CN210626066U - Device for detecting safety of special gas equipment - Google Patents
Device for detecting safety of special gas equipment Download PDFInfo
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- CN210626066U CN210626066U CN201920943213.6U CN201920943213U CN210626066U CN 210626066 U CN210626066 U CN 210626066U CN 201920943213 U CN201920943213 U CN 201920943213U CN 210626066 U CN210626066 U CN 210626066U
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Abstract
The utility model discloses a device for detecting special gas equipment security, detect cabinet, the equipment that awaits measuring and be used for placing the equipment that awaits measuring rack including the analysis, the analysis detects the cabinet and includes the cabinet body, test panel face, clarifier, test instrument and controller all set up at the cabinet internally. The utility model discloses can improve the throughput rate of the test of a whole set of system, shorten test time, reduce test cost.
Description
Technical Field
The utility model relates to a special gas equipment security detects technical field, especially relates to a device for detecting special gas equipment security.
Background
With the continuous expansion of the market demands of industries such as semiconductor integrated circuits, photovoltaics and the like at home and abroad, the consumption of special gas is also continuously increased, so that the demand on special gas equipment is increased more and more, and the quality requirement on the special gas equipment is also increased more and more. In order to ensure that the special gas equipment can safely, stably and reliably store and convey the special gas, the safety problem is comprehensively considered when the special gas conveying system is designed, and the safety of the special gas equipment is also required to be tested in the production process of the special gas equipment.
The main safety test items of the current special gas equipment are as follows: pressure maintaining test, helium detection test, moisture test, oxygen test and particle test.
The purpose of the dwell test is to ensure that the piping system does not have significant leaks in order to make helium leak detection on the piping system. Testing the tool: and a pressure gauge.
The purpose of the helium test is to sense the trace amount of helium gas leaking into the system using a helium mass spectrometer and to determine the magnitude of the leak rate based on the amount of helium gas detected.
The purpose of the moisture detection is mainly to avoid that when the water content in the pipeline is too high, a chemical reaction occurs to influence the process. Testing an instrument: a moisture meter.
The purpose of oxygen content detection is mainly to avoid the influence on the process caused by chemical reaction when the oxygen content in the pipeline is too high. Testing an instrument: oxygen analyzer
The particle detection mainly detects the particle size and the number of the micro-particles in the pipeline. If the amount of particles in the channel is too large, the Wafer yield will be greatly affected. Testing an instrument: particle instrument
When the safety of special gas equipment is tested at present, a purging gas source is directly connected to a gas inlet end of a pipeline system, all valves are in an open state, after 2H continuous purging, a gas outlet end of the pipeline system is connected with one of three testing instruments (a moisture meter, an oxygen analyzer and a particle instrument), gas is introduced into the testing instrument, a power supply is turned on after 10 minutes, testing is started after setting various parameters of the testing instrument, after data to be tested reach standard requirements, testing data is recorded, the valves of the gas inlet end and the gas outlet end are closed, positive pressure is kept in a pipeline, and then the testing instrument is powered off, so that the testing instrument is separated from the system; and after the test is finished, repeating the steps, and sequentially connecting the air outlet end of the pipeline system to the other two test instruments for testing.
The current test mode, the passing rate is low, the time requirement is long, can't satisfy large-scale equipment demand, mainly has following several:
1. and testing the pipeline cleanliness of the equipment and checking deviation.
The test equipment needs self-checking after being started every day, the test of the special gas equipment can be carried out after the test equipment reaches a qualified value, and a certain time needs to be spent for carrying out instrument self-checking because the cleanliness of the connecting pipeline part cannot be kept at the qualified value all the time. The connection and the separation of the test instrument and the special gas equipment all cause pollution to a certain degree on a connecting pipeline, and time is required for cleaning and checking.
2. The existing testing process only sweeps equipment, original water and oxygen particles in the equipment cannot be effectively and quickly removed, and meanwhile, the interference of human factors is too large, if the test fails due to improper manual operation, more time needs to be consumed to achieve a qualified test result.
