CN210803864U - Biaxial resonant scanning mirror - Google Patents
Biaxial resonant scanning mirror Download PDFInfo
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- CN210803864U CN210803864U CN201921589055.5U CN201921589055U CN210803864U CN 210803864 U CN210803864 U CN 210803864U CN 201921589055 U CN201921589055 U CN 201921589055U CN 210803864 U CN210803864 U CN 210803864U
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Abstract
A double-shaft resonance scanning reflector is characterized in that a reflector body is arranged on an elastic supporting frame; the elastic support frame comprises a first elastic rotating shaft and a second elastic rotating shaft which are mutually crossed; two pairs of permanent magnets are arranged on the lower side of the elastic support frame; the first pair of permanent magnets are arranged on two sides of the first elastic rotating shaft, and the second pair of permanent magnets are arranged on two sides of the second elastic device; the driving system comprises four voice coil drivers which correspond to the two pairs of permanent magnets one by one, and magnetic fields generated by the voice coil drivers interact with magnetic fields of the permanent magnets, so that the reflector body generates resonance and generates angle torsion; the angle measurement feedback system comprises a laser generator and a position sensitive detector measurement component; the laser generator generates laser which is used for irradiating the back surface of the reflector body, and the position sensitive detector measuring component detects the laser reflected by the back surface of the reflector body; the two-dimensional angle change of the reflector body can be obtained through the position change of the reflected laser on the position sensitive detector measuring component.
Description
Technical Field
The utility model relates to a resonance scanning device for optical system provides two-dimensional light beam scanning.
Background
The optical scanning device is a device which reflects a light beam to a certain range of a target area through a rotating mirror and receives an optical echo of the target. It is generally a complex of optical, mechanical, electronic, control, etc. parts. The optical scanning device has wide application and can be used in the fields of 3D imaging, earth observation, topographic mapping, target tracking, target monitoring, laser marking, laser engraving, laser communication and the like. The existing optical scanning devices are various, such as continuous rotating prism scanning, continuous rotating optical wedge pair scanning and fast reflection mirror scanning, and are divided into single-axis scanning and double-axis scanning from the scanning dimension, and divided into driving modes, such as galvanometer scanning, acousto-optic scanning, electro-optic scanning, piezoelectric type, inductive type, closed-loop tracking type, open-loop resonant type and the like, and the application is very wide.
In the fields of 3D scanning, accurate terrain mapping, and laser communication, there is a need for two-dimensional, large-angle, high-speed, lightweight scanners. The scanning modes of the continuous rotating prism, the continuous rotating optical wedge pair, the fast reflection mirror, the galvanometer scanning, the acousto-optic type, the electro-optic type, the piezoelectric type, the inductive type and the closed loop tracking type are difficult to simultaneously meet the requirements, especially the requirement of mass low-cost manufacturing.
SUMMERY OF THE UTILITY MODEL
In view of the above problems, the present application aims to provide a dual-axis resonant scanning mirror, which can realize two-dimensional, large-angle, high-speed scanning, and is light, low in power consumption, and easy to manufacture in large quantities and at low cost.
A dual-axis resonant scanning mirror, comprising:
the device comprises an elastic support frame, a base, a driving system and an angle measurement feedback system;
the elastic support frame is provided with a reflector body, the front surface of the reflector body is used for reflecting the working light beam, and the back surface of the reflector body is used for emitting an angle measuring laser beam; the elastic support frame comprises a first elastic rotating shaft and a second elastic rotating shaft which are mutually crossed, and provides two rotational degrees of freedom for the reflector body; two pairs of permanent magnets are arranged on the lower side of the elastic support frame; the first pair of permanent magnets are arranged on two sides of the first elastic rotating shaft, and the second pair of permanent magnets are arranged on two sides of the second elastic device;
two pillars with preset intervals are arranged on the upper side of the base, and the elastic support frame is arranged on the two pillars; the driving system is arranged on the upper side of the base; the driving system comprises four voice coil drivers which correspond to the two pairs of permanent magnets one by one, and magnetic fields generated by the voice coil drivers interact with magnetic fields of the permanent magnets, so that the reflector body generates resonance and generates angle torsion;
the angle measurement feedback system is arranged on the upper side of the base and is positioned right below the reflector body; the angle measurement feedback system comprises a laser generator and a position sensitive detector measurement component; the laser generator generates laser which is used for irradiating the back surface of the reflector body, and the position sensitive detector measuring component detects the laser reflected by the back surface of the reflector body; the two-dimensional angle change of the reflector body can be obtained according to the trigonometric function relation through the position change of the reflected laser on the position sensitive detector measuring component.
