CN110940989A - Galvanometer and laser radar - Google Patents
Galvanometer and laser radar Download PDFInfo
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- CN110940989A CN110940989A CN201911330333.XA CN201911330333A CN110940989A CN 110940989 A CN110940989 A CN 110940989A CN 201911330333 A CN201911330333 A CN 201911330333A CN 110940989 A CN110940989 A CN 110940989A
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- slow
- axis
- fast
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a galvanometer and a laser radar, wherein the galvanometer comprises: fixing base, galvanometer drive frame: the reflecting mirror is arranged in a fast shaft frame of the fast shaft support, the fast shaft support is connected in the slow shaft support, and the galvanometer driving support is rotatably connected in a fixed seat; the fast axis frame is twisted around the first direction, and the slow axis frame is twisted around the second direction; the slow shaft driving component: comprises a motor and a cam; the cam is connected with the motor, and the edge of cam and the one end side butt of slow-axis support, motor drive cam rotate around the second direction to drive slow-axis support and rotate around the second direction. Therefore, the reliability of the vibrating mirror can be improved, the vibration resistance and impact resistance of the vibrating mirror are improved, and the service life of the laser radar is prolonged.
Description
Technical Field
The embodiment of the invention relates to the technical field of laser radars, in particular to a galvanometer and a laser radar.
Background
The laser radar is a radar system that emits a laser beam to detect a characteristic quantity such as a position and a velocity of a target object. With the development of laser radar, Micro-Electro-Mechanical systems (MEMS) galvanometers (also referred to as "galvanometers" herein for short) are applied to laser radar, and the development of solid-state laser radar is a new trend of laser radar in recent years. The MEMS galvanometer is a micro mirror manufactured by adopting an MEMS process, the working mode of the MEMS galvanometer is mostly a resonance mode, and the MEMS galvanometer has the advantages of small size, high oscillation frequency, no rotating part and the like.
Generally, electromagnetic MEMS mirrors and MEMS-like mirrors are favored for solid state lidar. The electromagnetic MEMS galvanometer and the similar MEMS galvanometer use electromagnetic force to generate torque, and the mirror surface rotates around the torsion beam. The driving modes of the electromagnetic MEMS galvanometer can be divided into two modes, namely high-frequency resonant driving and low-frequency quasi-static driving. The high-frequency resonant drive utilizes high-gain vibration of the MEMS galvanometer in a resonant state, and has the characteristics of high frequency and large angle. However, the high-frequency resonant drive is sensitive to environment and vibration, and position feedback is required to be used for closed-loop control of the galvanometer; in addition, the resonant scanning cannot realize the low-frequency slow axis scanning required by the laser radar, the scanning angle is small, and the efficiency is low. In order to obtain a larger scanning angle, a low-frequency quasi-static driving mode can be adopted. Low frequency quasi-static drive requires electromagnetic force to overcome the stiffness of the torsion beam at low frequency, causing the mirror to rotate. In order to obtain a larger corner, the stiffness of the torsion beam is generally required to be reduced, and to meet the requirement, the torsion beam with a longer length and a smaller cross-sectional area is required to be adopted. However, the torsion beam has low rigidity, and stress concentration is easy to occur under the external vibration environment to exceed the stress limit of the material, so that the MEMS galvanometer is damaged; alternatively, MEMS mirrors are susceptible to vibration due to low stiffness. Therefore, the MEMS galvanometer is poor in reliability and easy to be damaged by vibration or impact, and the service life of the laser radar is short.
Disclosure of Invention
The embodiment of the invention provides a galvanometer and a laser radar, so that the reliability of the MEMS galvanometer is improved, and the vibration resistance and impact resistance of the MEMS galvanometer are improved, thereby being beneficial to prolonging the service life of the laser radar.
In a first aspect, an embodiment of the present invention provides a galvanometer, where the galvanometer includes: the device comprises a fixed seat, a galvanometer driving frame, a slow shaft driving assembly and a reflecting mirror;
the galvanometer driving frame comprises a fast shaft frame and a slow shaft frame, the fast shaft frame comprises a fast shaft frame, the reflecting mirror is installed in the fast shaft frame, the fast shaft frame is connected into the slow shaft frame, and the galvanometer driving frame is rotatably connected into the fixed seat; wherein the fast axis frame is twisted around a first direction, the slow axis frame is twisted around a second direction, and the first direction is crossed with the second direction;
the slow shaft driving component comprises a motor and a cam; the cam is connected with the motor, and the motor is used for driving the cam to rotate around the second direction; the edge of the cam is abutted against one end side face of the slow shaft support, and the slow shaft support is driven by the cam to rotate around the second direction.