3. The moisture, oxygen and particle detection is that gas is directly input into special gas equipment, whether the gas value in the equipment is qualified or not is detected through a testing instrument, and if the gas source does not reach the standard, the result that the gas finally reaches the testing instrument when passing through the special gas equipment is ineligible.
4. At present, the whole set of test system has low pass rate, long time requirement and high test cost.
Disclosure of Invention
In view of this, the utility model provides a device for detecting special gas equipment security for solve current test system low pass rate, the time needs to be long, test cost too high problem.
A device for detecting the safety of special gas equipment comprises
An analysis detection cabinet;
a device to be tested;
the equipment placing frame is used for placing equipment to be tested;
wherein, the analysis and detection cabinet comprises a cabinet body, a test panel, a purifier, a test instrument and a controller, the test panel, the purifier, the test instrument and the controller are all arranged in the cabinet body,
the test board surface comprises an air inlet pipeline, a maintenance pipeline, a test pipeline and a purging pipeline, wherein one air inlet branch of the air inlet pipeline is connected with an air source, the other air inlet branch of the air inlet pipeline is connected with the air outlet end of the purifier, the air outlet end of the air inlet pipeline is connected with an air inlet of the device to be tested, the air outlet of the device to be tested is respectively connected with the purging pipeline and the test pipeline, the test pipeline is connected with the air inlet end of the test instrument, and the air outlet end of the test instrument is connected with an exhaust;
the air inlet end of the purifier is connected with an air source, the air outlet end of the purifier is connected with the air inlet end of the storage pipeline, and the air outlet end of the maintenance pipeline is connected to the air inlet end of the test instrument.
Preferably, the test instrument comprises a moisture meter, an oxygen analyzer and a particle meter, wherein the air inlet end of the moisture meter, the air inlet end of the oxygen analyzer and the air inlet end of the particle meter are connected with the test pipeline.
Preferably, the air inlet pipeline and the test pipeline are provided with multiple paths, the number of the air inlet pipelines and the number of the test pipelines are equal to the number of the devices to be tested, and each device to be tested is connected with one path of air inlet pipeline and one path of test pipeline.
Preferably, the test pipeline is composed of a test main pipe and three test branch pipes arranged at the air outlet end of the test main pipe in parallel, and the three test branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle analyzer;
the test is responsible for and is provided with first test control valve, on the test branch pipe in proper order series connection have second test control valve and third test control valve, the junction department of second test control valve and third test control valve has connected gradually first check valve and discharge valve, first test control valve, second test control valve, third test control valve, discharge valve all are connected with the controller electricity.
Preferably, the purging pipeline is composed of a purging main pipe and a plurality of purging branch pipes which are arranged at the air inlet end of the purging main pipe in parallel, and each purging branch pipe is connected with one device to be tested;
the purging main pipe is provided with a second one-way valve, each purging branch pipe is provided with a purging control valve, and the purging control valves are electrically connected with the controller.
Preferably, the maintenance pipeline is composed of a maintenance main pipe and three maintenance branch pipes arranged at the air outlet end of the maintenance main pipe in parallel, and the three maintenance branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle analyzer;
the maintenance is responsible for and is equipped with the microleakage valve, all is equipped with the maintenance control valve on every way maintenance branch pipe, the maintenance control valve is connected with the controller electricity.
Preferably, a first pressure sensor for detecting the pressure of the air source is arranged on an air outlet end pipeline of the purifier, and the first pressure sensor is electrically connected with the controller.
The utility model has the advantages that:
the method and the device improve the test passing rate of the whole set of system, shorten the test time and reduce the test cost. Through set up the clarifier in the system, can effectively guarantee the clean grade of sweeping the air supply, improve the qualification rate of test greatly, and through sweeping pipeline and maintenance pipeline, utilize PN2 gas after the clarifier purification to sweep, maintain connecting line and equipment, can get rid of original impurity in connecting line and the equipment before the detection begins, guarantee the inside cleanliness factor of connecting line and equipment, the rate of accuracy of test result has been improved, guarantee the validity of this application device test result.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a piping diagram of the present invention.
Fig. 2 is a schematic perspective view of the analysis and detection cabinet.
FIG. 3 is an interior view of an analytical test cabinet.