Preferably, the elastic support frame comprises an outer peripheral frame and an inner peripheral frame; the inner peripheral frame is positioned in the outer peripheral frame and is connected with the outer peripheral frame through the first elastic rotating shaft; the peripheral frame is connected to the two struts by the second elastic shaft, whereby the entire elastic support frame is supported between the two struts.
Preferably, the elastic support frame is made of metal and integrally formed in a sheet shape.
Preferably, the inner and outer peripheral frames are respectively formed in a circular shape.
Preferably, the peripheral frame is formed with a U-shaped first elastic hinge-mounting auxiliary arm extending outwardly.
Preferably, the angle measurement feedback system further comprises a support cylinder, a reflecting prism and a residual light absorber;
the laser generator is composed of a semiconductor laser and is arranged on the first side of the support cylinder; the residual light absorber is arranged on the second side of the support cylinder and is opposite to the semiconductor laser; the reflecting prism is arranged between the residual light absorber and the semiconductor laser;
the position sensitive detector measuring component is positioned below the reflecting prism;
a part of laser light generated by the semiconductor laser is reflected to the back surface of the reflector body through the reflecting prism; at least one part of the laser reflected by the back surface of the reflector body irradiates the position sensitive detector measuring component after passing through the reflecting prism.
Preferably, a focusing lens is arranged between the reflection prism and the position sensitive detector measuring component.
Preferably, further comprising: control circuitry;
the control circuitry includes a digital controller and a power amplifier for driving the voice coil driver.
Preferably, the two-dimensional angular change of the mirror body measured by the angular measurement feedback system is fed back to the digital controller.
Preferably, the first pair of permanent magnets are mounted on the rear surface of the mirror body or on the inner peripheral frame;
the second pair of permanent magnets is mounted on the back of the reflector body or on the peripheral frame.
The light beam and the angle measuring light beam are reflected by the reflector, so that the coating is easy to polish, and the surface shape quality of the optical reflecting surface is ensured; utilize speculum and metal elastic support frame to combine together, set up the speculum at elastic metal support frame center ring, can guarantee that the structure is with wide-angle high frequency biax resonance work, make elastic support structure easily processing again, therefore, the carrier wave prepaid electric energy meter is low in cost, resonance working method can reduce the demand to driving moment under the same operating angle and the frequency condition again, adopt voice coil loudspeaker voice coil drive mode, contactless drive, thereby reduce structure friction loss, the extension system working life, angle measurement system based on position sensitive sensor can realize two-dimensional angle measurement, make angle measurement system compact structure again, easily make in batches.
Drawings
FIG. 1 is a perspective view of an example construction of a two-axis resonant scanning mirror;
FIG. 2 is an exploded view of FIG. 1;
FIG. 3 is a rear view of a dual axis resonant scanning mirror;
FIG. 4 is an exploded view of the angular measurement feedback system;
FIG. 5 is a cross-sectional view of an optical path of an angle measurement feedback system;
FIG. 6 is a block diagram of a control system for a dual-axis resonant scanning mirror.