In one embodiment, the slow axis drive assembly further comprises a resilient member; one end of the elastic piece is fixedly connected with the slow shaft support, the other end of the elastic piece is fixedly connected with the fixed seat, and the elastic piece is used for generating restoring force and damping movement so as to enable the slow shaft support and the cam to be kept in abutting joint.
In one embodiment, the slow-shaft support further comprises a bump;
the lug is arranged on one side of the slow shaft support facing the cam, and the side of the lug facing the cam is abutted with the cam.
In an embodiment, the slow shaft drive assembly further comprises a ball bearing disposed at an abutment position of the slow shaft carrier and the cam.
In one embodiment, the fixed seat further comprises a slow shaft bearing and a bearing seat;
and along the second direction, two ends of the slow shaft support are sleeved into the slow shaft bearings which are oppositely arranged, and the slow shaft bearings are arranged in the bearing seats.
In one embodiment, the galvanometer further comprises a slow axis angle sensor and a slow axis angle magnet;
the slow axis angle magnet is fixed at one end of the slow axis support, and the slow axis angle sensor is arranged at one side of the slow axis angle magnet, which is far away from the slow axis support; the slow axis angle sensor is used for sensing the direction and the size of the slow axis angle magnet so as to determine the rotation angle of the slow axis support.
In one embodiment, the fast axis carrier further comprises a fast axis torsion beam; along the first direction, the fast-axis torsion beam is symmetrically connected between the fast-axis frame and the slow-axis support;
the fast shaft torsion beam twists to drive the fast shaft frame to twist and reset.
In one embodiment, the galvanometer further comprises a fast axis magnet and a fast axis coil;
and the fast axis magnets are arranged at two ends of the slow axis bracket along the second direction, and the fast axis coils are arranged at the edge of the fast axis frame in a surrounding manner and penetrate through at least one of the fast axis torsion beams.
In one embodiment, the galvanometer further comprises a fast axis rotation angle detection component; the reflecting mirror comprises a first mirror surface and a second mirror surface which are oppositely arranged, and the first mirror surface is used for reflecting the probe light beam and the echo light beam; the fast axis rotation angle detection assembly comprises a detection light source, a light source fixing seat, a fast axis angle sensor and a sensor fixing support;
the detection light source is used for emitting the detection light beam to the second mirror surface, the detection light source is fixedly connected with the light source fixing seat, and the light source fixing seat is fixedly connected with the fixing seat; the light sensing surface of the fast axis angle sensor faces the second mirror surface, the fast axis angle sensor is fixedly connected with the sensor fixing support through a circuit board, and the sensor fixing support is fixedly connected with the slow axis support.
In a second aspect, an embodiment of the present invention further provides a laser radar, where the laser radar includes any one of the vibrating mirrors provided in the first aspect.
