CN210625934U - Six-dimensional force sensor calibration device - Google Patents

Six-dimensional force sensor calibration device Download PDF

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Publication number
CN210625934U
CN210625934U CN201921844698.XU CN201921844698U CN210625934U CN 210625934 U CN210625934 U CN 210625934U CN 201921844698 U CN201921844698 U CN 201921844698U CN 210625934 U CN210625934 U CN 210625934U
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CN
China
Prior art keywords
loading
sensor
rod
moving platform
weight
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Withdrawn - After Issue
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CN201921844698.XU
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Chinese (zh)
Inventor
李云
马珂幸
姚举禄
黄肖飞
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Nanjing Lihang Bionic Industry Research Institute Co Ltd
Nanjing Bio Inspired Intelligent Technology Co ltd
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Nanjing Lihang Bionic Industry Research Institute Co Ltd
Nanjing Bio Inspired Intelligent Technology Co ltd
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Application filed by Nanjing Lihang Bionic Industry Research Institute Co Ltd, Nanjing Bio Inspired Intelligent Technology Co ltd filed Critical Nanjing Lihang Bionic Industry Research Institute Co Ltd
Priority to CN201921844698.XU priority Critical patent/CN210625934U/en
Application granted granted Critical
Publication of CN210625934U publication Critical patent/CN210625934U/en
Priority to PCT/CN2020/108557 priority patent/WO2021082617A1/en
Withdrawn - After Issue legal-status Critical Current
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The utility model discloses a six-dimensional force sensor calibration device, which comprises a frame, a loading device, a rotating device and a mobile platform, wherein the frame is arranged on the ground, the loading device is arranged in the frame, the mobile platform is arranged on the top of the frame, the rotating device is arranged on the mobile platform, a sensor to be measured is arranged on the rotating device, and the sensor to be measured is connected with the loading device through a sensor loading rod; according to the calibration device, the loading device can automatically load weights to the sensor to be tested through motor driving. The calibration efficiency can be improved.

Description

Six-dimensional force sensor calibration device
Technical Field
The utility model relates to a six-dimensional force transducer, specific six-dimensional force transducer calibration device that says so.
Background
The six-dimensional force sensor can simultaneously detect full force information of a three-dimensional space, namely three-dimensional force information (Fx, Fy, Fz) and three-dimensional moment information (Mx, My, Mz), and is mainly applied to force and moment position control occasions, such as contour tracking, precision assembly, two-hand coordination, six-dimensional force information detection in a test system and the like.
The measurement accuracy of the sensor is one of the most important performance indexes for evaluating the sensor, and the error of the sensor comprises random error and systematic error. For a six-dimensional force sensor, random errors of the six-dimensional force sensor are mainly caused by factors such as an internal signal processing circuit, quantization errors and external interference; the system error is mainly determined by the calibration precision of a calibration system, and due to the complexity of the mechanical structure of the six-dimensional force sensor and the errors of the sensor in the processing process links of manufacturing, pasting a strain gauge and the like, the problem of mutual coupling of input and output channels of the sensor is solved, the coupling relation of input and output in each direction needs to be determined through calibration, the coupling matrix needs to be calculated, and the influence caused by the coupling among the dimensions needs to be compensated through decoupling. Therefore, the design of the sensor calibration device and the research of the calibration method are of great importance, and the calibration precision of the sensor calibration device directly influences the measurement precision of the sensor calibration device in use.
The calibration of the six-dimensional force sensor is to apply independent force/moment or linearly independent multiple forces/moments in a space coordinate system to the six-dimensional force sensor, read the output of the six-dimensional force sensor at various state subscript timing, and calculate to obtain a decoupling matrix. According to the actual application requirements, the calibration of the six-dimensional force sensor is divided into static calibration and dynamic calibration, wherein the static calibration is mainly used for detecting static performance indexes of the sensor, such as static sensitivity, nonlinearity, return difference, repeatability and the like; the dynamic calibration is mainly used for detecting dynamic characteristics of the sensor, such as dynamic sensitivity, frequency response, natural frequency and the like.