Fig. 4 is a schematic perspective view of the device placement frame.
The reference numerals in the figures have the meaning:
the device comprises an analysis detection cabinet 1, an equipment placing rack 2, a cabinet body 3, a test panel 4, a purifier 5, a test instrument 6, an air inlet pipeline 8, an air inlet branch 9, an air outlet pipeline 10, a test main pipe 13, a test branch pipe 14, a purging main pipe 15, a purging branch pipe 16, a maintenance main pipe 17, a maintenance branch pipe 18 and a controller 19, wherein the equipment placing rack is arranged on the analysis detection cabinet, the equipment placing rack 3, the test panel 4, the purifier 5, the test instrument 6, the air inlet pipeline 8;
Giis a first intake valve, PiA second intake valve;
Viis a purge control valve;
Tifor the first test of the control valve, Hi、oiAnd riAre all the second test control valves, HA, oA and rA are all the third test control valves, CViThe valve is a first one-way valve, HV, oV and rV are exhaust valves, and HB, oB and rB are maintenance control valves;
PT2 is a first pressure sensor, and PT3-PT7 are all second pressure sensors.
Detailed Description
For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.
It should be clear that the described embodiments are only some, but not all embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
The present application is described in further detail below with reference to specific embodiments and with reference to the attached drawings.
In the description of the present application, unless explicitly stated or limited otherwise, the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless specified or indicated otherwise; the term "connected" may be a fixed connection or a removable connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the description of the present specification, it will be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.
The embodiment of the utility model provides a device for detecting special gas equipment security, including analysis detection cabinet 1, the equipment that awaits measuring and be used for placing the equipment that awaits measuring equipment rack 2.
Specifically, the equipment to be tested is placed in equipment rack 2, has placed a plurality of baffles in equipment rack 2's the support body, and the equipment to be tested can place on the baffle, all is fixed with three status indicator lamp on every layer of baffle: yellow light, red light and green light, these three status indicator lamps are connected with the controller electricity respectively. If the yellow lamp is on, the corresponding device to be tested is in the test; if the red light is on, the corresponding equipment to be tested is unqualified; and if the green light is on, the corresponding equipment to be tested is qualified in test. Like this, according to the bright of different status indicator lamps on each layer baffle going out, can know the current test status that corresponds the equipment to be tested in real time, guarantee the reasonable and orderly going on of test work.
The analysis detection cabinet 1 comprises a cabinet body 3, a test panel 4, a purifier 5, a test instrument 6 and a controller, wherein the test panel 4, the purifier 5, the test instrument 6 and the controller are all arranged in the cabinet body 1.
The test panel 4 comprises an air inlet pipeline, a maintenance pipeline, a test pipeline and a purging pipeline.
The air inlet end of the purifier 5 is connected with an air source, the air outlet end of the purifier is connected with the air inlet end of the storage pipeline, and the air outlet end of the maintenance pipeline is connected to the air inlet end of the test instrument 6. The test instruments 6 include moisture meters, oxygen analyzers, and particle meters. A first pressure sensor PT2 for detecting the pressure of the air source is arranged on an air outlet end pipeline of the purifier 5, and the first pressure sensor PT2 is electrically connected with the controller. The air inlet end of the purifier 5 is provided with a valve PIN, and the air outlet end is provided with a valve POUT.
The maintenance pipeline comprises a maintenance main pipe 17 and three maintenance branch pipes 18 which are arranged at the air outlet end of the maintenance main pipe 17 in parallel, and the three maintenance branch pipes 18 are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle analyzer. The maintenance is responsible for and is equipped with little hourglass valve PNBV on 18, all is equipped with the maintenance control valve (maintenance control valve on the three maintenance branch road is rB, oB, HB respectively) on every way maintenance branch pipe 18, the maintenance control valve is connected with the controller electricity.
The air inlet pipeline 8 is provided with two air inlet branches 9 and an air outlet end, wherein one air inlet branch is connected with an air source, the other air inlet branch is connected to the air outlet end of the purifier, and the air outlet end of the air inlet pipeline is connected with an air inlet of the equipment to be tested. A first air inlet valve G is arranged on one air inlet branch of the air inlet pipelineiI 1,2,3,4 or 5, and a second intake valve P is mounted in the other intake branchiAnd i is equal to 1,2,3,4 or 5, the number of the air inlet pipelines is equal to that of the devices to be tested, and each device to be tested is connected with one air inlet pipeline.