The galvanometer provided by the embodiment of the invention comprises a fixed seat, a galvanometer driving frame, a slow shaft driving assembly and a reflecting mirror; the galvanometer driving frame comprises a fast-axis frame and a slow-axis frame, the fast-axis frame comprises a fast-axis frame, the reflecting mirror is installed in the fast-axis frame, the fast-axis frame is connected into the slow-axis frame, and the galvanometer driving frame is rotatably connected into the fixed seat; the fast axis frame twists around a first direction, the slow axis frame twists around a second direction, and the first direction is crossed with the second direction; the slow shaft driving component comprises a motor and a cam; the cam is connected with the motor, and the motor is used for driving the cam to rotate around the second direction; the edge of the cam is abutted against one end side face of the slow shaft support, and the slow shaft support is driven by the cam to rotate around the second direction; therefore, the motor is adopted to drive the cam to rotate, so that the slow-shaft support is driven to rotate, the rotating angle range of the vibrating mirror can be enlarged, material damage caused by vibration impact can be avoided, and the service life of the vibrating mirror can be prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief description will be given below of the drawings required for the embodiments or the technical solutions in the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic perspective view of a galvanometer according to an embodiment of the present invention;
FIG. 2 is a schematic view of another perspective of the galvanometer of the example of FIG. 1;
FIG. 3 is a schematic view of a further perspective of the galvanometer of the example of FIG. 1;
FIG. 4 is a schematic diagram of a front plan view of another galvanometer provided in accordance with an embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view taken along line A-A in FIG. 4;
fig. 6 is a schematic sectional view taken along B-B in fig. 4.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The galvanometer (also called as a scanning galvanometer) provided by the embodiment of the invention is mainly used in solid or mixed solid laser radars, and laser beams projected to the reflector can be reflected to a vertical view field by controlling the reflector in the scanning galvanometer to rotate around a fast axis, so that slow axis scanning is realized; the laser beam projected to the reflector can be reflected to a horizontal view field by controlling the reflector in the scanning galvanometer to rotate around the slow axis, so that fast axis scanning is realized, and scanning detection of a certain view field angle can be realized under the joint rotation action of the reflector around the fast axis and the slow axis. Wherein, the rotation angles of the reflecting mirror on the fast axis and the slow axis determine the scanning view field angle of the laser radar.
The improvement points of the embodiment of the invention are as follows: aiming at the defects that the low-frequency quasi-static scanning of the electromagnetic galvanometer is short in service life and easy to damage, the slow shaft adopts a rotary connection mode, the traditional mode of overcoming the rigidity of a torsion beam to rotate is replaced by a mode of realizing overall rotation by adopting a bearing support, a motor is adopted to drive a cam to rotate, so that the slow shaft support is driven to rotate, and meanwhile, an elastic part fixedly connected with the slow shaft support is adopted to generate linear restoring force and damping motion, so that the rotating angle range of the galvanometer can be enlarged, the material damage caused by vibration impact can be avoided, the service life of the galvanometer can be prolonged, and the service life of a laser radar can be prolonged. Meanwhile, the use of the bearing ensures that the rotation center of the slow shaft is superposed with the fast shaft, thereby being beneficial to realizing the accurate control of the rotation angle of the reflector.
The galvanometer and the lidar provided by the embodiment of the invention are exemplarily described below with reference to fig. 1 to 6.
Referring to fig. 1 to 6, the galvanometer 10 includes: a fixed base 100, a galvanometer driving frame 110, a slow axis driving component 120 and a reflecting mirror 130; the galvanometer driving rack 110 comprises a fast-axis rack 111 and a slow-axis rack 112, the fast-axis rack 111 comprises a fast-axis frame 1111, the reflecting mirror 130 is installed in the fast-axis frame 1111, the fast-axis rack 111 is connected in the slow-axis rack 112, and the galvanometer driving rack 110 is rotatably connected in the fixed seat 100; wherein the fast axis frame 1111 is twisted around a first direction X, the slow axis frame 112 is twisted around a second direction Y, and the first direction X intersects with the second direction Y; the slow shaft driving assembly 120 includes a motor 121, a cam 122 and an elastic member 123; the cam 122 is connected with the motor 121, and the motor 121 is used for driving the cam 122 to rotate around the second direction Y; the edge of the cam 122 abuts against one end side of the slow-shaft support 112, and the slow-shaft support 112 is driven by the cam 122 to rotate around the second direction Y; one end of the elastic member 123 is fixedly connected to the slow shaft bracket 112, the other end of the elastic member 123 is fixedly connected to the fixing base 100, and the elastic member 123 is used for generating a restoring force and damping movement to keep the slow shaft bracket 112 and the cam 122 in abutment.
In which a separate reflecting mirror 130 (quartz glass or sapphire or stainless steel, etc.) is assembled with the galvanometer driving rack 110. The galvanometer drive rack 110 may include a fast axis rack 111 and a slow axis rack 112. The fast axis support 111 includes a fast axis frame 1111 that is connected to the slow axis support 112 through a torsion beam or a fast axis bearing and is located inside the slow axis support 112. The mirror 130 is mounted in the fast axis frame 1111. for example, the mirror 130 may be fixed in the fast axis frame 1111 by any means known to those skilled in the art such as adhesive, embedding, clamping, etc.