The loading mode adopted by the static calibration of the prior six-dimensional force sensor mainly comprises a force measuring ring type and a weight type. The force measuring ring is loaded in a push rod mode, a force measuring ring reads a force value, the load allows larger load force, but the reading precision is lower, and the high-precision force measuring ring is expensive. The weight type calibration adopts the grade weights to provide standard loading force, directly uses the grade weights as a reference, has higher force value precision, and is more commonly used in the calibration of six-dimensional force sensors with medium range and small range.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects of the prior art, the six-dimensional force sensor calibration device is provided, and weights can be automatically loaded on a sensor to be tested through the driving of a motor. The calibration efficiency can be improved.
The calibration device comprises a rack, a loading device, a rotating device and a moving platform, wherein the rack is arranged on the ground, the loading device is arranged in the rack, the moving platform is arranged on the top of the rack, the rotating device is arranged on the moving platform, a sensor to be measured is arranged on the rotating device, and the sensor to be measured is connected with the loading device through a sensor loading rod;
the loading device comprises a loading fixing frame, a loading rod, a driving mechanism, a transmission mechanism and a weight loading device, the loading fixing frame is horizontally arranged, two ends of the loading fixing frame are both arranged on the rack, the weight loading device is arranged on the loading fixing frame and positioned in the rack, the driving mechanism is positioned below the weight loading device, one end of the transmission mechanism is connected with the output of the driving mechanism, and the other end of the transmission mechanism is connected with the weight loading device; one end of the loading rod is connected with the weight loading device, and the other end of the loading rod is connected with the sensor loading rod;
the moving platform comprises an X-direction moving platform and a Y-direction moving platform, the X-direction moving platform is connected with the Y-direction moving platform, and the X-direction moving platform is installed at the top of the frame; the rotary device is arranged on the Y-direction moving platform and comprises a vertical seat, a first shaft seat, a second shaft seat, a rotary platform and a sensor fixing plate, the Y-direction moving platform is arranged at the bottom of the vertical seat, the first shaft seat is attached to one side plane of the vertical seat and is arranged, a horizontal rotating shaft is arranged on the first shaft seat, the second shaft seat is sleeved on the horizontal rotating shaft and can rotate around the horizontal rotating shaft, the rotary platform is arranged on the second shaft seat, a rotating shaft of the rotary platform is perpendicular to the horizontal rotating shaft on the first shaft seat, the sensor fixing plate is arranged on the rotary platform, the sensor to be detected is arranged on the sensor fixing plate, a center hole in the sensor to be detected is concentric with the rotating shaft of the rotary platform, and the sensor loading;
the sensor loading rod comprises a mounting plate, an X-direction dowel bar, a Y-direction dowel bar and a Z-direction dowel bar, the Z-direction dowel bar is vertically fixed on the mounting plate, a circle of bolt through holes are formed in the mounting plate and are positioned on the same circumference, the Z-direction dowel bar is arranged at the center of a circle where all the bolt through holes are positioned, and a circle of screw holes which are superposed with the circle where the bolt through holes are positioned are arranged around a center hole of the sensor to be tested; the edge of the mounting plate extends to be provided with a vertical X-direction stress plate and a vertical Y-direction stress plate, the X-direction dowel bar is vertically arranged on the X-direction stress plate, and the Y-direction dowel bar is vertically arranged on the Y-direction stress plate.
The utility model discloses calibration device, loading device can carry out the automatic loading weight to the sensor that awaits measuring through motor drive. The calibration efficiency can be improved.
The utility model discloses the technical scheme who further injects is:
the driving mechanism is a motor, the transmission mechanism comprises a worm gear mechanism and a ball screw nut pair, the input of the worm gear mechanism is connected with a motor shaft, the output of the worm gear mechanism is connected with a ball screw in the ball screw nut pair, and a screw nut in the ball screw nut pair is arranged on the weight loading device.