Detailed Description
The application provides a two-axis resonant scanning mirror, it includes:
the device comprises an elastic support frame, a base, a driving system and an angle measurement feedback system;
the elastic support frame is provided with a reflector body, the front surface of the reflector body is used for reflecting the working light beam, and the back surface of the reflector body is used for emitting an angle measuring laser beam; the elastic support frame comprises a first elastic rotating shaft and a second elastic rotating shaft which are mutually crossed, and provides two rotational degrees of freedom for the reflector body; two pairs of permanent magnets are arranged on the lower side of the elastic support frame; the first pair of permanent magnets are arranged on two sides of the first elastic rotating shaft, and the second pair of permanent magnets are arranged on two sides of the second elastic device;
two pillars with preset intervals are arranged on the upper side of the base, and the elastic support frame is arranged on the two pillars; the driving system is arranged on the upper side of the base; the driving system comprises four voice coil drivers which correspond to the two pairs of permanent magnets one by one, and magnetic fields generated by the voice coil drivers interact with magnetic fields of the permanent magnets, so that the reflector body generates resonance and generates angle torsion;
the angle measurement feedback system is arranged on the upper side of the base and is positioned right below the reflector body; the angle measurement feedback system comprises a laser generator and a position sensitive detector measurement component; the laser generator generates laser which is used for irradiating the back surface of the reflector body, and the position sensitive detector measuring component detects the laser reflected by the back surface of the reflector body; the two-dimensional angle change of the reflector body can be obtained according to the trigonometric function relation through the position change of the reflected laser on the position sensitive detector measuring component.
In one embodiment, the elastic support frame comprises an outer peripheral frame and an inner peripheral frame; the inner peripheral frame is positioned in the outer peripheral frame and is connected with the outer peripheral frame through the first elastic rotating shaft; the peripheral frame is connected to the two struts by the second elastic shaft, whereby the entire elastic support frame is supported between the two struts.
In one embodiment, the elastic support frame is made of metal and is integrally formed in a sheet shape.
In one embodiment, the inner and outer peripheral frames are each formed in a circular shape.
In one embodiment, the peripheral frame is formed with a U-shaped first resilient pivot mounting assist arm extending outwardly.
In one embodiment, the angle measurement feedback system further comprises a support cylinder, a reflecting prism and a residual light absorber;
the laser generator is composed of a semiconductor laser and is arranged on the first side of the support cylinder; the residual light absorber is arranged on the second side of the support cylinder and is opposite to the semiconductor laser; the reflecting prism is arranged between the residual light absorber and the semiconductor laser;
the position sensitive detector measuring component is positioned below the reflecting prism;
a part of laser light generated by the semiconductor laser is reflected to the back surface of the reflector body through the reflecting prism; at least one part of the laser reflected by the back surface of the reflector body irradiates the position sensitive detector measuring component after passing through the reflecting prism.
In one embodiment, a focusing lens is arranged between the reflecting prism and the position sensitive detector measuring component.
In one embodiment, the method further comprises: control circuitry;
the control circuitry includes a digital controller and a power amplifier for driving the voice coil driver.
In one embodiment, the two-dimensional angular change of the mirror body measured by the angular measurement feedback system is fed back to the digital controller.
In one embodiment, the first pair of permanent magnets is mounted on the back surface of the mirror body or on the inner peripheral frame;
the second pair of permanent magnets is mounted on the back of the reflector body or on the peripheral frame.
The invention is described in detail below with reference to the attached drawings, which are exemplary illustrations, and the application is not limited to the forms presented in the drawings.
Fig. 1 and 2 illustrate the overall structure of the dual-axis resonant scanning mirror of the present application, fig. 3 illustrates the back of the dual-axis resonant scanning mirror, fig. 4 and 5 illustrate the angle measurement feedback system in detail, and fig. 6 illustrates the control system of the dual-axis resonant scanning mirror in detail.