In which the fast-axis support 111 and the slow-axis support 112 can be twisted (also referred to as "turning" or "rotation") about two directions (i.e., the first direction X and the second direction Y) perpendicular to each other, thereby achieving the turning of the mirror 130 in two dimensions. For example, the first direction X and the second direction Y may be perpendicular to each other, or may be disposed at other crossing angles known to those skilled in the art, and the embodiment of the present invention is not limited thereto.
Wherein, the slow shaft driving assembly 120 includes a motor 121, a cam 122 and an elastic member 123 (e.g., a torsion spring 123); the motor 121 is connected to the cam 122 to drive the cam 122 to rotate around the second direction Y. The edge of the cam 122 abuts against the side of the slow-axis support 112 where the mirror 130 is not disposed, so that the cam 122 can drive the slow-axis support 112 to rotate around the second direction Y during the rotation of the cam 122, thereby realizing the scanning of the laser beam in the first direction. One end of the torsion spring 123 is fixedly connected to the slow shaft bracket 112, and the other end is fixed to the fixing base 100. Therefore, during the rotation of the slow shaft support 112, the torsion spring 123 is deformed to generate a linear restoring force and a damping motion, so that the slow shaft support 112 is always in contact with the cam 122, and the slow shaft support 112 can move along the edge motion path of the cam 122, thereby not only increasing the rotation angle range, but also avoiding material damage caused by vibration and impact and prolonging the service life.
That is, in the galvanometer 10 provided in the embodiment of the present invention, the slow shaft adopts a driving structure in which the motor 121 is combined with the cam 122, and the movement track of the cam 122 is utilized to make the slow shaft periodically rotate, so that the galvanometer 10 has the characteristics of controllable speed of the motor 121 and regular movement track of the cam 122, thereby making the galvanometer 10 move more stably.
It should be noted that the motion trajectory of the cam 122, i.e. the edge profile shape of the cam 122, can be adjusted according to the actual requirements of the galvanometer 10, such as the requirement of the rotation angle, and the design is simple.
Meanwhile, the position of the elastic member 123 (e.g., the torsion spring 123) fixed on the fixing base 100 is adjustable, so that the position of the elastic member can be adjusted according to a required rotation angle, and the position of the embodiment of the present invention is not limited.
Finally, the slow axis driving assembly 120 in the galvanometer 10 may not be provided with the elastic member 123, but may implement the resetting of the slow axis by other ways known to those skilled in the art, which is not limited by the embodiment of the present invention.
In one embodiment, the slow shaft support 112 further includes a protrusion 1121; the projection 1121 is disposed on the side of the slow shaft support 112 facing the cam 122, and the side of the projection 1121 facing the cam 122 abuts against the cam 122.
In this way, the slow shaft holder 112 and the cam 122 can be simply abutted, and the main body shape of the slow shaft holder 112 can be regularly arranged, which is advantageous for simplifying the overall design of the galvanometer 10.
It should be noted that the bump 1121 and other structures of the slow shaft support 112 may be formed separately and then fixed, or may be formed integrally, which is not limited in the embodiment of the invention.
In one embodiment, the slow shaft drive assembly 120 further includes a ball bearing (not shown) disposed at the abutment position of the slow shaft support 112 and the cam 122.
Here, by providing a ball bearing at the contact portion between the slow shaft holder 112 and the cam 122, the friction loss between the cam 122 and the slow shaft holder 112 can be reduced, which is advantageous for increasing the lifetime of the galvanometer 10.
In one embodiment, the fixing base 100 further includes a slow shaft bearing 101 and a bearing seat 102; in the second direction Y, both ends of the slow shaft support 122 are sleeved in the slow shaft bearings 101 arranged oppositely, and the slow shaft bearings 101 are arranged in the bearing seats 102.
Wherein, both ends of the slow shaft bracket 112 are fixed on the fixing base 100. Specifically, two slow axis bearings 101 are disposed on the fixing base 100 along the second direction Y, and two ends of the slow axis bracket 112 are directly sleeved in the slow axis bearings 101. The slow shaft bearing 101 is further provided with a bearing seat 120 for fixing the slow shaft bearing 101 and protecting the slow shaft bearing 101.