The weight loading device comprises a supporting plate, a loading sleeve, a plurality of stand columns, a loading disc and a plurality of weights, wherein the stand columns penetrate through the supporting plate, the upper end and the lower end of each stand column are respectively fixed on the loading fixing frame, and a screw nut in the ball screw nut pair is fixed on the back surface of the supporting plate; the loading sleeve is vertically arranged on the supporting plate, a plurality of hanging blocks used for placing weights are arranged on the inner wall of the loading sleeve, the hanging blocks are arranged in a plurality of spiral lines, the weights are placed on the hanging blocks in a layered mode, and each layer of weights is placed on the hanging blocks; the loading rod penetrates through all the weights and is connected with the loading disc, the loading disc is located below the lowest-layer weight, and the loading disc is located above the supporting plate.
The utility model provides a calibration method of six-dimensional force transducer calibration device, including following step:
step 1) assembling a calibration device;
step 2), fixing a sensor to be measured on a sensor fixing plate;
step 3) installing a sensor loading rod, matching a central hole of a sensor to be tested with an Fz loading rod of the sensor loading rod, respectively enabling the x direction and the y direction of the sensor to be tested to be parallel to the Fx direction and the Fy direction of the sensor loading rod, and finally fixing the sensor loading rod on the sensor to be tested by using bolts;
step 4), adjusting the initial position, adjusting the sensor loading rod to enable the Fx direction of the sensor loading rod to be kept vertical, adjusting the mobile platform to enable the X-direction dowel bar of the sensor loading rod to be positioned right above the loading rod, and waiting for calibration;
step 5) calibrating the Fx direction, fixing the X-direction dowel bar and the top of a loading rod, loading the loading rod by a loading device, and acquiring output data of the sensor to be tested in each direction, wherein the stress state of the sensor to be tested is Fx;
step 6) calibrating the My direction, adjusting a moving platform, moving a Z-direction force transfer rod to a position right above a loading device, fixing the Z-direction force transfer rod and the top of the loading rod, loading the loading rod by the loading device, and acquiring output data of the sensor to be tested in each direction, wherein the stress state of the sensor to be tested is My;
step 7) Mz direction calibration, adjusting a moving platform, moving a Y direction dowel bar to a position right above a loading device, fixing the Y direction dowel bar and the top of the loading rod, loading the loading rod by the loading device, and acquiring output data of the sensor to be tested in each direction, wherein the stress state of the sensor to be tested is Mz;
step 8), calibrating the Fy direction, rotating the rotary platform anticlockwise by 90 degrees, keeping the Fy direction vertical, and waiting for calibration; the Y-direction dowel bar is fixed with the top of the loading rod, the loading device loads the loading rod, the stress state of the sensor to be tested is Fy, and then output data of the sensor to be tested in all directions are collected;
step 9) calibrating the Mx direction, adjusting a moving platform, moving a Z-direction force transfer rod to a position right above a loading device, fixing the Z-direction force transfer rod and the top of the loading rod, loading the loading rod by the loading device, and acquiring output data of the sensor to be tested in each direction, wherein the stress state of the sensor to be tested is Mx;
step 10) Fz direction calibration, wherein a second shaft seat rotates around a horizontal rotating shaft, a Z direction force transfer rod is moved to be vertically downward, a moving platform is adjusted, the Z direction force transfer rod is moved to be right above a loading device, the Z direction force transfer rod is fixed with the top of the loading rod, the loading device loads the loading rod, the stress state of a sensor to be tested is Fz at the moment, and then output data of the sensor to be tested in all directions are collected;
and 11) processing and analyzing the output data measured in the step to obtain a decoupling matrix of the sensor to be measured, and completing calibration of the sensor to be measured.
The utility model discloses calibration method, the stress point of the sensor that awaits measuring all is located the central plane of the sensor that awaits measuring when the calibration, has further improved the precision of demarcation.
The collection of the output data of the sensor to be detected is completed by connecting the signal end of the sensor to be detected into the data collection card. The data acquisition card is a conventional technique in the technical field to acquire output data of the sensor to be detected in each stress state.
