriate by adjusting the four adjusting bolts.
The single chip microcomputer detects the slight change of the light path through the optical sensor CCD and controls the movement of the stepping motor 11 and the displacement of the detection light spot. When the probe under the reflective film contacts with the surface of the sample, the elastic sheet changes with the position angle of the initial state, according to the reflection theorem, the change of the angle reflects the displacement change of a light spot on the CCD, the change is used as the basis for judging the contact of the sample and the probe, and the micro deformation of the surface of the sample can be measured by the rising height of the precision stepping motor at the moment.
The main operational flow diagram is as follows:
(1) a singlechip (mainly used for controlling a stepping motor and a CCD) is connected with an upper computer through a USB, and the whole system device is initialized through the upper computer;
(2) and turning on the laser, and adjusting the inclination angle of the first reflector and the second reflector. The first reflector is adjusted, so that the spot position of the laser beam emitted by the laser on the first reflector is positioned in the center of the mirror surface, and the reflected light of the first reflector is hit on the front end of the reflective film as far as possible (the detection effect on micro deformation is better). And adjusting the second reflector to enable the light spot on the second reflector to be positioned at the central position and the position of the reflected light to be positioned at the upper half part of the CCD, so that the light spot on the CCD is prevented from being bent when in detection, and the position of the light spot on the CCD is enabled to be moved out of the detection range of the CCD.
(3) When the instrument works, the precise workbench slowly rises, the position of a light spot on the CCD cannot be changed at the moment, once a sample on the workbench is contacted with the detection probe below the reflective film, the position of the light spot on the second reflector moves downwards due to the action of force by slight movement, the position of the light spot on the light sensing element CCD also moves downwards, the singlechip checks the change of the position of the light spot, stops the rising of the workbench, and records the rising height of the workbench (the height measured for the first time is used as the reference height h)0）。
(4) Measuring the rising heights h of the stepping motor at different positions of the sample according to the step 3, and making differences h-h between the heights and the reference height0The surface shape graph of the sample can be restored by measuring a large number of points, and the micro deformation change of the sample can be clearly found by comparing the two shape graphs which are not deformed with the two shape graphs which are deformed.
This patent is an instrument that can detect the small deformation of material, and it utilizes two reflectors and the shell fragment of plating the reflective membrane to form the light path structure, and small deformation also can pass through the light path and enlarge the detection. The device can provide an accurate measurement value for deformation, the measurement precision of the instrument can reach the micron level, the measurement precision is guaranteed, the automation degree is high, and the influence of the outside is small.
Claims (3)
1. Micro deformation measuring apparatu, characterized by: the device comprises a laser, a first reflector, a second reflector, a ccd, a controller, a worktable which is driven by a stepping motor to lift and translate, a sample which is placed on the worktable, and a probe which is contacted with the upper surface of the sample; the upper end of the probe is fixed at the free end of the elastic sheet, the fixed end of the elastic sheet is fixed, and the elastic sheet has elasticity for enabling the free end to swing downwards in a normal state; the upper surface of the free end of the elastic sheet is provided with a reflective film; the light beam emitted by the laser sequentially passes through the reflection of the first reflector, the reflection of the reflective film and the reflection of the second reflector and is emitted into the CCD, the output of the CCD is connected with the controller, and the output of the controller is connected with the stepping motor.
2. The micro-deformation measuring instrument according to claim 1, wherein: the first reflector is arranged on the supporting plate through an adjusting device, and the adjusting device is used for adjusting an included angle between a plane where the first reflector is located and the supporting plate.
3. The micro-deformation measuring instrument according to claim 2, wherein: the first reflector is arranged in the mirror frame, two adjusting bolts which are matched with the supporting plate through threads penetrate through the supporting plate, and the end parts of the two adjusting bolts are contacted with the side surface of the mirror frame opposite to the supporting plate; two fixing bolts arranged on the supporting plate penetrate through the mirror frame, springs are sleeved on the fixing bolts and located between the side face, back to the supporting plate, of the mirror frame and the end portions of the fixing springs, and the springs are used for enabling the frame to be in a state of being in contact with the end portions of the adjusting bolts; when one or two adjusting bolts are rotated, the adjusting bolts push the mirror frame to move against the elastic force of the springs, so that the included angle between the plane of the first reflector and the supporting plate is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922240302.7U CN210952723U (en) | 2019-12-14 | 2019-12-14 | Micro deformation measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922240302.7U CN210952723U (en) | 2019-12-14 | 2019-12-14 | Micro deformation measuring instrument |
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| Publication Number | Publication Date |
|---|---|
| CN210952723U true CN210952723U (en) | 2020-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922240302.7U Expired - Fee Related CN210952723U (en) | 2019-12-14 | 2019-12-14 | Micro deformation measuring instrument |
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| Country | Link |
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| CN (1) | CN210952723U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117308809A (en) * | 2023-11-28 | 2023-12-29 | 洛阳储变电***有限公司 | Bulge detection device after soft package battery seals |
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2019
- 2019-12-14 CN CN201922240302.7U patent/CN210952723U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117308809A (en) * | 2023-11-28 | 2023-12-29 | 洛阳储变电***有限公司 | Bulge detection device after soft package battery seals |
| CN117308809B (en) * | 2023-11-28 | 2024-02-02 | 洛阳储变电***有限公司 | Bulge detection device after soft package battery seals |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200707 |