And the gas outlet of the equipment to be tested is respectively connected with the purging pipeline and the testing pipeline.
The purging pipeline is composed of a purging main pipe 15 and a plurality of purging branch pipes 16 which are arranged at the air inlet end of the purging main pipe 15 in parallel, and each purging branch pipe 16 is connected with a device to be tested. A second one-way valve CV9 is arranged on the purging main pipe 15, and each path of purging is performedThe branch pipes 16 are all provided with a purging control valve (V)iAnd i is 1,2,3,4 or 5), and the purge control valve is electrically connected with the controller.
And the air inlet end of the test pipeline is connected with the equipment to be tested, and the air outlet end of the test pipeline is connected with the air inlet end of the test instrument. The number of the test pipelines is equal to the number of the devices to be tested, and each device to be tested is connected with one test pipeline.
The testing pipeline is composed of a main testing pipe 13 and three testing branch pipes 14 which are arranged at the air outlet end of the main testing pipe 13 in parallel, and the three testing branch pipes 14 are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter. The test main pipe 13 is provided with a first test control valve (T)iI-1, 2,3,4 or 5), a second test control valve (H) is connected in series to the test branch 14 in turni、oiOr r i1,2,3,4 or 5) and a third test control valve (HA, oA or rA) connected to the test instrument, and a second test control valve (H, oA or rA) connected to the test instrumenti、oiOr riA first Check Valve (CV) is connected to a connection point of the i-1, 2,3,4 or 5) and the third test control valve (HA, oA or rA) in sequenceiI ═ 1,2 or 3) and exhaust valves (HV, oV or rV), said first test control valve (T)iI ═ 1,2,3,4, or 5), second test control valve (H)i、oiOr riAnd i is 1,2,3,4 or 5), the third test control valve (HA, oA or rA) and the exhaust valve (HV, oV or rV) are all electrically connected with the controller.
The air outlet end of the testing instrument is connected with an exhaust pipeline 10, and a manual valve (RMV, OMV and HMV) is arranged on the exhaust pipeline 10.
The device of the present application can test multiple devices under test simultaneously, as shown in fig. 1, the device of this embodiment is provided with five devices under test (devices S1, S2, S3, S4, S5), which can perform safety detection simultaneously, but at the same time, media detected by different devices under test are different, for example, if the device under test S1 is currently performing moisture detection, the device S2 or other devices can only perform oxygen separation or particle detection, and the moisture detection needs to wait in a queue. In FIG. 1, GN2 is normal nitrogen, and PN2 is purified nitrogen.
The following specifically illustrates, by way of example, specific analysis steps for performing security analysis on a device to be tested according to the present application:
step 1: on being connected to the device of this application with 1 st equipment to be tested, the inlet end of this equipment to be tested is connected with the inlet line of the way, and the end of giving vent to anger sweeps the branch connection with the test tube way all the way, all the way of sweeping the pipeline.
Step 2: first pressure sensor PT2 real-time detection air supply pressure, when air supply pressure satisfies the settlement requirement, open the maintenance pipeline (manually open valve MIV, PIN and POUT, controller control opens maintenance control valve RB, OB and HB, manually open valve RMV, OMV, HMV), will pass through moisture appearance, oxygen analyzer and particle appearance through the PN2 gas after the clarifier purification, maintain moisture appearance, oxygen analyzer and particle appearance.