The utility model has the advantages that:
1. according to the calibration device, the loading device can automatically load weights to the sensor to be tested through motor driving. The calibration efficiency can be improved.
2. According to the calibration method, the stress points of the sensor to be measured are all positioned on the central plane of the sensor to be measured during calibration, so that the calibration precision is further improved.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the loading device and the frame assembly.
Fig. 3 is a front view of the weight loading device.
Fig. 4 is a cutaway view of the loading sleeve.
Fig. 5 is a schematic view of the weight.
Fig. 6 is a cut-away view of the weight loading device.
Fig. 7 is a schematic structural diagram of the mobile platform.
Fig. 8 is a schematic structural view of the turning device.
Fig. 9 is a schematic view illustrating a state in which the second bearing in fig. 8 is rotated by a certain angle around the horizontal rotation axis.
Fig. 10 is a schematic view of the position of the sensor loading rod and the sensor fixed together on the rotary platform.
Fig. 11 is a state diagram after fig. 10 is rotated counterclockwise by 90 °.
Fig. 12 is a schematic view of the structure of the sensor loading lever.
Fig. 13 is a schematic diagram of the position of the Fx-direction calibration, the sensor loading rod 305 and the sensor to be measured mounted on the rotating device.
FIG. 14 is a schematic diagram of the My direction calibration, the sensor loading rod 305 and the position of the sensor to be measured mounted on the rotating device.
Fig. 15 is a schematic diagram of the position of the Mz calibration, the sensor loading rod 305 and the sensor to be measured mounted on the rotating device.
Fig. 16 is a schematic diagram of the position of the Fy-direction calibration, the sensor loading rod 305 and the sensor to be measured mounted on the rotating device.
Fig. 17 is a schematic diagram of the position of the Mx direction calibration, the sensor loading rod 305 and the sensor to be measured mounted on the rotating device.
Fig. 18 is a schematic diagram of the position of Fz direction calibration, sensor loading rod 305 and the sensor to be measured mounted on the rotating device.
Detailed Description
The technical solution of the present invention is explained in detail below, but the scope of protection of the present invention is not limited to the embodiments.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to fig. 1-18 and the following embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example 1
As shown in fig. 1, a six-dimensional force sensor calibration device includes a rack 1, a loading device 2, a rotation device 3 and a mobile platform 4, wherein the rack 1 is disposed on the ground, the loading device 2 is installed in the rack 1, the mobile platform 4 is installed on the top of the rack 1, the rotation device 3 is installed on the mobile platform 4, a sensor 5 to be measured is installed on the rotation device 3, and the sensor 5 to be measured is connected with the loading device 2 through a sensor loading rod 305.
As shown in fig. 1, in the present embodiment, the frame 1 is a steel frame formed by welding angle steel or section steel.
As shown in fig. 2, the loading device 2 includes a loading fixing frame 201, a loading rod 202, a driving mechanism 203, a transmission mechanism 204 and a weight loading device 205, the loading fixing frame 201 is horizontally disposed, two ends of the loading fixing frame 201 are both mounted on the rack 1, the weight loading device 205 is mounted on the loading fixing frame 201 and located inside the rack 1, the driving mechanism 203 is located below the weight loading device 205, one end of the transmission mechanism 204 is connected to an output of the driving mechanism 203, and the other end of the transmission mechanism 204 is connected to the weight loading device 205; one end of the load lever 202 is connected to the weight loading device 205, and the other end of the load lever 202 is connected to the sensor load lever 305.
As shown in fig. 2, the driving mechanism 203 is a motor, the transmission mechanism 204 includes a worm gear mechanism and a ball screw nut pair, an input of the worm gear mechanism is connected to a motor shaft, an output of the worm gear mechanism is connected to a ball screw 204-2 in the ball screw nut pair, and a screw nut 204-1 in the ball screw nut pair is mounted on the weight loading device 205.