The base 8 is an integral support member for the two-axis resonant scanning mirror and is mounted in the user device by four screw, flat and resilient pad combinations 18. Posts 9A, 9B projecting from both sides of the base 8 provide mounting support for the movable portion of the biaxial resonant scanning mirror. The movable part of the biaxial resonant scanning mirror comprises a mirror body 1, an elastic support frame and four permanent magnets 10A, 10B, 10C and 10D. The center of the elastic support frame is an inner circular ring 2, and the inner circular ring 2 is connected with an outer circular ring 4 through a first elastic rotating shaft formed by two cantilevers 3A and 3B. The outer ring 4 is connected to the outer ring fastening mounting pieces 6A, 6B by a second elastic rotating shaft formed by cantilevers 5A and 5B. The outer ring fastening and mounting pieces 6A, 6B are mounted on the struts 9A, 9B by four screw, flat pad and elastic pad combinations 7. Two pairs of permanent magnets 10A, 10B, 10C, 10D are bonded to the back surface of the reflector 1, and the second pair of permanent magnets 10C, 10D may be bonded to the back surface of the reflector body 1 according to specific design conditions, as shown in fig. 3, or may be bonded to the outer ring 4 at positions 10C1 and 10C 2. Four voice coil drivers 11A, 11B, 11C, and 11D are fixed by screws 12 in four mounting holes 13 on the bottom surface of the base 8 at positions coaxial with the permanent magnets. Laser emitted by the semiconductor laser 19 is reflected by the reflecting prism 20 and then emitted to the back surface of the reflector body 1, and after being reflected by the back surface of the reflector body 1 and transmitted by the reflecting prism 20 again, the laser is focused on the position sensitive detector measuring component 16 by the focusing lens 20. The transmitted light of the laser light emitted from the semiconductor laser 19 passing through the reflecting prism for the first time is absorbed by the residual light absorber 23. The semiconductor laser 19 and the residual light absorber 23 are coaxially disposed and bonded to the stem 14. The reflection prism 21 is fixed in a mounting seat hole at the upper part of the support tube 14. The focus lens 20 is pressed against the mounting boss from the lower portion of the support cylinder 14 by a lens pressing ring 22. The support tube 14 is adhered to the base 8 in the bottom central hole 15. The position sensitive detector measuring assembly 16 is adhered to the bottom of the base 8 from the bottom thereof. The output signal of the position sensitive detector measurement assembly 16 is used as a system angle measurement or feedback signal.
As shown in fig. 1, 2 and 3, the mechanical resonance part of the biaxial resonance scanning mirror comprises a mirror body 1, an elastic support frame and four permanent magnets. The reflector body 1 is embedded in the central ring 2 of the elastic support frame. The cantilevers 3A and 3B constitute a first elastic rotation axis, and the cantilevers 5A and 5B constitute a second elastic rotation axis. The rotational inertia of the reflector body 1, the elastic support frame and the four permanent magnets around the inner ring axis and the axial torsional rigidity of the first elastic rotating shaft formed by the cantilevers 3A and 3B form an inner ring axis resonance system. The moment of inertia of the reflector body 1, the elastic support frame and the four permanent magnets around the outer ring axis and the circumferential torsional rigidity of the second elastic rotating shaft formed by the cantilevers 5A and 5B form an outer ring axis resonance system. The size and thickness of the reflector, the length and sectional area of the cantilever, the material size of the elastic support frame, the mass and the installation position of the permanent magnet are changed, and the resonant frequency of the resonant system can be changed. The smaller the moment of inertia, the larger the torsional stiffness system, the higher the resonant frequency and vice versa. The reflector body 1 is made of a glass material, the upper surface of the reflector body is polished and coated to reflect working laser, and the lower surface of the reflector body is polished and coated to reflect an angle measuring system. The glass reflector is used for reflecting the light beam and the angle measuring light beam, so that the coating is easy to polish, and the surface shape quality of the optical reflecting surface is ensured; the glass reflector is combined with the metal elastic support frame, the glass reflector is embedded into the central ring of the elastic metal support frame, the structure can be guaranteed to work in a large-angle high-frequency double-shaft resonance mode, the elastic support structure is easy to process, and cost is low. The four permanent magnets 10A, 10B are bonded to the back surface of the mirror body 1, and the permanent magnets 10C, 10D may be bonded to the back surface of the mirror body 1 according to specific design conditions, or may be bonded to the positions 10C1 and 10C2 of the inner ring support frame 4 according to design requirements.