And step 3: purging the equipment to be tested through a purging pipeline;
the specific steps of purging the ith equipment to be tested are as follows:
specifically, the first intake valve G on the intake line is openediPurging control valve V on purging pipelineiAnd performing primary purging on the equipment to be tested, and closing a first air inlet valve G after purging for set timei；
Then, the second intake valve P of the intake line is openediThe second pressure sensor detects the internal pressure of the equipment to be detected in real time, and when the internal pressure of the equipment to be detected is greater than a third set value, the second air inlet valve P is closediOpen purge control valve ViAfter a set time of purging, the second intake valve P is opened alternately in a cyclic manneriClosing the purge control valve ViClosing the second intake valve PiOpen purge control valve Vi", performing disk surface pulse purging on the equipment to be tested;
after the pulse blowing frequency of the disk surface reaches a set value, the second air inlet valve P is closediOpen purge control valve ViAfter a set time of purging, the second intake valve P is opened alternately in a cyclic manneriClosing the purge control valve ViClosing the second intake airValve PiOpen purge control valve Vi", deep purging is carried out on the equipment to be tested;
and when the deep purging frequency of the equipment to be tested reaches the set frequency, completing purging. After purging is completed, the second intake valve P is openediOpening purge control valve ViAnd entering a test waiting stage, and detecting moisture, oxygen and particles of the ith equipment to be tested.
Can sweep and detect 1 st equipment to be tested according to above-mentioned step, when 1 st equipment to be tested carries out moisture, oxygen and particle detection, with 2 nd equipment to be tested be connected to the device of this application, repeat above-mentioned sweeping and detecting process, make 2 nd equipment to be tested queue up and carry out moisture, oxygen and divide or particle detection. And (3) supposing that the moisture and oxygen of the 1 st to-be-detected device are both tested and the particle detection is not finished, performing the moisture and oxygen detection on the 2 nd to-be-detected device, queuing the particle detection of the 2 nd to-be-detected device, and restarting the particle detection of the 2 nd to-be-detected device after the particle detection of the 1 st to-be-detected device is finished.
When the second equipment to be tested is subjected to purging and detection operations, the third equipment to be tested is connected to the device, the purging and detection processes are repeated, and the third equipment to be tested is queued for moisture, oxygen or particle detection.
And (4) detecting all the water, oxygen or particles to be detected by analogy of the steps.
The specific steps of carrying out moisture detection on the device to be detected S1 are as follows: first, the purge branch pipe connected to the device under test S1 is closed (the purge control valve V is closed)1) And simultaneously opening a test main pipe on a test pipeline connected with the equipment to be tested (opening a first test control valve T)1) The second test control valve H1 and the exhaust valve HV on one of the test branch pipes discharge waste gas in the test pipeline through PN2 gas, after PN2 gas is introduced for set time, the exhaust valve HV on the test branch pipe is closed, the maintenance control valve HB is closed, the third test control valve HA on the test branch pipe is opened, the PN2 gas is introduced into the moisture meter, moisture detection is carried out, and the moisture meter transmits the detection result to the control branch pipeThe controller analyzes and processes the received data, if the test result meets the set requirement, the device to be tested is tested to be qualified, otherwise, the step 2 is executed again;
the specific steps of carrying out oxygen content detection on the device to be detected S1 are as follows: first, the purge branch pipe connected to the device under test S1 is closed (the purge control valve V is closed)1) And simultaneously opening a test main pipe on a test pipeline connected with the equipment to be tested (opening a first test control valve T)1) The second test control valve o1 and the exhaust valve oV on one of the test branch pipes discharge waste gas in a test pipeline through PN2 gas, after PN2 gas is introduced for a set time, the exhaust valve oV on the test branch pipe is closed, the maintenance control valve oB is closed, the third test control valve oA on the test branch pipe is opened, the PN2 gas is introduced into the oxygen analyzer for oxygen analysis, the oxygen analyzer transmits a detection result to the controller, the controller analyzes and processes the received data, if the test result meets the set requirement, the device to be tested is tested to be qualified, and if not, the step 2 is executed again.