As shown in fig. 3, 4, 5 and 6, the weight loading device 205 comprises a supporting plate 205-1, a loading sleeve 205-2, a plurality of columns 205-3, a loading disc 205-5 and a plurality of weights 205-6, wherein the plurality of columns 205-3 penetrate through the supporting plate 205-1, the upper end and the lower end of each of the plurality of columns 205-3 are respectively fixed on the loading fixing frame 201, and a screw nut 204-1 in a ball screw nut pair is fixed on the back surface of the supporting plate 205-1; the loading sleeve 205-2 is vertically arranged on the supporting plate 205-1, a plurality of hanging blocks 205-4 for placing weights are arranged on the inner wall of the loading sleeve 205-2, the hanging blocks 205-4 are arranged in a plurality of spiral lines, the weights 205-6 are placed on the hanging blocks 205-4 in a layered mode, and the weights 205-6 on each layer are placed on the hanging blocks 205-4; the load beam 202 extends through all the weights 205-6 and is connected to a load tray 205-5, the load tray 205-5 is located below the lowermost weight 205-6, and the load tray 205-5 is located above the support plate 205-1.
As shown in FIG. 5, a plurality of supporting blocks 205-6-1 extend from the outer circumference of the weight 205-6, and the supporting blocks 205-6-1 of the weight are movably connected with the suspension block 205-4 of the loading pipeline.
In the loading process of the weight loading device 205, a motor drives a worm and gear mechanism and a ball screw to move, a screw nut 204-1 on the screw is fixed on a supporting plate 205-1, the supporting plate is driven to move downwards through the screw nut, so that a loading sleeve 205-2 is driven to move downwards, and thus a weight 205-6 is driven to move downwards, when the weight at the lowest layer of the loading disc 205-5 presses the loading disc tightly, a supporting block 205-6-1 of the weight is separated from a suspension block 205-4 of the loading sleeve 205-2, the weight dead weight is completely pressed on the loading disc, so that the loading disc is loaded, when the loading sleeve 205-2 continues to move downwards, the penultimate weight continues to move downwards, and after the bottommost weight is pressed, the weight is separated from the loading sleeve 205-2, so that further loading is realized, and so on, loading with different forces can be achieved.
In the unloading process of the weight loading device 205, the motor drives the worm gear mechanism and the ball screw to move, the support plate is driven to move upwards through the screw nut, so that the loading sleeve 205-2 is driven to move upwards, and when the suspension block 205-4 arranged on the loading sleeve 205-2 is in contact with the support block 205-6-1 of the weight, the weight is driven to be separated from the loading disc, so that the unloading is realized.
The mounting relationship between the suspension block 205-4 on the loading socket 205-2 and the support block 205-6-1 of the weight referred to in this embodiment is known in the art as weight loading devices.
As shown in fig. 7, the moving platform 4 includes an X-direction moving platform 401 and a Y-direction moving platform 402, the X-direction moving platform 401 is connected to the Y-direction moving platform 402, and the X-direction moving platform 401 is installed on the top of the rack 1; the turning device 3 is mounted on the Y-direction moving stage 402.
The movable platform 4 in this embodiment is a known technology, and functions to move linearly in the X direction and the Y direction.
As shown in fig. 8 and 9, the rotation device 3 includes a vertical base 301, a first shaft base 302, a second shaft base 303, a rotation platform 306 and a sensor fixing plate 304, the bottom of the vertical base 301 is mounted on a Y-direction moving platform 402, the first shaft base 302 is mounted to be attached to one side plane of the vertical base 301, a horizontal rotation shaft is mounted on the first shaft base 302, the second shaft base 303 is sleeved on the horizontal rotation shaft and can rotate around the horizontal rotation shaft, the rotation platform 306 is mounted on the second shaft base 303, a rotation shaft of the rotation platform 306 is perpendicular to the horizontal rotation shaft on the first shaft base 302, the sensor fixing plate 304 is mounted on the rotation platform 306, the sensor 5 to be measured is mounted on the sensor fixing plate 304, a central hole in the sensor 5 to be measured is concentric with the rotation shaft of the rotation platform 306, and a sensor loading.