As shown in fig. 1, 2 and 3, the biaxial resonant scanning mirror drive system is composed of four cylindrical permanent magnets mounted on the back surface of the mirror 1 and four voice coil drivers mounted on the base 8. When current is passed through the voice coil, the voice coil driver generates a magnetic field that interacts with the magnetic field of the permanent magnet to produce a force. By changing the current in the coil, the magnitude and direction of the generated magnetic field, and thus the magnitude and direction of the applied force, can be changed. Permanent magnets 10A and 10B are paired for generating a moment around the first elastic rotation shaft; the permanent magnets 10C and 10D are paired for generating a moment about the second elastic rotation shaft. The magnetic field direction of each pair of permanent magnets can be the same or opposite. If the magnetic field directions are the same, the corresponding coils are reversely connected in parallel; if the magnetic field directions are opposite, the corresponding coils are connected in parallel in the same direction. The bottom of the voice coil is provided with a threaded hole and is fixed to the bottom of the base 8 by a screw 12. And the non-contact inductive drive is adopted, so that the friction can be reduced, the system abrasion can be reduced, and the service life and the reliability of the system can be improved.
As shown in fig. 4 and 5, the biaxial resonant scanning mirror angle measurement feedback system is composed of a support tube 14, a semiconductor laser 19, a reflecting prism 20, a focusing lens 21, a lens compression ring 22, a residual light absorber 23, and a position sensitive detector measurement component 16. After passing through the reflecting prism, a light beam 24 emitted by the semiconductor laser is partially transmitted through the prism and absorbed by the residual light absorber, and the other part 26 is reflected toward the reflecting mirror 1. The laser beam 27 reflected by the reflector passes through the reflecting prism again, one part 28 is reflected to the laser and is lost, the other part 29 is focused by the focusing lens, and the emergent laser 30 is focused on the position sensitive detector. The distance from the focusing lens to the position sensitive detector is equal to the focal length of the focusing lens. A change in the angle of the mirror 1 will cause a change in the position of the focused spot of the outgoing laser light 30. According to the change of the position of the light spot and the focal length of the lens, the angle change of the reflector 1 can be calculated according to the trigonometric function relation. The position sensitive sensor is a two-dimensional position spot position detector, so that a two-dimensional angular change of the mirror 1 can be obtained. The axis of the semiconductor laser and the connecting line of each pair of the voice coil drivers are arranged in a staggered mode by 45 degrees, so that the layout of the voice coil drivers and the semiconductor laser is ensured in space.
As shown in fig. 6, the two-axis resonant scanning mirror control system is composed of a digital controller 101, an inner loop power amplifier 102a, and an outer loop power amplifier 102 b. The digital controller 101 communicates with the user 100 through a serial port, receives a command from the user 100 to change the frequency and amplitude of resonance, or controls the system in a closed loop manner. The analog output control signal of the digital controller 101 is amplified by the power amplifier and drives the voice coil driver to work. The inner loop power amplifier 102a drives 11A and 11B, and the outer loop power amplifier 102B drives 11C and 11D. If the magnetic fields of the permanent magnets 10A and 10B are in the same direction, the voice coil drivers 11A and 11B are connected in parallel in an opposite direction; whereas the voice coil drivers 11A and 11B are connected in parallel in the same direction. The same rule applies to the voice coil drivers 11C and 11D. The digital controller 101 simultaneously receives the analog output signal of the position sensor 16, calculates the angle of the mirror body 1, and monitors the angle change amplitude and frequency of the mirror body in two directions. The digital controller 101 can also control the angle of the mirror body 1 in a closed loop according to the output signal of the position sensor 16, so as to make it track the signal required by the user 100.
Industrial applicability.
The utility model discloses a biax resonance scanning speculum system can install in user's optical path system, and angle is placed wantonly. The two shafts can be used independently or simultaneously. Both shafts may operate in a resonant mode or in a closed loop mode, or one may operate in a resonant mode and the other in a closed loop mode. The resonant frequencies of the two shafts can be adjusted and the configuration is flexible by adjusting the caliber, the thickness and the material of the reflector, the material and the thickness of the elastic support frame and the length of the cantilever.