Thus, the rotation of the slow-shaft support 112 by bearing support can be used to replace the conventional rotation by overcoming the stiffness of the torsion beam, so that the rotation angle range can be enlarged; meanwhile, the driving resistance of the slow axis can be extremely low, and a larger load can be driven in a low-frequency working state, so that the abrasion is reduced, and the service life of the galvanometer 10 is prolonged.
In one embodiment, the galvanometer 10 further includes a slow axis angle sensor 141 and a slow axis angle magnet 142; the slow axis angle magnet 142 is fixed at one end of the slow axis bracket 112, and the slow axis angle sensor 141 is arranged at one side of the slow axis angle magnet 142, which is far away from the slow axis bracket 112; the slow axis angle sensor 141 is used to sense the direction and size of the slow axis angle magnet 142 to determine the rotation angle of the slow axis carrier 112.
Illustratively, the slow axis angle magnet 142 is nested within the slow axis bearing 101.
In this way, by providing the slow axis angle sensor 141 and the slow axis angle magnet 142 at the end of the slow axis bracket 112, the slow axis angle magnet 141 and the slow axis bracket 112 can rotate synchronously, so that the direction and the size of the slow axis angle magnet 142 can be sensed by the slow axis angle sensor 141, the rotation angle of the slow axis bracket 112 can be determined, and the rotation angle of the mirror 130 linked therewith in the slow axis can be determined; that is, the function of detecting the rotation angle of the slow shaft can be realized, so that the rotation angle of the slow shaft can be accurately measured.
The above arrangement also simplifies the overall size of the galvanometer 10, and contributes to the miniaturization design thereof. In addition, the mutual influence of the fast axis direction and the slow axis direction can be avoided, so that the rotation angle of the slow axis direction can be measured more accurately.
As will be understood by those skilled in the art, "angle of rotation" herein may include both a direction of rotation, e.g., clockwise or counterclockwise; a rotation size, such as 5 ° or 8 °, may also be included.
In an exemplary manner, the first and second electrodes are,
in the above embodiments, the fast shaft may be supported by torsion beams or bearings to achieve the fast shaft rotation. The following embodiments are exemplified by torsion beams.
In one embodiment, the fast axis carrier 111 further includes a fast axis torsion beam 1112; along the first direction X, the fast-axis torsion beam 1112 is symmetrically connected between the fast-axis frame 1111 and the slow-axis support 112; the fast axis torsion beam 1112 twists to drive the fast axis frame 1111 to twist and reset.
The fast axis torsion beam 1112 can drive the fast axis frame 1111 to twist under the action of an external force, and at the moment, the fast axis torsion beam 1112 can restore to deform; under the action of the restoring force of the fast axis torsion beam 1112, the fast axis torsion beam 1112 can restore to the initial state, thereby driving the fast axis frame 1111 to restore synchronously.
So, to the reseing of fast axle frame 1111, can need not to set up extra structure that resets to can make fast axle simple structure, thereby be favorable to simplifying the overall structure of mirror 10 and laser radar that shake, with the miniaturized design that realizes mirror 10 and laser radar that shake.
In this embodiment, the fast axis torsion beam 1112 may be a straight line structure, and the fast axis torsion beam 1112 of the straight line structure extends along the first direction X, so the fast axis torsion beam 1112 has a simple structure, a low design difficulty, and a low manufacturing difficulty and a low manufacturing cost.
In other embodiments, the fast axis torsion beam 1112 can also adopt other special-shaped torsion beam structures, and the special-shaped torsion beam is in a non-linear extension shape; for example, the shape of the shaped torsion beam may be a non-linear structure formed by at least one of a curved line and a straight line as long as the center of gravity thereof is ensured to be located in the first direction X. Therefore, the overall rigidity of the fast-axis torsion beam 1112 can be reduced, and the range of the rotation angle is enlarged; meanwhile, the overall stress of the fast axis torsion beam 1112 is reduced, stress concentration is avoided, damage caused by vibration impact is avoided, and the fatigue limit is prolonged; further, it is advantageous to improve the control accuracy of the galvanometer 10 and to extend the service life of the galvanometer 10.
For example, the fast axis frame 1111 and the fast axis torsion beam 1112 may be integrally formed or may be separately formed and fixed by a fixing member. The setting can be according to the actual requirement of the galvanometer 10, and the embodiment of the present invention does not limit this.