As shown in fig. 10 and 11, the sensor loading rod and the sensor are fixed on the rotary platform, and as shown in fig. 11, the position of the state diagram can measure data in three different directions, namely Fx, My and Mz. As shown in fig. 2, which is a 90 ° counterclockwise rotation of fig. 11, the position of the state diagram allows the measurement of data in three different directions, Fy, Mx, and Fz, respectively.
As shown in fig. 12, the sensor loading rod 305 includes a mounting plate 501, an X-direction force transmission rod 502, a Y-direction force transmission rod 503 and a Z-direction force transmission rod 504, the Z-direction force transmission rod 504 is vertically fixed on the mounting plate 501, a circle of bolt through holes are formed in the mounting plate 501, the circle of bolt through holes are located on the same circumference, the Z-direction force transmission rod 504 is mounted at the center of the circle where all the bolt through holes are located, and a circle of screw holes coinciding with the circle where the bolt through holes are located are arranged around the center hole of the sensor 5 to be measured; perpendicular X direction atress board and Y direction atress board are provided with in the border extension of mounting panel 501, and X direction dowel steel 502 sets up perpendicularly on X direction atress board, and Y direction dowel steel 503 sets up perpendicularly on Y direction atress board.
As shown in fig. 10, Fx and Mz can be measured by mounting the loading unit 2 on the X-direction dowel bar 402, and My can be measured by mounting the loading unit 2 on the Z-direction dowel bar 404.
As shown in fig. 11, the loading device 2 is attached to the Y-direction transfer lever 403 to measure Fy and Mx, and the loading device 2 is attached to the Z-direction transfer lever 404 to measure Fz.
The sensor 5 to be measured is cylindrical, a center hole of the sensor 5 to be measured is matched with an Fz loading rod of the sensor loading rod 305, the x direction and the y direction of the sensor 5 to be measured are adjusted to be parallel to the Fx direction and the Fy direction of the sensor loading rod 305, then the sensor loading rod 305 is fixed on the sensor 5 to be measured by bolts, specifically, a Z-direction force transmission rod 504 is vertically fixed on a mounting plate 501, a circle of bolt through holes are formed in the mounting plate 501, the circle of bolt through holes are located on the same circumference, the Z-direction force transmission rod 504 is installed at the center position of a circle where all the bolt through holes are located, and a circle of screw holes which are coincident with the circle where the bolt through holes are located is arranged around the center.
According to the calibration device, the loading device 2 can automatically load weights on the sensor to be detected 5 through motor driving. The calibration efficiency can be improved.
The calibration method of the calibration device for the six-dimensional force sensor comprises the following steps:
step 1) assembling a calibration device;
step 2) fixing the sensor 5 to be measured on the sensor fixing plate 304;
step 3) installing a sensor loading rod 305, matching a central hole of a sensor to be detected 5 with an Fz loading rod of the sensor loading rod 305, respectively enabling the x direction and the y direction of the sensor to be detected 5 to be parallel to the Fx direction and the Fy direction of the sensor loading rod 305, and finally fixing the sensor loading rod 305 on the sensor to be detected 5 by using bolts;
step 4), adjusting the initial position, adjusting the sensor loading rod 305 to ensure that the Fx direction of the sensor loading rod 305 is kept vertical, adjusting the mobile platform 4 to ensure that the X-direction dowel bar 502 of the sensor loading rod 305 is positioned right above the loading rod 202 to wait for calibration;
step 5), calibrating the Fx direction, fixing the X-direction dowel bar 502 with the top of the loading rod 202, loading the loading rod 202 by the loading device 2, and acquiring output data of the sensor 5 to be tested in each direction, wherein the stress state of the sensor 5 to be tested is Fx; as shown in fig. 13.