Claims (10)
1. A dual-axis resonant scanning mirror, comprising:
the device comprises an elastic support frame, a base, a driving system and an angle measurement feedback system;
the elastic support frame is provided with a reflector body, the front surface of the reflector body is used for reflecting the working light beam, and the back surface of the reflector body is used for emitting an angle measuring laser beam; the elastic support frame comprises a first elastic rotating shaft and a second elastic rotating shaft which are mutually crossed, and provides two rotational degrees of freedom for the reflector body; two pairs of permanent magnets are arranged on the lower side of the elastic support frame; the first pair of permanent magnets are arranged on two sides of the first elastic rotating shaft, and the second pair of permanent magnets are arranged on two sides of the second elastic device;
two pillars with preset intervals are arranged on the upper side of the base, and the elastic support frame is arranged on the two pillars; the driving system is arranged on the upper side of the base; the driving system comprises four voice coil drivers which correspond to the two pairs of permanent magnets one by one, and magnetic fields generated by the voice coil drivers interact with magnetic fields of the permanent magnets, so that the reflector body generates resonance and generates angle torsion;
the angle measurement feedback system is arranged on the upper side of the base and is positioned right below the reflector body; the angle measurement feedback system comprises a laser generator and a position sensitive detector measurement component; the laser generator generates laser which is used for irradiating the back surface of the reflector body, and the position sensitive detector measuring component detects the laser reflected by the back surface of the reflector body; the two-dimensional angle change of the reflector body can be obtained according to the trigonometric function relation through the position change of the reflected laser on the position sensitive detector measuring component.
2. The dual-axis resonant scanning mirror of claim 1, wherein:
the elastic support frame comprises an outer peripheral frame and an inner peripheral frame; the inner peripheral frame is positioned in the outer peripheral frame and is connected with the outer peripheral frame through the first elastic rotating shaft; the peripheral frame is connected to the two struts by the second elastic shaft, whereby the entire elastic support frame is supported between the two struts.
3. The dual-axis resonant scanning mirror of claim 2, wherein:
the elastic support frame is made of metal and integrally formed into a sheet shape.
4. The dual-axis resonant scanning mirror of claim 2, wherein:
the inner and outer peripheral frames are respectively formed in a circular shape.
5. The dual-axis resonant scanning mirror of claim 4, wherein:
the peripheral frame is formed with a U-shaped first resilient pivot mounting assist arm extending outwardly.
6. The dual-axis resonant scanning mirror of claim 1, wherein:
the angle measurement feedback system also comprises a support cylinder, a reflecting prism and a residual light absorber;
the laser generator is composed of a semiconductor laser and is arranged on the first side of the support cylinder; the residual light absorber is arranged on the second side of the support cylinder and is opposite to the semiconductor laser; the reflecting prism is arranged between the residual light absorber and the semiconductor laser;
the position sensitive detector measuring component is positioned below the reflecting prism;
a part of laser light generated by the semiconductor laser is reflected to the back surface of the reflector body through the reflecting prism; at least one part of the laser reflected by the back surface of the reflector body irradiates the position sensitive detector measuring component after passing through the reflecting prism.
7. The dual-axis resonant scanning mirror of claim 6, wherein:
and a focusing lens is arranged between the reflecting prism and the position sensitive detector measuring component.
8. The dual-axis resonant scanning mirror of claim 1, further comprising: control circuitry;
the control circuitry includes a digital controller and a power amplifier for driving the voice coil driver.
9. The dual-axis resonant scanning mirror of claim 8, wherein:
the two-dimensional angular change of the mirror body measured by the angular measurement feedback system is fed back to the digital controller.
10. The dual-axis resonant scanning mirror of claim 2, wherein:
the first pair of permanent magnets are arranged on the back surface of the reflector body or on the inner peripheral frame;
the second pair of permanent magnets is mounted on the back of the reflector body or on the peripheral frame.
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| CN201921589055.5U CN210803864U (en) | 2019-09-24 | 2019-09-24 | Biaxial resonant scanning mirror |
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| CN201921589055.5U CN210803864U (en) | 2019-09-24 | 2019-09-24 | Biaxial resonant scanning mirror |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113114371A (en) * | 2021-04-12 | 2021-07-13 | 中国科学院光电技术研究所 | Compact lightweight design method for laser communication terminal of motion platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113114371A (en) * | 2021-04-12 | 2021-07-13 | 中国科学院光电技术研究所 | Compact lightweight design method for laser communication terminal of motion platform |
| CN113114371B (en) * | 2021-04-12 | 2023-09-19 | 中国科学院光电技术研究所 | Compact lightweight design method for moving platform laser communication terminal |
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