And 4, step 4: and (3) after all the equipment to be tested are tested, repeating the step (2) to maintain the moisture meter, the oxygen analyzer and the particle analyzer.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A device for detecting the safety of special gas equipment is characterized by comprising
An analysis detection cabinet;
a device to be tested;
the equipment placing frame is used for placing equipment to be tested;
wherein, the analysis and detection cabinet comprises a cabinet body, a test panel, a purifier, a test instrument and a controller, the test panel, the purifier, the test instrument and the controller are all arranged in the cabinet body,
the test board surface comprises an air inlet pipeline, a maintenance pipeline, a test pipeline and a purging pipeline, wherein one air inlet branch of the air inlet pipeline is connected with an air source, the other air inlet branch of the air inlet pipeline is connected with the air outlet end of the purifier, the air outlet end of the air inlet pipeline is connected with an air inlet of the device to be tested, the air outlet of the device to be tested is respectively connected with the purging pipeline and the test pipeline, the test pipeline is connected with the air inlet end of the test instrument, and the air outlet end of the test instrument is connected with an exhaust;
the inlet end of the purifier is connected with the air source, the outlet end of the purifier is connected with the inlet end of the maintenance pipeline, and the outlet end of the maintenance pipeline is connected to the inlet end of the test instrument.
2. The apparatus according to claim 1, wherein the testing instrument comprises a moisture meter, an oxygen analyzer and a particle meter, and the air inlet end of the moisture meter, the air inlet end of the oxygen analyzer and the air inlet end of the particle meter are connected with the testing pipeline.
3. The device for detecting the safety of special gas equipment as claimed in claim 1, wherein the air inlet pipeline and the test pipeline are provided with multiple paths, the number of the air inlet pipelines and the number of the test pipelines are equal to the number of the equipment to be tested, and each equipment to be tested is connected with one path of air inlet pipeline and one path of test pipeline.
4. The apparatus for detecting the safety of a special gas device according to claim 3, wherein the testing pipeline is composed of a main testing pipe and three branch testing pipes connected in parallel at the gas outlet end of the main testing pipe, and the three branch testing pipes are sequentially connected to the gas inlet ends of the moisture meter, the oxygen analyzer and the particle analyzer;
the test is responsible for and is provided with first test control valve, on the test branch pipe in proper order series connection have second test control valve and third test control valve, the junction department of second test control valve and third test control valve has connected gradually first check valve and discharge valve, first test control valve, second test control valve, third test control valve, discharge valve all are connected with the controller electricity.
5. The device for detecting the safety of the special gas equipment as claimed in claim 1, wherein the purging pipeline is composed of a purging main pipe and a plurality of purging branch pipes which are arranged at the gas inlet end of the purging main pipe in parallel, and each purging branch pipe is connected with the equipment to be detected;
the purging main pipe is provided with a second one-way valve, each purging branch pipe is provided with a purging control valve, and the purging control valves are electrically connected with the controller.
6. The device for detecting the safety of the special gas equipment as claimed in claim 1, wherein the maintenance pipeline is composed of a main maintenance pipe and three maintenance branch pipes arranged at the gas outlet end of the main maintenance pipe in parallel, and the three maintenance branch pipes are sequentially connected to the gas inlet ends of the moisture meter, the oxygen analyzer and the particle analyzer;
the maintenance is responsible for and is equipped with the microleakage valve, all is equipped with the maintenance control valve on every way maintenance branch pipe, the maintenance control valve is connected with the controller electricity.
7. The apparatus according to claim 1, wherein a second pressure sensor for detecting the pressure of the gas source is disposed on the gas outlet pipeline of the purifier, and the second pressure sensor is electrically connected to the controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920943213.6U CN210626066U (en) | 2019-06-21 | 2019-06-21 | Device for detecting safety of special gas equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920943213.6U CN210626066U (en) | 2019-06-21 | 2019-06-21 | Device for detecting safety of special gas equipment |
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| Publication Number | Publication Date |
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| CN210626066U true CN210626066U (en) | 2020-05-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920943213.6U Active CN210626066U (en) | 2019-06-21 | 2019-06-21 | Device for detecting safety of special gas equipment |
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| Country | Link |
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| CN (1) | CN210626066U (en) |
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2019
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Address after: 200000 floor 3 and 4, building 2, 170 Zihai Road, Minhang District, Shanghai Patentee after: Shanghai Zhichun system integration Co.,Ltd. Patentee after: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. Address before: 200241 floor 3 and 4, building 2, 170 Zihai Road, Minhang District, Shanghai Patentee before: ZHILI ELECTROMECHANICAL EQUIPMENT (SHANGHAI) Co.,Ltd. Patentee before: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. |
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