Step 6) calibrating the My direction, adjusting the mobile platform 4, moving the Z-direction force transfer rod 504 to the position right above the loading device 2, fixing the Z-direction force transfer rod 504 and the top of the loading rod 202, loading the loading rod 202 by the loading device 2, and acquiring output data of the sensor 5 to be tested in each direction, wherein the stress state of the sensor 5 to be tested is My; as shown in fig. 14.
Step 7) Mz direction calibration, adjusting the movable platform 4, moving the Y direction dowel bar 503 to the position right above the loading device 2, fixing the Y direction dowel bar 503 with the top of the loading rod 202, loading the loading rod 202 by the loading device 2, wherein the stress state of the sensor 5 to be tested is Mz, and then collecting output data of the sensor 5 to be tested in each direction; as shown in fig. 15.
Step 8), calibrating the Fy direction, rotating the rotary platform 306 anticlockwise by 90 degrees, keeping the Fy direction vertical, and waiting for calibration; the Y-direction dowel bar 503 is fixed with the top of the loading rod 202, the loading device 2 loads the loading rod 202, the stress state of the sensor 5 to be tested is Fy, and then output data of the sensor 5 to be tested in all directions are acquired; as shown in fig. 16.
Step 9) calibrating the Mx direction, adjusting the mobile platform 4, moving the Z-direction force transfer rod 504 to the position right above the loading device 2, fixing the Z-direction force transfer rod 504 and the top of the loading rod 202, loading the loading rod 202 by the loading device 2, wherein the stress state of the sensor 5 to be tested is Mx, and then collecting output data of the sensor 5 to be tested in each direction; as shown in fig. 17.
Step 10) calibrating the Fz direction, rotating the second shaft base 303 around a horizontal rotating shaft, moving the Z-direction force transfer rod 504 to be vertically downward, adjusting the moving platform 4, moving the Z-direction force transfer rod 504 to be right above the loading device 2, fixing the Z-direction force transfer rod 504 and the top of the loading rod 202, loading the loading rod 202 by the loading device 2, and acquiring output data of the sensor 5 to be tested in all directions, wherein the stress state of the sensor 5 to be tested is Fz; as shown in fig. 18.
And 11, processing and analyzing the output data measured in the step to obtain a decoupling matrix of the sensor 5 to be measured, and completing calibration of the sensor 5 to be measured.
According to the calibration method, the stress points of the sensor to be measured 5 are all located on the central plane of the sensor to be measured during calibration, so that the calibration precision is further improved.
The output data that mentions among the calibration method of this embodiment records in the calibration method is handled the analysis, obtains the decoupling matrix of the sensor 5 that awaits measuring, and this algorithm process is this technical field known algorithm, specific algorithm the utility model discloses do not do the restriction.
Above embodiment only is for explaining the utility model discloses a technical thought can not be injectd with this the utility model discloses a protection scope, all according to the utility model provides a technical thought, any change of doing on technical scheme basis all falls into the utility model discloses within the protection scope.