In one embodiment, the galvanometer 10 further includes a fast axis magnet 151 and a fast axis coil 152; in the second direction Y, the fast axis magnets 151 are disposed at both ends of the slow axis frame 112, and the fast axis coil 152 is disposed around an edge of the fast axis frame 1111 and passes through at least one fast axis torsion beam 1112 of the fast axis torsion beams 1112.
In this manner, the fast axis block 1111 may be implemented to be driven in a manner that the fast axis coil 152 generates a torque in a magnetic field.
In one embodiment, the galvanometer 10 further includes a fast axis rotation angle detection assembly 160; the reflector 130 includes a first mirror 131 and a second mirror 132 disposed oppositely, and the fast axis rotation angle detection assembly 160 is disposed on a side of the second mirror 132; the first mirror 131 is used for reflecting the probe beam and the echo beam; the second mirror 132 is used for reflecting the detection light beam of the fast axis rotation angle detection assembly 160 to determine the rotation angle of the mirror 130.
Thus, the fast axis rotation angle detection assembly 160 is utilized to measure the fast axis rotation angle based on the optical detection principle.
In one embodiment, the fast axis rotation angle detection assembly 160 includes a detection light source 161, a light source fixing base 162, a fast axis angle sensor 163, and a sensor fixing bracket 164; the detection light source 161 is used for emitting a detection light beam to the second mirror 132, the detection light source 161 is fixedly connected with the light source fixing seat 162, and the light source fixing seat 162 is fixedly connected with the fixing seat 100; the light-sensing surface of the fast axis angle sensor 163 faces the second mirror 132, the fast axis angle sensor 163 is fixedly connected with the sensor fixing bracket 164 through a circuit board, and the sensor fixing bracket 164 is fixedly connected with the slow axis bracket 112.
The first mirror 131 of the reflector 130 is used to reflect the laser beam emitted by the laser in the laser radar and the corresponding echo beam. The fast axis rotation angle detecting assembly 160 is disposed at a side of the second mirror 132 of the reflector 130, and may include a detecting light source 161, a light source fixing base 162, a fast axis angle sensor 163, and a sensor fixing bracket 164. The detection light source 161 is fixed on the light source fixing base 162, and the detection light source 161 is used for emitting laser to the second mirror 132. The fast axis angle sensor 163 is fixed to the circuit board (i.e., the circuit board of the detection light source 161 is arranged in parallel with the fast axis angle sensor 163 in fig. 2), the circuit board is fixed to the sensor fixing bracket 164, and the sensor fixing bracket 164 is fixed to the slow axis bracket 112. The fast axis angle sensor 163 can receive the laser beam reflected by the second mirror 132 and determine the rotation angle of the mirror 130 according to the received laser beam.
In an embodiment, the fast axis angle sensor 163 may be a PSD (photo detector), a CMOS, a silicon photo cell, or other types of photo sensors known to those skilled in the art, which is not described or limited in the embodiments of the present invention.
It should be noted that, in the structure of the galvanometer 10 provided in the embodiment of the present invention, the main improvement point is to improve the driving method of the slow axis, and the fast axis may adopt the driving method shown in the embodiment of the present invention, or may adopt other driving methods known to those skilled in the art, and the embodiment of the present invention is not limited.
In the above embodiment, an improvement of the galvanometer provided by the embodiment of the present invention is:
a. the slow shaft is supported by a bearing and is driven by combining a motor, a cam and an elastic piece, so that the slow shaft rotates, and the rotating speed of the motor is controllable, so that the rotating speed of the cam and the slow shaft support linked with the cam is controllable. Compared with the traditional driving mode of overcoming the rigidity of the torsion beam to rotate, the driving mode is not influenced by vibration, and the service life of the galvanometer is prolonged.
b. The fast axis is driven in a resonant mode.
c. The mounting mode of the slow axis angle sensor is as follows: along the rotation direction of the slow shaft, a slow shaft angle sensor and a slow shaft sensor magnet (namely a 'slow shaft angle magnet') are arranged at the tail end of the slow shaft bearing so as to realize the detection of the rotation angle of the slow shaft.