Claims (3)

1. The six-dimensional force sensor calibration device is characterized in that: the device comprises a rack (1), a loading device (2), a rotating device (3) and a moving platform (4), wherein the rack (1) is arranged on the ground, the loading device (2) is arranged in the rack (1), the moving platform (4) is arranged on the top of the rack (1), the rotating device (3) is arranged on the moving platform (4), a sensor (5) to be detected is arranged on the rotating device (3), and the sensor (5) to be detected is connected with the loading device (2) through a sensor loading rod (305);
the loading device (2) comprises a loading fixing frame (201), a loading rod (202), a driving mechanism (203), a transmission mechanism (204) and a weight loading device (205), the loading fixing frame (201) is horizontally arranged, two ends of the loading fixing frame (201) are arranged on the rack (1), the weight loading device (205) is arranged on the loading fixing frame (201) and is positioned inside the rack (1), the driving mechanism (203) is positioned below the weight loading device (205), one end of the transmission mechanism (204) is connected with the output of the driving mechanism (203), and the other end of the transmission mechanism (204) is connected with the weight loading device (205); one end of the loading rod (202) is connected with the weight loading device (205), and the other end of the loading rod (202) is connected with the sensor loading rod (305);
the moving platform (4) comprises an X-direction moving platform (401) and a Y-direction moving platform (402), the X-direction moving platform (401) is connected with the Y-direction moving platform (402), and the X-direction moving platform (401) is installed at the top of the rack (1); the rotary device (3) is arranged on a Y-direction moving platform (402), the rotary device (3) comprises a vertical seat (301), a first shaft seat (302), a second shaft seat (303), a rotary platform (306) and a sensor fixing plate (304), the Y-direction moving platform (402) is arranged at the bottom of the vertical seat (301), the first shaft seat (302) is attached to one side plane of the vertical seat (301) for installation, a horizontal rotating shaft is arranged on the first shaft seat (302), the second shaft seat (303) is sleeved on the horizontal rotating shaft and can rotate around the horizontal rotating shaft, the rotary platform (306) is arranged on the second shaft seat (303), a rotating shaft of the rotary platform (306) is vertical to the horizontal rotating shaft on the first shaft seat (302), the sensor fixing plate (304) is arranged on the rotary platform (306), a sensor to be detected (5) is arranged on the sensor fixing plate (304), a center hole in the sensor to be detected (5) is concentric with the rotating shaft of the rotary platform (306), the sensor loading rod (305) is arranged on a sensor (5) to be measured;
the sensor loading rod (305) comprises a mounting plate (501), an X-direction dowel bar (502), a Y-direction dowel bar (503) and a Z-direction dowel bar (504), the Z-direction dowel bar (504) is vertically fixed on the mounting plate (501), a circle of bolt through holes are formed in the mounting plate (501), the circle of bolt through holes are located on the same circumference, the Z-direction dowel bar (504) is mounted at the center position of a circle where all the bolt through holes are located, and a circle of screw holes which are overlapped with the circle where the bolt through holes are located are formed in the periphery of a center hole of the sensor to be detected (5); the X-direction stress plate and the Y-direction stress plate are vertically arranged on the edge of the mounting plate (501) in an extending mode, the X-direction force transfer rod (502) is vertically arranged on the X-direction stress plate, and the Y-direction force transfer rod (503) is vertically arranged on the Y-direction stress plate.
2. The six-dimensional force sensor calibration device according to claim 1, wherein: the driving mechanism (203) is a motor, the transmission mechanism (204) comprises a worm gear mechanism and a ball screw nut pair, the input of the worm gear mechanism is connected with a motor shaft, the output of the worm gear mechanism is connected with a ball screw in the ball screw nut pair, and a screw nut in the ball screw nut pair is installed on the weight loading device (205).
3. The six-dimensional force sensor calibration device according to claim 2, wherein: the weight loading device (205) comprises a supporting plate (205-1), a loading sleeve (205-2), a plurality of upright columns (205-3), a loading disc (205-5) and a plurality of weights (205-6), wherein the plurality of upright columns (205-3) penetrate through the supporting plate (205-1), the upper end and the lower end of each upright column (205-3) are respectively fixed on the loading fixing frame (201), and a screw nut in a ball screw nut pair is fixed on the back surface of the supporting plate (205-1); the loading sleeve (205-2) is vertically arranged on the supporting plate (205-1), a plurality of hanging blocks (205-4) for placing weights are arranged on the inner wall of the loading sleeve (205-2), the hanging blocks (205-4) are arranged in a plurality of spiral lines, the weights (205-6) are placed on the hanging blocks (205-4) in a layered mode, and each layer of weights (205-6) is placed on the hanging blocks (205-4); the loading rod (202) penetrates through all the weights (205-6) and is connected with the loading disc (205-5), the loading disc (205-5) is positioned below the lowest layer of weight (205-6), and the loading disc (205-5) is positioned above the supporting plate (205-1).
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WO2021082617A1 (en) * 2019-10-30 2021-05-06 南京神源生智能科技有限公司 Six-dimensional force sensor calibration apparatus and calibration method

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