D. And a fast axis rotation angle detection assembly is arranged on the back surface of the reflector so as to realize the detection of the fast axis rotation angle.
On the basis of the above embodiment, the embodiment of the invention also provides a laser radar. The lidar may include any one of the galvanometers provided in the above embodiments, and therefore, the lidar also has the beneficial effects of the galvanometers in the above embodiments, and the same points may be understood with reference to the explanation of the galvanometer in the above description, and are not described herein again.
In other embodiments, the laser radar may include other structural components known to those skilled in the art besides the galvanometer, which is not described or limited in this embodiment of the present invention.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A galvanometer, comprising:
the device comprises a fixed seat, a galvanometer driving frame, a slow shaft driving assembly and a reflecting mirror;
the galvanometer driving frame comprises a fast shaft frame and a slow shaft frame, the fast shaft frame comprises a fast shaft frame, the reflecting mirror is installed in the fast shaft frame, the fast shaft frame is connected into the slow shaft frame, and the galvanometer driving frame is rotatably connected into the fixed seat; wherein the fast axis frame is twisted around a first direction, the slow axis frame is twisted around a second direction, and the first direction is crossed with the second direction;
the slow shaft driving component comprises a motor and a cam; the cam is connected with the motor, and the motor is used for driving the cam to rotate around the second direction; the edge of the cam is abutted against one end side face of the slow shaft support, and the slow shaft support is driven by the cam to rotate around the second direction.
2. The galvanometer of claim 1, wherein the slow axis drive assembly further comprises a resilient member; one end of the elastic piece is fixedly connected with the slow shaft support, the other end of the elastic piece is fixedly connected with the fixed seat, and the elastic piece is used for generating restoring force and damping movement so as to enable the slow shaft support and the cam to be kept in abutting joint.
3. The galvanometer of claim 1, wherein the slow-axis support further comprises a bump;
the lug is arranged on one side of the slow shaft support facing the cam, and the side of the lug facing the cam is abutted with the cam.
4. A galvanometer according to claim 1, wherein the slow shaft drive assembly further comprises a ball bearing disposed at an abutment position of the slow shaft support and the cam.
5. The galvanometer of claim 1, wherein the mount further comprises a slow axis bearing and a bearing mount;
and along the second direction, two ends of the slow shaft support are sleeved into the slow shaft bearings which are oppositely arranged, and the slow shaft bearings are arranged in the bearing seats.
6. The galvanometer of claim 5, further comprising a slow axis angle sensor and a slow axis angle magnet;
the slow axis angle magnet is fixed at one end of the slow axis support, and the slow axis angle sensor is arranged at one side of the slow axis angle magnet, which is far away from the slow axis support; the slow axis angle sensor is used for sensing the direction and the size of the slow axis angle magnet so as to determine the rotation angle of the slow axis support.
7. The galvanometer of claim 1, wherein the fast axis support further comprises a fast axis torsion beam; along the first direction, the fast-axis torsion beam is symmetrically connected between the fast-axis frame and the slow-axis support;
the fast shaft torsion beam twists to drive the fast shaft frame to twist and reset.
8. The galvanometer of claim 7, further comprising a fast axis magnet and a fast axis coil;
and the fast axis magnets are arranged at two ends of the slow axis bracket along the second direction, and the fast axis coils are arranged at the edge of the fast axis frame in a surrounding manner and penetrate through at least one of the fast axis torsion beams.
9. The galvanometer of claim 1, further comprising a fast axis rotation angle detection assembly; the reflecting mirror comprises a first mirror surface and a second mirror surface which are oppositely arranged, and the first mirror surface is used for reflecting the probe light beam and the echo light beam; the fast axis rotation angle detection assembly comprises a detection light source, a light source fixing seat, a fast axis angle sensor and a sensor fixing support;
the detection light source is used for emitting the detection light beam to the second mirror surface, the detection light source is fixedly connected with the light source fixing seat, and the light source fixing seat is fixedly connected with the fixing seat; the light sensing surface of the fast axis angle sensor faces the second mirror surface, the fast axis angle sensor is fixedly connected with the sensor fixing support through a circuit board, and the sensor fixing support is fixedly connected with the slow axis support.
10. Lidar comprising a galvanometer according to any one of claims 1 to 9.
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